Plasma processing apparatus and components thereof, and method for detecting life span of the components

    公开(公告)号:US20060180074A1

    公开(公告)日:2006-08-17

    申请号:US11354847

    申请日:2006-02-16

    申请人: Daisuke Hayashi

    发明人: Daisuke Hayashi

    IPC分类号: G01D21/00

    CPC分类号: H01L21/67069 H01J37/3482

    摘要: In a plasma processing apparatus capable of generating a plasma in a processing chamber accommodating therein a substrate to plasma-process the substrate, a component disposed in the processing chamber includes an identification indicia formed with one or more symbols indicated by arranging a plurality of dotted recesses on a surface of the component. The dotted recesses are of a substantially circular shape in a plane view and a substantial U-shape in a sectional view. The life span of the component can be detected based on a status of the identification indicia.

    Digital broadcast receiver
    42.
    发明申请
    Digital broadcast receiver 审中-公开
    数字广播接收机

    公开(公告)号:US20060164563A1

    公开(公告)日:2006-07-27

    申请号:US10553738

    申请日:2004-06-15

    摘要: A tuner has a dual AGC function, and frequency-converts an input signal into an IF signal. An orthogonal detector calculates a complex signal from the IF signal. A demodulator demodulates a digital signal from the complex signals. An error corrector corrects the error of the digital signal. A signal level detector calculates a level judgment signal from the IF signal. A demodulation level detector detects a signal level of a demodulation signal on a desired band from an output signal of the demodulator. When a demodulation level judgment unit generates a judgment signal representing an influence from interference waves in adjacent channel affecting on a signal on the desired band from the demodulation signal, a control signal generator feeds back a gain control signal to the tuner in accordance with the judgment signal.

    摘要翻译: 调谐器具有双AGC功能,并将输入信号频率转换成IF信号。 正交检波器计算来自IF信号的复信号。 解调器解调来自复信号的数字信号。 误差校正器校正数字信号的误差。 信号电平检测器从IF信号计算电平判断信号。 解调电平检测器从解调器的输出信号检测期望频带上的解调信号的信号电平。 当解调电平判断单元从解调信号产生表示影响相邻信道中的信号的干扰波的影响的判断信号时,控制信号发生器根据判断反馈增益控制信号给调谐器 信号。

    OFDM signal receiving apparatus
    43.
    发明申请
    OFDM signal receiving apparatus 有权
    OFDM信号接收装置

    公开(公告)号:US20060146693A1

    公开(公告)日:2006-07-06

    申请号:US11302872

    申请日:2005-12-14

    IPC分类号: H04Q7/00 H04Q7/24 H04J11/00

    摘要: Disclosed is an OFDM signal receiving apparatus for diversity reception, with a plurality of antennas, of an OFDM signal containing Y sub-carriers, where 2X−1 1. The OFDM signal receiving apparatus includes a plurality of receiving systems, and a diversity processing unit connected to the receiving systems and fed with sequences of data on sub-carriers demodulated by the respective receiving systems. At least one of the receiving systems includes an FFT circuit for Fast Fourier transforming, in parallel, only a sequence of data on 2Z sub-carriers contained in the OFDM signal received with a corresponding antenna, where X>Z. The diversity processing unit performs a diversity process on sequences of data on sub-carriers, out of all the Y sub-carries, redundantly demodulated.

    摘要翻译: 公开了一种OFDM信号接收装置,用于分集接收包含Y个子载波的OFDM信号的多个天线,其中,2个X-1 和X> 1。 OFDM信号接收装置包括多个接收系统,以及连接到接收系统的分集处理单元,并且馈送有由各个接收系统解调的子载波上的数据序列。 至少一个接收系统包括用于快速傅里叶变换的FFT电路,其并行地仅包含在用相应的天线接收的OFDM信号中的2个子载波上的数据序列,其中X > Z。 在所有Y子载波中,分集处理单元对子载波上的数据序列执行分集处理,被冗余地解调。

    Thermally sprayed member, electrode and plasma processing apparatus using the electrode
    44.
    发明申请
    Thermally sprayed member, electrode and plasma processing apparatus using the electrode 有权
    使用电极的热喷涂部件,电极和等离子体处理装置

    公开(公告)号:US20050211384A1

    公开(公告)日:2005-09-29

    申请号:US11055058

    申请日:2005-02-11

    申请人: Daisuke Hayashi

    发明人: Daisuke Hayashi

    摘要: A thermally sprayed member or an electrode includes a basic material, a thermally sprayed film formed on the surface of the basic material, the thermally sprayed film being made of an insulating ceramic and a metallic intermediate layer provided between the basic material and the thermally sprayed film for increasing a bonding force therebetween, wherein the thermally sprayed film side of the member is exposed to a high frequency plasma atmosphere and the electrode is intended to form a high frequency plasma on the side of the thermally sprayed film. The basic material includes a base portion made of a conductive material and a dielectric portion provided to include a part of a surface of the basic material. Further, the intermediate layer is comprised of a plurality of island-shaped parts isolated from each other.

    摘要翻译: 热喷涂部件或电极包括碱性材料,形成在基材表面上的热喷涂膜,所述热喷涂膜由绝缘陶瓷和设置在所述基材和所述热喷涂膜之间的金属中间层 为了增加它们之间的结合力,其中该部件的热喷涂膜侧暴露于高频等离子体气氛中,该电极旨在在该热喷涂膜一侧上形成一高频等离子体。 基本材料包括由导电材料制成的基部和设置成包括基材的表面的一部分的电介质部分。 此外,中间层由彼此隔离的多个岛状部件组成。

    Processing apparatus and gas discharge suppressing member
    46.
    发明申请
    Processing apparatus and gas discharge suppressing member 有权
    处理装置和气体放电抑制构件

    公开(公告)号:US20050011456A1

    公开(公告)日:2005-01-20

    申请号:US10856797

    申请日:2004-06-01

    摘要: A processing apparatus for performing a process on a surface of an object to be processed by applying a high frequency power to an electrode installed in an airtight processing chamber to convert a processing gas introduced therein into a plasma, includes a thermal transfer gas feed pathway for supplying a thermal transfer gas for controlling a temperature of the object to be processed to a minute space between the object to be processed and a holding unit installed on the electrode for attracting and holding the object to be processed through an inner portion of an insulating member disposed under the electrode. A portion of the thermal transfer gas feed pathway, which passes through the inner portion of the insulating member, is formed in a zigzag shape or a spiral shape with respect to a normal direction of a holding surface of the holding unit.

    摘要翻译: 一种处理装置,用于通过向安装在气密处理室中的电极施加高频功率以将其中引入的等离子体中的处理气体转换为对等待处理对象的表面进行处理,所述处理装置包括:热传递气体供给路径, 将待传送物体的温度控制在被处理体的微小空间和安装在电极上的保持单元之间的热转印气体,用于通过绝缘构件的内部吸引并保持待处理物体 设置在电极下方。 通过绝缘构件的内部的热传递气体供给路径的一部分相对于保持单元的保持面的法线方向形成Z字形或螺旋状。

    Upper electrode and plasma processing apparatus
    47.
    发明申请
    Upper electrode and plasma processing apparatus 审中-公开
    上电极和等离子体处理装置

    公开(公告)号:US20050000442A1

    公开(公告)日:2005-01-06

    申请号:US10844436

    申请日:2004-05-13

    摘要: An upper electrode for use in generating a plasma of a processing gas includes a cooling block having a coolant path for circulating a coolant therethrough and one or more through holes for passing the processing gas therethrough, an electrode plate having one or more injection openings for injecting the processing gas toward the substrate to be processed mounted on the mounting table, and an electrode frame installed at an upper portion of the cooling block and providing a processing gas diffusion gap for diffusing the processing gas between the cooling block and the electrode frame. The electrode plate is detachably fixed to a bottom surface of the cooling block via a thermally conductive member having flexibility.

    摘要翻译: 用于产生处理气体的等离子体的上电极包括具有用于使冷却剂循环的冷却剂通道的冷却块和用于使处理气体通过的一个或多个通孔,具有一个或多个注射开口的电极板 处理气体朝着安装在安装台上的被处理基板,以及安装在冷却块的上部的电极框架,并且提供用于在冷却块和电极框架之间扩散处理气体的处理气体扩散间隙。 电极板通过具有柔性的导热构件可拆卸地固定在冷却块的底面上。

    Xerographic printing and sheet processing apparatus
    48.
    发明授权
    Xerographic printing and sheet processing apparatus 失效
    静电印刷和片材处理设备

    公开(公告)号:US5579097A

    公开(公告)日:1996-11-26

    申请号:US89377

    申请日:1993-07-12

    摘要: A sheet processing apparatus operating in xerographic printing apparatus employs a single-component magnetic toner. The inventive features of the sheet processing apparatus are directed toward smooth transportation and discharge of printing sheets sent through the printing apparatus, across a sheet transport guide, and through an image fixing and sheet transporting unit which finally discharges the printing sheets. Conductivity of the transport guide is selected by the material of which it is made, specified herein to have superficial resistivity in the range of ten thousand to one hundred million megohms. Charge applied to a printing sheet to electrostatically attract the magnetic toner during the xerographic printing is thus drained by the transport guide gradually enough not to disturb the adhesion of the toner to the sheet, yet rapidly enough to prevent the sheet from being curled upward by electrostatic attraction toward a residual toner container just over the downstream end of the guide, in the optimally compacted arrangement of the various components of the sheet processing and xerographic printing apparatus into a facsimile machine or the like.

    摘要翻译: 在静电印刷装置中操作的片材处理装置采用单组分磁性调色剂。 片材处理装置的发明特征是针对通过打印装置送出的打印纸,穿过纸张传送引导件以及通过最终排出打​​印纸的图像定影和纸张传送单元的平滑的输送和排出。 运输导轨的电导率由其制造的材料选择,这里规定具有在十万到十亿兆欧范围内的表面电阻率。 因此,在静电印刷过程中施加到印刷纸上以静电吸引磁性调色剂的电荷因此被输送引导件逐渐排出,足以不影响调色剂对片材的粘附,但足够快以防止片材被静电卷曲向上 在纸张处理和静电印刷装置的各种部件的最佳压实布置中,到导向装置的下游端上的残留调色剂容器的吸引力转移到传真机等中。

    Forward error correcting transmitter and receiver
    49.
    发明授权
    Forward error correcting transmitter and receiver 失效
    前向纠错发射机和接收机

    公开(公告)号:US5535220A

    公开(公告)日:1996-07-09

    申请号:US182830

    申请日:1994-01-19

    摘要: A forward error correcting transmitter and receiver for preventing the erroneous detection of synchronization is provided in a system in which synchronization of an interleaver circuit and a deinterleaver circuit, to be inserted between a convolutional encoder and a Viterbi decoder, is obtained from a synchronization detecting circuit of the Viterbi decoder. A LFSR (Linear Feedback Shift Register) is used as a row-direction address counter during writing and an up/down counter is used as a column-direction address counter during reading, during the interleaver circuit. In the deinterleaver circuit, an up/down counter is used as the column-direction address counter during writing, and an LFSR is used as the row-direction address counter during reading.

    摘要翻译: 在从同步检测电路获得插入卷积编码器和维特比译码器之间的交错器电路和去交织器电路的同步的系统中,提供了用于防止同步错误检测的前向纠错发送器和接收器 的维特比解码器。 在写入期间,LFSR(线性反馈移位寄存器)用作行方向地址计数器,并且在交织器电路期间,在读取期间将升/降计数器用作列方向地址计数器。 在去交错电路中,在写入期间使用升/减计数器作为列方向地址计数器,在读取期间使用LFSR作为行方向地址计数器。

    Burner, combustor and remodeling method for burner
    50.
    发明授权
    Burner, combustor and remodeling method for burner 有权
    燃烧器,燃烧器和燃烧器重塑方法

    公开(公告)号:US09353951B2

    公开(公告)日:2016-05-31

    申请号:US13047227

    申请日:2011-03-14

    摘要: A combustor with a burner maintains combustion stability. The burner includes an air hole member 31 with a plurality of air holes 34, 35 provided at an upstream side of the combustion gases generated by a combustion chamber 1. A first fueling nozzle 33 jets fuel in a direction crossing a central axis of the burner towards at least two of air holes 35. A plurality of second fueling nozzles 32, one for each of the remaining air holes 34, are provided to jet the fuel in a direction routed along the burner axis towards the corresponding air hole 34. A fuel header 30 distributes the fuel to the first fueling nozzle 33 and each of the second fueling nozzles 32. A fuel header storage unit 70 shrouds the fuel header 30, fueling nozzles 32, 33, and has an air inflow hole 71.

    摘要翻译: 具有燃烧器的燃烧器保持燃烧稳定性。 燃烧器包括一个气孔构件31,其具有设置在由燃烧室1产生的燃烧气体的上游侧的多个气孔34,35。第一燃料喷嘴33沿与燃烧器的中心轴线交叉的方向喷射燃料 至少两个气孔35.多个第二燃料喷嘴32,一个用于每个剩余的空气孔34,以沿着燃烧器轴线向着相应的气孔34喷射燃料。燃料 集管30将燃料分配到第一加燃料喷嘴33和每个第二加燃料喷嘴32.燃料头存放单元70覆盖燃料集管30,燃料喷嘴32,33,并具有空气流入孔71。