公开(公告)号：US20180339898A1

公开(公告)日：2018-11-29

申请号：US15978958

申请日：2018-05-14

Applicant: STMicroelectronics S.r.l.

Inventor： Gabriele Gattere ,  Alessandro Tocchio ,  Carlo Valzasina

IPC: B81B3/00 ,  B81B7/00 ,  H03H9/02

Abstract: A MEMS resonator is equipped with a substrate, a moving structure suspended above the substrate in a horizontal plane formed by first and second axes, having first and second arms, parallel to one another and extending along the second axis, coupled at their respective ends by first and second transverse joining elements, forming an internal window. A first electrode structure is positioned outside the window and capacitively coupled to the moving structure. A second electrode structure is positioned inside the window. One of the first and second electrode structures causes an oscillatory movement of the flexing arms in opposite directions along the first horizontal axis at a resonance frequency, and the other electrode structure has a function of detecting the oscillation. A suspension structure has a suspension arm in the window. An attachment arrangement is coupled to the suspension element centrally in the window, near the second electrode structure.

公开(公告)号：US20170268880A1

公开(公告)日：2017-09-21

申请号：US15610251

申请日：2017-05-31

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Luca Giuseppe Falorni ,  Carlo Valzasina ,  Roberto Carminati ,  Alessandro Tocchio

IPC: G01C19/5712 ,  G01C19/5733 ,  B81B3/00 ,  G01C19/5747

CPC classification number: G01C19/5712 ,  B81B3/0018 ,  B81B3/0086 ,  B81B2201/025 ,  B81B2203/0163 ,  G01C19/5733 ,  G01C19/5747

Abstract: MEMS device having a support region elastically carrying a suspended mass through first elastic elements. A tuned dynamic absorber is elastically coupled to the suspended mass and configured to dampen quadrature forces acting on the suspended mass at the natural oscillation frequency of the dynamic absorber. The tuned dynamic absorber is formed by a damping mass coupled to the suspended mass through second elastic elements. In an embodiment, the suspended mass and the damping mass are formed in a same structural layer, for example of semiconductor material, and the damping mass is surrounded by the suspended mass.

公开(公告)号：US09448071B2

公开(公告)日：2016-09-20

申请号：US13799243

申请日：2013-03-13

Applicant: STMicroelectronics S.r.l.

Inventor： Marco Garbarino ,  Andrea Donadel ,  Davide Magnoni ,  Carlo Valzasina

IPC: G01C19/56 ,  G01C19/5762 ,  G01C19/5726

CPC classification number: G01C19/5762 ,  G01C19/5726

Abstract: A microelectromechanical device includes: a body; a movable mass, elastically coupled to the body and oscillatable with respect to the body according to a degree of freedom; a frequency detector, configured to detect a current oscillation frequency of the movable mass; and a forcing stage, capacitively coupled to the movable mass and configured to provide energy to the movable mass through forcing signals having a forcing frequency equal to the current oscillation frequency detected by the frequency detector, at least in a first transient operating condition.

Abstract translation: 微机电装置包括：主体; 弹性联接到所述主体并且相对于所述主体可根据自由度而可振动的可动质量块; 频率检测器，被配置为检测所述可移动质量块的当前振荡频率; 以及强制级，其电容耦合到所述可移动质量块，并且被配置为至少在第一瞬态操作条件下通过强制具有等于由所述频率检测器检测到的当前振荡频率的强制频率的信号向所述可移动质量块提供能量。

公开(公告)号：US20160109237A1

公开(公告)日：2016-04-21

申请号：US14985071

申请日：2015-12-30

Applicant: STMicroelectronics S.R.L.

Inventor： Marco Garbarino ,  Andrea Donadel ,  Davide Magnoni ,  Carlo Valzasina

IPC: G01C19/5762 ,  G01C19/5726

CPC classification number: G01C19/5762 ,  G01C19/5726

Abstract: A microelectromechanical device includes: a body; a movable mass, elastically coupled to the body and oscillatable with respect to the body according to a degree of freedom; a frequency detector, configured to detect a current oscillation frequency of the movable mass; and a forcing stage, capacitively coupled to the movable mass and configured to provide energy to the movable mass through forcing signals having a forcing frequency equal to the current oscillation frequency detected by the frequency detector, at least in a first transient operating condition.

Abstract translation: 微机电装置包括：主体; 弹性联接到所述主体并且相对于所述主体可根据自由度而可振动的可动质量块; 频率检测器，被配置为检测所述可移动质量块的当前振荡频率; 以及强制级，其电容耦合到所述可移动质量块，并且被配置为至少在第一瞬态操作条件下通过强制具有等于由所述频率检测器检测到的当前振荡频率的强制频率的信号向所述可移动质量块提供能量。

公开(公告)号：US20140260609A1

公开(公告)日：2014-09-18

申请号：US13799243

申请日：2013-03-13

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Marco Garbarino ,  Andrea Donadel ,  Davide Magnoni ,  Carlo Valzasina

IPC: G01C19/56

CPC classification number: G01C19/5762 ,  G01C19/5726

Abstract: A microelectromechanical device includes: a body; a movable mass, elastically coupled to the body and oscillatable with respect to the body according to a degree of freedom; a frequency detector, configured to detect a current oscillation frequency of the movable mass; and a forcing stage, capacitively coupled to the movable mass and configured to provide energy to the movable mass through forcing signals having a forcing frequency equal to the current oscillation frequency detected by the frequency detector, at least in a first transient operating condition.

Abstract translation: 微机电装置包括：主体; 弹性联接到所述主体并且相对于所述主体可根据自由度而可振动的可动质量块; 频率检测器，被配置为检测所述可移动质量块的当前振荡频率; 以及强制级，其电容耦合到所述可移动质量块，并且被配置为至少在第一瞬态操作条件下通过强制具有等于由所述频率检测器检测到的当前振荡频率的强制频率的信号向所述可移动质量块提供能量。

公开(公告)号：US20130220016A1

公开(公告)日：2013-08-29

申请号：US13779002

申请日：2013-02-27

Applicant: STMicroelectronics S.r.l.

Inventor： Barbara Simoni ,  Carlo Valzasina

IPC: G01P15/125 ,  B81C1/00

CPC classification number: G01P15/125 ,  B81B3/0094 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2201/033 ,  B81B2203/04 ,  B81B2203/058 ,  B81C1/00198 ,  G01P15/0802

Abstract: A microelectromechanical sensor that in one embodiment includes a supporting structure, having a substrate and electrode structures anchored to the substrate; and a sensing mass, movable with respect to the supporting structure so that a distance between the sensing mass and the substrate is variable. The sensing mass is provided with movable electrodes capacitively coupled to the electrode structures. Each electrode structure comprises a first fixed electrode and a second fixed electrode mutually insulated by a dielectric region and arranged in succession in a direction substantially perpendicular to a face of the substrate.

Abstract translation: 一种微机电传感器，其在一个实施例中包括支撑结构，其具有衬底和锚定到衬底的电极结构; 以及相对于支撑结构可移动的感测质量，使得感测质量块和衬底之间的距离是可变的。 感测质量体具有与电极结构电容耦合的可动电极。 每个电极结构包括第一固定电极和第二固定电极，所述第一固定电极和第二固定电极通过电介质区域相互绝缘并且在基本上垂直于所述衬底的表面的方向上相继布置。

公开(公告)号：US12139396B2

公开(公告)日：2024-11-12

申请号：US17384566

申请日：2021-07-23

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Francesco Rizzini ,  Carlo Valzasina ,  Gabriele Gattere

IPC: B81B3/00 ,  G01P1/00 ,  G01P15/125

Abstract: A microelectromechanical sensor device has a detection structure including: a substrate having a first surface; a mobile structure having an inertial mass suspended above the substrate at a first area of the first surface so as to perform at least one inertial movement with respect to the substrate; and a fixed structure having fixed electrodes suspended above the substrate at the first area and defining with the mobile structure a capacitive coupling to form at least one sensing capacitor. The device further includes a single monolithic mechanical-anchorage structure positioned at a second area of the first surface separate from the first area and coupled to the mobile structure, the fixed structure, and the substrate and connection elements that couple the mobile structure and the fixed structure mechanically to the single mechanical-anchorage structure.

公开(公告)号：US11965906B2

公开(公告)日：2024-04-23

申请号：US17866378

申请日：2022-07-15

Applicant: STMicroelectronics S.r.l.

Inventor： Gabriele Gattere ,  Jean Marie Darmanin ,  Francesco Rizzini ,  Carlo Valzasina

IPC: G01P15/125 ,  G01P1/00 ,  G01P15/08 ,  G01P15/13

CPC classification number: G01P15/125 ,  G01P1/00 ,  G01P15/0802 ,  G01P15/131 ,  G01P2015/0831

Abstract: A closed-loop microelectromechanical accelerometer includes a substrate of semiconductor material, an out-of-plane sensing mass and feedback electrodes. The out-of-plane sensing mass, of semiconductor material, has a first side facing the supporting body and a second side opposite to the first side. The out-of-plane sensing mass is also connected to the supporting body to oscillate around a non-barycentric fulcrum axis parallel to the first side and to the second side and perpendicular to an out-of-plane sensing axis. The feedback electrodes are capacitively coupled to the sensing mass and are configured to apply opposite electrostatic forces to the sensing mass.

公开(公告)号：US11865581B2

公开(公告)日：2024-01-09

申请号：US16684289

申请日：2019-11-14

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Gabriele Gattere ,  Carlo Valzasina ,  Federico Vercesi ,  Giorgio Allegato

IPC: B06B1/06 ,  B81B7/00 ,  B81C1/00

CPC classification number: B06B1/0681 ,  B06B1/0666 ,  B81B7/0016 ,  B81C1/00825 ,  B81B2201/0264 ,  B81B2201/0271 ,  B81B2203/0127 ,  B81B2203/0163

Abstract: An ultrasonic MEMS acoustic transducer formed in a body of semiconductor material having first and second surfaces opposite to one another. A first cavity extends in the body and delimits at the bottom a sensitive portion, which extends between the first cavity and the first surface of the body. The sensitive portion houses a second cavity and forms a membrane that extends between the second cavity and the first surface of the body. An elastic supporting structure extends between the sensitive portion and the body and is suspended over the first cavity.

公开(公告)号：US11808574B2

公开(公告)日：2023-11-07

申请号：US17700275

申请日：2022-03-21

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Gabriele Gattere ,  Carlo Valzasina ,  Luca Giuseppe Falorni

IPC: G01C19/5747 ,  G01C19/5712 ,  H01G5/011 ,  G01C25/00 ,  B81C1/00 ,  G01C19/58

CPC classification number: G01C19/5747 ,  B81C1/00158 ,  G01C19/5712 ,  G01C25/00 ,  H01G5/011 ,  G01C19/58 ,  Y10T29/49169

Abstract: A multi-axis MEMS gyroscope includes a micromechanical detection structure having a substrate, a driving-mass arrangement, a driven-mass arrangement with a central window, and a sensing-mass arrangement which undergoes sensing movements in the presence of angular velocities about a first horizontal axis and a second horizontal axis. A sensing-electrode arrangement is fixed with respect to the substrate and is set underneath the sensing-mass arrangement. An anchorage assembly is set within the central window for constraining the driven-mass arrangement to the substrate at anchorage elements. The anchorage assembly includes a rigid structure suspended above the substrate that is elastically coupled to the driven mass by elastic connection elements at a central portion, and is coupled to the anchorage elements by elastic decoupling elements at end portions thereof.