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    Gas phase silicon etching with bromine trifluoride
    42.
    发明授权
    Gas phase silicon etching with bromine trifluoride 有权
    用三氟化硼气相硅蚀刻

    公开(公告)号：US06436229B2

    公开(公告)日：2002-08-20

    申请号：US09741403

    申请日：2000-12-19

    申请人： Yu-Chong Tai ,  Xuan-Oi Wang

    发明人： Yu-Chong Tai ,  Xuan-Oi Wang

    IPC分类号： B44C122

    CPC分类号： B81C1/00531 ,  B81C99/0025 ,  B81C2201/0132 ,  B81C2201/0138 ,  H01J2237/3344 ,  H01L21/30604 ,  H01L21/3065 ,  H01L21/32135 ,  H01L21/67069

    摘要： An apparatus and method for gas-phase bromine trifluoride (BrF3) silicon isotropic room temperature etching system for both bulk and surface micromachining. The gas-phase BrF3 can be applied in a pulse mode and in a continuous flow mode. The etching rate in pulse mode is dependent on gas concentration, reaction pressure, pulse duration, pattern opening area and effective surface area.

    摘要翻译： 用于体相和表面微加工的气相溴化三氟化硼（BrF 3）硅各向同性室温蚀刻系统的装置和方法。 气相BrF3可以以脉冲模式和连续流动模式施加。 脉冲模式下的蚀刻速率取决于气体浓度，反应压力，脉冲持续时间，图案开口面积和有效表面积。

    Microbellows actuator
    45.
    发明授权
    Microbellows actuator 有权
    微型致动器

    公开(公告)号：US6146543A

    公开(公告)日：2000-11-14

    申请号：US427513

    申请日：1999-10-26

    申请人： Yu-Chong Tai ,  Xing Yang

    发明人： Yu-Chong Tai ,  Xing Yang

    IPC分类号： B81B3/00 ,  B82B3/00 ,  H01L21/00 ,  H01L29/82

    CPC分类号： B81B3/007 ,  B81B2201/031

    摘要： A micromachined multi-layered microbellows-style actuator capable of delivering larger deflections compared to a single layered flat membrane of comparable size. Anchor structures are disclosed that improve the strength of the microbellows membrane. A characterization apparatus is used to measure microbellows membrane performance. Thermopneumatic actuators having a resistive heater chip are also disclosed. The microbellows membrane is manufactured by alternating deposition of structural layers and sacrificial layers on a substrate. The structural layers can be made of silicon nitride and the sacrificial layers can be made of polysilicon. The substrate is etched from the back to form an opening exposing the sacrificial layers, and then the membrane is released by etching away the sacrificial layers.

    摘要翻译： 与具有相似尺寸的单层平膜相比，微加工的多层微波导式致动器能够提供更大的偏转。 公开了提高微量膜的强度的锚结构。 使用表征装置来测量微波膜的性能。 还公开了具有电阻加热器芯片的热气动执行器。 微波膜是通过在衬底上交替沉积结构层和牺牲层来制造的。 结构层可以由氮化硅制成，并且牺牲层可以由多晶硅制成。 从背面蚀刻衬底以形成暴露牺牲层的开口，然后通过蚀刻去除牺牲层来释放膜。

    NEUROMODULATION SYSTEMS AND METHODS OF USING SAME
    47.
    发明申请
    NEUROMODULATION SYSTEMS AND METHODS OF USING SAME 审中-公开

    公开(公告)号：US20180185648A1

    公开(公告)日：2018-07-05

    申请号：US15713456

    申请日：2017-09-22

    申请人： Mandheerej Nandra ,  Yu-Chong Tai

    发明人： Mandheerej Nandra ,  Yu-Chong Tai

    IPC分类号： A61N1/36 ,  A61N1/05 ,  A61B5/0488 ,  A61B5/00 ,  A61N1/378

    摘要： Neuromodulation systems are described. An example neuromodulation system includes a controller wirelessly communicatively coupled to a host computer, a signal generator communicatively coupled to the controller, and a plurality of electrodes communicatively coupled to the signal generator. The controller, in conjunction with the signal generator and the at least one electrode are configured to deliver a stimulation to a mammal based on an instruction received from the host computer. The stimulation is configured to induce voluntary movement or restore function in the mammal.