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公开(公告)号：US5318045A
公开(公告)日：1994-06-07
申请号：US821028
申请日：1992-01-15
Applicant: Walter C. Rawls, Jr. , Gregory J. Provell
Inventor： Walter C. Rawls, Jr. , Gregory J. Provell
Abstract: A method is provided for the modification of microbial metabolism using a unipolar magnetic field. By applying a unipolar magnetic field to microbes under controlled conditions, changes in the rate and/or efficiency of metabolism are produced.
Abstract translation: 提供了使用单极磁场修饰微生物代谢的方法。 通过在受控条件下对微生物施加单极磁场，产生代谢速率和/或效率的变化。
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公开(公告)号：US5311028A
公开(公告)日：1994-05-10
申请号：US843391
申请日：1992-02-28
Applicant: Hilton F. Glavish
Inventor： Hilton F. Glavish
IPC: C23C14/48 , G21K1/093 , H01F3/02 , H01F7/20 , H01J3/32 , H01J29/76 , H01J37/04 , H01J37/09 , H01J37/12 , H01J37/147 , H01J37/317 , H01L21/02 , H01L21/265 , H01L27/12 , H01J37/302
CPC classification number: H01J37/147 , G21K1/093 , H01F3/02 , H01F7/202 , H01J29/76 , H01J3/32 , H01J37/1475 , H01J37/3007 , H01J37/3171 , H01J2237/31701
Abstract: Deflection apparatus is shown for high perveance ion beams, operating at 20 Hz fundamental and substantially higher order harmonics, having a magnetic structure formed of laminations with thickness in range between 0.2 and 1 millimeter. Additionally, a compensator is shown with similar laminated structures with resonant excitation circuit, operating at 20 Hz or higher, in phase locked relationship with the frequency of the previously deflected beam. Furthermore, features are shown which have broader applicability to producing strong magnetic field in magnetic gap. Among the numerous important features shown are special laminated magnetic structures, including different sets of crosswise laminations in which the field in one lamination of one set is distributed into multiplicity of laminations of the other set of coil-form structures, field detection means and feedback control system, cooling plate attached in thermal contact with number of lamination layers. Surfaces on the entry and exit sides of the compensator magnetic structure have cooperatively selected shapes to increase the length of path exposed to the force field dependently with deflection angle to compensate for contribution to deflection angle caused by higher order components. The entry and exit surfaces of the magnetic scanner and compensator structures cooperating to produce desired beam profile and desired limit on angular deviation of ions within the beam. Also shown is an accelerator comprising a set of accelerator electrodes having slotted apertures, a suppressor electrode at the exit of the electrostatic accelerator, a post-accelerator analyzer magnet having means for adjusting the angle of incidence by laterally moving the post-accelerator analyzer magnet, and a magnet to eliminate aberration created by the post-accelerator analyzer magnet. In the case of use of a spinning substrate carrier for scanning in one dimension, the excitation wave form of the scanner relates changes in scan velocity in inverse dependence with changes in the radial distance of an implant point from the rotation axis. Also an oxygen implantation method is shown with 50 mA ion beam current, the ion beam energy above 100 KeV, and the angular velocity of a rotating carrier above 50 rpm.
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53.发明授权Saddle type dipolar coil eliminating only sextupole components of magnetic field 失效鞍型偶极线圈仅消除磁场的六极分量
公开(公告)号：US5027098A
公开(公告)日：1991-06-25
申请号：US565241
申请日：1990-08-10
Applicant: Toru Okazaki , Shigeki Isojima
Inventor： Toru Okazaki , Shigeki Isojima
Abstract: A saddle type dipole coil comprises a pair of elongated ring shaped upper and lower coil layers each having an assembly of coil conductors of series-connected turns. The upper and lower coil layers are opposed each other and disposed on the outer surface of a duct. The end portions of the upper and lower coil layers positioned in a range of a predetermined width are so extended by a predetermined length in the longitudinal direction that the integral value of only sextupole components of a magnetic field is minimized or set nearly zero among the entire multi-pole components of the magnetic field, thereby enabling to make a synchrotron radiation ray generating device with good efficiency of accelerating particles.
Abstract translation: 鞍型偶极线圈包括一对细长的环形上下线圈层，每个线圈层具有串联连接匝的线圈导体的组件。 上下线圈层彼此相对并设置在管道的外表面上。 定位在预定宽度范围内的上，下线圈层的端部沿纵向方向延伸预定长度，使得仅在整个磁场中仅将六极分量的积分值设置为最小或几乎为零 磁场的多极分量，从而能够制造具有良好的加速粒子效率的同步加速器射线产生装置。
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54.发明授权
公开(公告)号：US5006759A
公开(公告)日：1991-04-09
申请号：US191633
申请日：1988-05-09
Applicant: Franz Krispel
Inventor： Franz Krispel
Abstract: Apparatus for accelerating and transporting a charged particle beam. The apparatus has a housing which encases an accelerating structure as well as a magnet system. The accelerating structure accelerates an injected charged particle beam within a first evacuated space and directs the beam into the magnet system which transports it along a bent beam path within a second evacuated space. Both spaces are separate from each other and the magnet system is supported within the housing such that it can be angularly adjusted with respect to the accelerating structure. In a preferred embodiment, the second evacuated spaced is partially defined by magnet poles of the magnet system and filled with helium under a pressure of higher than 10.sup.-2 torr.
Abstract translation: 用于加速和运输带电粒子束的装置。 该装置具有包围加速结构的壳体以及磁体系统。 加速结构加速了在第一抽空空间内的注入的带电粒子束，并将光束引导到磁体系统中，该磁体系统沿第二抽空空间内的弯曲光束路径传送。 两个空间彼此分离，并且磁体系统被支撑在壳体内，使得其可以相对于加速结构角度调节。 在优选实施例中，第二抽空的间隔部分由磁体系统的磁极限定，并在高于10-2托的压力下填充氦。
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公开(公告)号：US4962317A
公开(公告)日：1990-10-09
申请号：US414232
申请日：1989-09-29
Applicant: Andrew J. Jason , Barbara Blind
Inventor： Andrew J. Jason , Barbara Blind
Abstract: A charged particle beam is formed to a relatively larger area beam which is well-contained and has a beam area which relatively uniformly deposits energy over a beam target. Linear optics receive an accelerator beam and output a first beam with a first waist defined by a relatively small size in a first dimension normal to a second dimension. Nonlinear optics, such as an octupole magnet, are located about the first waist and output a second beam having a phase-space distribution which folds the beam edges along the second dimension toward the beam core to develop a well-contained beam and a relatively uniform particle intensity across the beam core. The beam may then be expanded along the second dimension to form the uniform ribbon beam at a selected distance from the nonlinear optics. Alternately, the beam may be passed through a second set of nonlinear optics to fold the beam edges in the first dimension. The beam may then be uniformly expanded along the first and second dimensions to form a well-contained, two-dimensional beam for illuminating a two-dimensional target with a relatively uniform energy deposition.
Abstract translation: 带电粒子束形成为相对较大的区域光束，其具有良好的并且具有在束目标上相对均匀地沉积能量的光束区域。 线性光学器件接收加速器光束并输出第一光束，第一光束具有由第二维度的第一维度中相对小的尺寸限定的第一腰部。 诸如八极磁体的非线性光学器件围绕第一腰围定位并输出具有相位空间分布的第二光束，所述第二光束具有沿着第二维度的光束边缘朝向光束核心折叠以形成良好的光束和相对均匀的光束 束芯的粒子强度。 然后可以沿着第二尺寸扩展梁，以在与非线性光学器件选择的距离处形成均匀的带状束。 或者，光束可以通过第二组非线性光学器件以折叠第一维度中的光束边缘。 然后，梁可以沿着第一和第二尺寸均匀地膨胀，以形成用于以相对均匀的能量沉积来照射二维目标的完全包含的二维光束。
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Patent Agency Ranking
公开(公告)号：US4962309A
公开(公告)日：1990-10-09
申请号：US396192
申请日：1989-08-21
Applicant: Frederic H. White, III , Patrick H. Hu , Jerry R. Bettis
Inventor： Frederic H. White, III , Patrick H. Hu , Jerry R. Bettis
Abstract: This invention relates to a fine focusing lens for charged particle beams. Since the field lines of the poles are additive, and the lens 50 can be made to be very small, the lens can be used inside of a coarse focusing lens 51. The lens 50 employs a plurality of poles 1-32, evenly spaced, circumferentially around the lens. The poles may be wires 38 for electromagnetic poles or plates 35 for electrostatic poles. Each pole can be tagged to induce a frequency, pulse, or phase signal on the charged particle beam 49, so that the effects of each pole on the beam can be separately detected. The beam can therefore be focused by seeing the effects of and adjusting each pole separately. As the number of poles increases, the ability to finely focus a charged particle beam increases. The lens 50 as shown in the figures has 32 poles, which is enough to very finely focus a charged particle beam.
Abstract translation: 本发明涉及带电粒子束的精细聚焦透镜。 由于极的场线是相加的，并且透镜50可以被制成非常小，所以透镜可以在粗调焦透镜51的内部使用。透镜50采用均匀间隔的多个极1-32， 围绕透镜周向。 极可以是用于电磁极的线38或用于静电极的板35。 每个极可被标记以在带电粒子束49上感应出频率，脉冲或相位信号，从而可以分别检测每个极对光束的影响。 因此，可以通过分别观察和调整每个极点来聚焦光束。 随着极数的增加，精细聚焦带电粒子束的能力增加。 如图所示的透镜50具有32个极，这足以使带电粒子束非常精细地聚焦。
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公开(公告)号：US4829179A
公开(公告)日：1989-05-09
申请号：US70252
申请日：1987-07-06
Applicant: Masahiko Aoki , Masashi Konishi , Yasuhiro Matsuda , Naoto Okazaki
Inventor： Masahiko Aoki , Masashi Konishi , Yasuhiro Matsuda , Naoto Okazaki
CPC classification number: H01J49/30 , G01N23/20 , G21K1/093 , H01J49/025 , H01J49/142
Abstract: A surface analyzer for analyzing physical properties of the surface of a sample by means of PELS (Proton energy loss spectroscopy) in which accelerated ion beams such as proton beams impinge on the sample in the vertical direction to the surface of the sample and ion beams scattered from the sample are decelerated and then detected by an analyzer to analyze the energy loss of the ion beams. The surface analyzer comprises an ion beam source for generating ion beams, deflecting means for deflecting the ion beams from the ion beam source, irradiating the surface of the sample with the ion beams from the ion beam source in the vertical direction to the surface of the sample, and deflecting scattered ion beams from the sample, accelerating and decelerating means for accelerating the ion beams before the ion beams impinge on the sample and decelerating the scattered ion beams, and analyzing means for detecting the scattered beams and analyzing energy loss of the ion beams.
Abstract translation: 用于通过PELS（质子能量损失光谱法）分析样品表面的物理性质的表面分析仪，其中质子束等加速离子束在垂直方向上撞击在样品的表面上并且离子束散射 从样品减速，然后由分析仪检测，以分析离子束的能量损失。 表面分析仪包括用于产生离子束的离子束源，用于偏转来自离子束源的离子束的偏转装置，用垂直方向的离子束源的离子束照射样品的表面 采样和偏转来自样品的散射离子束，加速和减速装置，用于在离子束照射在样品上并加速散射的离子束之前加速离子束，以及分析装置，用于检测散射光束并分析离子的能量损失 梁。
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公开(公告)号：US4767930A
公开(公告)日：1988-08-30
申请号：US33133
申请日：1987-03-31
Applicant: Volker Stieber , Franz Krispel
Inventor： Volker Stieber , Franz Krispel
CPC classification number: G21K1/093
Abstract: A method and an apparatus for irradiating a relatively large area with a charged particle beam. In the method, a pencil-like beam is generated and spread along a fan axis perpendicular to the beam axis. The fan axis is rotated around the beam axis so that finally a circular area is irradiated. The apparatus includes means for generating a pencil-like beam, a lens system for spreading the beam along the fan axis and means to rotate the fan axis around the beam axis. In a preferred embodiment, the beam is spread such that its transverse intensity distribution increases with increasing distance from the beam center so that the area swept by the beam is irradiated with an even intensity.
Abstract translation: 一种用带电粒子束照射较大面积的方法和装置。 在该方法中，沿垂直于光束轴的风扇轴线产生并扩展铅笔状光束。 风扇轴线绕光束轴线旋转，从而最终照射圆形区域。 该装置包括用于产生铅笔状光束的装置，用于沿着风扇轴线扩散光束的透镜系统，以及使风扇轴线围绕光束轴线旋转的装置。 在优选实施例中，光束被扩展使得其横向强度分布随着距离光束中心的距离的增加而增加，使得被光束扫过的区域以均匀的强度照射。
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公开(公告)号：US4701620A
公开(公告)日：1987-10-20
申请号：US893180
申请日：1986-08-05
Applicant: Masahide Okumura , Takashi Matsuzaka , Genya Matsuoka , Norio Saitou
Inventor： Masahide Okumura , Takashi Matsuzaka , Genya Matsuoka , Norio Saitou
IPC: H01L21/30 , H01J37/141 , H01J37/153 , H01J37/21 , H01J37/304 , H01L21/027 , G21K1/093 , H01J37/07
CPC classification number: H01J37/153 , H01J37/304
Abstract: Disclosed is an electron beam exposure apparatus which includes an objective lens focusing an electron beam, and a dynamic focus correction lens dynamically correcting the focusing by the objective lens. The apparatus comprises a control circuit which, in order to prevent a current variation induced in the objective lens by the dynamic focus correction lens, controls current supplied to the objective lens so as to cancel the current variation induced in the objective lens due to the coil current of the dynamic focus correction lens.
Abstract translation: 公开了一种电子束曝光装置，其包括聚焦电子束的物镜和动态校正透镜，动态校正物镜的聚焦。 该装置包括一个控制电路，为了防止物镜由动态聚焦校正透镜引起的电流变化，控制提供给物镜的电流，以消除由于线圈而引起的物镜中的电流变化 电流的动态聚焦校正镜头。
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公开(公告)号：US4687936A
公开(公告)日：1987-08-18
申请号：US810398
申请日：1985-12-17
Applicant: Raymond D. McIntyre , Karl L. Brown
Inventor： Raymond D. McIntyre , Karl L. Brown
Abstract: A system for scanning a beam of charged-particles across a target is described which compensates for energy dispersion in the beam. A time-varying magnet with circular pole pieces is used to sweep the beam left to right. Two wedge-shaped magnet dipoles, one on each side of the center line are used to bend the beam parallel to the center line and compensate for beam energy dispersion.
Abstract translation: 描述了用于扫描穿过靶的带电粒子束的系统，其补偿光束中的能量分散。 具有圆形极片的时变磁体用于从左到右扫掠光束。 使用两个楔形磁偶极子，中心线每侧一个，用于将光束平行于中心线弯曲并补偿光束能量散射。
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