摘要:
High capacity energy storage devices and energy storage device components, and more specifically, to a system and method for fabricating such high capacity energy storage devices and storage device components using processes that form three-dimensional porous structures are provided. In one embodiment, an anode structure for use in a high capacity energy storage device, comprising a conductive collector substrate, a three-dimensional copper-tin-iron porous conductive matrix formed on one or more surfaces of the conductive collector substrate, comprising a plurality of meso-porous structures formed over the conductive current collector, and an anodically active material deposited over the three-dimensional copper-tin-iron porous conductive matrix is provided. In certain embodiments, the three-dimensional copper-tin-iron porous conductive matrix further comprises a plurality of columnar projections formed on the conductive current collector with the plurality of meso-porous structure formed on the plurality of columnar projections.
摘要:
Apparatus and methods of forming a battery-active material are described. An apparatus includes a first processing section that raises the temperature of a precursor material to a reaction threshold temperature, a second processing section that converts the precursor material to a battery-active material, and a third processing section that cools the resulting battery-active material. Each of the processing sections may be a continuous flow tubular component. The first and third processing sections may be metal, and the second processing section may be a refractory material for high temperature service. The battery-active material is collected using a solids collector.
摘要:
A method for forming an electrode for a battery is disclosed. The method includes providing a substrate. A plurality of clusters of lithium containing compound is formed over the substrate, with each cluster having a plurality of sub-structures of lithium containing compound that exhibit nanocrystalline structure. The plurality of sub-structures of lithium containing compound are transformed to exhibit cation ordering structure. In some embodiments, a protective layer is disposed over the cluster of Li containing compound. An electrode for a battery and a system for processing the substrate are also disclosed.
摘要:
Embodiments described herein provide methods and systems for manufacturing faster charging, higher capacity energy storage devices that are smaller, lighter, and can be more cost effectively manufactured at a higher production rate. In one embodiment, a graded cathode structure is provided. The graded cathode structure comprises a conductive substrate, a first porous layer comprising a first cathodically active material having a first porosity formed on the conductive substrate, and a second porous layer comprising a second cathodically active material having a second porosity formed on the first porous layer. In certain embodiments, the first porosity is greater than the second porosity. In certain embodiments, the first porosity is less than the second porosity.
摘要:
A system and method for fabricating lithium-ion batteries using thin-film deposition processes that form three-dimensional structures is provided. In one embodiment, an anodic structure used to form an energy storage device is provided. The anodic structure comprises a conductive substrate, a plurality of conductive microstructures formed on the substrate, a passivation film formed over the conductive microstructures, and an insulative separator layer formed over the conductive microstructures, wherein the conductive microstructures comprise columnar projections.
摘要:
Embodiments described herein generally relate to methods and apparatus for forming an electrode structure used in an energy storage device. More particularly, embodiments described herein relate to methods and apparatus for characterizing nanomaterials used in forming high capacity electrode structures for energy storage devices. In one embodiment a process for forming an electrode structure for an energy storage device is provided. The process comprises depositing a columnar metal structure over a substrate at a first current density by a diffusion limited deposition process, measuring a capacitance of the columnar metal structure to determine a surface area of the columnar metal structure, and depositing three dimensional porous metal structures over the columnar metal structure at a second current density greater than the first current density.
摘要:
A method and apparatus for forming a reliable and cost efficient battery or electrochemical capacitor electrode structure that has an improved lifetime, lower production costs, and improved process performance are provided. In one embodiment a method for forming a three dimensional porous electrode for a battery or an electrochemical cell is provided. The method comprises depositing a columnar metal layer over a substrate at a first current density by a diffusion limited deposition process and depositing three dimensional metal porous dendritic structures over the columnar metal layer at a second current density greater than the first current density.
摘要:
In one embodiment, a method for depositing a capping layer on a substrate surface containing a copper layer is provided which includes exposing the substrate surface to a zinc solution, exposing the substrate surface to a silver solution to form a silver layer thereon and depositing the capping layer on the silver layer by an electroless deposition process. A second silver layer may be formed on the capping layer, if desired. In another embodiment, a composition of a deposition solution useful for forming a cobalt tungsten alloy contains calcium tungstate, a cobalt source at a concentration within a range from about 50 mM to about 500 mM, a complexing agent at a concentration within a range from about 100 mM to about 700 mM, and a buffering agent at a concentration within a range from about 50 mM to about 500 mM.
摘要:
A manufacturing method for an integrated circuit has a substrate with a semiconductor device thereon. A channel dielectric layer is deposited over the device and has an opening provided therein. A reducing process is performed in order to reduce the oxidation on the conductor and a conformal atomic liner is deposited in an atomic layer thickness to line the opening in the channel dielectric layer. A barrier layer is deposited over the conformal atomic liner and a seed layer is deposited over the barrier layer. A conductor core layer is deposited on the seed layer, filling the opening over the barrier layer and connecting to the semiconductor device.
摘要:
An integrated circuit manufacturing method is provided having a semiconductor substrate with a semiconductor device. A device dielectric layer is formed on the semiconductor substrate and a channel dielectric layer on the device dielectric layer has an opening formed therein. A barrier layer lines the channel opening and a conductor core fills the opening over the barrier layer. A seedless barrier layer lines the opening, and a conductor core fills the opening over the seedless barrier layer. The barrier layer is deposited in the opening and contains atomic layers of barrier material which bonds to the dielectric layer, an intermediate material which bonds to the barrier material layer and to the conductor core, and a conductor core material which bonds to the intermediate material. The conductor core bonds to the conductor core material.