公开(公告)号：US20130279118A1

公开(公告)日：2013-10-24

申请号：US13978600

申请日：2011-12-15

申请人： Taichi Koyama ,  Takayuki Saito

发明人： Taichi Koyama ,  Takayuki Saito

IPC分类号： H05K7/20

CPC分类号： H05K7/2039 ,  C08G59/42 ,  C08K3/08 ,  C08K2003/0806 ,  C09J9/00 ,  C09J11/04 ,  C09J163/00 ,  H01L23/3737 ,  H01L24/29 ,  H01L2224/29298 ,  H01L2224/48091 ,  H01L2224/73265 ,  H01L2924/01322 ,  H01L2924/07811 ,  H01L2924/12041 ,  H01L2924/00014 ,  H01L2924/00

摘要： A thermally conductive adhesive having: a thermosetting adhesive containing a curable component and a curing agent for the curable component, and a metal filler dispersed in the thermosetting adhesive uses a silver powder and a solder powder as the metal filler. The solder powder to be used has a melting temperature lower than the thermal curing temperature of the thermally conductive adhesive and produces a high-melting-point solder alloy having a melting point higher than the melting temperature of the solder powder when the solder powder is reacted with the silver powder under thermal curing conditions of the thermally conductive adhesive. A curing agent having flux activity to the metal filler is used as the curing agent.

摘要翻译： 一种导热粘合剂，其具有：含有可固化组分的热固性粘合剂和用于可固化组分的固化剂，以及分散在热固性粘合剂中的金属填料使用银粉和焊料粉末作为金属填料。 使用的焊料粉末的熔融温度低于导热性粘合剂的热固化温度，并且当焊料粉末反应时产生熔点高于焊料粉末的熔融温度的高熔点焊料合金 在导热粘合剂的热固化条件下，银粉末。 使用对金属填充剂具有助熔活性的固化剂作为固化剂。

公开(公告)号：USD674300S1

公开(公告)日：2013-01-15

申请号：US29397275

申请日：2011-07-14

申请人： Takayuki Saito ,  Hiromu Kikawa ,  Keiji Hanzawa

设计人： Takayuki Saito ,  Hiromu Kikawa ,  Keiji Hanzawa

公开(公告)号：US08215160B2

公开(公告)日：2012-07-10

申请号：US12826061

申请日：2010-06-29

申请人： Takayuki Saito ,  Chihiro Kobayashi ,  Takayuki Yogo

发明人： Takayuki Saito ,  Chihiro Kobayashi ,  Takayuki Yogo

IPC分类号： G01M15/04

CPC分类号： G01F1/6842 ,  F02D41/187 ,  G01F5/00 ,  G01F15/02

摘要： The present invention utilizes self-heating of electronic components to improve a humidity sensing part with low environment resistance, such as a condensation problem and the like, and also to enhance the heat radiation efficiency of electronic components. The humidity sensing part is used in an intake tube of an automobile by integrating, for example, with a heating resister type mass air flow measurement device. A humidity sensing element is mounted on an electronic circuit board in a mass air flow measurement device with the temperature thereof starting to increase immediately after a sensor has been actuated. This urges the temperature of the humidity sensing element to start increasing (being heated) immediately after the sensor has been actuated. To urge the humidity sensing element to be further heated, a base plate is composed of two types of materials, resin and metal. A part of the base plate holding an area of the electronic circuit board generating a large quantity of heat is composed of the metal. A part of the base plate corresponding to the periphery of the humidity sensing part which is to be heated is composed of the resin.

摘要翻译： 本发明利用电子部件的自身加热来改善诸如冷凝问题等的低环境阻力的湿度感测部件，并且还提高电子部件的散热效率。 湿度检测部件通过集成例如加热电阻式质量空气流量测量装置而用在汽车的进气管中。 湿度感测元件安装在质量空气流量测量装置的电子电路板上，其温度在传感器被致动之后立即开始增加。 这促使湿度传感元件的温度在传感器启动后立即开始增加（被加热）。 为了促使湿度传感元件进一步加热，基板由树脂和金属的两种材料组成。 保持产生大量热量的电子电路板的区域的基板的一部分由金属构成。 与被加热的湿度感测部的周边对应的基板的一部分由树脂构成。

公开(公告)号：US20120161322A1

公开(公告)日：2012-06-28

申请号：US13163989

申请日：2011-06-20

申请人： Shunichi Wakayanagi ,  Takayuki Saito ,  Takuya Seino ,  Akira Matsuo ,  Koji Yamazaki ,  Eitaro Morimoto ,  Yohsuke Shibuya ,  Yu Sato ,  Naomu Kitano

发明人： Shunichi Wakayanagi ,  Takayuki Saito ,  Takuya Seino ,  Akira Matsuo ,  Koji Yamazaki ,  Eitaro Morimoto ,  Yohsuke Shibuya ,  Yu Sato ,  Naomu Kitano

IPC分类号： H01L29/45 ,  H01L21/285 ,  C23C16/50

CPC分类号： H01L21/76843 ,  C23C14/0641 ,  H01L21/2855 ,  H01L21/76877 ,  H01L23/53223 ,  H01L2924/0002 ,  H01L2924/00

摘要： The present invention provides an electronic component manufacturing method including a step of embedding a metal film. An embodiment of the present invention includes a first step of depositing a barrier layer containing titanium nitride on an object to be processed on which a concave part is formed and a second step of filling a low-melting-point metal directly on the barrier layer under a temperature condition allowing the low-melting-point metal to flow, by a PCM sputtering method while forming a magnetic field by a magnet unit including plural magnets which are arranged at grid points of a polygonal grid so as to have different polarities between the neighboring magnets.

摘要翻译： 本发明提供了一种电子部件制造方法，其包括嵌入金属膜的步骤。 本发明的一个实施方案包括在其上形成有凹部的待处理物体上沉积包含氮化钛的阻挡层的第一步骤和将低熔点金属直接填充在阻挡层下面的第二步骤 通过PCM溅射法，通过包括多个磁铁的磁体单元形成磁场，允许低熔点金属流动的温度条件，该多个磁体布置在多边形网格的网格点处，以便在相邻的 磁铁。

公开(公告)号：US08059278B2

公开(公告)日：2011-11-15

申请号：US12578997

申请日：2009-10-14

申请人： Zongtao Ge ,  Hideo Kanda ,  Takayuki Saito ,  Noboru Koizumi

发明人： Zongtao Ge ,  Hideo Kanda ,  Takayuki Saito ,  Noboru Koizumi

IPC分类号： G01B11/02

CPC分类号： G01M11/0271 ,  G01M11/025

摘要： The relative position of a test surface is sequentially changed from a reference position where a surface central axis is aligned with a measurement optical axis such that the measurement optical axis is sequentially moved to a plurality of annular regions obtained by dividing the test surface in a diametric direction. The test surface is rotated on a rotation axis whenever the relative position is changed. Measurement light composed of a plane wave is radiated to the rotating test surface, and a one-dimensional image sensor captures interference fringes at each of a plurality of rotational positions. The shape information of each annular region is calculated on the basis of the captured interference fringes at each rotational position, and the shape information is connected to calculate the shape information of the entire measurement region.

摘要翻译： 测试表面的相对位置从表面中心轴与测量光轴对准的参考位置顺序地改变，使得测量光轴顺序地移动到通过将测试表面分成直径而获得的多个环形区域 方向。 每当相对位置改变时，测试表面都会在旋转轴上旋转。 由平面波构成的测量光被照射到旋转测试表面，并且一维图像传感器在多个旋转位置中的每一个处捕获干涉条纹。 基于每个旋转位置处的捕获的干涉条纹来计算每个环形区域的形状信息，并且形状信息被连接以计算整个测量区域的形状信息。

公开(公告)号：US07538890B2

公开(公告)日：2009-05-26

申请号：US11144709

申请日：2005-06-06

申请人： Zongtao Ge ,  Takayuki Saito ,  Minoru Kurose

发明人： Zongtao Ge ,  Takayuki Saito ,  Minoru Kurose

IPC分类号： G01B11/02

CPC分类号： G01J9/02 ,  G01J1/4257 ,  G02B5/005

摘要： The light beam measurement apparatus comprises a beam splitter that divides a light beam emitted from a light source unit into two luminous fluxes, a semi-transmitting/reflecting surface that reflects part of one of the divided luminous fluxes back in the opposite direction to the direction of incidence as a sample luminous flux, and reflection-type reference light producing means that converts part of the luminous flux transmitted through the semi-transmitting/reflecting surface into a wavefront-shaped reference luminous flux and outputs this reference luminous flux; this light beam measurement apparatus can carry out both wavefront measurement and light beam spot characteristic measurement on a light beam simultaneously.

摘要翻译： 光束测量装置包括：分束器，其将从光源单元发射的光束分成两个光束;半透射/反射表面，其将一个分割光束的一部分反向与方向相反的方向 作为样品光通量的入射角，以及反射型参照光产生装置，其将通过半透射/反射表面透射的光束的一部分转换为波前参考光通量并输出该参考光通量; 该光束测量装置可以同时对光束进行波前测量和光束点特性测量。

公开(公告)号：US20060234503A1

公开(公告)日：2006-10-19

申请号：US10564980

申请日：2004-07-28

申请人： Kaoru Yamada ,  Takayuki Saito ,  Sumio Yabe ,  Kenya Ito ,  Masayuki Kamezawa ,  Masaya Seki ,  Ichiro Katakabe ,  Yuki Inoue

发明人： Kaoru Yamada ,  Takayuki Saito ,  Sumio Yabe ,  Kenya Ito ,  Masayuki Kamezawa ,  Masaya Seki ,  Ichiro Katakabe ,  Yuki Inoue

IPC分类号： H01L21/44 ,  B65G47/91

CPC分类号： H01L21/02052 ,  B08B1/04 ,  B08B3/02 ,  B08B2203/0229 ,  B08B2203/0288 ,  C23C18/1628 ,  C25D17/001 ,  H01L21/67028 ,  H01L21/67034 ,  H01L21/67051

摘要： The present invention relates to a substrate processing apparatus and a substrate processing method for performing a chemical liquid process, a cleaning process, a drying process, or the like while rotating a substrate such as a semiconductor wafer or a liquid crystal substrate. The present invention also relates to a substrate holding apparatus for holding and rotating a substrate. The substrate processing apparatus (1) for processing a substrate (W) while supplying a fluid to the substrate (W) includes a substrate holder (11) for holding and rotating the substrate (W), and a holder suction unit (24) for sucking the fluid from the substrate holder (11). The substrate holding apparatus includes a plurality of rollers (20) which are brought into contact with an edge portion of a substrate (W) so as to hold and rotate the substrate (W), and at least one moving mechanism (303a) for moving the rollers (20).

摘要翻译： 本发明涉及在旋转诸如半导体晶片或液晶基板的基板的同时进行化学液体处理，清洁处理，干燥处理等的基板处理装置和基板处理方法。 本发明还涉及用于保持和旋转衬底的衬底保持装置。 另外，在向基板（W）供给流体的同时，对基板（W）进行处理的基板处理装置（1）具备用于保持和旋转基板（W）的基板支架（11），以及用于 从基板支架（11）吸入流体。 基板保持装置包括与基板（W）的边缘部分接触以便​​保持和旋转基板（W）的多个辊（20），以及至少一个移动机构（303a），用于 移动辊子（20）。

公开(公告)号：US20060088792A1

公开(公告)日：2006-04-27

申请号：US11255877

申请日：2005-10-24

申请人： Takeo Ishibashi ,  Takayuki Saito ,  Maya Itoh ,  Shuji Nakao

发明人： Takeo Ishibashi ,  Takayuki Saito ,  Maya Itoh ,  Shuji Nakao

IPC分类号： G03F7/00

CPC分类号： G03F7/70466 ,  G03F1/00

摘要： First, a first exposure process is performed using dipole illumination with only a grating-pattern forming region as a substantial object to be exposed. Next, a second exposure process is performed with only a standard-pattern forming region as a substantial object to be exposed. A development process is then performed to obtain a resist pattern. A mask for the first exposure process is such that a light blocking pattern is formed on the whole surface of a standard-pattern mask part corresponding to the standard-pattern forming region. A mask for the second exposure is such that a light blocking pattern is formed on the whole surface of a grating-pattern mask part corresponding to the grating-pattern forming region.

摘要翻译： 首先，使用仅具有光栅图案形成区域的偶极照明作为要暴露的实质对象来执行第一曝光处理。 接下来，仅以标准图案形成区域作为要曝光的实质物体进行第二曝光处理。 然后进行显影处理以获得抗蚀剂图案。 用于第一曝光处理的掩模使得在对应于标准图案形成区域的标准图案掩模部件的整个表面上形成遮光图案。 用于第二曝光的掩模使得在对应于光栅图案形成区域的光栅图案掩模部分的整个表面上形成遮光图案。

公开(公告)号：US20060088452A1

公开(公告)日：2006-04-27

申请号：US10541153

申请日：2004-01-29

申请人： Hajime Okura ,  Toshio Katsube ,  Takayuki Saito

发明人： Hajime Okura ,  Toshio Katsube ,  Takayuki Saito

IPC分类号： B01D50/00 ,  B01D53/50

CPC分类号： F23J15/06 ,  F23J15/02 ,  F23J15/08 ,  Y02E20/363

摘要： In an exhaust gas processing device wherein in order to efficiently outwardly discharge heat at high temperatures of about 90-150° C. released from a GGH reheater during the shutdown of a desulfurizer, to prevent damage to equipment and corrosion preventive lining material, and to ensure long-term stabilized use of the exhaust gas processing device, at least a GGH heat recovery unit, an absorption tower, a mist eliminator (M/E), and the GGH reheater are placed in a duct for exhaust gases discharged from a fire furnace, in the order named as seen from the upstream side of a flow of exhaust gases, an exhaust gas duct between the M/E and the reheater is provided with a heat radiation device or the like having a heat suppression function for suppressing dissipated heat from the reheater.

摘要翻译： 在废气处理装置中，为了在脱硫器关闭期间从GGH再热器释放的约90-150℃的高温有效地向外排出热量，以防止对设备和防腐蚀衬里材料的损坏，以及 确保废气处理装置的长期稳定使用，至少将GGH热回收单元，吸收塔，除雾器（M / E）和GGH再热器放置在用于从火中排出的废气的管道中 炉子以从废气流的上游侧看的顺序，M / E和再热器之间的排气管道设置有具有用于抑制散热的热抑制功能的散热装置等 从再热器。

公开(公告)号：US06254667B1

公开(公告)日：2001-07-03

申请号：US09385892

申请日：1999-08-30

申请人： Takayuki Saito ,  Takeo Kajishima ,  Katsumi Tsuchiya

发明人： Takayuki Saito ,  Takeo Kajishima ,  Katsumi Tsuchiya

IPC分类号： B01D1900

CPC分类号： B01D53/1475 ,  B01F3/04099 ,  B01F3/0451 ,  B01F3/0876 ,  B01F5/0495 ,  B01F2003/04893 ,  Y02C10/06 ,  Y02E20/326 ,  Y10S261/07

摘要： The apparatus of the present invention includes an inverted J-shaped pipe disposed under the sea and including shorter and longer open end portions, and a connecting portion joining them such that the shorter and longer portions extend downward from connecting portion to their respective open ends. An injector nut injecting the carbon dioxide-containing gas into a portion of said short pipe adjacent to said first open end into said shorter pipe. An accumulator is in fluid communication with the connecting portion for collecting gas, which remains undissolved in the seawater during the passage of the carbon dioxide-containing gas through said shorter pipe. According to the method of the invention, the injection of the carbon dioxide-containing gas forces the seawater to enter into first open end, to flow upward together with the carbon dioxide-containing gas through the shorter pipe portion, to flow downward through the longer pipe portion and to be discharged from the second open end, with the carbon dioxide being dissolved in the seawater during the passage of the carbon dioxide-containing gas through the shorter pipe portion, so that the seawater discharged from the second open end contains carbon dioxide dissolved therein.

摘要翻译： 本发明的装置包括一个倒置的J型管，其设置在海底下方并且包括较短和较长的开口端部，以及连接部分，使得较短和较长部分从连接部分向​​下延伸到其各自的开口端。 喷射器螺母将含二氧化碳的气体注入到与所述第一开口端相邻的所述短管的一部分进入所述较短管中。 蓄能器与用于收集气体的连接部分流体连通，这些气体在含二氧化碳的气体通过所述较短的管道期间不溶于海水。 根据本发明的方法，注入含二氧化碳的气体迫使海水进入第一开口端，与含二氧化碳的气体一起通过较短的管道部分向上流动，向下流过较长的管道 管部分并从第二开放端排出，在二氧化碳气体通过较短的管部分期间，二氧化碳溶解在海水中，使得从第二开放端排出的海水含有二氧化碳 溶解在其中。