Optical guided wave devices employing semiconductor-insulator structures
    31.
    发明授权
    Optical guided wave devices employing semiconductor-insulator structures 失效
    采用半导体 - 绝缘体结构的光导波器件

    公开(公告)号:US4420873A

    公开(公告)日:1983-12-20

    申请号:US115420

    申请日:1980-01-25

    IPC分类号: G02B6/122 G02B6/13 G02B5/172

    摘要: A method for fabricating three-dimensional optical waveguides is disclosed. In this method, a single crystal semiconductor layer is grown upon an insulator which has an index of refraction lower than the semiconductor. The semiconductor layer is deposited to a thickness which provides confinement of light propagating in the semiconductor layer in the vertical direction. An effective larger index of refraction over a cross-sectional region of the semiconductor layer is then formed to provide confinement of light in the lateral direction. In the preferred method, the growth of single crystal semiconductor upon the insulator is achieved by a vapor-phase lateral epitaxial overgrowth technique.Devices fabricated according to the method are also disclosed.

    摘要翻译: 公开了制造三维光波导的方法。 在该方法中,单晶半导体层生长在折射率低于半导体的绝缘体上。 半导体层被沉积成在垂直方向上提供在半导体层中传播的光的限制的厚度。 然后在半导体层的横截面区域上形成有效的较大的折射率,以在侧向方向上提供光的约束。 在优选的方法中,单晶半导体在绝缘体上的生长通过气相横向外延生长技术实现。 还公开了根据该方法制造的器件。

    Rolling shutter optical switch device with latch electrode and slits in shutter
    34.
    发明授权
    Rolling shutter optical switch device with latch electrode and slits in shutter 失效
    具有闩锁电极的卷帘快门光开关装置和快门中的狭缝

    公开(公告)号:US06907153B2

    公开(公告)日:2005-06-14

    申请号:US09799923

    申请日:2001-03-05

    摘要: An optical switch device includes a rolling shutter or membrane attached at one of its edges to a substrate near an optical port in the substrate. The rolling shutter can assume one of two states. In a first closed state, the membrane is uncoiled onto the substrate over the port such that light directed at the port impinges on the shutter. In a second open state, the membrane is rolled up away from the port such that light directed at the port impinges on the port. In one embodiment, a mirror is formed on the membrane such that when the membrane is in the closed state over the substrate, light directed at the port is reflected by the mirror. In one configuration, the optical port includes a hole or aperture such light passed through the port without interference. The device can include a latch electrode the far end of the membrane such that when it is rolled out, it can be held in position by a latching voltage applied across the latch electrode and the substrate. Slits can be formed in the membrane to keep the mirror flat by relieving strain in the membrane and to allow gases in proximity to the device to pass through the membrane as it is activated. The shutter can include dimples to minimize the area of contact between the membrane and the substrate to reduce the probability of the two sticking together. The attachment edge of the membrane can be made shorter than its width to reduce distortions in the membrane to keep the mirror flat. A raised annular rim can be provided around the port such that when the shutter is held down over the port it is pulled taut and flat over the rim. This feature is also used to maintain flatness in the mirror. The switch device can be used as part of an array of optical switches.

    摘要翻译: 一种光学开关装置包括将其一个边缘附接到衬底附近的光学端口的基板的卷帘门或薄膜。 滚动快门可以采取两种状态之一。 在第一关闭状态下,膜在端口上展开到基板上,使得指向端口的光照射在快门上。 在第二打开状态下,膜从端口卷起,使得指向端口的光照射在端口上。 在一个实施例中,在膜上形成反射镜,使得当膜在衬底上处于关闭状态时,指向端口的光被反射镜反射。 在一个配置中,光学端口包括孔或孔,这样的光通过端口而不受干扰。 该装置可以包括位于膜的远端的闩锁电极,使得当其被推出时,其可以通过施加在闩锁电极和基板上的锁存电压而保持就位。 可以在膜中形成狭缝,以通过减轻膜中的应变来保持反射镜平坦,并允许邻近装置的气体在被激活时通过膜。 快门可以包括凹坑以最小化膜和基底之间的接触面积,以减少两者粘在一起的可能性。 膜的附着边缘可以比其宽度短,以减少膜中的变形,以保持镜子平坦。 可以围绕端口设置凸起的环形边缘,使得当快门被按压在端口上时,其被拉紧并在边缘上平坦。 此功能也用于保持镜子的平整度。 开关器件可用作光开关阵列的一部分。

    Spatial light modulator
    35.
    发明授权
    Spatial light modulator 失效
    空间光调制器

    公开(公告)号:US5959763A

    公开(公告)日:1999-09-28

    申请号:US31487

    申请日:1998-02-26

    摘要: A spatial light modulator formed of a moveable electrode which is disposed opposite a fixed electrode and is biased to roll in a preferred direction upon application of an electric field across the electrodes to produce a light valve or light shutter. In one embodiment, the moveable electrode is restrained at one end and coils about the fixed end in a preferential roll direction. The bias is achieved by inducing anisotropic stress or anisotropic stiffness.

    摘要翻译: 由可移动电极形成的空间光调制器,所述可移动电极与固定电极相对设置,并且在跨过电极施加电场以偏置以在优选方向上滚动以产生光阀或光闸。 在一个实施例中,可移动电极被限制在一端并以优先的滚动方向围绕固定端盘绕。 通过诱发各向异性压力或各向异性刚度来实现偏置。

    Electric display device
    39.
    发明授权
    Electric display device 失效
    电动显示装置

    公开(公告)号:US5233459A

    公开(公告)日:1993-08-03

    申请号:US665345

    申请日:1991-03-06

    摘要: A bistable electrostatic light valve display in which a movable electrode is disposed opposite a fixed electrode and is biased to move in a preferred direction upon application of an electric field across the electrodes to produce a light valve or light shutter. In one embodiment, the movable electrode is restrained at one end and coils about the fixed end in a preferential roll direction. The bias is achieved by inducing anisotropic stress or anisotropic stiffness. In another embodiment, the moveable electrode is restrained at both ends and is biased upwardly by anisotropic stress or stiffening.

    摘要翻译: 一种双稳态静电光阀显示器,其中可动电极与固定电极相对地设置并且在施加电场两端的电场之后被偏置以沿优选方向移动以产生光阀或光闸。 在一个实施例中,可动电极被限制在一端并以优先的滚动方向围绕固定端盘绕。 通过诱发各向异性压力或各向异性刚度来实现偏置。 在另一个实施例中,可移动电极在两端被限制并且由各向异性的应力或加强向上偏置。