公开(公告)号：US20070145269A1

公开(公告)日：2007-06-28

申请号：US11537062

申请日：2006-09-29

申请人： BENYAMIN BULLER ,  William Devore ,  Juergen Frosien ,  Richard Lozes ,  Henry Pearce-Percy ,  Dieter Winkler

发明人： BENYAMIN BULLER ,  William Devore ,  Juergen Frosien ,  Richard Lozes ,  Henry Pearce-Percy ,  Dieter Winkler

IPC分类号： G21K7/00

CPC分类号： H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/244 ,  H01J2237/004 ,  H01J2237/0213 ,  H01J2237/0262 ,  H01J2237/2448 ,  H01J2237/24571

摘要： Methods and apparatus to facilitate the measurement of the amount of scattered electrons collected by an anti-fogging baffle arrangement are provided. For some embodiments, by affixing a lead to an electrically isolated (floating) portion of the baffle arrangement, the amount of scattered electrons collected thereby may be read out, for example, as a current signal. Thus, for such embodiments, the baffle arrangement may double as a detector, allowing an image of surface (e.g., a mask or substrate surface) to be generated.

摘要翻译： 提供了有助于测量由防雾挡板装置收集的散射电子量的方法和装置。 对于一些实施例，通过将引线附接到挡板装置的电隔离（浮动）部分，由此收集的散射电子的量可以例如被读出为电流信号。 因此，对于这样的实施例，挡板装置可以作为检测器加倍，从而允许产生表面（例如，掩模或衬底表面）的图像。

公开(公告)号：US20070138404A1

公开(公告)日：2007-06-21

申请号：US10571519

申请日：2004-09-09

申请人： Juergen Frosien ,  Thomas Jasinski ,  Dieter Winkler

发明人： Juergen Frosien ,  Thomas Jasinski ,  Dieter Winkler

IPC分类号： G01K1/08

CPC分类号： H01J37/16 ,  H01J5/02 ,  H01J2237/188

摘要： The present invention provides a charged particle emission component (100) for providing a charged particle beam (17) to a chamber of a charged particle beam column. The device comprises a gun chamber for housing the charged particle emission component; an emitter (16) for emitting a beam of charged particles; at least one beam shaping element (109; 18; 108; 402); and a residual gas diffusion barrier (106; 206) directly subsequent the emitter.

摘要翻译： 本发明提供了一种用于向带电粒子束柱的腔室提供带电粒子束（17）的带电粒子发射部件（100）。 该装置包括用于容纳带电粒子发射部件的枪室; 用于发射带电粒子束的发射器（16）; 至少一个光束成形元件（109; 18; 108; 402）; 和直接在发射器之后的残留气体扩散阻挡层（106; 206）。

公开(公告)号：US20070085019A1

公开(公告)日：2007-04-19

申请号：US11240279

申请日：2005-09-30

申请人： Thomas Jasinski ,  Dieter Winkler ,  William Eckes

发明人： Thomas Jasinski ,  Dieter Winkler ,  William Eckes

IPC分类号： H01J1/50

CPC分类号： H01J37/141 ,  H01J2237/002

摘要： We have developed a method and apparatus for cooling electromagnetic lens coils of the kind used in charged particle beams. The method and apparatus provide not only a symmetrical cooling effect around the optical axis of the charged particle beam, but also provide improved uniformity of heat transfer. This improved uniformity enables control over the optical axis of the charged particle beam within about 1 nm for high current charged particle beam columns, wherein the current ranges from about 100 nanoamps to about 1000 nanoamps. The use of a squat and wide electromagnetic lens coil in combination with an essentially flat modular cooling panel, which provides uniform cooling to the electromagnetic lens coil, not only enables control over the optical axis of the charged particle beam, but also provides mechanical stability for the charged particle beam column.

摘要翻译： 我们开发了一种用于冷却带电粒子束中使用的电磁透镜线圈的方法和装置。 该方法和装置不仅提供了带电粒子束的光轴周围的对称冷却效果，而且提供了改善的传热均匀性。 这种改进的均匀性使得能够对高电流带电粒子束柱控制带电粒子束的光轴在约1nm内，其中电流范围为约100纳安 - 约1000纳帕。 使用蹲式和宽电磁透镜线圈与基本上平坦的模块化冷却面板组合，其提供对电磁透镜线圈的均匀冷却，不仅能够控制带电粒子束的光轴，而且还提供机械稳定性 带电粒子束柱。

公开(公告)号：US20060272331A1

公开(公告)日：2006-12-07

申请号：US11453971

申请日：2006-06-16

申请人： Dominikus Bucker ,  Timothy Griffin ,  Dieter Winkler

发明人： Dominikus Bucker ,  Timothy Griffin ,  Dieter Winkler

IPC分类号： F02C7/00

CPC分类号： F23C13/00 ,  C01B3/386 ,  C01B2203/0261 ,  C01B2203/06 ,  C01B2203/84 ,  F02C1/08 ,  F02C3/34 ,  F02C6/003 ,  F02C6/18 ,  F23C6/042 ,  F23C9/08 ,  F23C2201/40 ,  F23C2202/30 ,  F23C2900/09001 ,  F23D2210/00 ,  F23R3/346 ,  F23R2900/00014 ,  F23R2900/00016 ,  F23R2900/03341

摘要： A thermal power plant with sequential combustion and reduced CO2 emissions is disclosed, which includes the following components, which are connected in series via in each case at least one flow passage (S): a combustion feed air compressor unit, a first combustion chamber, a high-pressure turbine stage, a second combustion chamber and a low-pressure turbine stage. The second combustion chamber and/or the low-pressure turbine stage can be supplied with a cooling gas stream for cooling purposes. A method for operating a thermal power plant of this type is also disclosed.

摘要翻译： 公开了具有顺序燃烧和减少CO 2排放的火力发电厂，其包括以下组件，其在每种情况下串联连接至少一个流动通道（S）：燃烧进料空气 压缩机单元，第一燃烧室，高压涡轮级，第二燃烧室和低压涡轮级。 可以为第二燃烧室和/或低压涡轮机级提供用于冷却目的的冷却气流。 还公开了一种用于操作这种热电厂的方法。

公开(公告)号：US07045781B2

公开(公告)日：2006-05-16

申请号：US10759392

申请日：2004-01-16

申请人： Pavel Adamec ,  Ralf Degenhardt ,  Hans-Peter Feuerbaum ,  Harry Munack ,  Dieter Winkler

发明人： Pavel Adamec ,  Ralf Degenhardt ,  Hans-Peter Feuerbaum ,  Harry Munack ,  Dieter Winkler

IPC分类号： H01J37/28

CPC分类号： H01J37/285 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/0435 ,  H01J2237/049 ,  H01J2237/2855 ,  H01J2237/2857

摘要： A charged particle beam apparatus is provided which comprises a charged particle source for producing a primary beam of charged particles, aperture means for collimating said primary beam of charged particles, wherein said aperture means is adapted to switch between a collimation of said primary beam to a width appropriate for serial imaging of a sample as well as a collimation of said primary beam to a width appropriate for parallel imaging of said sample, a condenser lens for condensing said primary beam of charged particles, scanning means for deflecting said primary beam of charged particles, an objective lens for focusing said condensed primary beam, a sectorized detector for detecting a secondary charged particles. Also, several different operation modes of the beam apparatus are described allowing for serial imaging as well as parallel imaging.

摘要翻译： 提供一种带电粒子束装置，其包括用于产生带电粒子的主束的带电粒子源，用于准直所述带电粒子的一次束的孔径装置，其中所述孔口装置适于在所述主光束的准直之间切换 适合于样本的串行成像的宽度以及所述主光束的准直到适合于所述样品的平行成像的宽度，用于聚集所述带电粒子的一次束的聚光透镜，用于偏转所述带电粒子的一次束的扫描装置 用于聚焦所述冷凝的主光束的物镜，用于检测次级带电粒子的扇形检测器。 此外，描述了束装置的几种不同的操作模式，允许串行成像以及平行成像。

公开(公告)号：US20050235650A1

公开(公告)日：2005-10-27

申请号：US11123128

申请日：2005-05-06

申请人： Timothy Griffin ,  Daniel Holmberg ,  Dieter Winkler

发明人： Timothy Griffin ,  Daniel Holmberg ,  Dieter Winkler

IPC分类号： F01K23/10 ,  F02C3/22 ,  F02C3/30 ,  F02C6/18

CPC分类号： F02C3/30 ,  C01B3/386 ,  C01B3/48 ,  C01B13/0251 ,  C01B2203/0261 ,  C01B2203/0283 ,  C01B2203/0475 ,  C01B2203/0827 ,  C01B2203/0883 ,  C01B2203/84 ,  C01B2203/86 ,  F01K23/10 ,  F02C3/22 ,  F02C6/18 ,  Y02P20/129 ,  Y02P20/13 ,  Y02P30/30

摘要： A method of operating a gas turbine power plant and gas turbine power plant are disclosed wherein hydrogen for the combusting process is produced by feeding natural gas mixed with steam through a membrane/partial oxidation reactor and converting the natural gas at least to H2 and CO. Thereby oxygen is transferred from the compressed air through the membrane of the membrane/partial oxidation reactor and the oxygen is used for the partial oxidation process of the natural gas. The process is followed by converting the syngas in a CO shift reactor and a CO shift reactor to a CO2 removal equipment to mainly hydrogen.

摘要翻译： 公开了一种操作燃气轮机发电厂和燃气轮机发电厂的方法，其中用于燃烧过程的氢气是通过将混合有蒸汽的天然气进入膜/部分氧化反应器并将天然气转化为H 2， 2和CO。因此，氧气从压缩空气通过膜/部分氧化反应器的膜转移，氧气用于天然气的部分氧化过程。 该方法之后是将CO转化反应器和CO转化反应器中的合成气转化为CO 2脱除设备至主要为氢气。

公开(公告)号：US06510693B2

公开(公告)日：2003-01-28

申请号：US09975307

申请日：2001-10-12

申请人： Dieter Winkler ,  Timothy Albert Griffin ,  Ulf Linder

发明人： Dieter Winkler ,  Timothy Albert Griffin ,  Ulf Linder

IPC分类号： F01K2506

CPC分类号： B01D53/22 ,  F02C3/22

摘要： The invention relates to a method for producing hot working gases for a gas turbine system. In a burner, combustion that generates hot combustion waste gas takes place. A portion of the combustion waste gas branches off and feeds into an oxygen separation device. A heat exchanger produces a heated oxygen-containing gas from oxygen-containing gas. The heated oxygen-containing gas feeds to the oxygen separation device. The oxygen separation device includes an oxygen separation means that removes oxygen from the heated oxygen-containing gas and feeds it to the branched-off waste gas. Oxygen-reduced hot gas then leaves the oxygen separation device. Oxygen-enriched branched-off waste gas as well as fuel feed to the burner and form a combustion mixture that bums in the burner while forming the hot combustion waste gases. In order to improve the efficiency of the device, the oxygen-enriched branched-off waste gas heats the oxygen-containing gas.

摘要翻译： 本发明涉及一种用于生产燃气轮机系统的热作业气体的方法。 在燃烧器中，产生产生热燃烧废气的燃烧。 一部分燃烧废气分支并进料到氧分离装置中。 热交换器从含氧气体产生加热的含氧气体。 加热的含氧气体进料到氧气分离装置。 氧分离装置包括氧分离装置，其从加热的含氧气体中除去氧并将其进料到分支废气。 然后将氧气还原的热气体离开氧气分离装置。 富氧分支废气以及燃料进料到燃烧器并形成燃烧混合物，燃烧器在燃烧器中形成热燃烧废气。 为了提高装置的效率，富氧分支废气加热含氧气体。

公开(公告)号：US5921766A

公开(公告)日：1999-07-13

申请号：US852548

申请日：1997-05-07

申请人： Klaus Dobbeling ,  Hans Peter Knopfel ,  Dieter Winkler

发明人： Klaus Dobbeling ,  Hans Peter Knopfel ,  Dieter Winkler

IPC分类号： F23R3/28 ,  F23C7/00 ,  F23D14/02 ,  F23D17/00 ,  F24C5/00

CPC分类号： F23D17/002 ,  F23C7/002 ,  F23C2900/07002

摘要： In a burner of the double-cone design for burning liquid (12) and gaseous fuels (16), the at least two sectional cone bodies (1, 2) overlap at least partly, the overlap angle (.delta.) increasing in the direction of flow of the burner, and the distance between the fuel injectors (15) and the air-inlet plane (21) into the burner increasing simultaneously with the increase in the overlap angle (.delta.). As a result, the air-inlet plane (21) and the fuel-injection plane (22) no longer coincide. Improved premixing of the gaseous fuel (16) with the combustion air is achieved by the invention, which leads to lower NOx emissions of the burner and to lower thermal loading of the burner front.

摘要翻译： 在用于燃烧液体（12）和气态燃料（16）的双锥设计的燃烧器中，至少两个截面锥体（1,2）至少部分重叠，重叠角（delta）在 随着重叠角度（delta）的增加，燃烧器的流动以及燃料喷射器（15）和入口平面（21）之间到燃烧器中的距离增加。 结果，空气入口平面（21）和燃料喷射平面（22）不再重合。 通过本发明实现了气体燃料（16）与燃烧空气的改进的预混合，这导致燃烧器的NOx排放降低并降低燃烧器前部的热负荷。

公开(公告)号：US5800731A

公开(公告)日：1998-09-01

申请号：US664294

申请日：1996-06-11

申请人： Dietrich Pirck ,  Hans-Dieter Grasshoff ,  Harald Kohnz ,  Peter Finmans ,  Tobias Carstensen ,  Dieter Jakubik ,  Wilfried Weber ,  Dieter Winkler

发明人： Dietrich Pirck ,  Hans-Dieter Grasshoff ,  Harald Kohnz ,  Peter Finmans ,  Tobias Carstensen ,  Dieter Jakubik ,  Wilfried Weber ,  Dieter Winkler

IPC分类号： C10M171/00 ,  C10M129/28 ,  C10M129/64

CPC分类号： C10M171/001 ,  C10M2203/10 ,  C10M2203/102 ,  C10M2205/00 ,  C10M2207/026 ,  C10M2209/084 ,  C10M2223/045 ,  C10N2210/02 ,  C10N2240/00 ,  C10N2240/22 ,  C10N2240/30 ,  C10N2240/50 ,  C10N2240/52 ,  C10N2240/54 ,  C10N2240/56 ,  C10N2240/58 ,  C10N2240/60 ,  C10N2240/66

摘要： Homogeneous, electro-viscous fluids are provided which contain aluminum soaps based on products obtained by reacting one or more mono- or polycarboxylic acid(s) or the anhydrides or semi-esters thereof with reactive aluminum compounds, such as aluminum alcoholates. The aforesaid fluids manifest high electro-rheological effect and are completely homogeneous, and do not require a dispersant.

摘要翻译： 提供了均匀的电粘性流体，其包含基于通过使一种或多种单羧酸或多元羧酸或其酸酐或其半酯与活性铝化合物如铝醇化物反应获得的产物的铝皂。 上述液体具有高的电流变效应，并且完全均匀，不需要分散剂。

公开(公告)号：US5107124A

公开(公告)日：1992-04-21

申请号：US449080

申请日：1989-12-08

申请人： Dieter Winkler

发明人： Dieter Winkler

IPC分类号： G01R31/302 ,  G02B21/00 ,  H01J37/04 ,  H01J37/248 ,  H01J37/28

CPC分类号： H01J37/045

摘要： An apparatus for pulsing an electron beam essentially includes two pulse generators driven by a synchronizing unit, an electronic time delay element for delaying a trigger signal generated by the synchronizing unit, and two blanking capacitors arranged between the electron source and a first condensor lens and an electron optical column of an electron beam metrological equipment. Signals of different frequencies are applied to the blanking capacitors so that one electron pulse reaches the module surface per period t of the signal being measured. The phase relationship of the electron pulses is shifted over a time range of interest with the assistance of a controllable time delay element.

摘要翻译： 用于脉冲电子束的装置基本上包括由同步单元驱动的两个脉冲发生器，用于延迟由同步单元产生的触发信号的电子时间延迟元件和布置在电子源和第一聚光透镜之间的两个消隐电容器， 电子束计量设备的电子光学柱。 将不同频率的信号施加到消隐电容器，使得每个测量信号的周期t的一个电子脉冲到达模块表面。 借助于可控时延元件，电子脉冲的相位关系在感兴趣的时间范围内移动。