Film formation method and film formation apparatus
    64.
    发明授权
    Film formation method and film formation apparatus 有权
    成膜方法和成膜装置

    公开(公告)号:US08431494B2

    公开(公告)日:2013-04-30

    申请号:US13164280

    申请日:2011-06-20

    CPC classification number: C23C16/401 C23C16/45523

    Abstract: A film formation method of forming a silicon oxide film on a surface of an object to be processed in a process chamber includes absorbing a seed gas comprising a silane-based gas on the surface of the object to be processed by supplying the seed gas into the process chamber, forming a silicon film having an impurity by supplying a silicon-containing gas as a material gas, and an addition gas including the impurity into the process chamber, and oxidizing the silicon film to convert the silicon film into the silicon oxide film. Accordingly, the silicon oxide film having the high density and the high stress is formed on the surface of the object to be processed.

    Abstract translation: 在处理室中的待处理物体的表面上形成氧化硅膜的成膜方法包括通过将种子气体供给到待处理物体的表面上来吸收包含硅烷类气体的种子气体 处理室,通过将作为原料气体的含硅气体和含有该杂质的添加气体供给到处理室中,形成具有杂质的硅膜,氧化硅膜,将硅膜转换成氧化硅膜。 因此,在待处理物体的表面上形成具有高密度和高应力的氧化硅膜。

    METHOD FOR FORMING NITRIDE FILM
    66.
    发明申请
    METHOD FOR FORMING NITRIDE FILM 审中-公开
    形成氮化膜的方法

    公开(公告)号:US20120164848A1

    公开(公告)日:2012-06-28

    申请号:US13338288

    申请日:2011-12-28

    Abstract: A plasma-assisted ALD method using a vertical furnace and being performed by repeating a cycle until a desired film thickness is obtained is disclosed. The cycle comprises introducing a source gas containing a source to be nitrided, adsorbing, purging, introducing a nitriding gas and nitriding the source, and then, purging. A flow rate of a second carrier gas during introduction of the nitriding gas is reduced relative to that of a first carrier gas during introduction of the source gas. Particularly, a flow ratio of NH3 gas as the nitriding gas to N2 gas as the second carrier gas is 50:3 or less.

    Abstract translation: 公开了使用垂直炉的等离子体辅助ALD方法,并且通过重复循环直到获得所需的膜厚度来进行。 该循环包括引入含氮源的源气体,吸附,净化,引入氮化气体和氮化氮源,然后进行清洗。 在引入氮化气体期间,第二载气的流量相对于第一载气在引入源气体时的流量减小。 特别地,作为氮化气体的NH 3气体与作为第二载气的N 2气体的流量比为50:3以下。

    POWER AMPLIFIER
    68.
    发明申请
    POWER AMPLIFIER 有权
    功率放大器

    公开(公告)号:US20120146733A1

    公开(公告)日:2012-06-14

    申请号:US13195051

    申请日:2011-08-01

    Abstract: A power amplifier includes an input matching circuit, an amplifier transistor for amplifying an input signal received through the input matching circuit, an element for varying the collector voltage of the amplifier transistor, a bias circuit for varying the idle current in the amplifier transistor, and a compensation circuit for varying capacitance of the input matching circuit to maintain the phase shift and the input reflection in the power amplifier constant when the collector voltage and the idle current are varied, to prevent a decrease in the efficiency of the power amplifier due to changes in the output power of the amplifier transistor.

    Abstract translation: 功率放大器包括输入匹配电路,用于放大通过输入匹配电路接收的输入信号的放大器晶体管,用于改变放大器晶体管的集电极电压的元件,用于改变放大器晶体管中的空闲电流的偏置电路,以及 用于改变输入匹配电路的电容的补偿电路,以在集电极电压和空闲电流变化时保持功率放大器的相移和输入反射恒定,以防止由于变化而导致的功率放大器的效率的降低 在放大晶体管的输出功率。

    Sheet transport apparatus
    69.
    发明授权
    Sheet transport apparatus 有权
    片材输送装置

    公开(公告)号:US08052146B2

    公开(公告)日:2011-11-08

    申请号:US12450243

    申请日:2008-08-28

    Abstract: Provided is a sheet inverting apparatus wherein members, such as a roller, are not brought into contact with the printed surface of a sheet at all, and the occurrence of dirt can be prevented by eliminating friction of ink on the surface of the sheet. A first transport apparatus and a second transport apparatus each have a plurality of transport belts which move on transport tracks along sheet transport directions and a suction box which sucks the sheet on the transport belts through suction holes formed on the transport belts. A turn guide arranged between the first transport apparatus and the second transport apparatus has a plurality of guide ribs disposed between the transport belts. Each of the guide ribs coming into slidable contact with the sheet forms a curved inverting transfer surface from an inversion starting point side to an inversion end point side.

    Abstract translation: 提供了一种片材翻转装置,其中诸如辊的构件根本不与片材的印刷表面接触,并且可以通过消除片材表面上的墨水的摩擦来防止污垢的发生。 第一输送装置和第二输送装置分别具有沿着输送方向在输送轨道上移动的多个输送带,以及通过形成在输送带上的吸孔将纸张吸附在输送带上的吸引箱。 布置在第一输送装置和第二输送装置之间的转向引导件具有设置在输送带之间的多个引导肋。 与片材滑动接触的每个引导肋从反转起点侧到反转端点侧形成弯曲的反转转移面。

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