公开(公告)号：US5929475A

公开(公告)日：1999-07-27

申请号：US573134

申请日：1995-12-15

Applicant: Yasuhiro Uemoto ,  Eigi Fujii ,  Koji Arita ,  Yoshihisa Nagano ,  Yasuhiro Shimada ,  Masamichi Azuma ,  Atsuo Inoue ,  Yasufumi Izutsu

Inventor： Yasuhiro Uemoto ,  Eigi Fujii ,  Koji Arita ,  Yoshihisa Nagano ,  Yasuhiro Shimada ,  Masamichi Azuma ,  Atsuo Inoue ,  Yasufumi Izutsu

IPC: H01L21/02 ,  H01L21/314 ,  H01L27/115 ,  H01L29/76 ,  H01L27/108 ,  H01L31/062

CPC classification number: H01L27/11502 ,  H01L28/40 ,  H01L28/56

Abstract: A method for fabricating a capacitor for an integrated circuit, comprising the steps of forming a titanium film for an adhesion layer over a substrate, forming a titanium dioxide film for a diffusion barrier layer by annealing the titanium film after ion-implantation of oxygen ion into a surface region of the titanium film so as to change titanium in the surface region to titanium dioxide, and forming a high dielectric constant capacitor on the titanium dioxide film.

Abstract translation: 一种用于制造用于集成电路的电容器的方法，包括以下步骤：在衬底上形成用于粘附层的钛膜，通过在离子注入氧离子之后将钛膜退火形成用于扩散阻挡层的二氧化钛膜 钛膜的表面区域，以将表面区域中的钛变为二氧化钛，并在二氧化钛膜上形成高介电常数电容器。

公开(公告)号：US5660471A

公开(公告)日：1997-08-26

申请号：US199794

申请日：1994-02-22

Applicant: Nobuyuki Yoshiike ,  Koji Arita ,  Katuya Morinaka ,  Hiroichi Goto

Inventor： Nobuyuki Yoshiike ,  Koji Arita ,  Katuya Morinaka ,  Hiroichi Goto

IPC: G01J5/00 ,  G01J5/34 ,  G01J5/62 ,  G01N25/00 ,  G01J5/08

CPC classification number: G01J5/04 ,  G01J5/047 ,  G01J5/08 ,  G01J5/0806 ,  G01J5/0834 ,  G01J5/089 ,  G01J2005/0077 ,  G01J5/34

Abstract: A temperature distribution measuring device has a turnable sensor head section 1 in which a plurality of detecting sections are arranged, a shaft 2 to which the sensor head section 1 is mounted so that the array direction of the detecting sections is inclined to the axis of rotation thereof, a rotation driving motor for rotating the shaft 2, control circuit 8 for controlling the direction and speed of rotation of the rotation driving section 3, and an umbrella-shaped chopping member for intermittently blocking incident infrared beams. The device has high spatial resolution and can offer temperature resolution at low cost.

Abstract translation: 温度分布测量装置具有安装有多个检测部的可转动传感器头部1，安装有传感器头部1的轴2，使得检测部的排列方向相对于旋转轴倾斜 用于旋转轴2的旋转驱动电机，用于控制旋转驱动部分3的旋转方向和速度的控制电路8以及用于间歇地阻挡入射的红外光束的伞形切割部件。 该器件具有高空间分辨率，可以低成本提供温度分辨率。

公开(公告)号：US5644158A

公开(公告)日：1997-07-01

申请号：US492690

申请日：1995-06-20

Applicant: Eiji Fujii ,  Atsuo Inoue ,  Koji Arita ,  Toru Nasu ,  Akihiro Matsuda

Inventor： Eiji Fujii ,  Atsuo Inoue ,  Koji Arita ,  Toru Nasu ,  Akihiro Matsuda

IPC: H01L27/04 ,  H01L21/02 ,  H01L21/3105 ,  H01L21/324 ,  H01L21/768 ,  H01L21/822 ,  H01L27/10 ,  H01L21/3205

CPC classification number: H01L28/40 ,  H01L21/3105 ,  H01L21/76828

Abstract: A semiconductor device comprising: (a) a semiconductor substrate on whose surface an integrated circuit is formed, (b) a first insulating layer formed on the semiconductor device and having first contact holes which lead to the integrated circuit, (c) a capacitance element formed on the first insulating layer, (d) a second insulating layer formed on the first insulating layer to cover the capacitance element, and having second contact holes which lead to an upper and a lower electrodes of the capacitance element respectively, and (e) interconnections which are connected to the integrated circuit and the capacitance element respectively through the first and second contact holes. The hydrogen density of this semiconductor device is 10.sup.11 atoms/cm.sup.2 or less.

Abstract translation: 一种半导体器件，包括：（a）在其表面上形成集成电路的半导体衬底，（b）形成在半导体器件上并具有通向集成电路的第一接触孔的第一绝缘层，（c）电容元件 形成在所述第一绝缘层上，（d）形成在所述第一绝缘层上以覆盖所述电容元件的第二绝缘层，以及具有分别通向所述电容元件的上下电极的第二接触孔，以及（e） 互连通过第一和第二接触孔分别连接到集成电路和电容元件。 该半导体器件的氢密度为1011原子/ cm 2以下。

公开(公告)号：US5624864A

公开(公告)日：1997-04-29

申请号：US284984

申请日：1994-08-04

Applicant: Koji Arita ,  Eiji Fujii ,  Yasuhiro Shimada ,  Yasuhiro Uemoto ,  Toru Nasu ,  Akihiro Matsuda ,  Yoshihisa Nagano ,  Atsuo Inoue ,  Taketoshi Matsuura ,  Tatsuo Otsuki

Inventor： Koji Arita ,  Eiji Fujii ,  Yasuhiro Shimada ,  Yasuhiro Uemoto ,  Toru Nasu ,  Akihiro Matsuda ,  Yoshihisa Nagano ,  Atsuo Inoue ,  Taketoshi Matsuura ,  Tatsuo Otsuki

IPC: H01L21/02 ,  H01L21/8242 ,  H01L21/8246 ,  H01L27/115

CPC classification number: H01L27/11502 ,  H01L27/10852 ,  H01L27/11585 ,  H01L27/1159 ,  H01L28/40 ,  H01L28/55 ,  H01L28/60 ,  H01L28/75 ,  Y10S438/958

Abstract: A semiconductor device forming a capacitor through an interlayer insulating layer on a semiconductor substrate on which an integrated circuit is formed. This semiconductor device has an interlayer insulating layer with moisture content of 0.5 g/cm.sup.3 or less, which covers the capacitor in one aspect, and has a passivation layer with hydrogen content of 10.sup.21 atoms/cm.sup.3 or less, which covers the interconnections of the capacitor in other aspect. By thus constituting, deterioration of the capacitor dielectric can be prevented which brings about the electrical reliability of the ferroelectric layer or high dielectric layer.

Abstract translation: 一种通过半导体衬底上的层间绝缘层形成电容器的半导体器件，其上形成集成电路。 该半导体装置具有含水量为0.5g / cm 3以下的层间绝缘层，其在一个方面覆盖电容器，并且具有氢含量为1021原子/ cm3以下的钝化层，其覆盖电容器的互连 在其他方面。 通过这样构成，可以防止导致铁电层或高介电层的电可靠性的电容器电介质的劣化。

公开(公告)号：US5567052A

公开(公告)日：1996-10-22

申请号：US372855

申请日：1995-01-13

Applicant: Nobuyuki Yoshiike ,  Koji Arita ,  Katsuya Morinaka

Inventor： Nobuyuki Yoshiike ,  Koji Arita ,  Katsuya Morinaka

IPC: G01J5/10 ,  G01J5/00 ,  G01J5/34 ,  G01J5/62 ,  G01V8/12 ,  G08B13/193 ,  G01J5/08

CPC classification number: G01J5/04 ,  G01J5/047 ,  G01J5/08 ,  G01J5/0806 ,  G01J5/0834 ,  G01J5/089 ,  G08B13/193 ,  G01J2005/0077 ,  G01J5/34 ,  Y10S250/01

Abstract: A temperature distribution measurement apparatus has an infrared array sensor that comprises a pyroelectric substrate with infrared ray detecting electrodes, a focusing member comprising an infrared lens for focusing incident infrared rays on the infrared array sensor, a cylindrical chopping member for intermittently shielding incident infrared rays from the plurality of detector elements and a driving member for continuously rotating a rotating member which includes the infrared array sensor. The temperature distribution measurement apparatus combined with computational means and detector means is applied to determine number, position, and movements of persons in a space.

Abstract translation: 温度分布测量装置具有红外阵列传感器，该红外阵列传感器包括具有红外线检测电极的热电基片，聚焦部件，包括用于将入射红外线聚焦在红外阵列传感器上的红外透镜，用于间断地屏蔽入射红外线的圆柱形切片部件 所述多个检测器元件和用于连续旋转包括所述红外阵列传感器的旋转部件的驱动部件。 应用与计算装置和检测器装置结合的温度分布测量装置来确定人员在空间中的数量，位置和移动。

公开(公告)号：US5438849A

公开(公告)日：1995-08-08

申请号：US305320

申请日：1994-09-15

Applicant: Yuji Yoshida ,  Koji Arita ,  Masami Funakura

Inventor： Yuji Yoshida ,  Koji Arita ,  Masami Funakura

IPC: C09K5/04 ,  F25B1/00

CPC classification number: C09K5/045 ,  C09K2205/22

Abstract: An air conditioner or heat pump containing a working fluid comprising tetrafluoroethane and at least two fluorinated hydrocarbons having a boiling point of not higher than -40.degree. C. under atmospheric pressure selected from the group consisting of methane derivatives and ethane derivatives which consist of one or two carbon atoms, hydrogen atoms and fluorine atoms, which has very small influence on the ozone layer in the stratosphere and is suitable as a substitute working fluid for chlorodifluoromethane.

Abstract translation: 一种包含工作流体的空调或热泵，其包含四氟乙烷和至少两种沸点不高于-40℃的氟化烃，所述氟化烃在大气压下选自甲烷衍生物和乙烷衍生物，所述甲烷衍生物和乙烷衍生物由一个或多个 两个碳原子，氢原子和氟原子，对平流层臭氧层的影响非常小，适用于氯二氟甲烷的替代工作流体。

公开(公告)号：US5299428A

公开(公告)日：1994-04-05

申请号：US39832

申请日：1993-03-30

Applicant: Mariko Kawaguri ,  Nobuyuki Yoshiike ,  Koji Arita ,  Susumu Kobayashi ,  Katsuya Morinaka

Inventor： Mariko Kawaguri ,  Nobuyuki Yoshiike ,  Koji Arita ,  Susumu Kobayashi ,  Katsuya Morinaka

IPC: F24F11/02 ,  A47C21/04 ,  F24F11/00 ,  G05D23/19 ,  F25D23/12

CPC classification number: A47C21/044 ,  F24F11/00 ,  G05D23/1902 ,  F24F1/00 ,  F24F11/0012 ,  F24F11/0015 ,  F24F2221/10

Abstract: An environmental control system comprises room temperature measurement apparatus, a plurality of thermal sensors fixed on a mattress over abed, a plurality of humidity sensors fixed on the mattress over the bed, an air conditioning unit for varying the room temperature, and a control circuit. The control circuit determines a thermal sensation of a sleeper from measured values by a plurality of thermal sensors , determines a perspiratory sensation of the sleeper from the measured values by a plurality of humidity sensors, and controls the air conditioning unit so as to let the temperature of the air in the vicinity of the bed be different from the room temperature by an amount prescribed by the combination of the room temperature value and the thermal and perspiratory sensation values, thus maintaining a comfortable condition in the bedroom and on the mattress.

Abstract translation: 环境控制系统包括室温测量装置，固定在床垫上的多个热传感器，固定在床上的多个湿度传感器，用于改变室温的空调单元和控制电路。 控制电路通过多个热传感器从测量值确定睡眠者的热感觉，通过多个湿度传感器从测量值确定睡眠者的呼吸感觉，并且控制空调单元以使温度 在床附近的空气不同于室温通过室温值和热和呼吸感觉值的组合规定的量，从而在卧室和床垫上保持舒适的状态。

公开(公告)号：US5154067A

公开(公告)日：1992-10-13

申请号：US806332

申请日：1991-12-13

Applicant: Takeshi Tomizawa ,  Koji Arita

Inventor： Takeshi Tomizawa ,  Koji Arita

IPC: F25D11/00 ,  F25B17/08

CPC classification number: F25B17/08

Abstract: A portable cooler for cooling an article by utilizing the endothermic and exothermic phenomenon pertaining to a chemical reaction is disclosed, in which an adsorbent and a working medium are sealed in a reaction chamber defined between an inner wall and an outer wall, a working medium retaining member is disposed on the inner wall inside the reaction chamber for holding therein the working medium, the working medium retaining member being spaced from the adsorbent disposed on the outer wall, and a heater is held in contact with the adsorbent for regenerating the same, at least a part of said outer wall constituting a heat radiating portion.

公开(公告)号：US08537605B2

公开(公告)日：2013-09-17

申请号：US12867437

申请日：2009-02-09

Applicant: Takumi Mikawa ,  Yoshio Kawashima ,  Koji Arita ,  Takeki Ninomiya

Inventor： Takumi Mikawa ,  Yoshio Kawashima ,  Koji Arita ,  Takeki Ninomiya

IPC: G11C11/14

CPC classification number: H01L27/101 ,  H01L27/2436 ,  H01L45/04 ,  H01L45/1233 ,  H01L45/146 ,  H01L45/1675

Abstract: A nonvolatile semiconductor memory device (100) comprises a substrate (102) provided with a transistor (101); a first interlayer insulating layer (103) formed over the substrate to cover the transistor; a first contact plug (104) formed in the first interlayer insulating layer and electrically connected to either of a drain electrode (101a) or a source electrode (101b) of the transistor, and a second contact plug (105) formed in the first interlayer insulating layer and electrically connected to the other of the drain electrode or the source electrode of the transistor; a resistance variable layer (106) formed to cover a portion of the first contact plug; a first wire (107) formed on the resistance variable layer; and a second wire (108) formed to cover a portion of the second contact plug; an end surface of the resistance variable layer being coplanar with an end surface of the first wire.

Abstract translation: 非易失性半导体存储器件（100）包括设置有晶体管（101）的衬底（102）; 形成在所述衬底上以覆盖所述晶体管的第一层间绝缘层（103） 形成在所述第一层间绝缘层中并电连接到所述晶体管的漏电极（101a）或源电极（101b）中的任一个的第一接触插塞（104）和形成在所述第一中间层 绝缘层并与晶体管的漏电极或源电极中的另一个电连接; 形成为覆盖所述第一接触插塞的一部分的电阻变化层（106） 形成在电阻变化层上的第一线（107） 以及形成为覆盖所述第二接触插塞的一部分的第二线（108） 所述电阻变化层的端面与所述第一线的端面共面。

公开(公告)号：US20130171799A1

公开(公告)日：2013-07-04

申请号：US13823667

申请日：2011-09-16

Applicant: Ryoko Miyanaga ,  Takumi Mikawa ,  Yukio Hayakawa ,  Takeki Ninomiya ,  Koji Arita

Inventor： Ryoko Miyanaga ,  Takumi Mikawa ,  Yukio Hayakawa ,  Takeki Ninomiya ,  Koji Arita

IPC: H01L45/00 ,  H01L21/768

CPC classification number: H01L45/16 ,  H01L21/768 ,  H01L27/101 ,  H01L27/2409 ,  H01L27/2418 ,  H01L45/00 ,  H01L45/04 ,  H01L45/1233 ,  H01L45/146

Abstract: A current steering element (100) formed such that the current steering element covers a lower opening (105) of a via hole (104) formed in an interlayer insulating layer (102), comprises: a corrosion-suppressing layer (106) formed on a lower side of a lower opening of the via hole such that the corrosion-suppressing layer covers an entire portion of the lower opening; a second electrode layer (108) formed under the corrosion-suppressing layer and comprising a material different from a material of the corrosion-suppressing layer; a current steering layer (110) formed under the second electrode layer such that the current steering layer is physically in contact with the second electrode layer; and a first electrode layer (112) formed under the current steering layer such that the first electrode layer is physically in contact with the current steering layer; and the first electrode layer, the current steering layer and the second electrode layer constitute one of a MSM diode and a MIM diode.

Abstract translation: 一种形成为当前的操舵元件覆盖形成在层间绝缘层（102）中的通孔（104）的下开口（105）的电流控制元件（100），包括：形成在 通孔的下开口的下侧，使得防蚀层覆盖下开口的整个部分; 形成在所述腐蚀抑制层下方并且包含不同于所述腐蚀抑制层的材料的材料的第二电极层（108） 形成在所述第二电极层下方的电流转向层（110），使得所述电流导向层物理地与所述第二电极层接触; 以及第一电极层（112），形成在所述电流导向层下方，使得所述第一电极层物理地与所述电流转向层接触; 并且第一电极层，电流导向层和第二电极层构成MSM二极管和MIM二极管之一。