公开(公告)号：US3622280A

公开(公告)日：1971-11-23

申请号：US3622280D

申请日：1968-04-26

Applicant: SIEMENS AG

Inventor： KELLER WOLFGANG

IPC: C30B13/32 ,  B01J17/10 ,  H05B5/18

CPC classification number: C30B13/32 ,  Y10T117/1068 ,  Y10T117/1072 ,  Y10T117/1088

Abstract: Device for crucible-free zone melting a crystalline rod, particularly a semiconductor rod, includes two induction heating coils annularly surrounding the crystalline rod, and driving means for adjusting the position of the induction heating coils relative to one another in a direction transverse to the rod axis. Method of using the device includes relatively moving the induction heating coils away from one another transversely to the rod axis at the junction of a seed crystal with one end of the rod so as to fuse the seed crystal to the rod, relatively moving the induction heating coils on the one hand and the rod on the other hand along the axis of the rod and simultaneously relatively displacing the induction heating coils gradually toward one another in a direction transverse to the rod axis in conformity with an outwardly flaring conical portion of the rod extending from the seed crystal, until the induction heating coils substantially coaxially surround the main cylindrical portion of the rod.

公开(公告)号：US3607110A

公开(公告)日：1971-09-21

申请号：US3607110D

申请日：1968-03-11

Applicant: SIEMENS AG

Inventor： HAAS ERNST ,  MARTIN JOACHIM ,  REUSCHEL KONRAD ,  SCHINK NORBERT ,  VOGEL CARL-HEINZ

IPC: C30B13/00 ,  B01J17/10

CPC classification number: C30B29/06 ,  C30B13/00 ,  Y10S117/90 ,  Y10T117/1076

Abstract: Apparatus comprising means for capturing carbon-containing vapor emanating from carbon-containing substances in the high vacuum environment and in the equipment for producing the high vacuum in the environment, and adsorbent means for adsorbing the carboncontaining vapor.

公开(公告)号：US3594132A

公开(公告)日：1971-07-20

申请号：US3594132D

申请日：1967-02-27

Applicant: SIEMENS AG

Inventor： KELLER WOLFGANG

IPC: C30B13/28 ,  B01J17/10

CPC classification number: C30B13/28 ,  Y10S117/91 ,  Y10S117/912 ,  Y10T117/1072

Abstract: METHOD OF CRUCIBLE-FREE ZONE MELTING A CRYSTALLINE ROD WHICH COMPRISES ROTATING A PAIR OF SPACED AND SUBSTANTIALLY VERTICALLY ALIGNED END HOLDERS SUPPORTING A CRYSTALLINE ROD THEREBETWEEN, HEATING THE ROD WITH AN ANNULAR HEATING DEVICE SURROUNDING THE ROD TO A TEMPERATURE AT WHICH A MOLTEN ZONE IS FORMED IN THE ROD DIVIDING THE ROD INTO A SUPPLY ROD PORITION BEING SUPPLIED TO THE MELT IN THE MOLTEN ZONE AND A ROD PORTION RESOLIDIFYING FROM THE MELT, RELATIVELY DISPLACING THE END HOLDERS AND THE HEATING DEVICE IN THE DIRECTION OF THE ROD AXIS AT A GIVEN RELATIVE SPEED SO THAT THE RESOLIDIFYING ROD PORTION HAS A THICKNESS OF PREDETERMINED NOMINAL VALUE, AND LATERALLY DISPLACING THE END HOLDER FOR THE SUPPLY ROD PORTION OUT OF VERTICAL ALIGNMENT WITH THE OTHER END HOLDER.

公开(公告)号：US3592611A

公开(公告)日：1971-07-13

申请号：US3592611D

申请日：1968-10-25

Applicant: SIEMENS AG

Inventor： EDER GEORG ,  EMEIS REIMER ,  KELLER WOLFGANG

IPC: C30B13/28 ,  C30B13/32 ,  B01J17/10

CPC classification number: C30B13/285 ,  C30B13/32 ,  Y10S117/911 ,  Y10T74/18656 ,  Y10T117/1084

Abstract: APPARATUS FOR REFINING A ROD ACCORDING TO THE FLOATINGZONE MELTING TECHNIQUE INCLUDES ROTARY SHAFT MEANS ADAPTED TO CARRY AND ROTATE A ROD DURING SUBJECTION THEREOF TO THE FLOATING-ZONE MELTING TECHNIQUE, PLAY-FREE WORMDRIVE MEANS OPERATIVELY CONNECTED TO THE ROTARY SHAFT MEANS FOR ROTATING THE LATTER, CARRIAGE MEANS CARRYING THE ROTARY SHAFT MEANS, BALL-BEARING GUIDE MEANS GUIDING THE CARRIAGE MEANS FOR MOVEMENT, AND ROTARY BALL-BEARING SPINDLE MEANS OPERATIVELY CONNECTED TO THE CARRIAGE MEANS FOR DISPLACING THE LATTER, SO THAT THE ROD IS MAINTAINED FREE OF MECHANICAL VIBRATIONS DURING TREATMENT OF THE ROD ACCORDING TO THE FLOATING-ZONE MELTING TECHNIQUE.

D R A W I N G

公开(公告)号：US3585008A

公开(公告)日：1971-06-15

申请号：US3585008D

申请日：1967-09-22

Applicant: SIEMENS AG

Inventor： KELLER WOLFGANG ,  KRAMER HERBERT

IPC: C30B13/20 ,  B01J17/10

CPC classification number: C30B13/20

Abstract: METHOD OF CRUCIBLE-FREE ZONE MELTING A CRYSTALLINE ROD WHICH COMPRISES SUCCESSIVELY PASSING ALONG THE ROD IN THE AXIAL DIRECTION THEREOF AN ADVANCE MELTING ZONE FORMED IN THE ROD TO A DEPTH SMALLER THAN THE RADIAL THICKNESS OF THE ROD AND A SUBSEQUENT MELTING ZONE FORMED IN THE ROD AND EXTENDING ACROSS THE ENTIRE CROSS SECTION OF THE ROD.

公开(公告)号：US3494745A

公开(公告)日：1970-02-10

申请号：US3494745D

申请日：1967-04-06

Applicant: CORNING GLASS WORKS

Inventor： HERCZOG ANDREW ,  RICE DALE W

IPC: C30B13/00 ,  C30B15/06 ,  B01J17/10 ,  B01J17/16

CPC classification number: C30B13/00 ,  C30B15/06

公开(公告)号：US4186173A

公开(公告)日：1980-01-29

申请号：US832757

申请日：1977-09-12

Applicant: Karl Jericho ,  Joachim Floymayr ,  Uwe Reimpell ,  Dieter Drechsel

Inventor： Karl Jericho ,  Joachim Floymayr ,  Uwe Reimpell ,  Dieter Drechsel

IPC: C30B13/28 ,  C30B13/32 ,  B01J17/10

CPC classification number: C30B13/32 ,  C30B13/285 ,  Y10S117/911 ,  Y10T117/1084

Abstract: Apparatus for producing monocrystals by potless zone melting, in which the monocrystal, setting out from a seed crystal, passes through a neck and a transitional zone into the main part of the monocrystal. A chamber is provided for the formation of a vacuum or a protective gas atmosphere plus a heating device for the production of the melting heat, driving means for the mechanical movements necessary for the crystal formation, a mounting for the seed crystal, and a supporting device which is applicable to the monocrystal beyond the neck, and a plurality of gripping bodies distributed about the circumference and applicable to the monocrystal radially on its substantially cylindrical surface the gripping bodies are disposed such that they first perform a radial approach to the monocrystal until a virtually force-free contact is made therewith, adapting themselves to the surface geometry and position of the monocrystal, whereupon the gripping force is increased and the gripping bodies are locked.

Abstract translation: 通过无碱区熔融制备单晶的装置，其中从晶种排出的单晶通过颈部和过渡区进入单晶的主要部分。 为了形成真空或保护气体气氛加上用于产生熔化热的加热装置，用于晶体形成所需的机械运动的驱动装置，晶种的安装以及支撑装置 其适用于超过颈部的单晶，以及分布在圆周周围的多个夹持体，并且在其基本上圆柱形的表面上径向可应用于单晶，夹持体被设置成使得它们首先对单晶进行径向接近，直到实际上 通过使其与单晶的表面几何形状和位置相适应而实现无力接触，于是增加了夹持力并且夹持体被锁定。

公开(公告)号：US4078897A

公开(公告)日：1978-03-14

申请号：US676187

申请日：1976-04-12

Applicant: Karl Jericho ,  Joachim Floymayr ,  Uwe Reimpell ,  Dieter Drechsel

Inventor： Karl Jericho ,  Joachim Floymayr ,  Uwe Reimpell ,  Dieter Drechsel

IPC: C30B13/28 ,  B01J17/10

CPC classification number: C30B13/285 ,  Y10S117/911 ,  Y10T117/1076 ,  Y10T117/1084

Abstract: Apparatus for producing monocrystals by potless zone melting, in which the monocrystal, setting out from a seed crystal, passes through a neck and a transitional zone into the main part of the monocrystal. A chamber is provided for the formation of a vacuum or a protective gas atmosphere plus a heating device for the production of the melting heat, driving means for the mechanical movements necessary for the crystal formation, a mounting for the seed crystal, and a supporting device which is applicable to the monocrystal beyond the neck, and a plurality of gripping bodies distributed about the circumference and applicable to the monocrystal radially on its substantially cylindrical surface the gripping bodies are disposed such that they first perform a radial approach to the monocrystal until a virtually force-free contact is made therewith, adapting themselves to the surface geometry and position of the monocrystal, whereupon the gripping force is increased and the gripping bodies are locked.

Abstract translation: 通过无碱区熔融制备单晶的装置，其中从晶种排出的单晶通过颈部和过渡区进入单晶的主要部分。 为了形成真空或保护气体气氛加上用于产生熔化热的加热装置，用于晶体形成所需的机械运动的驱动装置，晶种的安装以及支撑装置 其适用于超过颈部的单晶，以及分布在圆周周围的多个夹持体，并且在其基本上圆柱形的表面上径向可应用于单晶，夹持体被设置成使得它们首先对单晶进行径向接近，直到实际上 通过使其与单晶的表面几何形状和位置相适应而实现无力接触，于是增加了夹持力并且夹持体被锁定。

公开(公告)号：US4072556A

公开(公告)日：1978-02-07

申请号：US297903

申请日：1972-10-16

Applicant: Otto Schmidt

Inventor： Otto Schmidt

IPC: C30B13/20 ,  B01J17/10

CPC classification number: C30B13/20 ,  Y10T117/1084 ,  Y10T117/1088

Abstract: Device for crucible-free zone melting a crystalline rod, end-supported by holders, one of the holders being rotatable about the longitudinal axis thereof, includes an induction heating coil disposed between the end holders and coaxial to the longitudinal axis, the induction heating coil being energizable for heating a molten zone formed in the crystalline rod and comprising at least one winding disposed in a single plane, and a connecting lead to the induction heating coil, the connecting lead being formed as a partial winding and disposed outside the plane on a side thereof facing the rotatable holder; and method of operating the device.

Abstract translation: 用于无坩埚区域熔化结晶棒的装置，由支架端部支撑，其中一个保持器可围绕其纵向轴线旋转，包括设置在端部支架之间并与纵向轴线同轴的感应加热线圈，感应加热线圈 能够加热形成在所述结晶棒中的熔融区，并且包括设置在单个平面中的至少一个绕组，以及连接引线到所述感应加热线圈，所述连接引线形成为部分绕组并且设置在所述平面上 其面向可旋转保持器; 以及操作该设备的方法。

公开(公告)号：US4060392A

公开(公告)日：1977-11-29

申请号：US687711

申请日：1976-05-19

Applicant: Heinz Herzer ,  Helmut Zauhar

Inventor： Heinz Herzer ,  Helmut Zauhar

IPC: C30B13/32 ,  C30B13/28 ,  H01L21/208 ,  B01J17/10

CPC classification number: C30B13/285 ,  Y10S117/911 ,  Y10S269/903 ,  Y10T117/1084

Abstract: Device for supporting a crystalline rod during crucible-free zone melting ich comprises a zone-drawing apparatus, a rotating shaft in said apparatus, means for fastening the shaft in the apparatus, a screw bolt mounted for rotation with the shaft, the top end of the screw bolt having a bore for receiving a seed crystal, two or more swivel arms mounted adjacent to the bore and capable of being opened and closed, a ring coaxially surrounding the bolt and means for vertically moving the ring.

Abstract translation: 用于在无坩埚区域熔化期间支撑结晶棒的装置，其包括区域拉伸装置，所述装置中的旋转轴，用于将轴紧固在装置中的装置，安装成与轴一起旋转的螺栓， 所述螺栓具有用于接收晶种的孔，邻近所述孔安装并能够打开和关闭的两个或更多个旋转臂，同轴地围绕所述螺栓的环和用于垂直移动所述环的装置。