公开(公告)号：US20180370024A1

公开(公告)日：2018-12-27

申请号：US16121148

申请日：2018-09-04

Applicant: Brooks Automation Inc.

Inventor： Ulysses Gilchrist ,  Christopher Hofmeister

IPC: B25J9/04 ,  H01L21/677 ,  B25J9/10 ,  B25J9/08

Abstract: A substrate transport apparatus having a frame, a drive section and an articulated arm. The drive section has at least one motor module that is selectable for placement in the drive section from a number of different interchangeable motor modules. Each having a different predetermined characteristic. The articulated arm has articulated joints. The arm is connected to the drive section for articulation. The arm has a selectable configuration selectable from a number of different arm configurations each having a predetermined configuration characteristic. The selection of the arm configuration is effected by selection of the at least one motor module for placement in the drive section.

公开(公告)号：US10137576B2

公开(公告)日：2018-11-27

申请号：US14365277

申请日：2012-12-17

Applicant: Brooks Automation, Inc.

Inventor： Ulysses Gilchrist ,  Jairo Terra Moura

IPC: H01L21/687 ,  B25J15/00 ,  H01L21/677 ,  B25J18/00

Abstract: A substrate transport apparatus for transporting substrates, the substrate transport apparatus including a frame, at least one transfer arm connected to the frame, at least one end effector mounted to the at least one transfer arm and at least one substrate support pad disposed on the at least one end effector, the at least one substrate support pad has a configuration that effects increased friction force, resulting from an increased friction coefficient, in at least one predetermined direction.

公开(公告)号：US10134621B2

公开(公告)日：2018-11-20

申请号：US14568742

申请日：2014-12-12

Applicant: Brooks Automation, Inc.

Inventor： Robert T. Caveney ,  Ulysses Gilchrist ,  Alexander Krupyshev

IPC: H01L21/677 ,  B25J11/00 ,  H01L21/67

Abstract: A transfer apparatus including a frame, multiple arms connected to the frame, each arm having an end effector and an independent drive axis for extension and retraction of the respective arm with respect to other ones of the multiple arms, a linear rail defining a degree of freedom for the independent drive axis for extension and retraction of at least one arm, and a common drive axis shared by each arm and configured to pivot the multiple arms about a common pivot axis, wherein at least one of the multiple arms having another drive axis defining an independent degree of freedom with respect to other ones of the multiple arms.

公开(公告)号：US10065307B2

公开(公告)日：2018-09-04

申请号：US14071314

申请日：2013-11-04

Applicant: Brooks Automation Inc.

Inventor： Ulysses Gilchrist ,  Christopher Hofmeister

IPC: B25J9/04 ,  B25J9/08 ,  B25J9/10 ,  B25J18/04 ,  H01L21/677 ,  B25J9/00

Abstract: A substrate transport apparatus having a frame, a drive section and an articulated arm. The drive section has at least one motor module that is selectable for placement in the drive section from a number of different interchangeable motor modules. Each having a different predetermined characteristic. The articulated arm has articulated joints. The arm is connected to the drive section for articulation. The arm has a selectable configuration selectable from a number of different arm configurations each having a predetermined configuration characteristic. The selection of the arm configuration is effected by selection of the at least one motor module for placement in the drive section.

公开(公告)号：US09852935B2

公开(公告)日：2017-12-26

申请号：US14988256

申请日：2016-01-05

Applicant: Brooks Automation, Inc.

Inventor： Robert T. Caveney ,  Jayaraman Krishnasamy ,  Ulysses Gilchrist ,  Mitchell Drew ,  Jairo T. Moura

IPC: G06F7/00 ,  H01L21/677 ,  B25J9/04 ,  B25J11/00 ,  B25J18/04

CPC classification number: H01L21/67706 ,  B25J9/042 ,  B25J9/043 ,  B25J11/0095 ,  B25J18/04 ,  H01L21/67742 ,  Y10S901/15 ,  Y10S901/27 ,  Y10T74/20305 ,  Y10T74/20329

Abstract: A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.

公开(公告)号：US20160111308A1

公开(公告)日：2016-04-21

申请号：US14976952

申请日：2015-12-21

Applicant: Brooks Automation, Inc.

Inventor： Michael L. Bufano ,  Ulysses Gilchrist ,  William Fosnight ,  Christopher Hofmeister ,  Daniel Babbs ,  Robert C. May

IPC: H01L21/677

Abstract: In accordance with an exemplary embodiment a semiconductor workpiece processing system having at least one processing tool for processing semiconductor workpieces, a container for holding at least one semiconductor workpiece therein for transport to and from the at least one processing tool and a first transport section elongated and defining a travel direction. The first transport section has parts, that interface the container, supporting and transporting the container along the travel direction to and from the at least one processing tool. The container is in substantially continuous transport at a substantially constant rate in the travel direction, when supported by the first transport section. A second transport section is connected to the at least one process tool for transporting the container to and from the at least one processing tool.

公开(公告)号：US20150206782A1

公开(公告)日：2015-07-23

申请号：US14568742

申请日：2014-12-12

Applicant: Brooks Automation, Inc.

Inventor： Robert T. Caveney ,  Ulysses Gilchrist ,  Alexander Krupyshev

IPC: H01L21/677 ,  B25J11/00

CPC classification number: H01L21/67742 ,  B25J11/0095 ,  H01L21/67196 ,  H01L21/67745

Abstract: A transfer apparatus including a frame, multiple arms connected to the frame, each arm having an end effector and an independent drive axis for extension and retraction of the respective arm with respect to other ones of the multiple arms, a linear rail defining a degree of freedom for the independent drive axis for extension and retraction of at least one arm, and a common drive axis shared by each arm and configured to pivot the multiple arms about a common pivot axis, wherein at least one of the multiple arms having another drive axis defining an independent degree of freedom with respect to other ones of the multiple arms.

Abstract translation: 一种传送装置，包括框架，连接到框架的多个臂，每个臂具有端部执行器和独立的驱动轴线，用于相对于多个臂中的其它臂伸出和缩回各自的臂;线性轨道，其限定一定程度的 用于独立驱动轴的自由度用于至少一个臂的延伸和缩回，以及由每个臂共享的并且被配置为围绕公共枢转轴线枢转所述多个臂的公共驱动轴，其中所述多个臂中的至少一个具有另一个驱动轴 为多臂中的其他武器界定独立的自由度。

公开(公告)号：US20150155192A1

公开(公告)日：2015-06-04

申请号：US14541934

申请日：2014-11-14

Applicant: Brooks Automation, Inc.

Inventor： Ulysses Gilchrist ,  Michael L. Bufano ,  William Fosnight ,  Christopher Hofmeister ,  Gerarld M. Friedman

IPC: H01L21/677 ,  H01L21/673

CPC classification number: H01L21/67763 ,  H01L21/67326 ,  H01L21/67353 ,  H01L21/67369 ,  H01L21/67373 ,  H01L21/67376 ,  H01L21/67383 ,  H01L21/67389 ,  H01L21/67393 ,  H01L21/67772 ,  H01L21/67778 ,  H01L21/6779 ,  Y10S414/139

Abstract: A substrate transport apparatus is provided. The apparatus has a casing and a door. The casing is adapted to form a controlled environment therein. The casing has supports therein for holding at least one substrate in the casing. The casing defines a substrate transfer opening through which a substrate transport system accesses the substrate in the casing. The door is connected to the casing for closing the substrate transfer opening in the casing. The casing has structure forming a fast swap element allowing replacement of the substrate from the apparatus with another substrate without retraction of the substrate transport system and independent of substrate loading in the casing.

Abstract translation: 提供了一种基板输送装置。 该装置具有外壳和门。 壳体适于在其中形成受控的环境。 壳体具有用于在壳体中保持至少一个基板的支撑。 壳体限定衬底传送开口，衬底传送系统通过该衬底传送系统访问壳体中的衬底。 门连接到壳体以封闭壳体中的基板传送开口。 壳体具有形成快速互换元件的结构，其允许用另一个基板从设备更换基板，而不会退回基板输送系统，而与壳体中的基板负载无关。

公开(公告)号：US20140301818A1

公开(公告)日：2014-10-09

申请号：US14365277

申请日：2012-12-17

Applicant: Brooks Automation, Inc.

Inventor： Ulysses Gilchrist ,  Jairo Terra Moura

IPC: B25J15/00 ,  B25J18/00

CPC classification number: B25J15/00 ,  B25J18/00 ,  H01L21/67742 ,  H01L21/67766 ,  H01L21/68707 ,  H01L21/6875 ,  H01L21/68757 ,  Y10S901/30

Abstract: A substrate transport apparatus for transporting substrates, the substrate transport apparatus including a frame, at least one transfer arm connected to the frame, at least one end effector mounted to the at least one transfer arm and at least one substrate support pad disposed on the at least one end effector, the at least one substrate support pad has a configuration that effects increased friction force, resulting from an increased friction coefficient, in at least one predetermined direction.

Abstract translation: 一种用于输送基板的基板输送装置，所述基板输送装置包括框架，至少一个连接到所述框架的传送臂，安装在所述至少一个传送臂上的至少一个端部执行器和设置在所述至少一个传送臂上的至少一个基板支撑垫 至少一个末端执行器，所述至少一个基板支撑垫具有在至少一个预定方向上由增加的摩擦系数引起的增加的摩擦力的构造。

公开(公告)号：US20130089396A1

公开(公告)日：2013-04-11

申请号：US13625442

申请日：2012-09-24

Applicant: Brooks Automation, Inc.

Inventor： Michael L. Bufano ,  Ulysses Gilchrist ,  William Fosnight ,  Christopher Hofmeister ,  Daniel Babbs ,  Robert C. May

IPC: H01L21/677

CPC classification number: H01L21/67733 ,  H01L21/67017 ,  H01L21/67126 ,  H01L21/67201 ,  H01L21/67276 ,  H01L21/67376 ,  H01L21/67379 ,  H01L21/67386 ,  H01L21/677 ,  H01L21/67706 ,  H01L21/67715 ,  H01L21/67724 ,  H01L21/67727 ,  H01L21/6773 ,  H01L21/67736 ,  H01L21/67757 ,  H01L21/67766 ,  H01L21/67769 ,  H01L21/67772 ,  H01L21/67775

Abstract: In accordance with an exemplary embodiment a semiconductor workpiece processing system having at least one processing tool for processing semiconductor workpieces, a container for holding at least one semiconductor workpiece therein for transport to and from the at least one processing tool and a first transport section elongated and defining a travel direction. The first transport section has parts, that interface the container, supporting and transporting the container along the travel direction to and from the at least one processing tool. The container is in substantially continuous transport at a substantially constant rate in the travel direction, when supported by the first transport section. A second transport section is connected to the at least one process tool for transporting the container to and from the at least one processing tool.

Abstract translation: 根据示例性实施例，半导体工件处理系统具有至少一个用于处理半导体工件的处理工具，用于将至少一个半导体工件保持在其中以用于传送至至少一个处理工具和从该至少一个处理工具传送的容器和第一传送部分 定义旅行方向。 第一运输部分具有与集装箱接合的部件，沿着行进方向将容器支撑和运输到至少一个加工工具和从该至少一个加工工具运送。 当由第一输送部支撑时，容器以行进方向以基本上恒定的速度基本上连续输送。 第二传送部分连接到至少一个处理工具，用于将容器运送到至少一个处理工具和从该至少一个处理工具传送。