公开(公告)号：US06779878B2

公开(公告)日：2004-08-24

申请号：US10314418

申请日：2002-12-09

申请人： Takamitsu Higuchi ,  Setsuya Iwashita ,  Koji Sumi ,  Masami Murai

发明人： Takamitsu Higuchi ,  Setsuya Iwashita ,  Koji Sumi ,  Masami Murai

IPC分类号： B41J2045

CPC分类号： B41J2/14233 ,  B41J2/161 ,  B41J2/1628 ,  B41J2/1634 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2202/03 ,  H01L41/0477 ,  H01L41/0815 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/318

摘要： The present invention provides an optimum layer structure for a piezoelectric actuator in which (100) orientation strontium ruthenate is used as a bottom electrode. The piezoelectric actuator comprises a Si substrate 20, a diaphragm 30 comprising (110) or (100) orientation strontium oxide which is formed thereon by way of epitaxial growth, a bottom electrode 42 comprising (100) orientation strontium ruthenate having a perovskite structure, a piezoelectric layer 43 comprising (100) orientation PZT, and a top electrode 44.

摘要翻译： 本发明提供一种用于压电致动器的最佳层结构，其中（100）取向的钌酸锶用作底部电极。 压电致动器包括Si衬底20，包括通过外延生长在其上形成的（110）或（100）取向氧化锶的隔膜30，包括具有钙钛矿结构的（100）取向钌酸锶的底部电极42， 包括（100）取向PZT的压电层43和顶部电极44。

公开(公告)号：US4718751A

公开(公告)日：1988-01-12

申请号：US798089

申请日：1985-11-14

申请人： Koichi Kamijo ,  Yukihiro Iwashita ,  Koji Sumi

发明人： Koichi Kamijo ,  Yukihiro Iwashita ,  Koji Sumi

IPC分类号： G02F1/1343 ,  G02F1/13

CPC分类号： G02F1/13439 ,  Y10S359/90

摘要： An optical panel having superior environment resisting properties is provided. An increase in electrical resistance is prevented by heat treating the electrode in a vacuum at a temperature between about 200.degree. and 600.degree. C. Electrolytic corrosion resistance of the panel is provided by coating at least the non-conductive portions of the terminal portions of the panel with a water-repellant material.

摘要翻译： 提供了具有优异的耐环境性能的光学面板。 通过在约200℃至600℃的温度下在真空中对电极进行热处理来防止电阻的增加。面板的电解腐蚀性是通过涂覆至少不相同的 面板具有防水材料。

公开(公告)号：US07757362B2

公开(公告)日：2010-07-20

申请号：US12167930

申请日：2008-07-03

申请人： Akira Kuriki ,  Koji Sumi ,  Hironobu Kazama ,  Motoki Takabe ,  Motohisa Noguchi

发明人： Akira Kuriki ,  Koji Sumi ,  Hironobu Kazama ,  Motoki Takabe ,  Motohisa Noguchi

IPC分类号： H01L41/22 ,  H04R17/00

CPC分类号： H01L41/318 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2/1632 ,  B41J2/1646 ,  B41J2002/14241 ,  B41J2002/14419 ,  C23C18/1216 ,  C23C18/1283 ,  H01L41/0973 ,  H01L41/1876 ,  Y10T29/42 ,  Y10T29/435 ,  Y10T29/49155

摘要： A method for producing a dielectric film, comprising: a coating step of coating a colloidal solution containing an organometallic compound containing a metal constituting a dielectric film containing at least a lead component to form a dielectric precursor film; a drying step of drying the dielectric precursor film; a degreasing step of degreasing the dielectric precursor film; and a firing step of firing the dielectric precursor film to form a dielectric film, and wherein the drying step includes a first drying step of heating the dielectric precursor film to a temperature lower than the boiling point of a solvent, which is a main solvent of the material, and holding the dielectric precursor film at the temperature for a certain period of time to dry the dielectric precursor film, and a second drying step of drying the dielectric precursor film at a temperature in the range of 140° C., to 170° C., the degreasing step is performed at a degreasing temperature of 350° C. to 450° C. and at a heating-up rate of 15 [° C./sec] or higher, and the firing step is performed at a heating-up rate of 100 [° C./sec] to 150 [° C./sec].

摘要翻译： 一种电介质膜的制造方法，其特征在于，包括：涂布包含含有构成含有至少含有铅成分的电介质膜的金属的有机金属化合物的胶体溶液以形成电介质前体膜的涂布步骤; 干燥所述电介质前体膜的干燥步骤; 脱脂步骤，使所述电介质前体膜脱脂; 以及烧制电介质前体膜以形成电介质膜的烧制步骤，其中干燥步骤包括将电介质前体膜加热至低于作为主要溶剂的溶剂的沸点的温度的第一干燥步骤 并且将介电前体膜在该温度下保持一定时间以干燥电介质前体膜;以及第二干燥步骤，在140℃的温度下将电介质前体膜干燥至170℃ ℃，脱脂步骤在350℃至450℃的脱脂温度和15℃/秒以上的加热速率下进行，并且烧成步骤在 升温速度为100 [℃/秒]至150℃/秒。

公开(公告)号：US07579041B2

公开(公告)日：2009-08-25

申请号：US10998195

申请日：2004-11-29

申请人： Akira Kuriki ,  Hironobu Kazama ,  Toshinao Shinbo ,  Koji Sumi

发明人： Akira Kuriki ,  Hironobu Kazama ,  Toshinao Shinbo ,  Koji Sumi

IPC分类号： B05D5/12 ,  H01L41/22

CPC分类号： B41J2/161 ,  B41J2/1628 ,  B41J2/164 ,  C23C18/1216 ,  C23C18/1225 ,  C23C18/1245 ,  C23C18/1254 ,  C23C18/1283 ,  H01L41/1876 ,  H01L41/318 ,  Y10T29/42

摘要： A method of manufacturing a dielectric film includes a coating step of coating sol made of an organic metal compound and forming a dielectric precursor film, a drying step of drying the dielectric precursor film, a degreasing step of degreasing the dielectric precursor film, and a baking step of baking the dielectric precursor film to form a dielectric film. The drying step includes a first drying step of drying the dielectric precursor film by heating the dielectric precursor film to a temperature lower than a boiling point of a solvent which is a main solvent of the sol and then holding the dielectric precursor film at the temperature for a predetermined period of time, and a second drying step of drying the dielectric precursor film further by reheating the dielectric precursor film and then holding the dielectric precursor film at the temperature for a predetermined period of time.

摘要翻译： 制造电介质膜的方法包括：涂覆由有机金属化合物制成的溶胶并形成电介质前体膜的涂覆步骤，干燥电介质前体膜的干燥步骤，使电介质前体膜脱脂的脱脂步骤和烘烤 烘烤电介质前体膜以形成电介质膜的步骤。 干燥步骤包括：第一干燥步骤，通过将电介质前体膜加热到低于作为溶胶的主要溶剂的溶剂的沸点的温度，然后将电介质前体膜保持在温度为 以及第二干燥步骤，通过再次加热电介质前体膜，然后将电介质前体膜保持在该温度下进一步干燥电介质前体膜一段预定时间。

公开(公告)号：US20080018716A1

公开(公告)日：2008-01-24

申请号：US11879628

申请日：2007-07-18

申请人： Motohisa Noguchi ,  Koji Sumi ,  Motoki Takabe ,  Naoto Yokoyama

发明人： Motohisa Noguchi ,  Koji Sumi ,  Motoki Takabe ,  Naoto Yokoyama

IPC分类号： B41J2/045 ,  H01L41/187

CPC分类号： B41J2/14233 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/317 ,  H01L41/319

摘要： A piezoelectric device including: a substrate; a lower electrode formed over the substrate; a piezoelectric layer formed over the lower electrode and including lead zirconate titanate; and an upper electrode formed over the piezoelectric layer, the lead zirconate titanate having a half-width of a peak of a (100) plane measured by an X-ray diffraction rocking curve method of 10 degrees or more and 25 degrees or less.

摘要翻译： 一种压电装置，包括：基板; 形成在所述基板上的下电极; 形成在下电极上并包括锆钛酸铅的压电层; 和形成在压电层上的上电极，通过X射线衍射摇摆曲线法测量的具有（100）面的峰的半值宽度为10度以上且25度以下的钛酸铅钛酸铅。

公开(公告)号：US20080012911A1

公开(公告)日：2008-01-17

申请号：US11730644

申请日：2007-04-03

申请人： Motoki Takabe ,  Koji Sumi ,  Motohisa Noguchi ,  Naoto Yokoyama ,  Takeshi Saito

发明人： Motoki Takabe ,  Koji Sumi ,  Motohisa Noguchi ,  Naoto Yokoyama ,  Takeshi Saito

IPC分类号： B41J2/045

CPC分类号： B41J2/14233 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2002/14491

摘要： Disclosed is an actuator device which includes a vibration plate and a piezoelectric element. The vibration plate includes an elastic film which is made of silicon oxide (SiO2) and which is formed on a substrate while the piezoelectric element is formed on the vibration plate and including a lower electrode, a piezoelectric layer and an upper electrode. The vibration plate has such a stress as to give a tensile stress between 300 MPa and 500 MPa, inclusive, to the piezoelectric element that is in a state of being displaced.

摘要翻译： 公开了一种致动器装置，其包括振动板和压电元件。 振动板包括由氧化硅（SiO 2）构成的弹性膜，并且形成在基板上，同时压电元件形成在振动板上并且包括下电极，压电层 和上电极。 该振动板具有这样的应力，即对处于移动状态的压电元件产生在300MPa至500MPa之间的拉伸应力。

公开(公告)号：US20070190238A1

公开(公告)日：2007-08-16

申请号：US10590279

申请日：2005-06-29

申请人： Koji Sumi

发明人： Koji Sumi

IPC分类号： B05D5/12 ,  B05D3/02

CPC分类号： B41J2/14233 ,  B41J2202/03 ,  H01L41/1876 ,  H01L41/318

摘要： Provided are a composite for forming a ferroelectric thin film which is a colloidal solution applicable to the MOD method and capable of maintaining excellent dispersion stability and preservation stability of an organometallic compound over a long term, a ferroelectric thin film, a method of manufacturing a ferroelectric thin film, and a liquid-jet head. A composite for forming a ferroelectric thin film, which is made of a colloidal solution applicable to the MOD method containing an organometallic compound including metal constituting a ferroelectric thin film, and contains water other than water of crystallization in the organometallic compound is used when forming a ferroelectric thin film in accordance with the MOD method.

摘要翻译： 提供一种用于形成铁电薄膜的复合材料，其是适用于MOD方法的胶体溶液，并且能够长期保持有机金属化合物的优异的分散稳定性和保存稳定性，铁电薄膜，铁电体的制造方法 薄膜和喷液头。 用于形成铁电薄膜的复合材料，其由用于包含构成铁电薄膜的金属的有机金属化合物的MOD方法的胶体溶液制成，并且在形成有机金属化合物时含有结晶水以外的水 铁电薄膜按照MOD法。

公开(公告)号：US06962007B1

公开(公告)日：2005-11-08

申请号：US09889484

申请日：1999-08-10

申请人： Norio Maeda ,  Koji Sumi ,  Hiroshi Aihara ,  Masao Oono ,  Naoaki Izu Tani

发明人： Norio Maeda ,  Koji Sumi ,  Hiroshi Aihara ,  Masao Oono ,  Naoaki Izu Tani

IPC分类号： H01L21/304 ,  B05B7/04 ,  B08B3/04 ,  H01L21/00 ,  F26B17/00

CPC分类号： H01L21/67051 ,  H01L21/67028 ,  H01L21/67034

摘要： A device for drying substrates which stores a plurality of substrate (1) and which comprises a processing container (3) to which cleaning fluid (2) after cleaning the substrates (1) is drained and an injection nozzle (5) for injecting drying fluid located at the terminating part of a feed pipe (4) through which liquid drying fluid is supplied, whereby an exhaust equipment is eliminated or simplified, and the drying fluid is fed smoothly.

摘要翻译： 一种用于干燥存储多个基板（1）的基板的装置，其特征在于，包括：清洗基板（1）后的清洗液（2）的清洗液（2）的处理容器（3），以及喷射干燥流体 位于进料管（4）的终端部分，通过该进料管供应液体干燥流体，从而消除或简化排气设备，并且干燥流体被顺利进给。

公开(公告)号：US20050168524A1

公开(公告)日：2005-08-04

申请号：US10995945

申请日：2004-11-24

申请人： Li Xin-Shan ,  Hironobu Kazama ,  Masami Murai ,  Koji Sumi ,  Maki Ito ,  Toshiaki Yokouchi

发明人： Li Xin-Shan ,  Hironobu Kazama ,  Masami Murai ,  Koji Sumi ,  Maki Ito ,  Toshiaki Yokouchi

IPC分类号： H01L41/08 ,  B41J2/01 ,  B41J2/045 ,  B41J2/16 ,  B44C1/22

CPC分类号： B41J2/1632 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2/1635 ,  B41J2/1646 ,  B41J2002/14241 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/314 ,  H01L41/319 ,  Y10T29/42 ,  Y10T29/49401

摘要： A manufacturing method of a liquid jet head having increased the durability and reliability thereof by preventing delamination of a vibration plate is provided. At least the following two steps are included: a vibration plate forming step which includes at least a step of forming a zirconium layer on one side of a passage-forming substrate by sputtering so that a degrees of orientation to a (002) plane of the surface becomes equal to 80% or more, as well as forming an insulation film made of zirconium oxide and constituting a part of the vibration plate by subjecting the zirconium layer to thermal oxidation; and a piezoelectric element forming step of forming piezoelectric elements on the vibration plate.

摘要翻译： 提供一种通过防止振动板的分层而提高其耐久性和可靠性的液体喷射头的制造方法。 至少包括以下两个步骤：振动板形成步骤，其至少包括通过溅射在通道形成基板的一侧上形成锆层的步骤，使得对（002）面的取向度 表面变得等于80％以上，并且通过对锆层进行热氧化来形成由氧化锆制成的绝缘膜并构成振动板的一部分; 以及在振动板上形成压电元件的压电元件形成步骤。

公开(公告)号：US06551652B2

公开(公告)日：2003-04-22

申请号：US09451147

申请日：1999-11-30

申请人： Hong Qiu ,  Soichi Moriya ,  Hiroyuki Kamei ,  Koji Sumi ,  Masami Murai ,  Tsutomu Nishiwaki

发明人： Hong Qiu ,  Soichi Moriya ,  Hiroyuki Kamei ,  Koji Sumi ,  Masami Murai ,  Tsutomu Nishiwaki

IPC分类号： B05D512

CPC分类号： C23C18/1254 ,  C23C18/1216 ,  C23C18/1225 ,  H01L41/1876 ,  H01L41/318 ,  Y10T29/42

摘要： A piezoelectric element having a piezoelectric film where the difference in the quantity of lead along the thickness of the film is minimized. The film is obtained by first applying, at least once, a first sol for use in forming a PZT film on a substrate having a lower electrode formed thereon. Second, applying a second sol having the greater lead content than the first sol. Third, subjecting these films to heat treatment at a predetermined temperature at least once. The second sol has a composition capable of forming a piezoelectric film having a Perovskite structure expressed generally by AxByO3, and the content of material constituting the A site of the first sol is greater than what constitutes the A site of the second sol.

摘要翻译： 具有压电膜的压电元件，其中沿着膜的厚度的铅的量的差最小化。 通过首先在其上形成有下电极的基板上施加至少一次用于形成PZT膜的第一溶胶来获得膜。 其次，应用比第一溶胶具有更大铅含量的第二溶胶。 第三，使这些膜在预定温度下进行至少一次的热处理。 第二溶胶具有能够形成具有通常由AxByO3表示的钙钛矿结构的压电膜的组合物，构成第一溶胶的A位置的材料的含量大于构成第二溶胶的A位置的材料的含量。