公开(公告)号：US07054506B2

公开(公告)日：2006-05-30

申请号：US10147419

申请日：2002-05-16

申请人： Yutaka Ikku

发明人： Yutaka Ikku

IPC分类号： G06K9/36

CPC分类号： G06T7/60 ,  G06T7/12 ,  G06T7/13 ,  G06T2207/10056 ,  G06T2207/30164 ,  H01J2237/2817

摘要： A method of measuring a pattern by using a display microscope image comprises a step of setting an edge detection reference line by designating a range of detecting an edge and a number of edge points with regard to a respective side portion of the pattern in the microscope image, a step of sampling the edge point constituting a point of changing a brightness from image information by searching the edge point from a direction orthogonal to the set edge detection reference line, a step of providing a line approximating the respective side portion of the pattern based on position information of a plurality of the edge points and a step of specifying a shape of the pattern by an intersecting point of two pieces of lines, a specified point provided by a plurality of intersecting points, an angle made by two pieces of straight lines and a distance between two specified points from information of the approximated line approximating the respective side portion of the pattern.

公开(公告)号：US07020152B1

公开(公告)日：2006-03-28

申请号：US09830382

申请日：1999-11-02

申请人： Toshio Doi ,  Masashi Muramatsu ,  Hiroshi Matsumura ,  Toshiaki Fujii

发明人： Toshio Doi ,  Masashi Muramatsu ,  Hiroshi Matsumura ,  Toshiaki Fujii

IPC分类号： H04L12/28

CPC分类号： H04L12/28

摘要： A network system has a first LAN, a second LAN, and a storage device for storing data accessible from the first LAN and the second LAN. A control apparatus controls accessibility of the data stored in the storage device from the first LAN and the second LAN. The control apparatus includes an access prevention device for preventing access from the first LAN to the second LAN and from the second LAN to the first LAN and a device for overriding a setting of the access prevention device to allow accessibility of the second LAN from the first LAN.

摘要翻译： 网络系统具有第一LAN，第二LAN和用于存储从第一LAN和第二LAN可访问的数据的存储设备。 控制装置控制从第一LAN和第二LAN存储在存储装置中的数据的可访问性。 该控制装置包括用于防止从第一LAN到第二LAN和从第二LAN到第一LAN的访问的访问防止装置，以及用于覆盖访问防止装置的设置的装置，以允许第二LAN从第一LAN 局域网

公开(公告)号：US06953519B2

公开(公告)日：2005-10-11

申请号：US10651526

申请日：2003-08-29

申请人： Yoshiharu Shirakawabe ,  Hiroshi Takahashi ,  Tadashi Arai

发明人： Yoshiharu Shirakawabe ,  Hiroshi Takahashi ,  Tadashi Arai

IPC分类号： G01Q10/04 ,  G01Q20/04 ,  G01Q60/10 ,  G01Q60/16 ,  G01Q60/24 ,  G01Q60/32 ,  G01Q60/38 ,  G01Q70/06 ,  G01R1/073 ,  G01R3/00 ,  H01L21/66 ,  C23C14/32 ,  C23F1/00

CPC分类号： G01Q70/16 ,  G01N23/00 ,  G01N23/225 ,  G01Q70/06 ,  G01Q70/12 ,  G01R3/00 ,  Y10T29/49007

摘要： In order to establish processing techniques capable of making multi-tip probes with sub-micron intervals and provide such microscopic multi-tip probes, there is provided an outermost surface analysis apparatus for semiconductor devices etc. provided with a function for enabling positioning to be performed in such a manner that there is no influence on measurement in electrical measurements at an extremely small region using this microscopic multi-tip probe, and there are provided the steps of making a cantilever 1 formed with a plurality of electrodes 3 using lithographic techniques, and forming microscopic electrodes 6 minute in pitch by sputtering or gas-assisted etching a distal end of the cantilever 1 using a focused charged particle beam or using CVD.

摘要翻译： 为了建立能够制造具有亚微米间隔的多尖端探针并提供这种微观多尖头探针的加工技术，提供了一种用于半导体器件等的最外表面分析装置，其具有使得能够进行定位的功能 使用这种显微多头探针在极小区域的电测量中对测量没有影响，并且提供了使用光刻技术制造形成有多个电极3的悬臂1的步骤，以及 通过溅射或使用聚焦的带电粒子束或使用CVD气化辅助蚀刻悬臂1的远端来形成6分钟的间距的微观电极。

公开(公告)号：US06934920B2

公开(公告)日：2005-08-23

申请号：US10130880

申请日：2001-10-05

申请人： Toshiaki Fujii ,  Masamichi Oi ,  Atsushi Yamauchi

发明人： Toshiaki Fujii ,  Masamichi Oi ,  Atsushi Yamauchi

IPC分类号： H01L21/66 ,  G06F17/50 ,  G01N21/00 ,  G06K9/00

CPC分类号： H01L22/20 ,  H01J2237/2817 ,  H01L2223/5448

摘要： In a sample analysis method, positional coordinates of reference points on a surface of the sample are measured using a first device. Positional coordinates of an object on the surface of the sample to be analyzed are also measured using the first device. A sample piece containing on a surface thereof a preselected number of the reference points and the object is removed from the sample. The sample piece is then mounted on a second device different from the first device. The positional coordinates of the reference points on the surface of the sample piece are then measured using the second device. The positional coordinates of the object on the surface of the sample piece are then calculated using the positional coordinates of the reference points measured by the second device and the positional coordinates of the object measured by the first device. The object on the surface of the sample piece is then analyzed.

摘要翻译： 在样本分析方法中，使用第一装置测量样品表面上的参考点的位置坐标。 待分析样品表面上的物体的位置坐标也使用第一装置测量。 从样品中除去包含在其表面上的预选数量的参考点和物体的样品片。 然后将样品片安装在与第一装置不同的第二装置上。 然后使用第二装置测量样品片表面上的参考点的位置坐标。 然后使用由第二装置测量的参考点的位置坐标和由第一装置测量的物体的位置坐标来计算样品的表面上的物体的位置坐标。 然后分析样品的表面上的物体。

公开(公告)号：US06907359B2

公开(公告)日：2005-06-14

申请号：US10417906

申请日：2003-04-17

申请人： Keiichi Tanaka ,  Toshimitsu Morooka ,  Satoshi Nakayama

发明人： Keiichi Tanaka ,  Toshimitsu Morooka ,  Satoshi Nakayama

IPC分类号： G01T1/12 ,  G01K7/00 ,  G01K17/00 ,  G01T1/26 ,  G01T1/36 ,  H01L39/00

CPC分类号： G01K17/00 ,  G01K7/006

摘要： A superconducting radiation detector relies upon the abruptness of a superconducting transition edge to converts a slight heat generated by an X-ray into a high signal current and uses an electrothermal self-feedback mechanism to provide a high energy resolution and a high counting rate. A calorimeter incorporating such a radiation detector has an absorber for absorbing X-rays, a resistor formed of a superconductor provided under the absorber and having a resistance value that varies with heat generated in the absorber, superconducting wires for connecting the resistor to an external current detector, a membrane on which the resistor is provided, and an insulating film provided between the resistor and the absorber and having at least one hole penetrating therethrough, the resistor and the absorber being in contact through the hole.

摘要翻译： 超导辐射探测器依赖于超导过渡边缘的突然性，将由X射线产生的轻微热量转换为高信号电流，并使用电热自反馈机制提供高能量分辨率和高计数率。 结合了这样的放射线检测器的量热器具有用于吸收X射线的吸收体，由吸收体下方设置的超导体形成的电阻器，其电阻值随着在吸收体中产生的热量而变化，用于将电阻器连接到外部电流的超导线 检测器，设置有电阻器的膜，以及设置在电阻器和吸收体之间并具有贯穿其中的至少一个孔的绝缘膜，电阻器和吸收体通过孔接触。

公开(公告)号：US06891171B1

公开(公告)日：2005-05-10

申请号：US09959834

申请日：2000-04-19

申请人： Ryoji Hagiwara ,  Yoshihiro Koyama

发明人： Ryoji Hagiwara ,  Yoshihiro Koyama

IPC分类号： G01Q60/00 ,  G03F1/00 ,  H01J37/305

CPC分类号： G03F1/74 ,  G03F1/26 ,  H01J37/3056 ,  H01J2237/31744

摘要： A method is provided for repairing a phase shift mask. The phase shift mask has a substrate and a shifter containing a defect and disposed on the substrate. An ion beam is irradiated onto the defect while a region of the shifter that includes the defect is supplied with a first gas containing silicon, an oxidizing second gas, and a third gas for controlling an amount of ions from the ion beam which penetrate the region of the shifter to form a silicon thin film on the defect and thereby repair the phase shift mask.

摘要翻译： 提供了修复相移掩模的方法。 相移掩模具有衬底和包含缺陷并设置在衬底上的移位器。 将离子束照射到缺陷上，同时向包含缺陷的移位器的区域提供含有硅的第一气体，氧化性第二气体和用于控制穿透该区域的离子束的离子量的第三气体 的移位器，以在缺陷上形成硅薄膜，从而修复相移掩模。

公开(公告)号：US06870161B2

公开(公告)日：2005-03-22

申请号：US10644696

申请日：2003-08-20

申请人： Tatsuya Adachi ,  Toshiaki Fujii ,  Hiroshi Sawaragi ,  Yasuhiko Sugiyama

发明人： Tatsuya Adachi ,  Toshiaki Fujii ,  Hiroshi Sawaragi ,  Yasuhiko Sugiyama

IPC分类号： G01N1/28 ,  H01J37/20 ,  H01J37/305 ,  G01N1/04 ,  H01J37/26

CPC分类号： G01N1/286 ,  G01N2001/2873 ,  H01J37/20 ,  H01J37/3056 ,  H01J2237/2817 ,  H01J2237/31745

摘要： An apparatus for processing and observing a sample has a sample stage for supporting a sample at a preselected location thereof, a focused ion beam irradiation system for irradiating the sample with a focused ion beam along an optical axis to cut out a portion from the sample, and a side entry stage disposed over the sample stage and extending slantingly with respect to the optical axis of the focused ion beam irradiated by the focused ion beam irradiation system. The side entry stage has a microscope sample holder for picking up the cut-out sample portion directly from the preselected location of the sample and for supporting the sample portion. The microscope sample holder is configured to be removed from the side entry stage while supporting the sample portion and to be connected to an entry stage of a microscope device for observing the sample portion.

摘要翻译： 用于处理和观察样品的装置具有用于在预选位置处支撑样品的样品台，用于沿着光轴照射具有聚焦离子束的样品的聚焦离子束照射系统，以从样品中切出一部分， 以及设置在样品台上并相对于由聚焦离子束照射系统照射的聚焦离子束的光轴倾斜延伸的侧入口台。 侧进入台具有用于从样品的预选位置直接拾取切出的样品部分并用于支撑样品部分的显微镜样品架。 显微镜样品架被配置为在支撑样品部分的同时从侧入口台移除并连接到用于观察样品部分的显微镜装置的入口台。

公开(公告)号：US06864481B2

公开(公告)日：2005-03-08

申请号：US10308796

申请日：2002-12-03

申请人： Takashi Kaito ,  Masatoshi Yasutake ,  Tatsuya Adachi

发明人： Takashi Kaito ,  Masatoshi Yasutake ,  Tatsuya Adachi

IPC分类号： G01B21/30 ,  G01Q30/02 ,  G01Q60/38 ,  G01Q70/00 ,  G01Q70/10 ,  G01Q70/14 ,  G01Q90/00 ,  G01N23/00 ,  G21K7/00

CPC分类号： G01Q60/38 ,  G01Q70/12 ,  Y10S977/875

摘要： A probe for a scanning probe microscope has a cantilever portion and a microscopic probe portion formed of a solid columnar tip at a distal end of the cantilever portion by deposition using an organic gas decomposed by a focused ion beam inside a vacuum chamber. The probe is sufficiently narrow and has high abrasion resistance and rigidity. The tip may be grown to extend from the cantilever portion at an angle shifted by an angle at which the cantilever portion is inclined during scanning of the probe portion across a sample surface, so that the columnar tip is perpendicular to the sample surface during the scanning. The tip may be formed of a conductive material such as tungsten of diamond-like carbon by FIB-CVD.

摘要翻译： 用于扫描探针显微镜的探针具有悬臂部分和微观探针部分，其通过使用在真空室内聚焦的离子束分解的有机气体沉积而在悬臂部分的远端由固体柱状尖端形成。 探头足够窄，具有高耐磨性和刚性。 在扫描探针部分穿过样品表面扫描期间，尖端可以以悬臂部分倾斜一个角度移动的角度从悬臂部分延伸，使得柱状尖端在扫描期间垂直于样品表面 。 尖端可以由诸如金刚石状碳的钨的导电材料通过FIB-CVD形成。

公开(公告)号：US08608373B2

公开(公告)日：2013-12-17

申请号：US12806364

申请日：2010-08-11

申请人： Kazunori Ando ,  Masayuki Iwasa ,  Masatsugu Shigeno ,  Hiroumi Momota ,  Kazutoshi Watanabe

发明人： Kazunori Ando ,  Masayuki Iwasa ,  Masatsugu Shigeno ,  Hiroumi Momota ,  Kazutoshi Watanabe

IPC分类号： G01N25/02 ,  G01N25/18

CPC分类号： G01N25/18 ,  G01N25/04 ,  G01Q60/58

摘要： In a local softening point measuring apparatus and thermal conductivity measuring apparatus using a probe microscope as a base, environment of the prob˜ and a sample surface is set to 1/100 atmospheric pressure (103 Pa) or lower. Otherwise, a side surface of the probe is coated with a thermal insulation material having a thickness that enables thermal dissipation to be reduced to 1/100 or lower, to thereby reduce the thermal dissipation from the side surface of the probe, and exchange heat substantially only at the contacting portion between the probe and the sample surface.

摘要翻译： 在使用探针显微镜作为基础的局部软化点测定装置和热导率测定装置中，将试样表面的环境设定为1/100大气压（103Pa）以下。 否则，探针的侧表面涂覆有能够使散热减小到1/100或更低的厚度的绝热材料，从而减少从探针侧表面的散热，并且基本上交换热量 仅在探针和样品表面之间的接触部分处。

公开(公告)号：US20130180019A1

公开(公告)日：2013-07-11

申请号：US13737022

申请日：2013-01-09

申请人： SII NANOTECHNOLOGY INC.

发明人： Masafumi WATANABE ,  Hiroumi MOMOTA

IPC分类号： G01Q70/10

CPC分类号： G01Q70/10 ,  G01Q40/00

摘要： Provided is a method of evaluating a probe tip shape in a scanning probe microscope, including: measuring the probe tip shape by a probe shape test sample having a needle-like structure; determining radii of cross-sections at a plurality of distances from the apex; and calculating, based on the distances and the radii, a radios of curvature when the probe tip shape is approximated by a circle.

摘要翻译： 提供了一种在扫描探针显微镜中评价探针尖端形状的方法，包括：通过具有针状结构的探针形状测试样品测量探针尖端形状; 确定距所述顶点多个距离处的横截面的半径; 并且当探针尖端形状由圆形近似时，基于距离和半径计算曲率半径。