公开(公告)号：US20160314993A1

公开(公告)日：2016-10-27

申请号：US15137722

申请日：2016-04-25

Applicant: Brooks Automation, Inc.

Inventor： Alexander G. Krupyshev ,  John Underwood

IPC: H01L21/677 ,  H01L21/67

CPC classification number: H01L21/677 ,  H01L21/67126 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67201

Abstract: A workpiece handling module including a first housing member and a second housing member pivotally movable relative to the first member forming a housing having an access side and a second side opposite the access side and side walls, a first portion of the side walls is carried by the first member and a second portion of the side walls is carried by the second member, and at least one of the first and second housing members includes at least one sealable opening for allowing ingress and egress of workpieces to and from an interior chamber formed by the first and second housing members in a closed configuration, and the second portion of the side walls adjacent the access side and carried by the second member is greater than the first portion of the side walls adjacent the access side and carried by the first member.

Abstract translation: 一种工件处理模块，包括第一壳体构件和第二壳体构件，所述第二壳体构件可相对于第一构件枢转运动，所述第一构件形成具有入口侧的壳体和与入口侧和侧壁相对的第二侧，侧壁的第一部分由 所述第一构件和所述侧壁的第二部分由所述第二构件承载，并且所述第一和第二壳体构件中的至少一个包括至少一个可密封的开口，用于允许工件进入和离开由内部腔室形成的内部腔室 所述第一和第二壳体构件处于闭合构型，并且邻近所述进入侧并由所述第二构件承载的所述侧壁的第二部分大于邻近所述进入侧并由所述第一构件承载的所述侧壁的第一部分。

公开(公告)号：US20160293467A1

公开(公告)日：2016-10-06

申请号：US15103268

申请日：2014-10-16

Applicant: Brooks Automation, Inc.

Inventor： Robert T. CAVENEY ,  Ulysses GILCHRIST

IPC: H01L21/677 ,  H01L21/67

Abstract: In accordance with one or more aspects of the disclosed embodiment a semiconductor processing apparatus is provided. The semiconductor processing apparatus includes a frame forming a sealable chamber having a longitudinal axis and lateral sides astride the longitudinal axis, the sealable chamber being configured to hold a sealed environment therein, at least one transport module mounted to the sealable chamber and having a telescoping carriage being configured so that the telescoping carriage is linearly movable relative to another portion of the transport module where the telescoping carriage and the other portion define a telescoping motion along the longitudinal axis, and at least one transfer robot mounted to the carriage, each of the at least one transfer robot having at least one transfer arm configured for holding a substrate thereon.

Abstract translation: 根据所公开的实施例的一个或多个方面，提供一种半导体处理装置。 该半导体处理装置包括一个框架，该框架形成一个具有纵向轴线和横向于纵向轴线的横向侧壁的可密封腔室，该可密封腔室构造成保持其中的密封环境;至少一个传送模块，安装在可密封的腔室上， 被构造成使得所述伸缩式托架相对于所述运输模块的另一部分线性移动，其中所述伸缩式托架和所述另一部分沿着所述纵向轴线限定伸缩运动，并且至少一个传送机器人安装到所述托架， 至少一个传送机器人具有被配置用于在其上保持衬底的至少一个传送臂。

公开(公告)号：US20160288999A1

公开(公告)日：2016-10-06

申请号：US15085431

申请日：2016-03-30

Applicant: Brooks Automation, Inc.

Inventor： Robert T. Caveney ,  Frank Hunt ,  Lingchen Sun ,  Julian D. Warhurst ,  Bruce S. Zandi ,  Anthony C. Bonora

IPC: B65G1/04 ,  F25D25/02 ,  B65G1/06 ,  F25D21/02 ,  F25D21/04 ,  B65G1/10 ,  F25D3/10 ,  F25D29/00

CPC classification number: B65G1/045 ,  B65G1/0464 ,  B65G1/06 ,  B65G1/10 ,  F25D3/105 ,  F25D3/11 ,  F25D21/02 ,  F25D21/04 ,  F25D25/02 ,  F25D25/04 ,  F25D29/001 ,  F25D2400/38

Abstract: An automated cryogenic storage system includes a freezer and an automation system to provide automated transfer of samples to and from the freezer. The freezer includes a bearing and a drive shaft though the freezer, the drive shaft being coupled to a rack carrier inside the freezer and adapted to be coupled to a motor. The automation module includes a rack puller that is automatically positioned above an access port of the freezer. The rack puller engages with a sample rack within the freezer, and elevates the rack into an insulating sleeve external to the freezer. From the insulating sleeve, samples can be added to and removed from the sample rack before it is returned to the freezer.

Abstract translation: 一种自动化低温储存系统，包括一个冷冻箱和一个自动化系统，用于自动转移样品往返于冰箱。 冷冻机包括轴承和通过冷冻器的驱动轴，驱动轴联接到冷冻室内的齿条架，并适于联接到电动机。 自动化模块包括自动定位在冷冻室的进入端口上方的机架拉拔器。 机架拉拔器与冷冻机内的样品架接合，并将机架提升到冷冻机外部的绝缘套管中。 在绝缘套管上，样品可以在返回到冷藏室之前添加到样品架上并从样品架中取出。

公开(公告)号：US09401294B2

公开(公告)日：2016-07-26

申请号：US14058436

申请日：2013-10-21

Applicant: Brooks Automation, Inc.

Inventor： Christopher Hofmeister ,  Alexander Krupyshev ,  Ulysses Gilchrist

IPC: H01L21/677 ,  H01L21/67

CPC classification number: H01L21/677 ,  H01L21/6719 ,  H01L21/67201 ,  H01L21/67742 ,  H01L21/67766 ,  H01L21/67775

Abstract: A substrate processing system including a load port module configured to hold at least one substrate container for storing and transporting substrates, a substrate processing chamber, an isolatable transfer chamber capable of holding an isolated atmosphere therein configured to couple the substrate processing chamber and the load port module, and a substrate transport mounted at least partially within the transfer chamber having a drive section fixed to the transfer chamber and having a SCARA arm configured to support at least one substrate, the SCARA arm being configured to transport the at least one substrate between the at least one substrate container and the processing chamber with but one touch of the at least one substrate, wherein the SCARA arm comprises a first arm link, a second arm link, and at least one end effector serially pivotally coupled to each other, where the first and second arm links have unequal lengths.

公开(公告)号：US09368382B2

公开(公告)日：2016-06-14

申请号：US14223553

申请日：2014-03-24

Applicant: Brooks Automation, Inc.

Inventor： Gerald M. Friedman ,  Michael L. Bufano ,  Christopher Hofmeister ,  Ulysses Gilchrist ,  William Fosnight

IPC: B65G47/10 ,  H01L21/677 ,  B65G47/50 ,  H01L21/67

CPC classification number: H01L21/677 ,  B65G47/50 ,  H01L21/67276 ,  H01L21/67769 ,  H01L21/67772 ,  H01L21/67775 ,  Y10S414/14

Abstract: A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier so the at least one substrate transport carrier is capable of being coupled to the load port interface without lifting the at least one substrate transport carrier off the carrier holding station. The carrier holding station is arranged to provide a substantially simultaneous swap section for substantially simultaneous replacement of the substrate transport carrier from the carrier holding station.

Abstract translation: 提供了一种基板处理装置。 该装置具有壳体，低端口接口和载体保持站。 壳体具有用于处理基板的处理装置。 负载端口接口连接到外壳，用于将基板装载到处理设备中。 托架保持站连接到外壳。 载体保持站用于保持至少一个基板输送载体，使得至少一个基板输送载体能够耦合到负载端口接口，而不将至少一个基板传输载体从载体保持站提起。 载体保持站布置成提供基本上同时的交换部分，用于基本上同时从载体保持站更换基板传输载体。

公开(公告)号：US20160164382A1

公开(公告)日：2016-06-09

申请号：US14540058

申请日：2014-11-13

Applicant: BROOKS AUTOMATION, INC.

Inventor： Jairo T. MOURA ,  Reza SAEIDPOURAZAR ,  Branden Gunn ,  Matthew W. Coady ,  Ulysses Gilchrist

IPC: H02K11/215 ,  H01L21/687 ,  H02K1/14 ,  H01L21/677 ,  H02K5/128 ,  H02K1/24

Abstract: A transport apparatus including a housing, a drive mounted to the housing, and at least one transport arm connected to the drive, where the drive includes at least one rotor having at least one salient pole of magnetic permeable material and disposed in an isolated environment, at least one stator having at least one salient pole with corresponding coil units and disposed outside the isolated environment where the at least one salient pole of the at least one stator and the at least one salient pole of the rotor form a closed magnetic flux circuit between the at least one rotor and the at least one stator, at least one seal partition configured to isolate the isolated environment, and at least one sensor including a magnetic sensor member connected to the housing, at least one sensor track connected to the at least one rotor where the at least one seal partition is disposed between and separates the magnetic sensor member and the at least one sensor track so that the at least one sensor track is disposed in the isolated environment and the magnetic sensor member is disposed outside the isolated environment.

Abstract translation: 一种运输装置，包括壳体，安装到壳体的驱动器和连接到驱动器的至少一个输送臂，其中驱动器包括至少一个转子，该转子具有至少一个磁性可渗透材料的凸极并且设置在隔离环境中， 至少一个定子具有至少一个具有对应的线圈单元的凸极并且设置在所述隔离环境的外部，其中所述至少一个定子的至少一个凸极和所述转子的所述至少一个凸极形成闭合磁通电路， 所述至少一个转子和所述至少一个定子，被配置为隔离所述隔离环境的至少一个密封分隔件，以及包括连接到所述壳体的磁性传感器构件的至少一个传感器，连接到所述至少一个的至少一个传感器轨道 转子，其中所述至少一个密封分隔件设置在所述磁性传感器构件和所述至少一个传感器轨道之间，并且使所述至少一个感测体 r轨道设置在隔离环境中，并且磁传感器构件设置在隔离环境的外部。

公开(公告)号：US20150273468A1

公开(公告)日：2015-10-01

申请号：US14671423

申请日：2015-03-27

Applicant: BROOKS AUTOMATION, INC.

Inventor： Etienne CROQUETTE ,  Rhett AFFLECK ,  Robin GRIMWOOD

IPC: B01L3/00 ,  B01L9/00 ,  B01L9/06

CPC classification number: B01L3/50825 ,  B01L9/06 ,  B01L9/50 ,  B01L2200/18 ,  B01L2300/021 ,  B01L2300/042 ,  B01L2300/046 ,  B01L2300/0609 ,  B01L2300/1883 ,  B25J15/0047 ,  B25J15/0206 ,  B25J15/0608 ,  B25J19/02 ,  G01N35/00009 ,  G01N35/0099 ,  G01N35/04 ,  G01N2035/00425 ,  G01N2035/00435 ,  G01N2035/00445

Abstract: A sample storage including a frame and an array of sample container holding areas disposed within the frame where a spacing between adjacent sample container holding areas is independent of a gripping area for sample containers held by the sample storage.

Abstract translation: 包括框架的样品储存器和设置在框架内的样品容器保持区域的阵列，其中相邻样品容器保持区域之间的间隔与由样品储存器保持的样品容器的夹持区域无关。

公开(公告)号：US09104650B2

公开(公告)日：2015-08-11

申请号：US13739831

申请日：2013-01-11

Applicant: Brooks Automation, Inc.

Inventor： Martin Hosek ,  Jayaraman Krishnasmy ,  Jan Prochazka

IPC: G06F11/00 ,  G06F11/22

CPC classification number: G05B23/0283 ,  B25J9/1674 ,  G05B19/41875 ,  G05B23/0221 ,  G06F11/2257

Abstract: A system for condition monitoring and fault diagnosis includes a data collection function that acquires time histories of selected variables for one or more of the components, a pre-processing function that calculates specified characteristics of the time histories, an analysis function for evaluating the characteristics to produce one or more hypotheses of a condition of the one or more components, and a reasoning function for determining the condition of the one or more components from the one or more hypotheses.

Abstract translation: 用于状态监视和故障诊断的系统包括数据收集功能，其获取一个或多个组件的选定变量的时间历史，计算时间历史的指定特征的预处理功能，用于评估特征的分析功能 产生一个或多个组件的条件的一个或多个假设，以及用于从一个或多个假设确定一个或多个组件的状况的推理功能。

公开(公告)号：US20150221534A1

公开(公告)日：2015-08-06

申请号：US14611697

申请日：2015-02-02

Applicant: BROOKS AUTOMATION, INC.

Inventor： Peter van der Meulen

IPC: H01L21/67 ,  H01L21/677

CPC classification number: H01L21/67167 ,  B25J9/042 ,  H01L21/67126 ,  H01L21/67161 ,  H01L21/67173 ,  H01L21/67178 ,  H01L21/67184 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67201 ,  H01L21/67207 ,  H01L21/67253 ,  H01L21/67259 ,  H01L21/67706 ,  H01L21/67727 ,  H01L21/67733 ,  H01L21/67736 ,  H01L21/67742 ,  H01L21/67745 ,  H01L21/67748 ,  H01L21/67754 ,  H01L21/67757 ,  H01L21/67781 ,  H01L21/68 ,  H01L21/68707 ,  H01L21/68735 ,  Y10S414/135 ,  Y10S414/137 ,  Y10S414/139 ,  Y10T74/20305

Abstract: A substrate transport apparatus having a drive section, an articulated arm operably connected to the drive section, and an end effector connected to the articulated arm, the end effector being configured for holding a substrate thereon and transporting the substrate through articulation of the articulated arm. The end effector is a substantially flat and elongated member, depending from the articulated arm at a base end of the end effector, and extending longitudinally so that the end effector engages edges of the substrate on both proximal and distal sides with respect to the base end. The end effector has a lateral cross section that tapers in a longitudinal portion of the end effector extending between the base end and a distal end of the end effector, the lateral cross section being tapered, along the longitudinal portion, in at least two different directions that are angled and crossing each other.

Abstract translation: 具有驱动部分，可操作地连接到驱动部分的关节臂以及连接到铰接臂的端部执行器的基底输送装置，该末端执行器构造成用于在其上保持基底并且通过铰接臂的铰接运送基底。 末端执行器是基本上平坦且细长的构件，其从端部执行器的基端处的铰接臂垂直延伸并且纵向延伸，使得末端执行器相对于基端部在近侧和远侧两侧接合基板的边缘 。 末端执行器具有侧向横截面，该横截面在端部执行器的纵向部分中逐渐变细，该纵向部分在基端和端部执行器的远端之间延伸，横向截面沿着纵向部分在至少两个不同的方向上是渐缩的 它们是相互交叉的。

公开(公告)号：US20150128749A1

公开(公告)日：2015-05-14

申请号：US14469260

申请日：2014-08-26

Applicant: Brooks Automation, Inc.

Inventor： Ulysses Gilchrist

IPC: H01L21/677 ,  B25J18/04 ,  B25J9/04

CPC classification number: H01L21/67742 ,  B25J9/042 ,  B25J18/04 ,  G05B2219/40301 ,  Y10T74/20323

Abstract: A substrate processing apparatus comprising a transport arm having serially connected arm links, at least one of the arm links having a predetermined arm link height, at least a first pulley and a second pulley, where the second pulley is fixed to an arm link of the serially connected arm links, and at least one torque transmission band extending longitudinally between and coupled to each of the first pulley and the second pulley, the at least one torque transmission band having a corresponding band height for the predetermined arm link height and a variable lateral thickness such that the at least one torque transmission band includes a segment of laterally increased cross section for the corresponding band height.

Abstract translation: 一种基板处理装置，包括具有串联连接的臂连杆的传送臂，至少一个臂连杆具有预定的臂连杆高度，至少第一滑轮和第二滑轮，其中第二滑轮固定到臂连杆 至少一个扭矩传递带，其在所述第一滑轮和所述第二滑轮之间纵向延伸并且联接到所述第一滑轮和所述第二滑轮中的每一个，所述至少一个扭矩传递带具有用于所述预定臂连杆高度的相应的带高度，以及可变横向 使得所述至少一个扭矩传递带包括用于相应的带高度的横向增加的横截面的段。