公开(公告)号：US09261363B2

公开(公告)日：2016-02-16

申请号：US12303443

申请日：2007-06-06

Applicant: Reinhard Neul ,  Johannes Classen ,  Axel Franke ,  Marco Quander ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

Inventor： Reinhard Neul ,  Johannes Classen ,  Axel Franke ,  Marco Quander ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

IPC: G01C19/56 ,  G01C19/5762 ,  G01C19/5747

CPC classification number: G01C19/5762 ,  G01C19/5747

Abstract: A yaw rate sensor includes a drive mass element which is situated above a surface of a substrate and is drivable to vibrate by a drive device along a first axis extending along the surface, having a detection mass element, which is deflectable under the influence of a Coriolis force along a second axis perpendicular to the surface, and having a detection device by which the deflection of the detection mass element along the second axis is detectable. Due to the arrangement of the second axis perpendicular to the surface, the yaw rate sensor may be integrated into a chip together with additional yaw rate sensors suitable for detection of rotations about axes of rotation in other directions.

Abstract translation: 偏航率传感器包括驱动质量元件，该驱动质量元件位于衬底的表面上方并且可被驱动装置驱动，沿着沿表面延伸的第一轴线振动，具有检测质量元件，该检测质量元件可在 科里奥利力沿着垂直于表面的第二轴线，并且具有检测装置，通过该检测装置可以检测到检测质量元件沿着第二轴线的偏转。 由于垂直于表面的第二轴的布置，横摆角速度传感器可以与适合于检测围绕其它方向的旋转轴线的旋转的附加横摆速率传感器一体地集成到一个芯片中。

公开(公告)号：US09040336B2

公开(公告)日：2015-05-26

申请号：US14058806

申请日：2013-10-21

Applicant: Johannes Classen ,  Axel Franke ,  Jens Frey ,  Heribert Weber ,  Frank Fischer ,  Patrick Wellner

Inventor： Johannes Classen ,  Axel Franke ,  Jens Frey ,  Heribert Weber ,  Frank Fischer ,  Patrick Wellner

IPC: H01L21/00 ,  B81C1/00 ,  B81B3/00 ,  B81B7/00

CPC classification number: B81C1/00015 ,  B81B3/0018 ,  B81B7/0058

Abstract: A manufacturing method for a cap, for a hybrid vertically integrated component having a MEMS component a relatively large cavern volume having a low cavern internal pressure, and a reliable overload protection for the micromechanical structure of the MEMS component. A cap structure is produced in a flat cap substrate in a multistep anisotropic etching, and includes at least one mounting frame having at least one mounting surface and a stop structure, on the cap inner side, having at least one stop surface, the surface of the cap substrate being masked for the multistep anisotropic etching with at least two masking layers made of different materials, and the layouts of the masking layers and the number and duration of the etching steps being selected so that the mounting surface, the stop surface, and the cap inner side are situated at different surface levels of the cap structure.

Abstract translation: 一种用于具有MEMS部件的混合垂直集成部件的盖的制造方法，具有较低的洞穴内部压力的相对较大的洞穴体积以及用于MEMS部件的微机械结构的可靠的过载保护。 在多步骤各向异性蚀刻中，在平盖基板中制造盖结构，并且包括至少一个安装框架，该安装框架具有至少一个安装表面和止动结构，在盖内侧具有至少一个止动表面， 掩模基板被掩模用于具有由不同材料制成的至少两个掩模层的多步各向异性蚀刻，并且选择掩模层的布局以及蚀刻步骤的数量和持续时间，使得安装表面，止动表面和 帽内侧位于帽结构的不同表面水平处。

公开(公告)号：US08915137B2

公开(公告)日：2014-12-23

申请号：US12897367

申请日：2010-10-04

Applicant: Johannes Classen ,  Torsten Ohms ,  Daniel Christoph Meisel ,  Joerg Hauer

Inventor： Johannes Classen ,  Torsten Ohms ,  Daniel Christoph Meisel ,  Joerg Hauer

IPC: G01P3/44 ,  G01C19/574 ,  G01C19/5755

CPC classification number: G01C19/5755 ,  G01C19/574

Abstract: A yaw rate sensor having a substrate which has a main plane of extension, and a Coriolis element is proposed. The Coriolis element is excitable to a vibration along a third direction which is perpendicular to the main plane of extension. A Coriolis deflection of the Coriolis element along a first direction which is parallel to the main plane of extension may be detected using a detection arrangement. The detection arrangement includes a Coriolis electrode which is connected to the Coriolis element, and a corresponding counterelectrode. Both the Coriolis electrode and the counterelectrode may be excited to a vibration along the third direction.

Abstract translation: 提出了具有具有主平面延伸的基板和科里奥利元件的偏航率传感器。 科里奥利元件可以沿垂直于主延伸平面的第三方向振动。 可以使用检测装置检测Coriolis元件沿着与主延伸平面平行的第一方向的科里奥利偏转。 检测装置包括连接到科里奥利元件的科里奥利电极和相应的反电极。 科里奥利电极和对电极都可以沿着第三个方向激发振动。

公开(公告)号：US08689633B2

公开(公告)日：2014-04-08

申请号：US12806311

申请日：2010-08-09

Applicant: Johannes Classen

Inventor： Johannes Classen

IPC: G01P15/125

CPC classification number: B81B7/02 ,  B81B2201/0235 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0814 ,  G01P2015/0831

Abstract: A micromechanical system includes a first movable element, which is connected to a substrate via a first spring element, and a second movable element, which is connected to the substrate via a second spring element. The first movable element and the second movable element are movable in relation to the substrate independent of one another. Furthermore, the first movable element and the second movable element are situated one above the other in at least some sections in a direction perpendicular to the substrate surface.

Abstract translation: 微机械系统包括经由第一弹簧元件连接到基板的第一可移动元件和经由第二弹簧元件连接到基板的第二可移动元件。 第一可移动元件和第二可移动元件可相对于基板相互独立地移动。 此外，第一可移动元件和第二可移动元件在垂直于基板表面的方向中的至少一些部分中一个地位于另一个之上。

公开(公告)号：US08461833B2

公开(公告)日：2013-06-11

申请号：US12927259

申请日：2010-11-09

Applicant: Johannes Classen ,  Arnd Kaelberer ,  Hans-Joerg Faisst ,  Axel Franke ,  Mirko Hattass ,  Holger Rank ,  Robert Sattler ,  Alexander Buhmann ,  Ramona Maas ,  Marian Keck

Inventor： Johannes Classen ,  Arnd Kaelberer ,  Hans-Joerg Faisst ,  Axel Franke ,  Mirko Hattass ,  Holger Rank ,  Robert Sattler ,  Alexander Buhmann ,  Ramona Maas ,  Marian Keck

IPC: G01R33/02 ,  G01R33/00

CPC classification number: G01R33/0286 ,  B81C99/003 ,  G01P15/125 ,  G01P15/18 ,  G01P21/00

Abstract: A method for determining the sensitivity of a sensor provides the following steps: a) first and second deflection voltages are applied to first and second electrode systems of the sensor, respectively, and first and second electrostatic forces are exerted on an elastically suspended seismic mass of the sensor by the first and second electrode systems, respectively, and a restoring force is exerted on the mass as a result of the elasticity of the mass, and a force equilibrium is established among the first and second electrostatic forces and the restoring force, and the mass assumes a deflection position characteristic of the force equilibrium, and an output signal characteristic of the force equilibrium and of the deflection position is measured; and b) the sensitivity of the sensor is computed on the basis of the first and second deflection voltages.

Abstract translation: 用于确定传感器的灵敏度的方法提供以下步骤：a）分别将第一和第二偏转电压施加到传感器的第一和第二电极系统，并且第一和第二静电力施加在弹性悬浮的地震块 分别由第一和第二电极系统的传感器和由于质量的弹性而对质量施加回复力，并且在第一和第二静电力和恢复力之间建立力平衡，并且 质量呈现力平衡特性的偏转位置，并且测量力平衡和偏转位置的特征的输出信号; 以及b）基于第一和第二偏转电压来计算传感器的灵敏度。

公开(公告)号：US08272268B2

公开(公告)日：2012-09-25

申请号：US12543649

申请日：2009-08-19

Applicant: Johannes Classen ,  Arnd Kaelberer ,  Lars Tebje

Inventor： Johannes Classen ,  Arnd Kaelberer ,  Lars Tebje

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P15/18 ,  G01P2015/0831

Abstract: An acceleration sensor includes a substrate, a rocker mass, a z spring connected to the rocker mass, which allows the rocker mass to rotate about an axis, and at least one additional spring system connected to the substrate and the rocker mass. The additional spring system allows the rocker mass to deflect in an x or y direction oriented parallel or perpendicular to the axis. The z spring or the additional spring system allows the rocker mass to deflect in a y or x direction oriented parallel or perpendicular to the axis.

Abstract translation: 一个加速度传感器包括一个基板，一个摇臂质量体，一个连接在摇臂上的z弹簧，它允许摇臂质量绕一个轴线旋转，另外一个弹簧系统连接到基片和摇臂块上。 额外的弹簧系统允许摇杆质量在平行于或垂直于轴线定向的x或y方向上偏转。 z弹簧或附加弹簧系统允许摇杆质量在平行或垂直于轴线定向的y或x方向上偏转。

公开(公告)号：US20110185813A1

公开(公告)日：2011-08-04

申请号：US12987732

申请日：2011-01-10

Applicant: Johannes Classen ,  Burkhard Kuhlmann ,  Daniel Christoph Meisel

Inventor： Johannes Classen ,  Burkhard Kuhlmann ,  Daniel Christoph Meisel

IPC: G01C19/56

CPC classification number: G01C19/5747

Abstract: In a yaw rate sensor with a substrate having a main extent plane and with a first and second partial structure disposed parallel to the main extent plane, the first partial structure includes a first driving structure and the second partial structure includes a second driving structure, the first and second partial structure being excitable by a driving device, via the first and second driving structure, into oscillation parallel to a first axis parallel to the main extent plane, the first partial structure having a first Coriolis element and the second partial structure having a second Coriolis element, the yaw rate sensor being characterized in that the first and second Coriolis elements are displaceable by a Coriolis force parallel to a second axis, which is perpendicular to the first axis, and parallel to a third axis, which is perpendicular to the first and second axis, the second axis extending parallel to the main extent plane, and the first Coriolis element being connected to the second Coriolis element via a coupling element.

Abstract translation: 在具有主范围平面并具有平行于主范围平面布置的第一和第二部分结构的基板的偏航率传感器中，第一部分结构包括第一驱动结构，第二部分结构包括第二驱动结构， 第一和第二部分结构可被驱动装置通过第一和第二驱动结构激发成与平行于主范围平面的第一轴平行的振荡，第一部分结构具有第一科里奥利元件，第二部分结构具有 第二科里奥利元件，所述横摆率传感器的特征在于，所述第一和第二科里奥利元件可通过平行于垂直于所述第一轴线的第二轴线的科里奥利力移动，并且平行于垂直于所述第一轴线的第三轴线 第一和第二轴，第二轴平行于主范围平面延伸，第一科里奥利元件连接到t 他通过耦合元件第二个科里奥利元件。

公开(公告)号：US20110153251A1

公开(公告)日：2011-06-23

申请号：US12645010

申请日：2009-12-22

Applicant: Johannes Classen ,  Christoph Gauger

Inventor： Johannes Classen ,  Christoph Gauger

IPC: G06F19/00 ,  G01P21/00

CPC classification number: G01C19/5755 ,  G01C19/5726

Abstract: A method for compensating for the quadrature of a micromechanical structure, the micromechanical structure having a substrate having a main extension plane, a seismic mass that is attached by spring elements to the substrate, and first and second compensation electrodes anchored to the substrate; in response to application of a first quadrature voltage between the first compensation electrode and the seismic mass, a first compensation force being produced on the seismic mass and, in response to application of a second quadrature voltage between the second compensation electrode and the seismic mass, a second compensation force being produced on the seismic mass and, in addition, the second quadrature voltage being adjusted as a function of the first quadrature voltage.

Abstract translation: 一种用于补偿微机械结构的正交的方法，所述微机械结构具有具有主延伸平面的基板，通过弹簧元件附接到所述基板的地震质量以及锚定到所述基板的第一和第二补偿电极; 响应于在第一补偿电极和地震质量之间施加第一正交电压，在地震质量上产生第一补偿力，并且响应于在第二补偿电极和地震块之间施加第二正交电压， 在地震质量上产生第二补偿力，此外，第二正交电压被调整为第一正交电压的函数。

公开(公告)号：US20110083506A1

公开(公告)日：2011-04-14

申请号：US12924641

申请日：2010-10-01

Applicant: Johannes Classen ,  Christian Bierhoff

Inventor： Johannes Classen ,  Christian Bierhoff

IPC: G01C19/56 ,  H01R43/16

CPC classification number: B81B3/0072 ,  B81B2201/0235 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0814 ,  Y10T29/49204

Abstract: A micromechanical structure includes: a substrate; a seismic mass movable relative to the substrate along a first direction parallel to a main plane of extension of the substrate; a first electrode structure is connected to the substrate; and a second electrode structure connected to the substrate. The seismic mass includes a counterelectrode structure having finger electrodes situated between first finger electrodes of the first electrode structure and second finger electrodes of the second electrode structure, along the first direction. The first electrode structure is fastened to the substrate by a first anchoring element in a central region of the micromechanical structure, and the second electrode structure is anchored to the substrate by a second anchoring element situated in the central region.

Abstract translation: 微机械结构包括：基板; 沿着平行于所述基板的延伸主平面的第一方向相对于所述基板移动的地震质量块; 第一电极结构连接到基板; 以及与基板连接的第二电极结构。 地震质量包括沿着第一方向具有位于第一电极结构的第一指状电极和第二电极结构的第二指状电极之间的指状电极的反电极结构。 第一电极结构通过微机电结构的中心区域中的第一锚定元件紧固到基板，并且第二电极结构通过位于中心区域中的第二锚定元件锚定到基板。

公开(公告)号：US20090320596A1

公开(公告)日：2009-12-31

申请号：US12304604

申请日：2007-10-19

Applicant: Johannes Classen ,  Markus Heitz ,  Found Bennini

Inventor： Johannes Classen ,  Markus Heitz ,  Found Bennini

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P2015/0814

Abstract: A micromechanical capacitive acceleration sensor having at least one seismic mass that is connected to a substrate so as to be capable of deflection, at least one electrode connected fixedly to the substrate, and at least one electrode connected to the seismic mass, the at least one electrode connected fixedly to the substrate and the at least one electrode connected to the seismic mass being realized as comb-shaped electrodes having lamellae that run parallel to the direction of deflection of the seismic mass, the lamellae of the two comb-shaped electrodes overlapping partially in the resting state.

Abstract translation: 一种微机电电容式加速度传感器，具有至少一个地震质量，其连接到基板以便能够偏转，至少一个电极固定地连接到所述基板，以及至少一个连接到所述地震块的电极，所述至少一个 连接到基板的电极和连接到地震块的至少一个电极被实现为具有平行于地震块的偏转方向延伸的薄片的梳状电极，两个梳状电极的薄片部分重叠 在休息状态。