Plasma processing apparatus
    43.
    发明授权
    Plasma processing apparatus 失效
    等离子体处理装置

    公开(公告)号:US06755935B2

    公开(公告)日:2004-06-29

    申请号:US09793443

    申请日:2001-02-27

    IPC分类号: H01L213065

    CPC分类号: H01J37/32082 H01J37/32541

    摘要: A plasma processing apparatus has a vacuum vessel, a processing chamber arranged in the vacuum vessel and supplied with gas, a support electrode arranged in the processing chamber to support an object to be processed, a radio frequency providing unit for supplying a radio frequency in UHF or VHF band, and a magnetic field generating unit for generating a magnetic field in the processing chamber, wherein the radio frequency providing unit includes an antenna having a groove or step formed in its surface opposing the process object, whereby plasma of high density and high uniformity can be generated in a wide parameter region.

    摘要翻译: 等离子体处理装置具有真空容器,设置在真空容器中并供给气体的处理室,布置在处理室中的支撑电极,以支撑被处理物体;射频提供单元,用于在UHF中提供射频 或VHF频带,以及用于在处理室中产生磁场的磁场产生单元,其中所述射频提供单元包括在其与所述处理对象相对的表面中形成有凹槽或台阶的天线,由此形成高密度和高的等离子体 可以在宽参数区域中产生均匀性。

    Electronic device and docking system and power control system therefor
    44.
    发明授权
    Electronic device and docking system and power control system therefor 失效
    电子设备和对接系统及其电源控制系统

    公开(公告)号:US06629182B1

    公开(公告)日:2003-09-30

    申请号:US09122325

    申请日:1998-07-24

    IPC分类号: G06F100

    摘要: In an electronic device capable of being driven on a battery, there is provided a docking system configuration in which a docking unit mainly serving as an extension can be attached/detached to/from a master unit by using a system bus as a bridge. The docking unit is adapted to operate alone upon start-up of a power source even while being detached from the master unit. In each of the master unit and the docking unit, detection is made for whether the units are docked each other and for whether a residual capacity of a driving battery in steps is decreased. When it is detected that the residual capacity of the driving battery is decreased, either of operation suspending processing or operation end processing is selectively executed.

    摘要翻译: 在能够在电池上驱动的电子设备中,提供了一种对接系统配置,其中主要用作扩展的对接单元可以通过使用系统总线作为桥连接/从主单元分离。 对接单元适于在启动电源时单独操作,即使在与主单元分离时也是如此。 在主单元和对接单元中的每一个中,检测单元是否彼此对接,以及是否减少了步进的驱动电池的剩余容量。 当检测到驱动电池的剩余容量减小时,选择性地执行操作暂停处理或操作结束处理中的任一个。

    Plasma processing equipment and plasma processing method using the same
    45.
    发明授权
    Plasma processing equipment and plasma processing method using the same 失效
    等离子体处理设备和等离子体处理方法使用相同

    公开(公告)号:US06624084B2

    公开(公告)日:2003-09-23

    申请号:US09741996

    申请日:2000-12-22

    IPC分类号: H01L2100

    摘要: In plasma processing equipment having a vacuum processing chamber, a plasma generation means, a stage for loading a wafer to be processed in the vacuum processing chamber, an opposing electrode having an area almost equal to or wider than the aforementioned wafer which is installed opposite to the stage, and a bias power source for applying a high frequency bias to the wafer, a current path correction means is provided for correcting the current path part in the neighborhood of the outer periphery of the wafer among the high frequency current paths produced by the high frequency bias so as to be directed toward the wafer opposing surface of the opposing electrode.

    摘要翻译: 在具有真空处理室的等离子体处理设备中,等离子体产生装置,用于在真空处理室中装载待处理的晶片的阶段,具有几乎等于或大于上述晶片的面积的对置电极, 该级和用于向晶片施加高频偏压的偏压电源,提供电流路径校正装置,用于校正由该晶体管产生的高频电流路径中的晶片外周附近的电流路径部分 高频偏压以指向相对电极的晶片相对表面。

    Image forming apparatus having an improved developer-supplying mechanism and method thereof
    48.
    发明授权
    Image forming apparatus having an improved developer-supplying mechanism and method thereof 有权
    一种用于具有改进的显影剂供应机构的图像形成装置中的显影剂容器

    公开(公告)号:US06336020B1

    公开(公告)日:2002-01-01

    申请号:US09576440

    申请日:2000-05-22

    IPC分类号: G03G1501

    摘要: A developer container for use in an image forming apparatus including a supporting member rotating around a rotation shaft thereof. A plurality of developing devices are arranged on the supporting member, each developing device including a developer supplying device. A plurality of cylindrically-shaped developer containers containing developer are provided, each developer container having an opening and a guide, and each developer container being detachably mounted on the developer supplying device. A container rotating device rotates the developer container, in which the guide is arranged that when one of the developing devices needs to be filled with the developer, the container rotating device rotates the developer container to transfer the developer in the developer container to the opening in accordance with a rotating movement of the developer container.

    摘要翻译: 一种用于图像形成装置的显影剂容器,包括围绕其旋转轴旋转的支撑构件。 在支撑构件上布置有多个显影装置,每个显影装置包括显影剂供应装置。 提供了多个包含显影剂的圆筒状显影剂容器,每个显影剂容器具有开口和引导件,并且每个显影剂容器可拆卸地安装在显影剂供应装置上。 容器旋转装置旋转显影剂容器,其中布置引导件,当显影装置中的一个需要用显影剂填充时,容器旋转装置旋转显影剂容器以将显影剂容器中的显影剂转移到开口中 根据显影剂容器的旋转运动。

    Cleaning roll material and fixing apparatus
    50.
    发明授权
    Cleaning roll material and fixing apparatus 失效
    清洁滚动材料和固定装置

    公开(公告)号:US5218410A

    公开(公告)日:1993-06-08

    申请号:US767470

    申请日:1991-09-30

    CPC分类号: G03G15/2025

    摘要: In order to reliably clean a thermal fixing roll for fixing a non-fixed image in an image forming apparatus such as a copier or a laser beam printer, a non-woven fabric web having a crisscross structure or a parallel structure with a thermally bonded fiber sheet is disposed at least on the side in contact with the fixing roll. The thermally bonded fiber sheet comprises composite fibers including 5 to 70% by weight of electroless nickel plated `CONEX` fibers, which is obtained by depositing metallic nickel to a thickness of up to and including 0.2 .mu.m by an electroless plating method on `CONEX` fibers which have the surface formed with stripe-like grooves, macrovoids, fine irregularities or a modified cross-section and is heat-resistant and excellent in adhesion for nickel, in addition to non-plated `CONEX` fibers and undrawn polyester fibers. Preferably, the above non-fabric web is impregnated with a heat-resistant cationic charging agent as a cleaning roll material.