公开(公告)号：US08530259B2

公开(公告)日：2013-09-10

申请号：US13480351

申请日：2012-05-24

申请人： Dongmin Chen ,  Justin Payne ,  Li-Tien Tseng

发明人： Dongmin Chen ,  Justin Payne ,  Li-Tien Tseng

IPC分类号： H01L21/00

CPC分类号： G01C19/5719 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81C1/00238 ,  G01C25/00 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0814 ,  G01P2015/0831

摘要： A method for fabricating a micro electromechanical device includes providing a first substrate including control circuitry. The first substrate has a top surface and a bottom surface. The method also includes forming an insulating layer on the top surface of the first substrate, removing a first portion of the insulating layer so as to form a plurality of standoff structures, and bonding a second substrate to the first substrate. The method further includes thinning the second substrate to a predetermined thickness and forming a plurality of trenches in the second substrate. Each of the plurality of trenches extends to the top surface of the first substrate. Moreover, the method includes filling at least a portion of each of the plurality of trenches with a conductive material, forming the micro electromechanical device in the second substrate, and bonding a third substrate to the second substrate.

摘要翻译： 一种用于制造微机电装置的方法包括提供包括控制电路的第一基板。 第一衬底具有顶表面和底表面。 该方法还包括在第一衬底的顶表面上形成绝缘层，去除绝缘层的第一部分以形成多个间隔结构，并将第二衬底接合到第一衬底。 该方法还包括将第二衬底稀薄至预定厚度，并在第二衬底中形成多个沟槽。 多个沟槽中的每一个延伸到第一衬底的顶表面。 此外，该方法包括用导电材料填充多个沟槽中的每一个的至少一部分，在第二衬底中形成微机电器件，以及将第三衬底接合到第二衬底。

公开(公告)号：US20130167636A1

公开(公告)日：2013-07-04

申请号：US13720426

申请日：2012-12-19

申请人： Maxim Integrated Products, Inc.

发明人： Luca Coronato ,  Gabriele Cazzaniga

IPC分类号： G01C19/42

CPC分类号： G01C19/5712 ,  G01C19/42 ,  G01C19/5642 ,  G01C19/5719 ,  G01C19/5747

摘要： The present invention relates to a method for operating a rotation sensor for detecting a plurality of rates of rotation about orthogonal axes (x,y,z). The rotation sensor comprises a substrate, driving masses, X-Y sensor masses, and Z sensor masses. The driving masses are driven by drive elements to oscillate in the X-direction. The X-Y sensor masses are coupled to the driving masses, and driven to oscillate in the X-Y direction radially to a center. When a rate of rotation of the substrate occurs about the X-axis or the Y-axis, the X-Y sensor masses are jointly deflected about the Y-axis or X-axis. When a rate of rotation of the substrate occurs about the Z-axis, the X-Y sensor masses are rotated about the Z-axis, and the Z sensor masses are deflected substantially in the X-direction.

摘要翻译： 本发明涉及一种用于操作旋转传感器的方法，用于检测围绕正交轴（x，y，z）的多个旋转速率。 旋转传感器包括基板，驱动块，X-Y传感器块和Z传感器块。 驱动质量由驱动元件驱动以在X方向上振荡。 X-Y传感器质量联接到驱动质量块，并被驱动以沿X-Y方向径向振荡到中心。 当基板绕X轴或Y轴发生旋转速度时，X-Y传感器质量围绕Y轴或X轴共同偏转。 当基板绕Z轴发生转动速度时，X-Y传感器质量绕Z轴旋转，Z传感器质量基本上在X方向偏转。

公开(公告)号：US08418555B2

公开(公告)日：2013-04-16

申请号：US12492915

申请日：2009-06-26

申请人： Michael Foster ,  Shifang Zhou

发明人： Michael Foster ,  Shifang Zhou

IPC分类号： G01P15/125

CPC分类号： G01P15/0802 ,  G01C19/5719 ,  G01P15/125 ,  G01P15/131 ,  Y10T29/49009

摘要： A bi-directional, out-of-plane electrostatic comb drive apparatus including two electrically independent sets of stator comb tines; and a method for fabricating an out-of-plane comb drive with stacked sets of stator comb tines. A first set of stator comb tines is offset from a second set of stator comb tines. A set of rotor comb tines interleaves with both sets of stator comb tines. A first voltage applied to the first set of stator comb tines operates to pull the rotor tines toward the first set of stator comb tines. A second voltage applied to the second set of stator comb tines operates to pull the rotor tines toward the second set of stator comb tines, enabling bi-directional operation. A fabrication method is disclosed that enables fabrication of the first and second sets of stator comb tines that are mechanically and electrically independent and interleaved by the rotor comb tines.

摘要翻译： 一种双向，平面外的静电梳驱动装置，包括两组电独立的定子梳齿组; 以及用于制造具有堆叠的定子梳齿组的平面外梳齿驱动的方法。 第一组定子梳齿偏离第二组定子梳齿。 一组转子梳齿与两组定子梳齿交错。 施加到第一组定子梳齿上的第一电压用于将转子尖齿拉向第一组定子梳齿。 施加到第二组定子梳齿上的第二电压用于将转子尖齿拉向第二组定子梳齿，从而实现双向操作。 公开了一种制造方法，其能够制造由转子梳齿机械和电气独立和交错的第一组和第二组定子梳齿。

公开(公告)号：US20130069621A1

公开(公告)日：2013-03-21

申请号：US13676679

申请日：2012-11-14

申请人： Seiko Epson Corporation

发明人： Kenji SATO

IPC分类号： G01P1/00

CPC分类号： G01C19/5649 ,  G01C19/56 ,  G01C19/5719

摘要： An angular velocity detection circuit is connected to a resonator for making excited vibration on the basis of a drive signal and detects an angular velocity. The angular velocity detection circuit includes: a self-vibration component extraction unit that receives, from the resonator, a detection signal including an angular velocity component based on a Coriolis force and a self-vibration component based on the excited vibration of the resonator and extracts the self-vibration component from the detection signal; a direct-current conversion unit including an integration unit that integrates an output signal of the self-vibration component extraction unit; and an offset addition unit that adds an offset value to an output signal of the direct-current conversion unit.

摘要翻译： 角速度检测电路连接到谐振器，用于基于驱动信号进行激励振动并检测角速度。 角速度检测电路包括：自振部件提取单元，其从谐振器接收包括基于科里奥利力的角速度分量的检测信号和基于共振器的激发振动的提取物的自振分量 检测信号的自振分量; 直流转换单元，其包括积分单元，其对自振部件提取单元的输出信号进行积分; 以及偏移加法单元，其将偏移值与直流转换单元的输出信号相加。

公开(公告)号：US08383442B2

公开(公告)日：2013-02-26

申请号：US13237838

申请日：2011-09-20

申请人： Michael Foster ,  Mark Williams ,  Mark Eskridge

发明人： Michael Foster ,  Mark Williams ,  Mark Eskridge

IPC分类号： H01L21/00

CPC分类号： H01L29/84 ,  B81B1/00 ,  B81B2201/0242 ,  B81B2203/0307 ,  B81B2207/07 ,  B81C1/00039 ,  G01C19/5719

摘要： Methods of anchoring components of a Micro-Electro-Mechanical Systems (MEMS) device to a substrate. An exemplary embodiment has a trace anchor bonded to a substrate, a device anchor bonded to the substrate, and an anchor flexure configured to flexibly couple the trace anchor and the device anchor to substantially prevent transmission of a stress induced in the trace anchor from being transmitted to the device anchor.

摘要翻译： 将微机电系统（MEMS）装置的部件锚固到基板上的方法。 示例性实施例具有结合到基底的迹线锚固件，结合到基底的装置锚固件和锚构件挠曲件，其构造成柔性地联接轨迹锚和装置锚固件，以基本上防止在轨迹锚中感应的应力的传递不被传递 到设备锚点。

公开(公告)号：US20130031977A1

公开(公告)日：2013-02-07

申请号：US13641663

申请日：2011-04-19

申请人： Volker Kempe

发明人： Volker Kempe

IPC分类号： G01C19/56

CPC分类号： G01C19/5747 ,  G01C19/56 ,  G01C19/5642 ,  G01C19/5656 ,  G01C19/5719

摘要： The invention relates to a micro-gyroscope for detecting motions relative to an X and/or Y and Z axis, particularly as a 3D, 5D, or 6D sensor. Sample masses are disposed uniformly about an anchor and can be driven radially relative to the central anchor. Anchor springs are disposed to attach the sample masses to a substrate, and these sample masses can be deflected both radially within and out of the X-Y plane. A sensor mass is disposed on one of the sample masses by means of sensor springs, and the sensor springs allow deflection of the sensor mass within the plane of the sample mass, and orthogonal to the radial drive direction of the sample masses. Drive elements oscillate these sample masses in the X-Y plane, and sensor elements captures the defection of the sample masses due to the Coriolis forces generated when the substrate is rotated.

摘要翻译： 本发明涉及用于检测相对于X和/或Y和Z轴的运动的微陀螺仪，特别是作为3D，5D或6D传感器。 样品质量均匀地围绕锚固件设置并且可以相对于中心锚向径向驱动。 锚固弹簧被设置成将样品质量块附着到基底上，并且这些样品质量可以径向地偏转到X-Y平面内和外。 传感器质量通过传感器弹簧设置在一个样品质量上，并且传感器弹簧允许传感器质量在样品质量平面内偏转，并与样品质量的径向驱动方向垂直。 驱动元件在X-Y平面上振荡这些样品质量，传感器元件捕获由于在旋转基板时产生的科里奥利力产生的样品质量的偏差。

公开(公告)号：US08368387B2

公开(公告)日：2013-02-05

申请号：US12920682

申请日：2008-10-28

申请人： Nobuaki Konno

发明人： Nobuaki Konno

IPC分类号： G01P15/00 ,  G01P15/08

CPC分类号： G01P15/0802 ,  B81B7/0048 ,  B81B2201/0235 ,  B81B2201/0242 ,  G01C19/5719 ,  G01P3/22 ,  G01P15/0888 ,  G01P15/125 ,  G01P15/14 ,  G01P15/18 ,  G01P2015/0831 ,  H01L29/84

摘要： An acceleration sensor includes a substrate, first and second torsion beams, first and second detection frames, first and second detection electrodes, first and second link beams, and an inertial mass body. The first and second torsion beams are distorted around the first and second torsion axes. The first and second detection frames are rotated about the first and second torsion axes. The first and second detection electrodes detect an angle formed between the substrate and each of the first and second detection frames. The first link beam is on a first axis located at a position shifted from a position of the first torsion axis to one end side of the first detection frame along a direction crossing the first torsion axis. The second link beam is on a second axis located at a position shifted from a position of the second torsion axis in a direction identical to the direction of shift from the position of the first torsion axis.

摘要翻译： 加速度传感器包括基板，第一和第二扭转梁，第一和第二检测框架，第一和第二检测电极，第一和第二连杆梁以及惯性质量体。 第一和第二扭转梁围绕第一和第二扭转轴线变形。 第一和第二检测框围绕第一和第二扭转轴线旋转。 第一和第二检测电极检测基板与第一和第二检测框架中的每一个之间形成的角度。 第一连杆梁位于沿着与第一扭转轴相交叉的方向位于从第一扭转轴位置到第一检测框架的一端侧的位置的第一轴上。 第二连杆梁位于从与第一扭转轴的位置相同的方向与第二扭转轴的位置偏移的位置的第二轴上。

公开(公告)号：US08365597B2

公开(公告)日：2013-02-05

申请号：US12723971

申请日：2010-03-15

申请人： Teruhisa Akashi ,  Yutaka Nonomura ,  Motohiro Fujiyoshi ,  Hirofumi Funabashi

发明人： Teruhisa Akashi ,  Yutaka Nonomura ,  Motohiro Fujiyoshi ,  Hirofumi Funabashi

IPC分类号： G01P15/00

CPC分类号： G01C19/5719 ,  G01P2015/082

摘要： An apparatus with a second movable portion that moves along an x-axis direction and a z-axis direction and a first movable portion that only moves along the z-axis direction is disclosed. The apparatus is provided with a fixed portion fixed to a support portion, a plurality of first spring portions connected to the fixed portion, a first movable portion connected to the plurality of first spring portions, a second spring portion connected to the first movable portion, and a second movable portion connected to the second spring portion. A spring constant of each of the plurality of first spring portions in the z-axis direction is lower than spring constants of each of the plurality of first spring portions in the x-axis and a y-axis directions respectively, and a spring constant of the second spring portion in the x-axis direction is lower than spring constants of the second spring portion in the y-axis and the z-axis directions respectively. The first movable portion is configured to move along the z-axis but not to move along the x-axis and the y-axis nor to rotate around the z-axis, and the second movable portion is configured to move along the x-axis and the z-axis with respect to the support portion.

摘要翻译： 公开了一种具有沿x轴方向和z轴方向移动的第二可移动部分和仅沿着z轴方向移动的第一可动部分的装置。 该装置设置有固定到支撑部分的固定部分，连接到固定部分的多个第一弹簧部分，连接到多个第一弹簧部分的第一可动部分，连接到第一可动部分的第二弹簧部分， 以及与第二弹簧部连接的第二可动部。 多个第一弹簧部分中的每一个在z轴方向上的弹簧常数分别低于多个第一弹簧部分在x轴和y轴方向上的弹簧常数，弹簧常数 x轴方向上的第二弹簧部分分别低于第二弹簧部分在y轴和z轴方向上的弹簧常数。 第一可移动部分被配置为沿着z轴移动但不沿着x轴和y轴移动，也不围绕z轴旋转，并且第二可移动部分构造成沿x轴移动 和z轴相对于支撑部分。

公开(公告)号：US20120291549A1

公开(公告)日：2012-11-22

申请号：US13564615

申请日：2012-08-01

申请人： Joseph SEEGER ,  Bruno BOROVIC

发明人： Joseph SEEGER ,  Bruno BOROVIC

IPC分类号： G01C19/5719

CPC分类号： G01C19/5712 ,  G01C19/56 ,  G01C19/5719 ,  G01C19/574

摘要： An angular velocity sensor including a drive extension mode. In one aspect, an angular rate sensor includes a base and at least three masses disposed substantially in a plane parallel to the base, the masses having a center of mass. At least one actuator drives the masses in an extension mode, such that in the extension mode the masses move in the plane simultaneously away or simultaneously towards the center of mass. At least one transducer senses at least one Coriolis force resulting from motion of the masses and angular velocity about at least one input axis of the sensor. Additional embodiments can include a linkage that constrains the masses to move in the extension mode.

摘要翻译： 包括驱动器扩展模式的角速度传感器。 一方面，角速度传感器包括基部和基本上设置在平行于基部的平面中的至少三个质量，质量块具有质心。 至少一个致动器以延伸模式驱动质量，使得在延伸模式中，质量在平面中同时移动或同时移向质心。 至少一个换能器感测由质量的运动和围绕传感器的至少一个输入轴线的角速度产生的至少一个科里奥利力。 另外的实施例可以包括限制质量以伸展模式移动的连杆。

公开(公告)号：US20120274176A1

公开(公告)日：2012-11-01

申请号：US13282774

申请日：2011-10-27

申请人： Bertrand Leverrier ,  Olivier Lefort ,  Andre Boura ,  Bernard Chaumet

发明人： Bertrand Leverrier ,  Olivier Lefort ,  Andre Boura ,  Bernard Chaumet

IPC分类号： H02N1/00

CPC分类号： B81B7/0048 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2203/0109 ,  G01C19/5719

摘要： The micro-electro-mechanical system is provided with at least two separate anchoring elements (F1, F2) designed to be bound to a support. A anchoring element (F1, F2) is solidly linked to at least one beam (P1, P2) that can be deformed in bending, and two beams (P1, P2) respectively linked to two distinct anchoring elements (F1, F2) have different directions. A beam has a length L, a thickness e, and a height h, such that the stiffnesses KL in the directions of the length and of the height Kh are large and the stiffness in the direction of the thickness Ke is small.

摘要翻译： 微电机系统设置有至少两个分离的锚定元件（F1，F2），其设计成与支撑件结合。 锚固元件（F1，F2）牢固地连接到可以弯曲变形的至少一个梁（P1，P2），并且分别连接到两个不同的锚定元件（F1，F2）的两个梁（P1，P2）具有不同的 方向。 梁具有长度L，厚度e和高度h，使得在长度方向和高度Kh方向上的刚度KL大，并且厚度Ke方向上的刚度小。