公开(公告)号：US20210358742A1

公开(公告)日：2021-11-18

申请号：US17389029

申请日：2021-07-29

Applicant: Applied Materials, Inc.

Inventor： Daihua Zhang ,  Yingdong Luo ,  Mingwei Zhu ,  Hou T. Ng ,  Sivapackia Ganapathiappan ,  Nag B. Patibandla

IPC: H01L21/02 ,  H01L33/50 ,  H01L25/075 ,  H01L33/58 ,  H01L33/62 ,  H01L33/00 ,  H01L21/70 ,  H01L21/027

Abstract: A multi-color display includes a backplane having backplane circuitry, an array of micro-LEDs electrically integrated with backplane circuitry of the backplane, a first color conversion layer over each of a first plurality of light emitting diodes, a second color conversion layer over each of a second plurality of light emitting diodes, and a plurality of isolation walls separating adjacent micro-LEDs of the array. The micro-LEDs of the array are configured to generate illumination of the same wavelength range, the first color conversion layer converts the illumination to light of a first color, and the second color conversion layer converts the illumination to light of a different second color.

公开(公告)号：US20210205890A1

公开(公告)日：2021-07-08

申请号：US17208992

申请日：2021-03-22

Applicant: Applied Materials, Inc.

Inventor： Hou T. Ng ,  Nag B. Patibandla ,  Ajey M. Joshi ,  Bharath Swaminathan ,  Ashavani Kumar ,  Eric Ng ,  Bernard Frey ,  Kasiraman Krishnan

IPC: B22F12/00 ,  B29C64/153 ,  B29C64/371 ,  B29C64/364 ,  B23K26/342 ,  B23K26/70

Abstract: An additive manufacturing system includes a platen having a top surface to support an object being manufactured, a feed material dispenser to deliver a plurality of successive layers of feed material over the platen, an energy source positioned above the platen to fuse at least a portion of an outermost layer of feed material, and a coolant fluid dispenser to deliver a coolant fluid onto the outermost layer of feed material after at least a portion of the outermost layer has been fused.

公开(公告)号：US20210114106A1

公开(公告)日：2021-04-22

申请号：US17131639

申请日：2020-12-22

Applicant: Applied Materials, Inc.

Inventor： Hou T. Ng ,  Nag B. Patibandla ,  Ajey M. Joshi ,  Bharath Swaminathan ,  Ashavani Kumar ,  Eric Ng ,  Bernard Frey ,  Kasiraman Krishnan

IPC: B22F10/00 ,  B33Y10/00 ,  B29C64/153 ,  B33Y50/02 ,  B22F1/00

Abstract: Additive manufacturing includes successively forming a plurality of layers on a support. Depositing a layer from the plurality of layers includes dispensing first particles, selectively dispensing second particles in selected regions corresponding to a surface of the object, and fusing at least a portion of the layer. The layer has the first particles throughout and the second particles in the selected regions. Alternatively or in addition, forming the plurality of layers includes depositing multiple groups of layers. Depositing a group of layers includes, for each layer in the group of layers dispensing a feed material to provide the layer, and after dispensing the feed material and before dispensing a subsequent layer fusing a selected portion of the layer. After all layers in the group of layers are dispensed, a volume of the group of layers that extends through all the layers in the group of layers is fused.

公开(公告)号：US20210054222A1

公开(公告)日：2021-02-25

申请号：US16996744

申请日：2020-08-18

Applicant: Applied Materials, Inc.

Inventor： Yingdong Luo ,  Sivapackia Ganapathiappan ,  Ashwin Murugappan Chockalingam ,  Daihua Zhang ,  Uma Sridhar ,  Daniel Redfield ,  Rajeev Bajaj ,  Nag B. Patibandla ,  Hou T. Ng ,  Sudhakar Madhusoodhanan

IPC: C09D11/107 ,  C09K3/14 ,  B24B37/24 ,  B33Y70/10 ,  B33Y80/00 ,  B33Y40/10 ,  B29C64/112 ,  B33Y10/00

Abstract: A formulation, system, and method for additive manufacturing of a polishing pad. The formulation includes monomer, dispersant, and nanoparticles. A method of preparing the formulation includes adding a dispersant that is a polyester derivative to monomer, adding metal-oxide nanoparticles to the monomer, and subjecting the monomer having the nanoparticles and dispersant to sonication to disperse the nanoparticles in the monomer.

公开(公告)号：US10821573B2

公开(公告)日：2020-11-03

申请号：US14887240

申请日：2015-10-19

Applicant: Applied Materials, Inc.

Inventor： Rajeev Bajaj ,  Daniel Redfield ,  Mahendra C. Orilall ,  Boyi Fu ,  Aniruddh Khanna ,  Jason G. Fung ,  Mario Cornejo ,  Ashwin Chockalingam ,  Mayu Yamamura ,  Veera Raghava Reddy Kakireddy ,  Ashavani Kumar ,  Venkat Hariharan ,  Gregory E. Menk ,  Fred C. Redeker ,  Nag B. Patibandla ,  Hou T. Ng ,  Robert E. Davenport ,  Amritanshu Sinha

IPC: B24B37/22 ,  B24B37/24 ,  B24D3/28 ,  B33Y80/00

Abstract: Embodiments of the present disclosure relate to advanced polishing pads with tunable chemical, material and structural properties, and new methods of manufacturing the same. According to one or more embodiments of the disclosure, it has been discovered that a polishing pad with improved properties may be produced by an additive manufacturing process, such as a three-dimensional (3D) printing process. Embodiments of the present disclosure thus may provide an advanced polishing pad that has discrete features and geometries, formed from at least two different materials that include functional polymers, functional oligomers, reactive diluents, and curing agents. For example, the advanced polishing pad may be formed from a plurality of polymeric layers, by the automated sequential deposition of at least one resin precursor composition followed by at least one curing step, wherein each layer may represent at least one polymer composition, and/or regions of different compositions.

公开(公告)号：US10800103B2

公开(公告)日：2020-10-13

申请号：US15811547

申请日：2017-11-13

Applicant: Applied Materials, Inc.

Inventor： Hou T. Ng ,  Nag B. Patibandla ,  Ajey M. Joshi ,  Raanan Zehavi ,  Jeffrey L. Franklin ,  Kashif Maqsood

IPC: B29C64/268 ,  B29C64/135 ,  B22F3/105 ,  B23K26/082 ,  B33Y10/00 ,  B28B1/00 ,  B33Y30/00 ,  B29C64/153 ,  B29C64/245 ,  B29C64/205 ,  B29C64/209 ,  B29C64/277 ,  B29C64/273 ,  G02B26/12 ,  G02B26/08 ,  B29C64/295

Abstract: An additive manufacturing apparatus includes a platform, a dispenser to dispense a plurality of layers of feed material on a top surface of the platform, and an energy delivery assembly. The energy delivery assembly includes a light source to emit one or more light beams, a first reflective member having a plurality of reflective facets, and at least one second reflective member. The first reflective member is rotatable such that sequential facets sweep the light beam sequentially along a path on the uppermost layer. The at least one second reflective member is movable such that the at least one second reflective surface is repositionable to receive at least one of the at least one light beam and redirect the at least one of at least one light beam along a two-dimensional path on the uppermost layer.

公开(公告)号：US10692923B2

公开(公告)日：2020-06-23

申请号：US16020692

申请日：2018-06-27

Applicant: Applied Materials, Inc.

Inventor： Mingwei Zhu ,  Sivapackia Ganapathiappan ,  Boyi Fu ,  Hou T. Ng ,  Nag B. Patibandla

IPC: H01L21/66 ,  H01L33/48 ,  H01L27/15 ,  H01L33/00 ,  H01L21/683 ,  H01L23/00 ,  H01L25/075

Abstract: An apparatus for positioning micro-devices on a substrate includes one or more supports to hold a donor substrate and a destination substrate, an adhesive dispenser to deliver adhesive on micro-devices on the donor substrate, a transfer device including a transfer surface to transfer the micro-devices from the donor substrate to the destination substrate, and a controller. The controller is configured to operate the adhesive dispenser to selectively dispense the adhesive onto selected micro-devices on the donor substrate based on a desired spacing of the selected micro-devices on the destination substrate. The controller is configured to operate the transfer device such that the transfer surface engages the adhesive on the donor substrate to cause the selected micro-devices to adhere to the transfer surface and the transfer surface then transfers the selected micro-devices from the donor substrate to the destination substrate.

公开(公告)号：US10399201B2

公开(公告)日：2019-09-03

申请号：US15296015

申请日：2016-10-17

Applicant: Applied Materials, Inc.

Inventor： Sivapackia Ganapathiappan ,  Boyi Fu ,  Ashwin Chockalingam ,  Daniel Redfield ,  Rajeev Bajaj ,  Mahendra C. Orilall ,  Hou T. Ng ,  Jason G. Fung ,  Mayu Yamamura

IPC: B24D3/28 ,  C09D4/00 ,  C09G1/16 ,  B24B37/22 ,  B24B37/24 ,  B24B37/26 ,  B24D11/00 ,  B24D11/04 ,  B33Y10/00 ,  B33Y80/00 ,  B29C64/112 ,  B29C35/08 ,  B29K33/04 ,  B33Y70/00

Abstract: Embodiments herein relate to advanced polishing pads with tunable chemical, material and structural properties, and manufacturing methods related thereto. According to one or more embodiments herein, a polishing pad with improved properties may be produced by an additive manufacturing process, such as a three-dimensional (3D) printing process. Embodiments herein thus may provide an advanced polishing pad having discrete features and geometries, formed from at least two different materials that include functional polymers, functional oligomers, reactive diluents, addition polymer precursor compounds, catalysts, and curing agents. For example, the advanced polishing pad may be formed from a plurality of polymeric layers, by the automated sequential deposition of at least one polymer precursor composition followed by at least one curing step, wherein each layer may represent at least one polymer composition, and/or regions of different compositions. Embodiments herein further provide a polishing pad with polymeric layers that may be interpenetrating polymer networks.

公开(公告)号：US10391707B2

公开(公告)日：2019-08-27

申请号：US15942116

申请日：2018-03-30

Applicant: Applied Materials, Inc.

Inventor： Hou T. Ng ,  Raanan Zehavi ,  Nag B. Patibandla

IPC: B29C67/00 ,  B29C64/153 ,  B33Y30/00 ,  B33Y50/02 ,  B29C64/386 ,  B29C64/20 ,  B29C64/336 ,  B29C64/264 ,  B29C64/205 ,  B29C64/165 ,  B29C64/295 ,  B29C64/209 ,  B29C64/307 ,  B22F3/105 ,  B33Y10/00 ,  B22F3/00 ,  B33Y70/00

Abstract: An additive manufacturing system includes a platen to support an object being manufactured, a dispenser to deliver a plurality of successive layers of a powder over the platen, and energy source configured to fuse at least a portion of the powder. The dispenser is configured to deliver the powder in a linear region that extends along a first axis. The dispenser and actuator are supported by a support structure, and the actuator is coupled to the support structure to move the support structure along a second axis perpendicular to the first axis such that the dispenser and energy source move as a single unit with the support structure and the linear region sweeps along the second axis to deposit the powder along a swath over the platen to form a layer of powder.

公开(公告)号：US10384265B2

公开(公告)日：2019-08-20

申请号：US15186277

申请日：2016-06-17

Applicant: Applied Materials, Inc.

Inventor： Bharath Swaminathan ,  Ajey M. Joshi ,  Nag B. Patibandla ,  Hou T. Ng ,  Ashavani Kumar ,  Eric Ng ,  Bernard Frey ,  Kasiraman Krishnan

IPC: B22F3/105 ,  B33Y30/00 ,  B23K26/16 ,  B22F3/10 ,  B23K26/342 ,  B33Y10/00 ,  B33Y50/02 ,  B29C64/153 ,  B23K103/04 ,  B23K103/08 ,  B23K103/14 ,  B23K103/18 ,  B29C64/245

Abstract: A method of additive manufacturing include delivering at least one layer by either depositing a uniform layer of powder on a support and then removing a portion of the layer with a roller with a surface having spatially controlled electrostatic charge, or by depositing powder onto the surface of the roller and moving the roller relative to a support such that the spatially controllable electrostatic charge on the surface of the roller causes transfer of a corresponding portion of the powder from the roller onto the support or an underlying layer.