公开(公告)号：US09273999B2

公开(公告)日：2016-03-01

申请号：US14400686

申请日：2013-05-08

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Takashi Kasahara ,  Katsumi Shibayama

IPC: G01C9/00 ,  G01B9/02 ,  H01L21/00 ,  B29C65/00 ,  G02B27/00 ,  G02B1/10 ,  G03B21/56 ,  G01J3/26 ,  G01J3/36 ,  G01J3/45

CPC classification number: G01J3/26 ,  G01J3/0259 ,  G01J3/0291 ,  G01J3/36 ,  G01J3/45

Abstract: A spectroscopic sensor 1A comprises an interference filter unit 20A having a cavity layer 21 and first and second mirror layers 22, 23 and a light detection substrate 30 having a light-receiving surface 32a for receiving light transmitted through the interference filter unit 20A. The interference filter unit 20A has a first filter region 24 corresponding to the light-receiving surface 32a and a ring-shaped second filter region 25 surrounding the first filter region 24. The distance between the first and second mirror layers 22, 23 varies in the first filter region 24 and is fixed in the second filter region 25.

Abstract translation: 分光传感器1A包括具有空腔层21和第一和第二镜层22,23的干涉滤光器单元20A和具有用于接收透过干涉滤光器单元20A的光的光接收表面32a的光检测基板30。 干涉滤光器单元20A具有对应于光接收表面32a的第一滤光区域24和围绕第一滤光区域24的环形第二滤光区域25.第一和第二镜层22,23之间的距离在 第一过滤器区域24并固定在第二过滤器区域25中。

公开(公告)号：US20160011049A1

公开(公告)日：2016-01-14

申请号：US14748430

申请日：2015-06-24

Applicant: Robert Furstenberg ,  Chris Kendziora ,  Michael Papantonakis ,  R. Andrew McGill ,  Viet K. Nguyen ,  Graham K. Hubler

Inventor： Robert Furstenberg ,  Chris Kendziora ,  Michael Papantonakis ,  R. Andrew McGill ,  Viet K. Nguyen ,  Graham K. Hubler

IPC: G01J3/28 ,  G01J3/443 ,  G01J3/02 ,  G01J3/45

CPC classification number: G01J3/2823 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/443 ,  G01J3/45 ,  G01J5/60 ,  G01J2003/2826 ,  G01N21/171 ,  G01N21/3563 ,  G01N21/41 ,  G01N21/45 ,  G01N2021/1714 ,  G01N2021/1725 ,  G01N2021/1731 ,  G01N2021/393 ,  G02B21/0028 ,  G02B21/008

Abstract: A non-destructive method for chemical imaging with ˜1 nm to 10 μm spatial resolution (depending on the type of heat source) without sample preparation and in a non-contact manner. In one embodiment, a sample undergoes photo-thermal heating using an IR laser and the resulting increase in thermal emissions is measured with either an IR detector or a laser probe having a visible laser reflected from the sample. In another embodiment, the infrared laser is replaced with a focused electron or ion source while the thermal emission is collected in the same manner as with the infrared heating. The achievable spatial resolution of this embodiment is in the 1-50 nm range.

Abstract translation: 用于化学成像的非破坏性方法，具有〜1 nm至10μm的空间分辨率（取决于热源的类型），无需样品制备和非接触式。 在一个实施例中，样品使用IR激光进行光热加热，并且用具有从样品反射的可见激光的IR检测器或激光探针测量所得到的热发射增加。 在另一个实施例中，红外激光被聚焦的电子或离子源代替，同时以与红外线加热相同的方式收集热发射。 该实施例的可实现的空间分辨率在1-50nm范围内。

公开(公告)号：US09217859B2

公开(公告)日：2015-12-22

申请号：US14450835

申请日：2014-08-04

Applicant: Dimensional Photonics International, Inc.

Inventor： Robert F. Dillon ,  Neil H. K. Judell ,  Timothy I. Fillion ,  Gurpreet Singh ,  Nathan E. Wallace

IPC: G03H1/26 ,  G06K9/00 ,  G01J1/20 ,  G01J1/34 ,  G02B26/06 ,  G01B11/24 ,  G01B11/25 ,  G02B21/36 ,  G02B27/00 ,  G02B5/32 ,  G01J3/26 ,  G01J3/02 ,  G06T7/00 ,  G01J3/45

CPC classification number: G02B26/06 ,  G01B11/2441 ,  G01B11/2527 ,  G01J3/0229 ,  G01J3/26 ,  G01J3/45 ,  G02B5/32 ,  G02B21/361 ,  G02B27/0068 ,  G02B27/0087 ,  G02B2207/117 ,  G06T2200/04 ,  G06T2200/08

Abstract: Described are a method and apparatus for high-speed phase shifting of an optical beam. A transparent plate having regions of different optical thickness is illuminated by an optical beam along a path of incidence that extends through the regions. The transparent plate can be moved or the optical beam can be steered to generate the path of incidence. The optical beam exiting the transparent plate has an instantaneous phase value according to the region in which the optical beam is incident. Advantageously, the phase values are repeatable and stable regardless of the location of incidence of the optical beam within the respective regions, and phase changes at high modulation rates are possible. The method and apparatus can be used to modulate a phase difference of a pair of coherent optical beams such as in an interferometric fringe projection system.

Abstract translation: 描述了用于光束的高速相移的方法和装置。 具有不同光学厚度的区域的透明板被沿着延伸穿过该区域的入射路径的光束照射。 可以移动透明板或者使光束转向以产生入射路径。 离开透明板的光束根据光束入射的区域具有瞬时相位值。 有利地，无论光束在各个区域内的入射位置如何，相位值都是可重复和稳定的，并且高调制速率下的相位变化是可能的。 该方法和装置可以用于调制一对相干光束的相位差，例如在干涉条纹投影系统中。

公开(公告)号：US20150338351A1

公开(公告)日：2015-11-26

申请号：US14758914

申请日：2014-01-09

Applicant: International Moisture Analysers Limited

Inventor： Paul Stockwell ,  David Widdup ,  Michael Foster ,  Jonathan Storey

IPC: G01N21/85 ,  G01J3/44 ,  G01N21/65

CPC classification number: G01N21/45 ,  G01J3/4412 ,  G01J3/45 ,  G01N21/65 ,  G01N21/85 ,  G01N21/8507

Abstract: An optical chemical analyser comprises a source of a first amount of radiation (46), an optics module configured to direct the first amount of radiation such that it is incident on or passes though a target (14) at a target location, the optics module further being configured to receive a second amount of Raman scattered radiation from the target and direct the second amount of radiation (206) to a Spatial Interference Fourier Transform (SIFT) module, the SIFT module including a first dispersive element (216) and a second dispersive element (218), the SIFT module being configured such that a portion of the second amount of radiation is received by the first dispersive element and interferes with a portion of the second amount of radiation received by the second dispersive element to form an interference pattern; the SIFT module further comprising a detector (48) configured to capture an image of at least a portion of the interference pattern and produce a detector signal (226) based on the captured image; and a processor configured to receive the detector signal from the detector and perform a Fourier transform on the detector signal to thereby obtain a frequency spectrum of the second amount of radiation.

Abstract translation: 光学化学分析仪包括第一辐射量（46）的源，光学模块，被配置为引导第一量的辐射，使得其在目标位置入射或穿过目标（14），光学模块 进一步被配置为从所述目标接收第二量的拉曼散射辐射，并将所述第二辐射量（206）引导到空间干涉傅立叶变换（SIFT）模块，所述SIFT模块包括第一色散元件（216）和第二色散元件 色散元件（218），SIFT模块被配置为使得第二量的辐射的一部分被第一色散元件接收并且干扰由第二色散元件接收的第二数量的辐射的一部分以形成干涉图案 ; 所述SIFT模块还包括检测器（48），其被配置为捕获所述干扰图案的至少一部分的图像，并且基于所捕获的图像产生检测器信号（226）; 以及处理器，被配置为从所述检测器接收所述检测器信号，并对所述检测器信号执行傅里叶变换，从而获得所述第二辐射量的频谱。

公开(公告)号：US09184102B2

公开(公告)日：2015-11-10

申请号：US14494981

申请日：2014-09-24

Applicant: NOVA MEASURING INSTRUMENTS LTD.

Inventor： Moshe Finarov ,  Boaz Brill

IPC: G01B11/14 ,  H01L21/66 ,  G01B11/24 ,  G01N21/21 ,  G01B9/02 ,  G01J3/45

CPC classification number: G01B11/24 ,  G01B9/02087 ,  G01J3/45 ,  G01N21/21 ,  H01L22/12 ,  H01L22/20

Abstract: A method and system are presented for determining a line profile in a patterned structure, aimed at controlling a process of manufacture of the structure. The patterned structure comprises a plurality of different layers, the pattern in the structure being formed by patterned regions and un-patterned regions. At least first and second measurements are carried out, each utilizing illumination of the structure with a broad wavelengths band of incident light directed on the structure at a certain angle of incidence, detection of spectral characteristics of light returned from the structure, and generation of measured data representative thereof. The measured data obtained with the first measurement is analyzed, and at least one parameter of the structure is thereby determined. Then, this determined parameter is utilized, while analyzing the measured data obtained with the second measurements enabling the determination of the profile of the structure.

公开(公告)号：US09182280B1

公开(公告)日：2015-11-10

申请号：US14455212

申请日：2014-08-08

Applicant: Thermo Scientific Portable Analytical Instruments Inc.

Inventor： Craig M. Gardner ,  Michael Burka

IPC: G01N21/35 ,  G01J3/02

CPC classification number: G01N21/552 ,  G01J3/28 ,  G01J3/45 ,  G01J2003/2873 ,  G01N21/15 ,  G01N21/274 ,  G01N2021/3595

Abstract: Featured is a method for reducing frequency of taking background spectra in FTIR or FTIR-ATR spectroscopy. Such a method includes determining if there is a pre-existing reference spectrum available and if such a reference spectrum is available, acquiring a present reference scan before acquiring a sample scan. The method also includes comparing the present reference scan with the pre-existing reference spectrum to determine if there is one or more non-conformities therebetween and if there is/are one or more nonconformities, determining if the one or more non-conformities are resolvable or not. If the one or more non-conformities are resolvable; resolve each non-conformity in a determined manner and thereafter acquiring a scan of the sample, and if the non-conformities are not resolvable, then acquiring a new reference sample and thereafter acquiring a scan of the sample.

Abstract translation: 特色是在FTIR或FTIR-ATR光谱学中降低拍摄背景光谱频率的方法。 这种方法包括确定是否存在可用的预先存在的参考频谱，并且如果这样的参考频谱可用，则在获取样本扫描之前获取当前的参考扫描。 该方法还包括将本参考扫描与预先存在的参考光谱进行比较，以确定其间是否存在一个或多个不一致性，并且如果存在/是一个或多个不一致性，则确定一个或多个不一致性是否可解析 或不。 如果一个或多个不合格是可解决的; 以确定的方式解决每个不合格，然后获取样本的扫描，并且如果不合格不能解析，则获取新的参考样本，然后获取样本的扫描。

公开(公告)号：US20150316416A1

公开(公告)日：2015-11-05

申请号：US14700613

申请日：2015-04-30

Applicant: Seiko Epson Corporation

Inventor： Tatsuaki FUNAMOTO ,  Tetsuo TATSUDA ,  Akira SANO

IPC: G01J3/26 ,  G01J3/45 ,  G01J3/28

CPC classification number: G01J3/26 ,  G01J3/0208 ,  G01J3/2823 ,  G01J3/45

Abstract: An optical module includes a variable wavelength interference filter that has a pair of reflection films facing one another, and that emits light with a wavelength according to the gap dimensions of the pair of reflection films; an incident side optical system as a negative power lens group that guides an incident luminous flux to the variable wavelength interference filter; and a light guiding optical system as a positive power lens group on which a luminous flux passing through the variable wavelength interference filter is incident, in which the incident side optical system guides the incident luminous flux to the variable wavelength interference filter as a luminous flux in which the principal ray is parallel with respect to the optical axis (central optical axis) orthogonal to the pair of reflection films and that is scattered with respect to the principal ray, and the light guiding optical system makes the luminous flux scattered with respect to the principal ray a parallel luminous flux.

Abstract translation: 光学模块包括可变波长干涉滤光器，该可变波长干涉滤光器具有彼此面对的一对反射膜，并且发射具有根据该对反射膜的间隙尺寸的波长的光; 将入射光束引导到可变波长干涉滤光器的负功率透镜组的入射侧光学系统; 以及作为正光焦度透镜组的光导系统，其中通过可变波长干涉滤光器的光束入射，其中入射侧光学系统将入射光束引导到可变波长干涉滤光器作为光通量 主光线相对于与该对反射膜正交的光轴（中心光轴）平行，并且相对于主光线散射，导光光学系统使光束相对于 主光线平行光通量。

公开(公告)号：US09170599B2

公开(公告)日：2015-10-27

申请号：US13290982

申请日：2011-11-07

Applicant: Aydogan Ozcan ,  Michel J. F. Digonnet ,  Gordon S. Kino

Inventor： Aydogan Ozcan ,  Michel J. F. Digonnet ,  Gordon S. Kino

IPC: G01J11/00 ,  G01J3/45 ,  G06E3/00

CPC classification number: G06E3/003 ,  G01J3/45 ,  G01J11/00

Abstract: A method utilizes an optical image processing system. The method includes calculating a product of (i) a measured magnitude of a Fourier transform of a complex transmission function of an object or optical image and (ii) an estimated phase term of the Fourier transform of the complex transmission function. The method further includes calculating an inverse Fourier transform of the product, wherein the inverse Fourier transform is a spatial function. The method further includes calculating an estimated complex transmission function by applying at least one constraint to the inverse Fourier transform.

Abstract translation: 一种方法利用光学图像处理系统。 该方法包括：计算（i）物体或光学图像的复数传播函数的傅里叶变换的测量幅度和（ii）复数传递函数的傅立叶变换的估计相位项的乘积。 该方法还包括计算乘积的逆傅里叶变换，其中逆傅立叶变换是空间函数。 该方法还包括通过对傅里叶逆变换应用至少一个约束来计算估计的复传输函数。

公开(公告)号：US20150293005A1

公开(公告)日：2015-10-15

申请号：US14639258

申请日：2015-03-05

Applicant: ExxonMobil Chemical Patents Inc.

Inventor： Jay L. Reimers

IPC: G01N15/02 ,  G01J3/45

CPC classification number: G01N15/0205 ,  G01J3/45 ,  G01N21/35

Abstract: This invention relates to a method for the determination of the average particle size or particle size distribution of a material in a gas phase reactor comprising: 1) analyzing the average particle size and particle size distribution of a baseline composition using the method described in ASTM D1921; 2) analyzing the average particle size and particle size distribution of said baseline composition using an FT-NIR analysis technique; 3) preparing a calibration matrix by comparing results from said reference analytical technique to the results from said FT-NIR analysis technique; 4) analyzing the material using an FT-NIR technique; and 5) identifying and quantifying the type and content of particles present in the material by comparing spectral data obtained from said FT-NIR technique of the material to said calibration matrix.This invention also relates to a process for determining polymer properties in a polymerization reactor system using such techniques.

Abstract translation: 本发明涉及用于确定气相反应器中材料的平均粒度或粒度分布的方法，包括：1）使用ASTM D1921中所述的方法分析基准组合物的平均粒径和粒度分布 ; 2）使用FT-NIR分析技术分析所述基线组合物的平均粒度和粒度分布; 3）通过比较所述参考分析技术的结果与所述FT-NIR分析技术的结果来制备校准矩阵; 4）使用FT-NIR技术分析材料; 以及5）通过将从所述材料的所述FT-NIR技术获得的光谱数据与所述校准矩阵进行比较来识别和定量存在于所述材料中的颗粒的类型和含量。 本发明还涉及使用这种技术在聚合反应器系统中测定聚合物性质的方法。

公开(公告)号：US20150285683A1

公开(公告)日：2015-10-08

申请号：US14677470

申请日：2015-04-02

Applicant: François Ouellette

Inventor： François Ouellette

IPC: G01J3/18 ,  G01J3/02 ,  G01J3/45

CPC classification number: G01D5/35354 ,  G01D5/35383 ,  G01J3/0218 ,  G01J3/1895 ,  G01J3/45

Abstract: There is described a sensor apparatus. It comprises an interrogator comprising a light source emitting pulses having a wavelength about an average wavelength; and a fiber Bragg grating (FBG) arrangement. The arrangement comprises a FBG sensor array comprising a plurality of FBG sensors on an optical fiber and being for reflecting the pulses, thereby producing reflected pulses at each one of the FBG sensors. FBG sensors of a given FBG sensor array have a spatial separation therebetween which is sufficient to allow, at a receiver, a temporal discrimination between the reflected pulses produced by each one of the FBG sensors. The FBG sensor array has a spectral reflection window which comprises the average wavelength.

Abstract translation: 描述了传感器装置。 它包括一个询问器，该询问器包括发射波长约为平均波长的脉冲的光源; 和光纤布拉格光栅（FBG）布置。 该装置包括一个FBG传感器阵列，其包括在光纤上的多个FBG传感器，用于反射脉冲，从而在每个FBG传感器处产生反射的脉冲。 给定FBG传感器阵列的FBG传感器之间具有空间间隔，其足以允许在接收器处由每个FBG传感器产生的反射脉冲之间的时间辨别。 FBG传感器阵列具有包括平均波长的光谱反射窗口。