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86 条记录 (耗时 0.022 秒)

    Chamber with low electron stimulated desorption
    52.
    发明申请
    Chamber with low electron stimulated desorption 审中-公开
    具有低电子刺激解吸的室

    公开(公告)号：US20070138404A1

    公开(公告)日：2007-06-21

    申请号：US10571519

    申请日：2004-09-09

    申请人： Juergen Frosien ,  Thomas Jasinski ,  Dieter Winkler

    发明人： Juergen Frosien ,  Thomas Jasinski ,  Dieter Winkler

    IPC分类号： G01K1/08

    CPC分类号： H01J37/16 ,  H01J5/02 ,  H01J2237/188

    摘要： The present invention provides a charged particle emission component (100) for providing a charged particle beam (17) to a chamber of a charged particle beam column. The device comprises a gun chamber for housing the charged particle emission component; an emitter (16) for emitting a beam of charged particles; at least one beam shaping element (109; 18; 108; 402); and a residual gas diffusion barrier (106; 206) directly subsequent the emitter.

    摘要翻译： 本发明提供了一种用于向带电粒子束柱的腔室提供带电粒子束（17）的带电粒子发射部件（100）。 该装置包括用于容纳带电粒子发射部件的枪室; 用于发射带电粒子束的发射器（16）; 至少一个光束成形元件（109; 18; 108; 402）; 和直接在发射器之后的残留气体扩散阻挡层（106; 206）。

    Cooling module for charged particle beam column elements
    53.
    发明申请
    Cooling module for charged particle beam column elements 有权
    用于带电粒子束柱元件的冷却模块

    公开(公告)号：US20070085019A1

    公开(公告)日：2007-04-19

    申请号：US11240279

    申请日：2005-09-30

    申请人： Thomas Jasinski ,  Dieter Winkler ,  William Eckes

    发明人： Thomas Jasinski ,  Dieter Winkler ,  William Eckes

    IPC分类号： H01J1/50

    CPC分类号： H01J37/141 ,  H01J2237/002

    摘要： We have developed a method and apparatus for cooling electromagnetic lens coils of the kind used in charged particle beams. The method and apparatus provide not only a symmetrical cooling effect around the optical axis of the charged particle beam, but also provide improved uniformity of heat transfer. This improved uniformity enables control over the optical axis of the charged particle beam within about 1 nm for high current charged particle beam columns, wherein the current ranges from about 100 nanoamps to about 1000 nanoamps. The use of a squat and wide electromagnetic lens coil in combination with an essentially flat modular cooling panel, which provides uniform cooling to the electromagnetic lens coil, not only enables control over the optical axis of the charged particle beam, but also provides mechanical stability for the charged particle beam column.

    摘要翻译： 我们开发了一种用于冷却带电粒子束中使用的电磁透镜线圈的方法和装置。 该方法和装置不仅提供了带电粒子束的光轴周围的对称冷却效果，而且提供了改善的传热均匀性。 这种改进的均匀性使得能够对高电流带电粒子束柱控制带电粒子束的光轴在约1nm内，其中电流范围为约100纳安 - 约1000纳帕。 使用蹲式和宽电磁透镜线圈与基本上平坦的模块化冷却面板组合，其提供对电磁透镜线圈的均匀冷却，不仅能够控制带电粒子束的光轴，而且还提供机械稳定性 带电粒子束柱。

    Charged particle beam apparatus and method for operating the same
    55.
    发明授权
    Charged particle beam apparatus and method for operating the same 有权
    带电粒子束装置及其操作方法

    公开(公告)号：US07045781B2

    公开(公告)日：2006-05-16

    申请号：US10759392

    申请日：2004-01-16

    申请人： Pavel Adamec ,  Ralf Degenhardt ,  Hans-Peter Feuerbaum ,  Harry Munack ,  Dieter Winkler

    发明人： Pavel Adamec ,  Ralf Degenhardt ,  Hans-Peter Feuerbaum ,  Harry Munack ,  Dieter Winkler

    IPC分类号： H01J37/28

    CPC分类号： H01J37/285 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/0435 ,  H01J2237/049 ,  H01J2237/2855 ,  H01J2237/2857

    摘要： A charged particle beam apparatus is provided which comprises a charged particle source for producing a primary beam of charged particles, aperture means for collimating said primary beam of charged particles, wherein said aperture means is adapted to switch between a collimation of said primary beam to a width appropriate for serial imaging of a sample as well as a collimation of said primary beam to a width appropriate for parallel imaging of said sample, a condenser lens for condensing said primary beam of charged particles, scanning means for deflecting said primary beam of charged particles, an objective lens for focusing said condensed primary beam, a sectorized detector for detecting a secondary charged particles. Also, several different operation modes of the beam apparatus are described allowing for serial imaging as well as parallel imaging.

    摘要翻译： 提供一种带电粒子束装置，其包括用于产生带电粒子的主束的带电粒子源，用于准直所述带电粒子的一次束的孔径装置，其中所述孔口装置适于在所述主光束的准直之间切换 适合于样本的串行成像的宽度以及所述主光束的准直到适合于所述样品的平行成像的宽度，用于聚集所述带电粒子的一次束的聚光透镜，用于偏转所述带电粒子的一次束的扫描装置 用于聚焦所述冷凝的主光束的物镜，用于检测次级带电粒子的扇形检测器。 此外，描述了束装置的几种不同的操作模式，允许串行成像以及平行成像。

    Method and device for producing hot working gases
    57.
    发明授权
    Method and device for producing hot working gases 有权
    生产热作用气体的方法和装置

    公开(公告)号：US06510693B2

    公开(公告)日：2003-01-28

    申请号：US09975307

    申请日：2001-10-12

    申请人： Dieter Winkler ,  Timothy Albert Griffin ,  Ulf Linder

    发明人： Dieter Winkler ,  Timothy Albert Griffin ,  Ulf Linder

    IPC分类号： F01K2506

    CPC分类号： B01D53/22 ,  F02C3/22

    摘要： The invention relates to a method for producing hot working gases for a gas turbine system. In a burner, combustion that generates hot combustion waste gas takes place. A portion of the combustion waste gas branches off and feeds into an oxygen separation device. A heat exchanger produces a heated oxygen-containing gas from oxygen-containing gas. The heated oxygen-containing gas feeds to the oxygen separation device. The oxygen separation device includes an oxygen separation means that removes oxygen from the heated oxygen-containing gas and feeds it to the branched-off waste gas. Oxygen-reduced hot gas then leaves the oxygen separation device. Oxygen-enriched branched-off waste gas as well as fuel feed to the burner and form a combustion mixture that bums in the burner while forming the hot combustion waste gases. In order to improve the efficiency of the device, the oxygen-enriched branched-off waste gas heats the oxygen-containing gas.

    摘要翻译： 本发明涉及一种用于生产燃气轮机系统的热作业气体的方法。 在燃烧器中，产生产生热燃烧废气的燃烧。 一部分燃烧废气分支并进料到氧分离装置中。 热交换器从含氧气体产生加热的含氧气体。 加热的含氧气体进料到氧气分离装置。 氧分离装置包括氧分离装置，其从加热的含氧气体中除去氧并将其进料到分支废气。 然后将氧气还原的热气体离开氧气分离装置。 富氧分支废气以及燃料进料到燃烧器并形成燃烧混合物，燃烧器在燃烧器中形成热燃烧废气。 为了提高装置的效率，富氧分支废气加热含氧气体。

    Burner
    58.
    发明授权
    Burner 失效
    刻录机

    公开(公告)号：US5921766A

    公开(公告)日：1999-07-13

    申请号：US852548

    申请日：1997-05-07

    申请人： Klaus Dobbeling ,  Hans Peter Knopfel ,  Dieter Winkler

    发明人： Klaus Dobbeling ,  Hans Peter Knopfel ,  Dieter Winkler

    IPC分类号： F23R3/28 ,  F23C7/00 ,  F23D14/02 ,  F23D17/00 ,  F24C5/00

    CPC分类号： F23D17/002 ,  F23C7/002 ,  F23C2900/07002

    摘要： In a burner of the double-cone design for burning liquid (12) and gaseous fuels (16), the at least two sectional cone bodies (1, 2) overlap at least partly, the overlap angle (.delta.) increasing in the direction of flow of the burner, and the distance between the fuel injectors (15) and the air-inlet plane (21) into the burner increasing simultaneously with the increase in the overlap angle (.delta.). As a result, the air-inlet plane (21) and the fuel-injection plane (22) no longer coincide. Improved premixing of the gaseous fuel (16) with the combustion air is achieved by the invention, which leads to lower NOx emissions of the burner and to lower thermal loading of the burner front.

    摘要翻译： 在用于燃烧液体（12）和气态燃料（16）的双锥设计的燃烧器中，至少两个截面锥体（1,2）至少部分重叠，重叠角（delta）在 随着重叠角度（delta）的增加，燃烧器的流动以及燃料喷射器（15）和入口平面（21）之间到燃烧器中的距离增加。 结果，空气入口平面（21）和燃料喷射平面（22）不再重合。 通过本发明实现了气体燃料（16）与燃烧空气的改进的预混合，这导致燃烧器的NOx排放降低并降低燃烧器前部的热负荷。

    Apparatus for modulating a particle beam intensity
    60.
    发明授权
    Apparatus for modulating a particle beam intensity 失效
    调制粒子束强度的装置

    公开(公告)号：US5107124A

    公开(公告)日：1992-04-21

    申请号：US449080

    申请日：1989-12-08

    申请人： Dieter Winkler

    发明人： Dieter Winkler

    IPC分类号： G01R31/302 ,  G02B21/00 ,  H01J37/04 ,  H01J37/248 ,  H01J37/28

    CPC分类号： H01J37/045

    摘要： An apparatus for pulsing an electron beam essentially includes two pulse generators driven by a synchronizing unit, an electronic time delay element for delaying a trigger signal generated by the synchronizing unit, and two blanking capacitors arranged between the electron source and a first condensor lens and an electron optical column of an electron beam metrological equipment. Signals of different frequencies are applied to the blanking capacitors so that one electron pulse reaches the module surface per period t of the signal being measured. The phase relationship of the electron pulses is shifted over a time range of interest with the assistance of a controllable time delay element.

    摘要翻译： 用于脉冲电子束的装置基本上包括由同步单元驱动的两个脉冲发生器，用于延迟由同步单元产生的触发信号的电子时间延迟元件和布置在电子源和第一聚光透镜之间的两个消隐电容器， 电子束计量设备的电子光学柱。 将不同频率的信号施加到消隐电容器，使得每个测量信号的周期t的一个电子脉冲到达模块表面。 借助于可控时延元件，电子脉冲的相位关系在感兴趣的时间范围内移动。