摘要:
In a plasma processing apparatus capable of generating a plasma in a processing chamber accommodating therein a substrate to plasma-process the substrate, a component disposed in the processing chamber includes an identification indicia formed with one or more symbols indicated by arranging a plurality of dotted recesses on a surface of the component. The dotted recesses are of a substantially circular shape in a plane view and a substantial U-shape in a sectional view. The life span of the component can be detected based on a status of the identification indicia.
摘要:
A tuner has a dual AGC function, and frequency-converts an input signal into an IF signal. An orthogonal detector calculates a complex signal from the IF signal. A demodulator demodulates a digital signal from the complex signals. An error corrector corrects the error of the digital signal. A signal level detector calculates a level judgment signal from the IF signal. A demodulation level detector detects a signal level of a demodulation signal on a desired band from an output signal of the demodulator. When a demodulation level judgment unit generates a judgment signal representing an influence from interference waves in adjacent channel affecting on a signal on the desired band from the demodulation signal, a control signal generator feeds back a gain control signal to the tuner in accordance with the judgment signal.
摘要:
Disclosed is an OFDM signal receiving apparatus for diversity reception, with a plurality of antennas, of an OFDM signal containing Y sub-carriers, where 2X−1 1. The OFDM signal receiving apparatus includes a plurality of receiving systems, and a diversity processing unit connected to the receiving systems and fed with sequences of data on sub-carriers demodulated by the respective receiving systems. At least one of the receiving systems includes an FFT circuit for Fast Fourier transforming, in parallel, only a sequence of data on 2Z sub-carriers contained in the OFDM signal received with a corresponding antenna, where X>Z. The diversity processing unit performs a diversity process on sequences of data on sub-carriers, out of all the Y sub-carries, redundantly demodulated.
摘要:
A thermally sprayed member or an electrode includes a basic material, a thermally sprayed film formed on the surface of the basic material, the thermally sprayed film being made of an insulating ceramic and a metallic intermediate layer provided between the basic material and the thermally sprayed film for increasing a bonding force therebetween, wherein the thermally sprayed film side of the member is exposed to a high frequency plasma atmosphere and the electrode is intended to form a high frequency plasma on the side of the thermally sprayed film. The basic material includes a base portion made of a conductive material and a dielectric portion provided to include a part of a surface of the basic material. Further, the intermediate layer is comprised of a plurality of island-shaped parts isolated from each other.
摘要:
A partial pressure control system 45 includes two valves 2 which are branched from an operation gas supply pipe 44 and which variably control operation gas, pressure sensors 3 which are respectively connected to the each valves 2 in series and which detect pressure of the operation gas, and a controller 25 which proportionally controls the operation of the valves 2 based on detection result of the pressure sensors 3, thereby relatively controlling pressures P1 and P2 of the two valves. With this configuration, it is possible to reduce wastefull consumption of the operation gas, and to enhance the responsivity with respect to change of setting and the like.
摘要:
A processing apparatus for performing a process on a surface of an object to be processed by applying a high frequency power to an electrode installed in an airtight processing chamber to convert a processing gas introduced therein into a plasma, includes a thermal transfer gas feed pathway for supplying a thermal transfer gas for controlling a temperature of the object to be processed to a minute space between the object to be processed and a holding unit installed on the electrode for attracting and holding the object to be processed through an inner portion of an insulating member disposed under the electrode. A portion of the thermal transfer gas feed pathway, which passes through the inner portion of the insulating member, is formed in a zigzag shape or a spiral shape with respect to a normal direction of a holding surface of the holding unit.
摘要:
An upper electrode for use in generating a plasma of a processing gas includes a cooling block having a coolant path for circulating a coolant therethrough and one or more through holes for passing the processing gas therethrough, an electrode plate having one or more injection openings for injecting the processing gas toward the substrate to be processed mounted on the mounting table, and an electrode frame installed at an upper portion of the cooling block and providing a processing gas diffusion gap for diffusing the processing gas between the cooling block and the electrode frame. The electrode plate is detachably fixed to a bottom surface of the cooling block via a thermally conductive member having flexibility.
摘要:
A sheet processing apparatus operating in xerographic printing apparatus employs a single-component magnetic toner. The inventive features of the sheet processing apparatus are directed toward smooth transportation and discharge of printing sheets sent through the printing apparatus, across a sheet transport guide, and through an image fixing and sheet transporting unit which finally discharges the printing sheets. Conductivity of the transport guide is selected by the material of which it is made, specified herein to have superficial resistivity in the range of ten thousand to one hundred million megohms. Charge applied to a printing sheet to electrostatically attract the magnetic toner during the xerographic printing is thus drained by the transport guide gradually enough not to disturb the adhesion of the toner to the sheet, yet rapidly enough to prevent the sheet from being curled upward by electrostatic attraction toward a residual toner container just over the downstream end of the guide, in the optimally compacted arrangement of the various components of the sheet processing and xerographic printing apparatus into a facsimile machine or the like.
摘要:
A forward error correcting transmitter and receiver for preventing the erroneous detection of synchronization is provided in a system in which synchronization of an interleaver circuit and a deinterleaver circuit, to be inserted between a convolutional encoder and a Viterbi decoder, is obtained from a synchronization detecting circuit of the Viterbi decoder. A LFSR (Linear Feedback Shift Register) is used as a row-direction address counter during writing and an up/down counter is used as a column-direction address counter during reading, during the interleaver circuit. In the deinterleaver circuit, an up/down counter is used as the column-direction address counter during writing, and an LFSR is used as the row-direction address counter during reading.
摘要:
A combustor with a burner maintains combustion stability. The burner includes an air hole member 31 with a plurality of air holes 34, 35 provided at an upstream side of the combustion gases generated by a combustion chamber 1. A first fueling nozzle 33 jets fuel in a direction crossing a central axis of the burner towards at least two of air holes 35. A plurality of second fueling nozzles 32, one for each of the remaining air holes 34, are provided to jet the fuel in a direction routed along the burner axis towards the corresponding air hole 34. A fuel header 30 distributes the fuel to the first fueling nozzle 33 and each of the second fueling nozzles 32. A fuel header storage unit 70 shrouds the fuel header 30, fueling nozzles 32, 33, and has an air inflow hole 71.