Sensor for detecting bubbles in a liquid flowing through a flow path
    41.
    发明授权
    Sensor for detecting bubbles in a liquid flowing through a flow path 有权
    用于检测流过流路的液体中的气泡的传感器

    公开(公告)号:US08794081B2

    公开(公告)日:2014-08-05

    申请号:US13203801

    申请日:2010-03-03

    IPC分类号: G01F13/00 G01F1/68

    摘要: A sensor for detecting bubbles in gas phase present in a liquid flowing through a flow path. The sensor can include a heating element for heating the liquid, which can be provided with a predetermined level of power at least during detecting, and a transducer arrangement arranged for generating a measurement signal indicative for the temperature of the heating element. The sensor furthermore can include a comparator arrangement for comparing a measurement value of the measurement signal with a predetermined threshold level, which can correspond to a reference temperature attainable by the heating element in response to the predetermined level of power and a minimum velocity attainable by the liquid in the flow path. Based on the latter comparison, the comparator arrangement can generate an output signal indicative for a possible presence of bubbles in gas phase.

    摘要翻译: 用于检测存在于流过流路的液体中的气相中的气泡的传感器。 传感器可以包括用于加热液体的加热元件,其至少在检测期间可以被提供预定水平的功率;以及换能器布置,其布置成产生指示加热元件的温度的测量信号。 此外,传感器还可以包括比较器装置,用于将测量信号的测量值与预定阈值电平进行比较,该预定阈值电平可以对应于由加热元件响应于预定功率水平而可达到的参考温度,以及可由 流动路径中的液体。 基于后一比较,比较器装置可以产生指示在气相中可能存在气泡的输出信号。

    Three-dimensional projection device
    43.
    发明授权
    Three-dimensional projection device 有权
    三维投影装置

    公开(公告)号:US08602561B2

    公开(公告)日:2013-12-10

    申请号:US13228684

    申请日:2011-09-09

    IPC分类号: G02B27/26

    摘要: An image projection system having a laser projector that projects two differently polarized images on a display region is disclosed. The laser projector enables viewing the two differently polarized images as a three-dimensional image. The image projection system includes a planar lightwave circuit-based beam combiner that enables multiple colors of laser light having different polarization modes to be combined in a single output beam that is scanned over the display region at video rates to produce the two polarized images.

    摘要翻译: 公开了一种具有在显示区域上投影两个不同偏振图像的激光投影仪的图像投影系统。 激光投影机可以将两个不同偏振的图像视为三维图像。 图像投影系统包括基于平面光波电路的光束组合器,其能够将具有不同偏振模式的多种激光的颜色组合在以视频速率在显示区域上扫描以产生两个偏振图像的单个输出光束中。

    SPECTRAL PURITY FILTER, LITHOGRAPHIC APPARATUS, AND METHOD FOR MANUFACTURING A SPECTRAL PURITY FILTER
    45.
    发明申请
    SPECTRAL PURITY FILTER, LITHOGRAPHIC APPARATUS, AND METHOD FOR MANUFACTURING A SPECTRAL PURITY FILTER 有权
    光谱滤光片,光刻设备和制造光谱滤光片的方法

    公开(公告)号:US20120154778A1

    公开(公告)日:2012-06-21

    申请号:US13392434

    申请日:2010-07-21

    IPC分类号: F21V9/06 B29D11/00 G03B27/72

    摘要: A method of forming a spectral purity filter having a plurality of apertures configured to transmit extreme ultraviolet radiation and suppress transmission of a second type of radiation, in which trenches are formed in a base material in a pattern corresponding to the walls to be formed between the apertures. The trenches are filled with a grid material to form walls of the grid material, and the base material is selectively removed until the grid material is exposed and forms the spaces between the walls of the grid material for the apertures.

    摘要翻译: 一种形成光谱纯度滤光片的方法,该光谱纯度滤光器具有多个孔,其被配置为透射极紫外辐射并抑制第二类型辐射的透射,其中沟槽以对应于待形成的壁之间的壁的图案形成在基材中 孔。 沟槽填充有栅格材料以形成栅格材料的壁,并且选择性地去除基底材料,直到栅格材料暴露并且在孔的栅格材料的壁之间形成空间。

    SENSOR FOR DETECTING BUBBLES IN A LIQUID FLOWING THROUGH A FLOW PATH
    48.
    发明申请
    SENSOR FOR DETECTING BUBBLES IN A LIQUID FLOWING THROUGH A FLOW PATH 有权
    用于检测通过流动路径流动的液体中的泡沫的传感器

    公开(公告)号:US20110308328A1

    公开(公告)日:2011-12-22

    申请号:US13203801

    申请日:2010-03-03

    IPC分类号: G01F13/00

    摘要: The invention relates to a sensor (102, 202, 402, 502) for detecting bubbles in gas phase present in a liquid (208, 408, 527) flowing through a flow path (204, 406, 508). The sensor comprises a heating element (106, 210) for heating the liquid, which heating element is provided with a predetermined level of power at least during detecting, and a transducer arrangement (108, 112, 212) arranged for generating a measurement signal (114) indicative for the temperature of the heating element. The sensor furthermore comprises a comparator arrangement (116) for comparing a measurement value of the measurement signal with a predetermined threshold level, which predetermined threshold level corresponds to a reference temperature attainable by the heating element in response to said predetermined level of power and a minimum velocity attainable by the liquid in the flow path. Based on the latter comparison, the comparator arrangement generates an output signal (118) indicative for a possible presence of bubbles in gas phase.

    摘要翻译: 本发明涉及一种用于检测存在于流过流路(204,406,508)的液体(208,408,527)中的气相中的气泡的传感器(102,202,402,502)。 传感器包括用于加热液体的加热元件(106,210),所述加热元件至少在检测期间被提供有预定水平的功率;以及换能器布置(108,112,212),其布置成用于产生测量信号 114),其指示加热元件的温度。 该传感器还包括比较器装置(116),用于将测量信号的测量值与预定阈值电平进行比较,该预定阈值电平响应于所述预定功率水平而对应于由加热元件可达到的参考温度,并且最小值 通过流路中的液体可获得的速度。 基于后一种比较,比较器装置产生指示气相中可能存在气泡的输出信号(118)。