Equipment for sticking adhesive tape on semiconductor wafer
    33.
    发明授权
    Equipment for sticking adhesive tape on semiconductor wafer 失效
    用于在半导体晶片上粘贴胶带的设备

    公开(公告)号:US5171398A

    公开(公告)日:1992-12-15

    申请号:US600439

    申请日:1990-10-19

    申请人: Naoki Miyamoto

    发明人: Naoki Miyamoto

    IPC分类号: H01L21/301 H01L21/00

    摘要: Disclosed herein is an equipment for sticking a vinyl tape on the backside surface of a wafer prior to the dicing of the wafer. Suction ports for sucking and supporting the peripheral part of the wafer surface is provided in the outer block of a stage for supporting the wafer, a recessed part is formed at the central part of the support stage so as to avoid the contact of the central part of the wafer to the support stage, and concentric ring-shaped projection parts are formed on the bottom surface of the recessed part. The height of the top face of the ring-shaped projection parts is set to be slightly lower than the outer block of the support stage which is the wafer contact part, with minute gaps being kept from the fixed wafer. It is possible to prevent the generation of flexure due to a turning roller at the time of sticking of the tape by introducing high pressure air to the recessed part of the wafer support part and the minute gaps.

    摘要翻译: 本文公开了一种用于在切割晶片之前将乙烯基带粘附在晶片的背面上的设备。 用于吸附和支撑晶片表面的周边部分的吸入口设置在用于支撑晶片的台的外部块中,在支撑台的中心部分处形成凹部,以避免中心部分 的晶片到支撑台,并且在凹部的底面上形成有同心环状的突起部。 环状突起部的顶面的高度被设定为略低于作为晶片接触部的支撑台的外部块,并且从固定的晶片保持微小的间隙。 可以通过将高压空气引入到晶片支撑部分的凹部和微小间隙来防止在带子粘附时由于转向辊产生弯曲。

    Control device and control method for laser processing machine
    34.
    发明授权
    Control device and control method for laser processing machine 有权
    激光加工机控制装置及控制方法

    公开(公告)号:US09492884B2

    公开(公告)日:2016-11-15

    申请号:US13880136

    申请日:2011-09-13

    摘要: In a laser processing machine 100 including a plurality of element units containing at least a laser blower unit 3, an optical-path purge unit 24, and a temperature controlling unit 8, a measurement unit and a control unit 10 are provided. The measurement unit measures an elapsed time from a final trigger at which a laser processing operation of the laser processing machine has stopped and no user operation is applied with respect to the laser processing machine. The control unit 10 stops the element units based on the elapsed time after the final trigger, when a condition specified for each of the element units is satisfied.

    摘要翻译: 在包括至少包含激光鼓风机单元3的多个元件单元的激光加工机100中,设置有光路吹扫单元24和温度控制单元8,测量单元和控制单元10。 测量单元测量从激光加工机的激光加工操作停止的最终触发器的经过时间,并且不对激光加工机器施加用户操作。 当满足为每个元件单元指定的条件时,控制单元10基于最终触发之后的经过时间来停止元件单元。

    Gas laser oscillator and gas exchange method for gas laser oscillator
    35.
    发明授权
    Gas laser oscillator and gas exchange method for gas laser oscillator 有权
    气体激光振荡器和气体激光振荡器的气体交换方法

    公开(公告)号:US08576891B2

    公开(公告)日:2013-11-05

    申请号:US13878911

    申请日:2011-09-13

    IPC分类号: H01S3/20

    摘要: The sealed gas laser oscillator that includes the airtight vessel, the laser gas supply source that supplies a laser gas to the airtight vessel, and the vacuum pump that performs evacuation until a pressure of an inside of the airtight vessel reaches a target reached pressure every predetermined interval between laser gas exchanges and is connected to the airtight vessel, and that performs laser oscillation in a state where the airtight vessel is filled with the laser gas. The gas laser oscillator includes a unit that determines the target reached pressure on the basis of the interval between laser gas exchanges, a leakage rate of an impurity gas from the outside to the airtight vessel after evacuation, and an allowable impurity gas pressure at which the gas laser oscillator is capable of being operated.

    摘要翻译: 包括气密容器的密封气体激光振荡器,向气密容器供应激光气体的激光气体供给源,以及在气密容器内部的压力达到目标之前进行抽真空的真空泵达到每个预定的压力 激光气体交换之间的间隔并连接到气密容器,并且在气密容器填充有激光气体的状态下进行激光振荡。 气体激光振荡器包括基于激光气体交换之间的间隔,排气后从外部到气密容器的杂质气体的泄漏率以及允许的杂质气体压力来确定目标到达压力的单元, 气体激光振荡器能够被操作。

    Structure of motor terminal
    36.
    发明授权
    Structure of motor terminal 有权
    电机端子结构

    公开(公告)号:US07990001B2

    公开(公告)日:2011-08-02

    申请号:US12524386

    申请日:2007-10-30

    IPC分类号: H02K11/00

    摘要: A terminal structure for a vehicle-mounted motor includes a motor body having a motor terminal 28 connected to a coil, and a circuit body 5 holding a circuit board 18 for controlling a rotation of the motor body and is assembled in the motor body, wherein a stress relaxation section 35 is provided in an intermediate of an intermediate conductor 34, in order to reduce stress acting on the intermediate conductor 34 connecting the motor terminal 28 and the circuit board 18 and to thereby improve the conductive reliability of electrical joint.

    摘要翻译: 一种用于车载电动机的端子结构,包括具有连接到线圈的电动机端子28的电动机主体和保持用于控制电动机主体的旋转并组装在电动机主体中的电路板18的电路体5,其中, 在中间导体34的中间设置有应力缓和部35,以便减小作用在连接电动机端子28和电路基板18的中间导体34上的应力,从而提高电接头的导电可靠性。

    HOT CATHODE AND ION SOURCE INCLUDING THE SAME
    37.
    发明申请
    HOT CATHODE AND ION SOURCE INCLUDING THE SAME 有权
    热阴极和离子源包括它

    公开(公告)号:US20100038556A1

    公开(公告)日:2010-02-18

    申请号:US12511660

    申请日:2009-07-29

    申请人: Naoki Miyamoto

    发明人: Naoki Miyamoto

    IPC分类号: H01J27/00 H01J9/02

    摘要: A hot cathode includes: a hollow external conductor; a hollow internal conductor which is placed coaxially inside the external conductor; and a connection conductor which electrically connects tip end portions of the conductors. A heating current is folded back through the connection conductor to flow in opposite directions in the external conductor and the internal conductor.

    摘要翻译: 热阴极包括:中空的外部导体; 中空的内部导体,同轴地放置在外部导体内部; 以及将导体的前端部电连接的连接导体。 加热电流通过连接导体折回,在外部导体和内部导体中沿相反方向流动。