Systems and methods for pressure differential molecular spectroscopy of compressible fluids
    43.
    发明授权
    Systems and methods for pressure differential molecular spectroscopy of compressible fluids 有权
    可压缩流体的压力差分谱法的系统和方法

    公开(公告)号:US09488570B2

    公开(公告)日:2016-11-08

    申请号:US14511842

    申请日:2014-10-10

    Inventor: Vidi A. Saptari

    Abstract: Described herein is a spectroscopic system and method for measuring and monitoring the chemical composition and/or impurity content of a sample or sample stream using absorption light spectroscopy. Specifically, in certain embodiments, this invention relates to the use of sample pressure variation to alter the magnitude of the absorption spectrum (e.g., wavelength-dependent signal) received for the sample, thereby obviating the need for a reference or ‘zero’ sample. Rather than use a reference or ‘zero’ sample, embodiments described herein obtain a spectrum/signal from a sample-containing cell at both a first pressure and a second (different) pressure.

    Abstract translation: 本文描述的是使用吸收光谱测量和监测样品或样品流的化学成分和/或杂质含量的光谱系统和方法。 具体来说,在某些实施方案中,本发明涉及使用样品压力变化来改变为样品接收的吸收光谱的幅度(例如,依赖于波长的信号),从而避免了对参考或“零”样品的需要。 不是使用参考或“零”样本,本文所述的实施例在第一压力和第二(不同)压力下都从含样品的电池获得光谱/信号。

    METHOD AND APPARATUS FOR TESTING OF ENGINE COMPONENTS
    44.
    发明申请
    METHOD AND APPARATUS FOR TESTING OF ENGINE COMPONENTS 有权
    用于测试发动机部件的方法和装置

    公开(公告)号:US20160195474A1

    公开(公告)日:2016-07-07

    申请号:US14978498

    申请日:2015-12-22

    Abstract: Method and apparatus testing engine component, for blockage of one or more through-holes in a portion of a wall. The method including (i) providing a supply of test fluid, (ii) causing or permitting flow of test fluid to occur from first to second region, (iii) illuminating the second region with electromagnetic radiation to cause scattering of electromagnetic radiation by material exiting substantially non-blocked through-holes in wall portion having passed therethrough from the first to second side, (iv) detecting said scattering of electromagnetic radiation from said substantially non-blocked through-holes; and (v) comparing said detected scattering of electromagnetic radiation from said substantially non-blocked holes with known pattern of through-holes in component wall portion to determine the presence and/or location and/or identity of any blocked or partially blocked through-holes in component wall portion.

    Abstract translation: 方法和装置测试发动机部件,用于堵塞壁的一部分中的一个或多个通孔。 该方法包括(i)提供测试流体的供应,(ii)引起或允许测试流体从第一到第二区域发生的流动,(iii)用电磁辐射照射第二区域,以通过材料离开而使电磁辐射散射 从第一至第二侧通过的壁部分中的基本上未堵塞的通孔,(iv)检测来自所述基本上未堵塞的通孔的电磁辐射的散射; 和(v)将来自所述基本上未堵塞的孔的所述检测到的电磁辐射的散射与组件壁部分中的已知图案的通孔进行比较,以确定任何阻塞或部分阻挡的通孔的存在和/或位置和/或身份 在组件壁部分中。

    Cavity enhanced laser based isotopic gas analyzer
    46.
    发明授权
    Cavity enhanced laser based isotopic gas analyzer 有权
    腔增强型激光同位素气体分析仪

    公开(公告)号:US08665442B2

    公开(公告)日:2014-03-04

    申请号:US13538620

    申请日:2012-06-29

    Abstract: Systems and methods for measuring the isotope ratio of one or more trace gases and/or components of gas mixtures such as different gas species present in a gas mixture. The system includes a resonant optical cavity having two or more mirrors and containing a gas, the cavity having a free spectral range that equals the difference between frequencies of two measured absorption lines of different gas species in the gas, or of two different isotopes, divided onto an integer number. The system includes a continuous-wave tunable laser optically coupled with the resonant optical cavity and a detector system for measuring an absorption of laser light by the gas in the cavity. The detector system includes a photo-detector to measure an intensity of the intra-cavity light, or both a photo-acoustic sensor to measure photo-acoustic waves generated in the cavity and a photo-detector to measure an intensity of the intra-cavity light.

    Abstract translation: 用于测量气体混合物中存在的气体混合物(例如不同气体物质)的一种或多种痕量气体和/或组分的同位素比的系统和方法。 该系统包括具有两个或更多个反射镜并且包含气体的谐振光学腔,空腔具有等于气体中不同气体种类或两个不同同位素的两个测量的吸收线的频率之间的差的自由光谱范围 到一个整数。 该系统包括与谐振光腔光学耦合的连续波可调谐激光器和用于测量由空腔中的气体吸收激光的检测器系统。 检测器系统包括用于测量腔内光的强度的光检测器,或者用于测量在空腔中产生的光声波的光声传感器和光检测器以测量腔内的强度 光。

    CAVITY ENHANCED LASER BASED ISOTOPIC GAS ANALYZER
    47.
    发明申请
    CAVITY ENHANCED LASER BASED ISOTOPIC GAS ANALYZER 有权
    CAVITY增强型激光基于同位素气体分析仪

    公开(公告)号:US20130044314A1

    公开(公告)日:2013-02-21

    申请号:US13538620

    申请日:2012-06-29

    Abstract: Systems and methods for measuring the isotope ratio of one or more trace gases and/or components of gas mixtures such as different gas species present in a gas mixture. The system includes a resonant optical cavity having two or more mirrors and containing a gas, the cavity having a free spectral range that equals the difference between frequencies of two measured absorption lines of different gas species in the gas, or of two different isotopes, divided onto an integer number. The system includes a continuous-wave tunable laser optically coupled with the resonant optical cavity and a detector system for measuring an absorption of laser light by the gas in the cavity. The detector system includes a photo-detector to measure an intensity of the intra-cavity light, or both a photo-acoustic sensor to measure photo-acoustic waves generated in the cavity and a photo-detector to measure an intensity of the intra-cavity light.

    Abstract translation: 用于测量气体混合物中存在的气体混合物(例如不同气体物质)的一种或多种痕量气体和/或组分的同位素比的系统和方法。 该系统包括具有两个或更多个反射镜并且包含气体的谐振光学腔,空腔具有等于气体中不同气体种类或两个不同同位素的两个测量的吸收线的频率之间的差的自由光谱范围 到一个整数。 该系统包括与谐振光腔光学耦合的连续波可调谐激光器和用于测量由空腔中的气体吸收激光的检测器系统。 检测器系统包括用于测量腔内光的强度的光检测器,或者用于测量在空腔中产生的光声波的光声传感器和光检测器以测量腔内的强度 光。

    Method and apparatus for eliminating and compensating thermal transients in gas analyzer
    49.
    发明申请
    Method and apparatus for eliminating and compensating thermal transients in gas analyzer 有权
    消除和补偿气体分析仪热瞬变的方法和装置

    公开(公告)号:US20050268690A1

    公开(公告)日:2005-12-08

    申请号:US10863810

    申请日:2004-06-08

    Abstract: The invention concerns a gas analyzer comprising: a measuring volume (2), a radiation source (1) for providing a beam to pass said measuring volume; a heat sink (16) for said radiation source; at least one thermal detector (3) having a hot junction within a support structure and receiving the radiation and a cold junction for reference within the same support structure and protected from said radiation; at least one optical bandpass filter (9) between said hot junction and said radiation source; and a thermal mass (11), which is formed of a material having high thermal conductance. The thermal mass has a cavity with a bottom step (34) and a rim (32), and a first length therebetween. The support structure has a frontal edge (35) and a base plate lip (33), and a second length therebetween. There is a radial gap between the thermal mass and the support structure. Press means urge said support structure in the cavity, whereupon a more efficient thermal contact is either between said frontal edge and said bottom step, or between said base plate lip and said rim. A first thermal barrier (17) is between the heat sink and the thermal mass, and a second thermal barrier (22) surrounds the thermal mass. A shield (19) formed of a material having high thermal conductance covers said second thermal barrier and is in thermal contact with said heat sink.

    Abstract translation: 本发明涉及一种气体分析仪,包括:测量体积(2),用于提供光束以通过所述测量体积的辐射源(1) 用于所述辐射源的散热器(16); 至少一个热探测器(3),其在支撑结构内具有热接合部,并且在相同的支撑结构内接受辐射和冷接点供参考,并保护免受所述辐射; 在所述热接头和所述辐射源之间的至少一个光学带通滤波器(9); 以及由具有高导热性的材料形成的热质(11)。 热质量具有具有底部台阶(34)和边缘(32)的空腔,并且其间具有第一长度。 支撑结构具有前边缘(35)和基板唇缘(33),并且其间具有第二长度。 在热质和支撑结构之间存在径向间隙。 压制装置促使空腔中的所述支撑结构,由此在所述正面边缘和所述底部台阶之间或所述基板唇缘和所述边缘之间更有效的热接触。 第一热障(17)在散热器和热质量之间,第二热障(22)围绕热质量。 由具有高导热性的材料形成的屏蔽(19)覆盖所述第二热障,并与所述散热器热接触。

    Optical inspection equipment for semiconductor wafers with precleaning
    50.
    发明申请
    Optical inspection equipment for semiconductor wafers with precleaning 有权
    具有预清洗功能的半导体晶片的光学检测设备

    公开(公告)号:US20040100633A1

    公开(公告)日:2004-05-27

    申请号:US10717316

    申请日:2003-11-19

    Abstract: A method for improving the measurement of semiconductor wafers is disclosed. In the past, the repeatability of measurements was adversely affected due to the unpredictable growth of a layer of contamination over the intentionally deposited dielectric layers. Repeatability can be enhanced by removing this contamination layer prior to measurement. This contamination layer can be effectively removed in a non-destructive fashion by subjecting the wafer to a cleaning step. In one embodiment, the cleaning is performed by exposing the wafer to microwave radiation. Alternatively, the wafer can be cleaned with a radiant heat source. These two cleaning modalities can be used alone or in combination with each other or in combination with other cleaning modalities. The cleaning step may be carried out in air, an inert atmosphere or a vacuum. Once the cleaning has been performed, the wafer can be measured using any number of known optical measurement systems.

    Abstract translation: 公开了一种改善半导体晶片测量的方法。 在过去,由于在有意沉积的介电层上的污染层的不可预测的增长,测量的重复性受到不利影响。 在测量之前,通过去除这个污染层可以提高重复性。 通过使晶片进行清洁步骤,可以非破坏性地有效地去除该污染层。 在一个实施例中,通过将晶片暴露于微波辐射来进行清洁。 或者,可以用辐射热源清洁晶片。 这两种清洁方式可以单独使用或彼此组合使用或与其他清洁模式组合使用。 清洁步骤可以在空气,惰性气氛或真空中进行。 一旦执行了清洁,就可以使用任何数量的已知光学测量系统测量晶片。

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