公开(公告)号：US20230065198A1

公开(公告)日：2023-03-02

申请号：US17465752

申请日：2021-09-02

Applicant: Intel Corporation

Inventor： Ian Alexander Young ,  Dmitri Evgenievich Nikonov ,  Chia-Ching Lin ,  Tanay A. Gosavi ,  Ashish Verma Penumatcha ,  Kaan Oguz ,  Punyashloka Debashis

IPC: H01L43/04 ,  H01L27/22 ,  H01L43/02 ,  H01L43/06 ,  H01L43/10 ,  G11C11/16 ,  G11C11/18 ,  H01F10/32

Abstract: A memory device, an integrated circuit component including an array of the memory devices, and an integrated device assembly including the integrated circuit component. The memory devices includes a first electrode; a second electrode including an antiferromagnetic (AFM) material; and a memory stack including: a first layer adjacent the second electrode and including a multilayer stack of adjacent layers comprising ferromagnetic materials; a second layer adjacent the first layer; and a third layer adjacent the second layer at one side thereof, and adjacent the first electrode at another side thereof, the second layer between the first layer and the third layer, the third layer including a ferromagnetic material. The memory device may correspond to a magnetic tunnel junction (MTJ) magnetic random access memory bit cell, and the memory stack may correspond to a MTJ device.

公开(公告)号：US20220181433A1

公开(公告)日：2022-06-09

申请号：US17116315

申请日：2020-12-09

Applicant: Intel Corporation

Inventor： Sou-Chi Chang ,  Chia-Ching Lin ,  Kaan Oguz ,  I-Cheng Tung ,  Uygar E. Avci ,  Matthew V. Metz ,  Ashish Verma Penumatcha ,  Ian A. Young ,  Arnab Sen Gupta

IPC: H01L49/02

Abstract: Disclosed herein are capacitors including built-in electric fields, as well as related devices and assemblies. In some embodiments, a capacitor may include a top electrode region, a bottom electrode region, and a dielectric region between and in contact with the top electrode region and the bottom electrode region, wherein the dielectric region includes a perovskite material, and the top electrode region has a different material structure than the bottom electrode region.

公开(公告)号：US20220102495A1

公开(公告)日：2022-03-31

申请号：US17032669

申请日：2020-09-25

Applicant: Intel Corporation

Inventor： Kirby Kurtis Maxey ,  Ashish Verma Penumatcha ,  Carl Hugo Naylor ,  Chelsey Jane Dorow ,  Kevin P. O'Brien ,  Shriram Shivaraman ,  Tanay Arun Gosavi ,  Uygar E. Avci

IPC: H01L29/08 ,  H01L29/24 ,  H01L29/78 ,  H01L29/66

Abstract: Disclosed herein are transistors including two-dimensional materials, as well as related methods and devices. In some embodiments, a transistor may include a first two-dimensional channel material and a second two-dimensional source/drain (S/D) material in a source/drain (S/D), and the first two-dimensional material and the second two-dimensional material may have different compositions or thicknesses. In some embodiments, a transistor may include a first two-dimensional material in a channel and a second two-dimensional material in a source/drain (S/D), wherein the first two-dimensional material is a single-crystal material, and the second two-dimensional material is a single-crystal material.

公开(公告)号：US20210408227A1

公开(公告)日：2021-12-30

申请号：US16914137

申请日：2020-06-26

Applicant: Intel Corporation

Inventor： Kevin O'Brien ,  Chelsey Dorow ,  Kirby Maxey ,  Carl Naylor ,  Shriram Shivaraman ,  Sudarat Lee ,  Tanay Gosavi ,  Chia-Ching Lin ,  Uygar Avci ,  Ashish Verma Penumatcha

IPC: H01L29/04 ,  H01L29/267 ,  H01L29/06 ,  H01L29/20 ,  H01L21/02 ,  H01L27/092

Abstract: A transistor structure includes a first channel layer over a second channel layer, where the first and the second channel layers include a monocrystalline transition metal dichalcogenide (TMD). The transistor structure further includes a source material coupled to a first end of the first and second channel layers, a drain material coupled to a second end of the first and second channel layers, a gate electrode between the source material and the drain material, and between the first channel layer and the second channel layer and a gate dielectric between the gate electrode and each of the first channel layer and the second channel layer.

公开(公告)号：US20200212194A1

公开(公告)日：2020-07-02

申请号：US16238420

申请日：2019-01-02

Applicant: Intel Corporation

Inventor： Tanay Gosavi ,  Chia-ching Lin ,  Raseong Kim ,  Ashish Verma Penumatcha ,  Uygar Avci ,  Ian Young

IPC: H01L29/51 ,  H01L27/088 ,  H01L29/423 ,  H03H9/17 ,  H01L29/78

Abstract: Describe is a resonator that uses ferroelectric (FE) materials in the gate of a transistor as a dielectric. The use of FE increases the strain/stress generated in the gate of the FinFET. Along with the usual capacitive drive, which is boosted with the increased polarization, FE material expands or contacts depending on the applied electric field on the gate of the transistor. As such, acoustic waves are generated by switching polarization of the FE materials. In some embodiments, the acoustic mode of the resonator is isolated using phononic gratings all around the resonator using the metal line above and vias' to body and dummy fins on the side. As such, a Bragg reflector is formed above the FE based transistor.

公开(公告)号：US12266712B2

公开(公告)日：2025-04-01

申请号：US17133087

申请日：2020-12-23

Applicant: Intel Corporation

Inventor： Ashish Verma Penumatcha ,  Kevin O'Brien ,  Chelsey Dorow ,  Kirby Maxey ,  Carl Naylor ,  Tanay Gosavi ,  Sudarat Lee ,  Chia-Ching Lin ,  Seung Hoon Sung ,  Uygar Avci

IPC: H01L29/66 ,  H01L21/8234 ,  H01L29/06 ,  H01L29/24 ,  H01L29/423 ,  H10B61/00 ,  H10B63/00 ,  H10N50/85 ,  H10N50/10 ,  H10N50/80 ,  H10N70/00 ,  H10N70/20

Abstract: A transistor includes a first channel layer over a second channel layer, where the first and the second channel layers include a monocrystalline transition metal dichalcogenide (TMD). The transistor structure further includes a source structure coupled to a first end of the first and second channel layers, a drain structure coupled to a second end of the first and second channel layers, a gate structure between the source material and the drain material, and between the first channel layer and the second channel layer. The transistor further includes a spacer laterally between the gate structure and the and the source structure and between the gate structure and the drain structure. A liner is between the spacer and the gate structure. The liner is in contact with the first channel layer and the second channel layer and extends between the gate structure and the respective source structure and the drain structure.

公开(公告)号：US12224309B2

公开(公告)日：2025-02-11

申请号：US17116315

申请日：2020-12-09

Applicant: Intel Corporation

Inventor： Sou-Chi Chang ,  Chia-Ching Lin ,  Kaan Oguz ,  I-Cheng Tung ,  Uygar E. Avci ,  Matthew V. Metz ,  Ashish Verma Penumatcha ,  Ian A. Young ,  Arnab Sen Gupta

IPC: H01L23/522 ,  H01L49/02

Abstract: Disclosed herein are capacitors including built-in electric fields, as well as related devices and assemblies. In some embodiments, a capacitor may include a top electrode region, a bottom electrode region, and a dielectric region between and in contact with the top electrode region and the bottom electrode region, wherein the dielectric region includes a perovskite material, and the top electrode region has a different material structure than the bottom electrode region.

公开(公告)号：US12125895B2

公开(公告)日：2024-10-22

申请号：US16915600

申请日：2020-06-29

Applicant: Intel Corporation

Inventor： Chelsey Dorow ,  Kevin O'Brien ,  Carl Naylor ,  Uygar Avci ,  Sudarat Lee ,  Ashish Verma Penumatcha ,  Chia-Ching Lin ,  Tanay Gosavi ,  Shriram Shivaraman ,  Kirby Maxey

IPC: H01L29/66 ,  B82Y10/00 ,  B82Y25/00 ,  H01L21/02 ,  H01L29/06 ,  H01L29/24 ,  H01L29/423 ,  H01L29/775 ,  H01L29/786 ,  H10B63/00 ,  H10N70/20

CPC classification number: H01L29/66439 ,  H01L21/02568 ,  H01L29/66969 ,  H01L29/775 ,  H01L29/78696 ,  H10B63/30 ,  H10B63/34 ,  H10N70/253

Abstract: A transistor includes a channel including a first layer including a first monocrystalline transition metal dichalcogenide (TMD) material, where the first layer is stoichiometric and includes a first transition metal. The channel further includes a second layer above the first layer, the second layer including a second monocrystalline TMD material, where the second monocrystalline TMD material includes a second transition metal and oxygen, and where the second layer is sub-stoichiometric. The transistor further includes a gate electrode above a first portion of the channel layer, a gate dielectric layer between the channel layer and the gate electrode, a source contact on a second portion of the channel layer and a drain contact on a third portion of the channel layer, where the gate electrode is between drain contact and the source contact.

公开(公告)号：US12113117B2

公开(公告)日：2024-10-08

申请号：US18130326

申请日：2023-04-03

Applicant: Intel Corporation

Inventor： Tanay Gosavi ,  Chia-ching Lin ,  Raseong Kim ,  Ashish Verma Penumatcha ,  Uygar Avci ,  Ian Young

IPC: H01L29/51 ,  H01L27/088 ,  H01L29/423 ,  H01L29/78 ,  H03H9/17

CPC classification number: H01L29/516 ,  H01L27/0886 ,  H01L29/42356 ,  H01L29/78391 ,  H01L29/7851 ,  H03H9/17

Abstract: Describe is a resonator that uses ferroelectric (FE) materials in the gate of a transistor as a dielectric. The use of FE increases the strain/stress generated in the gate of the FinFET. Along with the usual capacitive drive, which is boosted with the increased polarization, FE material expands or contacts depending on the applied electric field on the gate of the transistor. As such, acoustic waves are generated by switching polarization of the FE materials. In some embodiments, the acoustic mode of the resonator is isolated using phononic gratings all around the resonator using the metal line above and vias' to body and dummy fins on the side. As such, a Bragg reflector is formed above the FE based transistor.

公开(公告)号：US20230411390A1

公开(公告)日：2023-12-21

申请号：US17842462

申请日：2022-06-16

Applicant: Intel Corporation

Inventor： Kevin P. O'Brien ,  Ande Kitamura ,  Ashish Verma Penumatcha ,  Carl Hugo Naylor ,  Kirby Maxey ,  Rachel A. Steinhardt ,  Scott B. Clendenning ,  Sudarat Lee ,  Uygar E. Avci ,  Chelsey Dorow

IPC: H01L27/092 ,  H03K19/0185 ,  H01L29/26 ,  H01L23/522 ,  H01L23/532

CPC classification number: H01L27/092 ,  H03K19/018571 ,  H01L29/26 ,  H01L23/5226 ,  H01L23/53295 ,  H01L23/53228 ,  H01L23/53242 ,  H01L23/53257 ,  H01L23/5283

Abstract: In one embodiment, a transistor device includes a metal layer, a first dielectric layer comprising Hafnium and Oxygen on the metal layer, a channel layer comprising Tungsten and Selenium above the dielectric layer, a second dielectric layer comprising Hafnium and Oxygen on the channel layer, a source region comprising metal on a first end of the channel layer, a drain region comprising metal on a second end of the channel layer opposite the first end, and a metal contact on the second dielectric layer between the source regions and the drain region. In some embodiments, the transistor device may be included in a complementary metal-oxide semiconductor (CMOS) logic circuit in the back-end of an integrated circuit device, such as a processor or system-on-chip (SoC).