公开(公告)号：US07215115B2

公开(公告)日：2007-05-08

申请号：US11132178

申请日：2005-05-19

申请人： Masashi Saito ,  Youichi Nakano ,  Hayato Sugawara ,  Hiroaki Saeki

发明人： Masashi Saito ,  Youichi Nakano ,  Hayato Sugawara ,  Hiroaki Saeki

IPC分类号： G01B7/30 ,  H01L43/08

CPC分类号： G01D3/0365 ,  F16H59/70 ,  F16H61/0003 ,  F16H61/32 ,  F16H63/304 ,  F16H2063/005 ,  G01D5/145 ,  G01D11/245 ,  G01D18/00 ,  H02K7/1166 ,  H02K11/21 ,  H02K11/38 ,  Y10T74/19251

摘要： A sensor and a control circuit are provided externally of a gear cover. This enhances reliability of a shift controller operated by an electric actuator and a motor driven control module similar thereto, and constitute them compact. Further, this provides a rotating position detection sensor suitably used for a switching device as described. A circuit and a sensor are not contaminated with oil or metal powder of a gear mechanism portion.

摘要翻译： 传感器和控制电路设置在齿轮罩的外部。 这增强了由与其类似的电动致动器和电动机驱动的控制模块操作的变速控制器的可靠性，并且构成它们。 此外，这提供了适用于所述的开关装置的旋转位置检测传感器。 电路和传感器不会被齿轮机构部分的油或金属粉末污染。

公开(公告)号：US07167805B2

公开(公告)日：2007-01-23

申请号：US10534709

申请日：2003-11-13

申请人： Hiroaki Saeki ,  Toshio Kamigaki

发明人： Hiroaki Saeki ,  Toshio Kamigaki

IPC分类号： G01P21/00 ,  G06F19/00

CPC分类号： B62D57/032 ,  B25J9/1692 ,  B25J19/021 ,  H01L21/67766 ,  H01L21/681

摘要： Disclosed herein is a conveying mechanism disposed in a conveying vessel which includes: a moving member which can move in a horizontal moving direction; a rotary table attached to the moving member such that the rotary table can turn in a horizontal turning direction and move in the vertical direction; and two arm mechanisms which can bend and stretch in a horizontal operating direction relative to the rotary table. Also disclosed herein is a reference position correcting device for the conveying mechanism and methods of correcting reference positions of the conveying mechanism. The reference position correcting device includes: a light emitter for emitting a sensing light beam; a light detector for receiving the sensing light beam; and a correcting device.

摘要翻译： 这里公开了一种设置在输送容器中的输送机构，其包括：能够沿水平移动方向移动的移动部件; 旋转工作台，其附接到所述移动构件，使得所述旋转台可以在水平转动方向上转动并沿垂直方向移动; 以及能够相对于旋转台在水平操作方向上弯曲和拉伸的两个臂机构。 这里还公开了用于输送机构的基准位置校正装置和校正输送机构的基准位置的方法。 参考位置校正装置包括：用于发射感测光束的光发射器; 用于接收感测光束的光检测器; 和校正装置。

公开(公告)号：US06510365B1

公开(公告)日：2003-01-21

申请号：US09830363

申请日：2001-04-25

申请人： Yasuhiko Nishinakayama ,  Shigeru Ishizawa ,  Hiroaki Saeki ,  Takashi Kawano ,  Tetsu Osawa

发明人： Yasuhiko Nishinakayama ,  Shigeru Ishizawa ,  Hiroaki Saeki ,  Takashi Kawano ,  Tetsu Osawa

IPC分类号： G06F700

CPC分类号： H01L21/681 ,  G05B19/4015 ,  G05B19/402 ,  G05B2219/37339 ,  G05B2219/45031 ,  G05B2219/49299 ,  H01L21/67745 ,  Y10S414/136

摘要： The invention is a method for positioning a conveying mechanism having a holding portion for semiconductor wafers. Respective provisional position coordinates of an orienting teaching standard position and a container teaching standard positions are inputted into a controlling unit in advance. A wafer to be conveyed precisely positioned with respect to and held by the holding portion is conveyed and placed on the rotating orienting device according a control based on the provisional coordinates of the orienting teaching standard position. A posture detector then detects the eccentric volume and eccentric direction of the wafer. Appropriate position coordinates are made by amending the provisional coordinates. Then, a wafer to be conveyed precisely positioned with respect to the container teaching standard position is conveyed and placed on the rotating orienting device according a control based on the provisional coordinates of the orienting teaching standard position. A posture detector then detects the eccentric volume and eccentric direction of the wafer. Appropriate position coordinates are made by amending the provisional coordinates.

摘要翻译： 本发明是用于定位具有用于半导体晶片的保持部分的输送机构的方法。 定向教学标准位置和容器教学标准位置的各个临时位置坐标被预先输入到控制单元中。 根据定向教学标准位置的临时坐标的控制，将要被输送的精确定位的晶片相对于保持部分保持并被放置在旋转定向装置上。 然后姿势检测器检测晶片的偏心体积和偏心方向。 通过修改临时坐标来进行适当的位置坐标。 然后，基于定向教学标准位置的临时坐标的控制，将要相对于容器教导标准位置精确定位的晶片输送并放置在旋转取向装置上。 然后姿势检测器检测晶片的偏心体积和偏心方向。 通过修改临时坐标来进行适当的位置坐标。

公开(公告)号：US06450757B1

公开(公告)日：2002-09-17

申请号：US09856097

申请日：2001-05-17

申请人： Hiroaki Saeki ,  Keisuke Kondoh

发明人： Hiroaki Saeki ,  Keisuke Kondoh

IPC分类号： B25J906

CPC分类号： H01L21/687 ,  B25J9/1065 ,  B25J9/107 ,  H01L21/67742 ,  Y10S414/13 ,  Y10T74/20305 ,  Y10T74/20329

摘要： In most cases, a hot, corrosive atmosphere is created in, for example, a semiconductor wafer processing chamber. When an arm including belts, such as steel belts, is moved into such a semiconductor wafer processing chamber, the belts are exposed to the hot, corrosive atmosphere. Belts, such as steel belts, have limited heat resistance and corrosion resistance and the hot, corrosive atmosphere in the processing chamber shortens the life of the belts. A carrying device of the present invention has a frog leg type arm (3) and a wafer holder (4) connected to the frog leg type arm (3). The wafer holder (4) is pivotally connected to front end parts of a first front arm (8A) and a second front arm (8B) by coaxial joints (10). The wafer holder (4) is linked to the first front arm (8A) and the second front arm (8B) by a posture maintaining linkage (5) including two antiparallel linkages capable of controlling the turning of the wafer holder (4) relative to the first and the second front arms (8A, 8B).

摘要翻译： 在大多数情况下，在例如半导体晶片处理室中产生热的腐蚀性气体。 当包括诸如钢带的带的臂移动到这种半导体晶片处理室中时，带暴露于热的腐蚀性气氛中。 皮带，如钢带，具有有限的耐热性和耐腐蚀性，加工室内的热腐蚀性气氛缩短了皮带的使用寿命。 本发明的携带装置具有连接到青蛙腿型臂（3）的蛙腿式臂（3）和晶片保持架（4）。 晶片保持架（4）通过同轴接头（10）枢转地连接到第一前臂（8A）和第二前臂（8B）的前端部分。 晶片保持器（4）通过包括两个能够控制晶片保持器（4）的相对转动的两个反平行连杆的姿态保持连杆（5）连接到第一前臂（8A）和第二前臂（8B） 第一和第二前臂（8A，8B）。

公开(公告)号：US06338626B1

公开(公告)日：2002-01-15

申请号：US09508269

申请日：2000-08-10

申请人： Hiroaki Saeki

发明人： Hiroaki Saeki

IPC分类号： F27D312

CPC分类号： H01L21/67748 ,  H01L21/67161 ,  H01L21/67201 ,  H01L21/67751

摘要： A load-lock mechanism according to the invention comprises a vacuum chamber 31 arranged between a vacuum first transferring chamber 20 and atmospheric second transferring chambers 40. The vacuum chamber 31 has a first opening 31A facing the first transferring chamber 20, a vertical pair of second openings 31B facing the second transferring chambers 40 and open-close mechanisms 34A, 34B to open and close each of the second opening 31B. One vertical pair of load-lock chambers 32, 33 are movably housed in the vacuum chamber 31. The supply-discharge passageways 31G, 31H are provided in the vacuum chamber 31 to supply and discharge air into and out of each of the load-lock chambers 32, 33. Each of the load-lock chamber 32, 33 has a first port 32A, 33A which can communicate with the first opening 31A, a second port 32B, 33B which can communicate with the corresponding second opening 31B. The inside of each of the load-lock chambers 32, 33 are shut off from the inside of the vacuum chamber 31 when the second port 32B, 33B communicates with the second opening 31B.

摘要翻译： 根据本发明的装载锁定机构包括设置在真空第一传送室20和大气第二传送室40之间的真空室31.真空室31具有面向第一传送室20的第一开口31A， 开口31B面对第二传送室40和打开 - 关闭机构34A，34B，以打开和关闭每个第二开口31B。 一对垂直的负载锁定室32,33可移动地容纳在真空室31中。供给排放通道31G，31H设置在真空室31中，以将空气进出每个负载锁 每个装载锁定室32,33都具有能够与第一开口31A连通的第一端口32A，33A，与相应的第二开口31B连通的第二端口32B，33B。 当第二端口32B，33B与第二开口31B连通时，每个负载锁定室32,33的内部从真空室31的内部切断。

公开(公告)号：US5484013A

公开(公告)日：1996-01-16

申请号：US246796

申请日：1994-05-20

申请人： Fumihiro Morikawa ,  Hiroaki Saeki

发明人： Fumihiro Morikawa ,  Hiroaki Saeki

IPC分类号： H01L23/467 ,  F28F7/00 ,  F28F13/12

CPC分类号： H01L23/467 ,  H01L2924/0002

摘要： A heat sink fan has a fan motor provided with blades, a rectangular upper casing for holding the fan motor, and a rectangular lower casing fixed to the upper casing. The lower casing has a bottom portion and fin dissipating fins erected perpendicularly from the four side edges of the bottom portion. The upper and lower casings are fixed together by a mechanically interlocking mechanism consisting of a combination of pawls and pawl receiving portions, a combination of projections each having an inflated portion and cavities or a combination of hooks and engaging grooves formed or in the upper or lower casing. Fin portions are formed on the whole area or the area except for the fan motor and the blades to increase a heat dissipating efficiency.

摘要翻译： 散热风扇具有设置有叶片的风扇电动机，用于保持风扇电动机的矩形上壳体和固定在上壳体上的矩形下壳体。 下壳体具有从底部的四个侧边缘竖直竖立的底部部分和散热片散热片。 上壳体和下壳体通过由棘爪和棘爪接收部分的组合构成的机械互锁机构固定在一起，每个凸起的组合具有充气部分和空腔，或者组合的钩和接合槽，所述凸起形成在上部或下部 套管。 翅片部分形成在除了风扇马达和叶片之外的整个区域或区域上以提高散热效率。

公开(公告)号：US20120204837A1

公开(公告)日：2012-08-16

申请号：US13028616

申请日：2011-02-16

申请人： William T. Harvey ,  Steven J. Miller ,  Hiroaki Saeki

发明人： William T. Harvey ,  Steven J. Miller ,  Hiroaki Saeki

IPC分类号： F02M61/14 ,  F02M55/02

CPC分类号： F02M55/02 ,  F02M61/14

摘要： A fuel injector assembly for use with an engine block of a direct injection engine. The fuel injector assembly includes an elongated tubular fuel rail which is fluidly connected to a high pressure fuel source. At least two fuel cups are attached to and extend downwardly from the fuel rail and each fuel cup is adapted to receive one fuel injector. First fasteners attach a bracket to the engine block while second fasteners attach the bracket to the fuel rail. These second fasteners, furthermore, are positioned so that the second fasteners are coplanar with a plane extending through a longitudinal axis of each fuel injector.

摘要翻译： 一种用于直喷式发动机的发动机缸体的燃料喷射器组件。 燃料喷射器组件包括细长的管状燃料轨道，其流体地连接到高压燃料源。 至少两个燃料杯连接到燃料轨道并从燃料轨道向下延伸，并且每个燃料杯适于容纳一个燃料喷射器。 第一紧固件将支架连接到发动机缸体，而第二紧固件将支架连接到燃料轨。 此外，这些第二紧固件被定位成使得第二紧固件与延伸穿过每个燃料喷射器的纵向轴线的平面共面。

公开(公告)号：US07279067B2

公开(公告)日：2007-10-09

申请号：US10503940

申请日：2003-02-17

申请人： Tetsuo Yoshida ,  Yoshiaki Sasaki ,  Hiroaki Saeki ,  Yasushi Taniyama ,  Hiroshi Takizawa

发明人： Tetsuo Yoshida ,  Yoshiaki Sasaki ,  Hiroaki Saeki ,  Yasushi Taniyama ,  Hiroshi Takizawa

IPC分类号： C23F1/00 ,  H01L21/306 ,  C23C16/00 ,  B65G49/07

CPC分类号： H01L21/67017 ,  H01L21/67772 ,  Y10S414/135 ,  Y10S414/137

摘要： In a port structure 16A in a semiconductor processing system 2, a door 20A is disposed in a port 12A defined by upright wall 52 and 54. A table 48 opposed to the port is disposed outside the system. Defined on the table is a mount region 76 for mounting an open type cassette 18A for a process subject substrate W. A hood 50 is disposed rotatable relative to the table. The hood defines in its closed position a closed space surrounding the mount region and port, the space having a size to receive the cassette. First ventholes 58 are formed in the upright walls and/or the door so as to introduce gas from within the system into the closed space in the hood. Second ventholes 72 are formed in the table so as to discharge the gas can be discharged out of the closed space.

摘要翻译： 在半导体处理系统2中的端口结构16A中，门20A设置在由直立壁52和54限定的端口12A中。 与该端口相对的一个表48设置在系统外部。 在桌子上定义的是安装区域76，用于安装用于处理对象衬底W的打开型盒18A。罩50可相对于桌子旋转设置。 罩在其关闭位置限定围绕安装区域和端口的封闭空间，该空间具有用于容纳盒的尺寸。 第一通气孔58形成在直立壁和/或门中，以将来自系统内的气体引入罩内的封闭空间。 第二通气孔72形成在工作台中，以便排出气体可以排出封闭空间。

公开(公告)号：US20070107845A1

公开(公告)日：2007-05-17

申请号：US11623573

申请日：2007-01-16

申请人： Shigeru Ishizawa ,  Hiroaki Saeki ,  Yoshimitsu Tamura ,  Shigetoshi Hosaka ,  Masahide Itoh ,  Kazushi Tahara ,  Yasushi Kodashima

发明人： Shigeru Ishizawa ,  Hiroaki Saeki ,  Yoshimitsu Tamura ,  Shigetoshi Hosaka ,  Masahide Itoh ,  Kazushi Tahara ,  Yasushi Kodashima

IPC分类号： C23F1/00 ,  H01L21/306 ,  C23C16/00

CPC分类号： H01L21/67751 ,  H01L21/67109 ,  H01L21/67115 ,  H01L21/67184 ,  H01L21/67201

摘要： A semiconductor processing system includes an intermediate structure disposed between an atmospheric pressure entrance transfer chamber and a vacuum common transfer chamber. The intermediate structure includes a transfer passage for a target substrate to pass therein. The transfer passage includes a first buffer chamber a middle transfer chamber and a second buffer chamber detachably connected. An additional processing apparatus is detachably connected to the middle transfer chamber. The intermediate structure is selectively arranged in first or second state. In the first state, the additional processing apparatus performs a vacuum process, while the first buffer chamber is a load-lock chamber. In the second state, the additional processing apparatus performs an atmospheric pressure process, while the second buffer chamber is a load-lock chamber.

摘要翻译： 半导体处理系统包括设置在大气压入口传送室和真空公共传送室之间的中间结构。 中间结构包括用于目标基板的传送通道。 传送通道包括第一缓冲室，中间传送室和可拆卸地连接的第二缓冲室。 附加处理装置可拆卸地连接到中间传送室。 中间结构选择性地布置在第一或第二状态。 在第一状态下，附加处理装置执行真空处理，而第一缓冲室是装载锁定室。 在第二状态下，附加处理装置进行大气压处理，而第二缓冲室是装载锁定室。

公开(公告)号：US07093426B2

公开(公告)日：2006-08-22

申请号：US10621619

申请日：2003-07-18

申请人： Takanobu Ichihara ,  Masami Nagano ,  Kozo Katogi ,  Hiroaki Saeki

发明人： Takanobu Ichihara ,  Masami Nagano ,  Kozo Katogi ,  Hiroaki Saeki

IPC分类号： F01N3/00

CPC分类号： F02D41/3094 ,  F02D9/02 ,  F02D31/005 ,  F02D41/0255 ,  F02D41/064 ,  F02D41/067 ,  F02D41/32 ,  F02M31/135 ,  F02M69/325 ,  F02N11/0818 ,  Y02T10/126 ,  Y02T10/26

摘要： To improve startability and reduce the amount of HC emission at start-up with the aid of a construction where vaporized fuel is supplied to the bypass passage that bypasses the main passage.The main air control valve 16 is installed near the intake port 10 of the main air passage 3, and the main air control valve is closed or throttled at the time of start-up or additional injection from the port injection valve 5 is given in the beginning of start-up cranking. With a apparatus equipped with the main air control valve, vaporization of the fuel injected from the auxiliary injection valve 6 is facilitated in the beginning of cranking and also intake delay of the vaporized fuel is reduced, and hence startability can improve and the amount of HC emission at the time of start-up can decrease. With a apparatus where additional injection is given from the port injection valve 5 in the beginning of cranking, fuel supply into the cylinder is achieved quickly, and hence startability can improve and the amount of HC emission at the time of start-up can decrease.

摘要翻译： 借助于将旁路通道的旁通通道供给汽化燃料的结构，来提高起动性并减少启动时HC排放量。 主空气控制阀16安装在主空气通道3的进气口10附近，并且在启动时关闭或节流主空气控制阀，或者从喷油阀5向喷油阀5提供附加喷射 开始启动起动。 使用装备有主空气控制阀的装置，在起动开始时便于从辅助喷射阀6喷射的燃料的蒸发，并且还减少汽化燃料的进气延迟，因此可以提高启动能力和HC的量 启动时的排放可能会下降。 利用在启动开始时从端口喷射阀5进行附加喷射的装置，能够快速地实现向气缸的供给，从而可以提高启动性，并且能够降低启动时的HC排放量。