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公开(公告)号：US5141885A
公开(公告)日：1992-08-25
申请号：US709495
申请日：1991-06-03
IPC分类号： H01L29/78 , H01L21/223 , H01L21/336 , H01L29/786
CPC分类号： H01L29/66765 , H01L21/2236 , H01L29/78669
摘要： A method of fabricating a thin film transistor on an insulating substrate such as quartz or glass without defect in the channel region in semiconductor thin layer, or at the boundary between the semiconductor thin layer and gate insulation layer, but with high mobility and high integration. For that purpose, ions produced by the discharge-decomposition of a hydride gas including dopant are accelerated and implanted into the semiconductor thin layer, wherein the protecting insulation layer for protection of the channel region is of a thickness larger than the projected range of the hydrogen ion.
摘要翻译： 在半导体薄层的沟道区域或半导体薄层与栅极绝缘层之间的边界处，但具有高移动性和高集成度的绝缘基板（例如石英或玻璃等）的绝缘基板上制造薄膜晶体管的方法。 为此，通过包括掺杂剂的氢化物气体的放电分解产生的离子被加速并注入到半导体薄层中，其中用于保护沟道区的保护绝缘层的厚度大于氢的投影范围 离子。
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52.发明授权
公开(公告)号：US4645341A
公开(公告)日：1987-02-24
申请号：US604939
申请日：1984-04-27
CPC分类号： G01N21/3103 , G01J2003/4275 , G01N2021/3111 , G01N21/74
摘要： A double polarized light beam spectrophotometer of a light-source modulation type. A modulated light beam emitted by a light source is conducted through specimen atom vapor generated by a graphite atomizer. Wavelength of light undergone atom absorption is selected and spatially separated into a pair of linearly polarized light beams perpendicular to each other. The pair of the linearly polarized light beams separated are alternately passed through a chopper and received by a photoelectric conversion device to be converted into electric signals which are utilized for determining atomic absorption of the specimen. The phase of modulation of light radiated from the light source is synchronized with phase of a current supplied to the graphite atomizer for heating thereof and the switching timing of the chopper.
摘要翻译： 一种光源调制型双偏振光束分光光度计。 由光源发射的调制光束通过由石墨雾化器产生的试样原子蒸气进行。 选择原子吸收的光的波长并在空间上分离为彼此垂直的一对线性偏振光束。 分离出的一对线偏振光交替地通过斩波器并由光电转换装置接收，以转换成用于确定样品的原子吸收的电信号。 从光源辐射的光的调制相位与提供给石墨雾化器的电流的相位同步，以加热它们以及斩波器的切换时序。
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公开(公告)号：US07468145B2
公开(公告)日：2008-12-23
申请号：US10528589
申请日：2003-10-07
IPC分类号： C09K11/08
CPC分类号： C09K11/7734 , H01J61/44 , H01J2211/42 , Y10T428/2991 , Y10T428/2993
摘要： The present invention aims at realizing a PDP and a mercury-free fluorescent lamp feasible to maintain excellent luminescent characteristics over long periods by suppressing time-lapse changes in luminescent characteristics of a phosphor that is excited by vacuum ultraviolet light to thereby emit light. To accomplish this object, the oxide phosphor of the invention comprises individual particles, each of which has a region at and near the surface thereof modified, and the elemental composition of the surface region is in a more oxidized state than that of the internal region of the particles. Alternatively, the surface region has more halogen or chalcogen in the elemental composition. In the phosphor treatment method of the invention, the surface region of individual phosphor particles is selectively modified by (i) forming a highly reactive gas atmosphere by exciting gas which contains reactive gas, and (ii) exposing the phosphor to the gas atmosphere.
摘要翻译： 本发明旨在实现通过抑制由真空紫外光激发的荧光体的发光特性的延时变化从而发光的方法，实现长时间保持优异发光特性的PDP和无汞荧光灯。 为了实现这个目的，本发明的氧化物荧光体包括单个颗粒，每个颗粒在其表面处和附近的区域都被修饰，并且表面区域的元素组成比内部区域的 颗粒。 或者，表面区域在元素组合物中具有更多的卤素或硫族元素。 在本发明的荧光体处理方法中，通过（i）通过激发含有反应性气体的气体形成高反应性气体气氛，并且（ii）将荧光体暴露于气体气氛，来选择性地修饰单个荧光体颗粒的表面区域。
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公开(公告)号：US07056427B2
公开(公告)日：2006-06-06
申请号：US09842685
申请日：2001-04-27
IPC分类号： C02F1/48
CPC分类号： G01N27/44782 , G01N27/44743
摘要： A sample plate assembly for an electrophoresis apparatus including a tray at a sample supply portion of a capillary array, an adapter for the tray, a sample plate mounted on the adapter, a septer mounted on the sample plate and a septer holder mounted on the septer. Thereby, many number of samples can be automatically supplied to capillaries in a multi capillary array.
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公开(公告)号：US06212057B1
公开(公告)日：2001-04-03
申请号：US09471621
申请日：1999-12-21
申请人： Naoki Kohara , Taisuke Sawada , Masatoshi Kitagawa
发明人： Naoki Kohara , Taisuke Sawada , Masatoshi Kitagawa
IPC分类号： H01G430
CPC分类号： H05K1/162 , H01G4/08 , H05K1/0393 , H05K3/388 , H05K2201/0175 , H05K2201/0179 , H05K2201/09763
摘要： According to a flexible thin film capacitor of the present invention, an adhesive film is formed on a substrate composed of at least one selected from the group consisting of an organic polymer and a metal foil, and an inorganic high dielectric film and metal electrode films are formed thereon. A metal oxide adhesive film can be used as the adhesive film. The adhesive film is formed in contact with the inorganic high dielectric film and at least one of the metal electrode films.
摘要翻译： 根据本发明的柔性薄膜电容器，在由选自有机聚合物和金属箔中的至少一种构成的基板上形成粘合膜，并且无机高介电膜和金属电极膜是 形成在其上。 可以使用金属氧化物粘合膜作为粘合膜。 该粘合膜形成为与无机高介电膜和至少一个金属电极膜接触。
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公开(公告)号：US5674366A
公开(公告)日：1997-10-07
申请号：US483873
申请日：1995-06-07
申请人： Shigenori Hayashi , Kazuki Komaki , Takeshi Kamada , Masatoshi Kitagawa , Takashi Deguchi , Ryoichi Takayama , Takashi Hirao
发明人： Shigenori Hayashi , Kazuki Komaki , Takeshi Kamada , Masatoshi Kitagawa , Takashi Deguchi , Ryoichi Takayama , Takashi Hirao
IPC分类号： C23C14/00 , C23C14/08 , C23C14/58 , G02F1/00 , H01L21/314 , H01L21/316 , H01L37/02 , H01L41/316 , C23C14/34
CPC分类号： C23C14/5853 , C23C14/0078 , C23C14/088 , H01L21/02197 , H01L21/02266 , H01L21/314 , H01L21/31691 , H01L37/025 , H01L41/1875 , H01L41/316 , G02F1/0027
摘要： A method whereby perovskite type oxide dielectric thin films with ABO.sub.3 structure are able to be formed with such features as good stability, uniformity, reproducibility, or the like, with high through-put by having a deposition process, wherein the thin films are deposited on a substrate, and a stabilization process, where no deposition of the thin films takes place, repeated alternatingly while the substrate temperature being kept near the temperature at which perovskite type oxide dielectric thin films are formed. Also, by employing (i) a processing method wherein a decomposing excitation of a reactive gas due to plasma takes place on or near the deposition surface in a gaseous atmosphere comprising a gas that reacts with the elements composing the thin films, (ii) a processing method wherein an oxidation reaction takes place on the deposition surface in a gaseous atmosphere comprising at least ozone (O.sub.3), and (iii) a processing method wherein light of short wave length is irradiated on the deposition surface in a gaseous atmosphere comprising at least reactive elements in the non-deposition process, the oxygen concentration in the deposited thin films is adjusted and dielectric thin films of good quality and an extremely low defect content are realized.
摘要翻译： 具有ABO3结构的钙钛矿型氧化物电介质薄膜能够通过具有沉积工艺的高通量形成具有良好的稳定性，均匀性，再现性等特性的方法，其中薄膜沉积在 基板和稳定化处理，其中不存在薄膜的沉积，在衬底温度保持接近形成钙钛矿型氧化物电介质薄膜的温度的同时交替重复。 此外，通过采用以下处理方法：（i）在包含与组成薄膜的元素反应的气体的气体气氛中，在等离子体发生的反应性气体的分解激发发生在沉积表面上或其附近的处理方法，（ii） 处理方法，其中在至少包含臭氧（O 3）的气体气氛中在沉积表面上发生氧化反应，和（iii）其中在至少包括至少包含臭氧（O 3）的气体气氛中在沉积表面上照射短波长的光的处理方法 在非沉积工艺中的非活性元素，沉积的薄膜中的氧浓度被调节，并且实现了良好质量和极低缺陷含量的介电薄膜。
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公开(公告)号：US5662965A
公开(公告)日：1997-09-02
申请号：US351739
申请日：1994-12-08
IPC分类号： B32B9/00 , C23C14/02 , C23C14/06 , C23C14/24 , H01B1/06 , H01B5/14 , H01B13/00 , C23C16/00 , B05D3/06 , C23C14/30
CPC分类号： C23C14/027 , C23C14/0605 , C23C14/0635 , Y10S427/103
摘要： Crystalline carbon-based thin film structures are formed in which a compositionally-graded intermediate layer is first deposited on a substrate, and a crystalline carbon-based thin film such as silicon carbide or diamond is deposited thereafter on the intermediate layer. The compositionally-graded intermediate layer has a carbon content which increases in a direction away from the substrate. The compositionally-graded intermediate layer is effective in reducing problems associated with the lattice mismatch between the thin film and the substrate which hamper conventional hetero-epitaxial growth of high quality crystalline carbon-based thin films.
摘要翻译： 形成结晶碳基薄膜结构，其中首先在基板上沉积组成梯度的中间层，然后在中间层上沉积诸如碳化硅或金刚石的结晶碳基薄膜。 组分梯度的中间层具有在远离基底的方向上增加的碳含量。 组分梯度的中间层有效地减少与薄膜和衬底之间的晶格失配相关的问题，这妨碍了高质量结晶碳基薄膜的常规异质外延生长。
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公开(公告)号：US5431733A
公开(公告)日：1995-07-11
申请号：US83300
申请日：1993-06-29
IPC分类号： C23C16/44 , C23C16/448 , C23C16/455 , C23C16/52 , C23C16/00
CPC分类号： C23C16/4482
摘要： A low vapor-pressure material feeding apparatus comprises a bubbler (4, 5), accommodating a low vapor-pressure material (6) therein, for bubbling the low vapor-pressure material (6) with an inert gas fed from an inert gas container (3). A bifurcated gas feeding passage (51, 8) is provided between the gas container (3) and a vacuum chamber (50). One branch passage directly introduces an inert gas into the vacuum chamber (50), and the other branch passage introduces an inert gas into the bubbler (4, 5). A gas mixture of a vaporized low vapor-pressure material (6) and the inert gas, is supplied from the bubbler (4, 5) to a vacuum chamber (50). A gas flow meter (7) detects a flow amount of the gas mixture. On a basis of a gas flow amount detected by the gas flow meter (7), an inert gas controller (10) adjusts a feeding amount of inert gas so that a total amount of an inert gas introduced directly into said vacuum chamber (50) and an inert gas introduced into the bubbler (4, 5) is kept at a constant value.
摘要翻译： 低蒸气压材料输送装置包括一个容纳低蒸气压材料（6）的起泡器（4,5），用于使惰性气体从惰性气体容器 （3）。 在气体容器（3）和真空室（50）之间设置有分支气体供给通路（51,8）。 一个分支通道直接将惰性气体引入真空室（50），另一个分支通道将惰性气体引入起泡器（4,5）中。 蒸发的低蒸气压材料（6）和惰性气体的气体混合物从起泡器（4,5）供应到真空室（50）。 气体流量计（7）检测气体混合物的流量。 基于由气体流量计（7）检测到的气体流量，惰性气体控制器（10）调节惰性气体的供给量，使得直接引入所述真空室（50）的惰性气体的总量， 引入起泡器（4,5）中的惰性气体保持恒定值。
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公开(公告)号：US5202562A
公开(公告)日：1993-04-13
申请号：US724179
申请日：1991-07-01
IPC分类号： G01N27/62 , H01J37/244 , H01J49/04 , H01J49/26
CPC分类号： H01J49/04
摘要： A standard containing the same elements as a sample is prepared. Concentrations of the elements of the standard are known previously. When signal intensities of an element of the standard solution and the sample exceed an upper limit of a pulse counter of an element analyzing apparatus, a transmitting rate of a passage, through which ionized elements of the standard and the sample pass, is controlled to be less than the ordinal transmitting rate of the passage in synchronism to the passing time of the elements. The concentrations of the elements of the sample is calculated based on output signals of the pulse counter concerning the elements of the standard and the sample and known concentration of the standard.
摘要翻译： 制备含有与样品相同元素的标准品。 标准要素的浓度先前已知。 当标准溶液和样品的元素的信号强度超过元素分析装置的脉冲计数器的上限时，将标准品和样品通过的通道的透射率控制为 小于通道的顺序传输速率与元件的通过时间同步。 基于脉冲计数器的输出信号计算样品的元素浓度，该脉冲计数器与标准品和样品的元素以及标准品的已知浓度相关。
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公开(公告)号：US4867562A
公开(公告)日：1989-09-19
申请号：US196263
申请日：1988-05-20
CPC分类号： G01N21/3103 , G01N2021/3111 , G01N2021/3114 , G01N21/74 , G01N2201/06166
摘要： An atomic absorption spectrophotometer for simultaneously measuring a plurality of elements different in kind from each other. A cylindrical heating furnace is provided for heating a sample being analyzed to dry, ash and atomize the sample thereby producing atomic vapor. A plurality of hollow-cathode discharge tubes corresponding in number to the elements being detected are arranged for simultaneously emitting light beams respectively containing line spectra of the respective elements, to cause the light beams to be incident upon the heating furnace at respective angles of inclination with respect to a central axis of the heating furnace. A plurality of spectral detection systems are arranged behind the heating furnace in relation to the angles of inclination, for respectively spectral-diffracting and receiving the light beams having their respective line spectra absorbed by the atomic vapor. A signal processing device is provided for carrying out calculation to obtain concentrations or quantities of the respective elements in the sample being analyzed, on the basis of respective ratios of atomic resonance absorption of the respective line spectra spectral-detected.
摘要翻译： 一种用于同时测量彼此不同种类的多种元素的原子吸收分光光度计。 提供圆柱形加热炉，用于加热被分析的样品以干燥，灰分并雾化样品，从而产生原子蒸气。 多个对应于被检测的元件的空心阴极放电管被布置成同时发射分别包含各个元件的线谱的光束，以使光束以相应的倾角入射到加热炉上， 相对于加热炉的中心轴线。 多个光谱检测系统相对于倾斜角度布置在加热炉后面，用于分别衍射和接收具有由原子蒸气吸收的各自线谱的光束。 提供信号处理装置，用于根据频谱检测的各个线谱的原子共振吸收的相应比例进行计算以获得正在分析的样品中的各元素的浓度或数量。
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