Method for manufacturing thin film magnetic head
    37.
    发明授权
    Method for manufacturing thin film magnetic head 失效
    制造薄膜磁头的方法

    公开(公告)号:US06305072B1

    公开(公告)日:2001-10-23

    申请号:US08979965

    申请日:1997-11-26

    IPC分类号: G11B542

    摘要: When manufacturing a thin film magnetic head in which an upper magnetic pole is formed on a lower magnetic pole through a magnetic gap, firstly, at least on the lower magnetic pole, a convex portion possessing the width equivalent to a track width is formed. The convex portion forms a lower magnetic pole tip. Conforming to a contour of the convex shape of the lower magnetic pole, a non-magnetic material layer is formed. A flattening layer is formed on the non-magnetic material layer. The non-magnetic layer is etched with the flattening layer, for example, as a mask. In the non-magnetic material layer, a concave portion self-aligned to the lower portion magnetic pole top (convex portion) is formed. Inside the concave portion, a magnetic layer (upper magnetic pole tip) destined to be a part of the upper magnetic pole is formed. As to the lower magnetic pole tip and the upper magnetic pole tip, the widths of surfaces opposite to the magnetic gap are almost equal, and the central positions thereof almost overlap each other. Thus, a narrow track head structure with high accuracy can be obtained.

    摘要翻译: 当通过磁隙制造在下磁极上形成上磁极的薄膜磁头时,首先至少在下磁极上形成具有与磁道宽度相等的宽度的凸部。 凸部形成下磁极末端。 符合下磁极的凸形轮廓,形成非磁性材料层。 在非磁性材料层上形成平坦化层。 用平坦化层,例如作为掩模蚀刻非磁性层。 在非磁性材料层中,形成与下部磁极顶部(凸部)自对准的凹部。 在凹部内部形成着作为上磁极的一部分的磁性层(上磁极端)。 对于下磁极尖端和上磁极尖端,与磁隙相反的表面的宽度几乎相等,并且其中心位置几乎彼此重叠。 因此,可以获得高精度的窄轨道头结构。