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    Determination of metal and metalloid concentrations using ICPMS
    61.
    发明授权
    Determination of metal and metalloid concentrations using ICPMS 有权
    使用ICPMS测定金属和准金属浓度

    公开(公告)号：US09406490B1

    公开(公告)日：2016-08-02

    申请号：US14703828

    申请日：2015-05-04

    Applicant: Elemental Scientific, Inc.

    Inventor： Nathan Saetveit ,  Daniel R. Wiederin

    IPC: H01J49/00 ,  H01J49/10 ,  H01J49/14

    CPC classification number: H01J49/105 ,  B05B14/45 ,  H01J49/0031 ,  H01J49/0077 ,  H01J49/045 ,  H01J49/145

    Abstract: A system for determining an analyte by inductively coupled plasma mass spectrometry (ICPMS) includes a sample introduction device having a heated cyclonic spray chamber. The system is configured to introduce sample that includes a metal and/or a metalloid having an organic interferent. The system also includes an inductively coupled plasma mass spectrometry device with a collision/reaction cell configured to receive a mixture of gases including both ammonia and hydrogen. A method includes introducing a sample to plasma to produce a characteristic spectrum associated with an elemental composition of the sample. The method also includes introducing both ammonia and hydrogen to a collision/reaction cell to remove carbon-based interferences to detection of the sample prior to determining the elemental composition of the sample.

    Abstract translation: 通过电感耦合等离子体质谱法（ICPMS）确定分析物的系统包括具有加热旋风喷雾室的样品引入装置。 该系统被配置为引入包含具有有机干扰物的金属和/或准金属的样品。 该系统还包括电感耦合等离子体质谱装置，其中碰撞/反应池配置成接收包括氨和氢的气体混合物。 一种方法包括将样品引入等离子体以产生与样品的元素组成相关的特征谱。 该方法还包括将氨和氢引入到碰撞/反应池中，以在确定样品的元素组成之前除去对基于样品的检测的碳基干扰。

    Injection valve
    62.
    发明授权
    Injection valve 有权
    注射阀

    公开(公告)号：US09146182B1

    公开(公告)日：2015-09-29

    申请号：US14163311

    申请日：2014-01-24

    Applicant: Elemental Scientific, Inc.

    Inventor： Daniel R. Wiederin ,  Nathan Saetveit

    IPC: F16K11/074 ,  G01N30/20 ,  G01N1/28

    CPC classification number: G01N30/20 ,  G01N2030/201 ,  G01N2030/202 ,  G01N2030/207 ,  Y10T137/86863

    Abstract: Valve assemblies are described that provide flow paths in substantially indirect opposition for fluids injected into the valve assemblies for mixing. A valve assembly includes a first valve member having ports configured to receive a first fluid and a second fluid. The valve assembly also includes a second valve member coupled adjacent to the first valve member. The valve assembly defines a first flow path for the first fluid and a second flow path for the second fluid. The first flow path extends from one of the ports of the first valve member toward an interface between the first valve member and the second valve member, and the second flow path extends from a channel defined by the second valve member toward the interface between the first valve member and the second valve member. The second flow path is in substantially indirect opposition to the first flow path.

    Abstract translation: 描述了阀组件，其为注入到阀组件中以用于混合的流体提供基本上间接的相反的流动路径。 阀组件包括具有构造成容纳第一流体和第二流体的端口的第一阀构件。 阀组件还包括与第一阀构件相邻联接的第二阀构件。 阀组件限定用于第一流体的第一流动路径和用于第二流体的第二流动路径。 第一流路从第一阀构件的一个端口延伸到第一阀构件和第二阀构件之间的界面，并且第二流动路径从由第二阀构件限定的通道朝向第一阀构件和第二阀构件之间的界面延伸 阀构件和第二阀构件。 第二流动路径基本上间接地与第一流动路径相反。

    INDUCTIVELY COUPLED PLASMA TORCH STRUCTURE WITH FLARED OUTLET
    63.
    发明申请
    INDUCTIVELY COUPLED PLASMA TORCH STRUCTURE WITH FLARED OUTLET 有权

    公开(公告)号：US20250126700A1

    公开(公告)日：2025-04-17

    申请号：US18999768

    申请日：2024-12-23

    Applicant: Elemental Scientific, Inc.

    Inventor： Daniel R. Wiederin ,  Gary J. Barrett ,  Kevin Wiederin

    IPC: H05H1/22 ,  G01N21/73 ,  H01J49/10 ,  H05H1/24 ,  H05H1/28 ,  H05H1/30 ,  H05H1/34

    Abstract: An inductively coupled plasma (ICP) torch is described that includes a tapered outer end. A system embodiment includes, but is not limited to, a tubular sample injector configured to receive an aerosolized sample in an interior defined by walls of the tubular sample injector; an inner tube surrounding at least a portion of the tubular sample injector to form a first annular space between the inner tube and the walls of the tubular sample injector, the inner tube defining at least one inlet port for introduction of an auxiliary gas into the first annular space; and an outer tube surrounding at least a portion of the inner tube to form a second annular space, the outer tube defining at least one inlet port for introduction of a cooling gas into the second annular space, the outer tube having a flared region at an outlet of the outer tube.

    SYSTEMS AND METHODS FOR RECOVERING ORGANIC CONTAMINANTS FROM SEMICONDUCTING WAFERS
    64.
    发明申请
    SYSTEMS AND METHODS FOR RECOVERING ORGANIC CONTAMINANTS FROM SEMICONDUCTING WAFERS 有权

    公开(公告)号：US20250079145A1

    公开(公告)日：2025-03-06

    申请号：US18816531

    申请日：2024-08-27

    Applicant: Elemental Scientific, Inc.

    Inventor： Jacob Unnerstall ,  Brianna Dufek ,  Daniel R. Wiederin ,  Suhas Ketkar ,  Austin Schultz ,  Kyle W. Uhlmeyer ,  Beau A. Marth

    IPC: H01J49/04 ,  H01J49/10 ,  H01J49/40 ,  H01J49/42

    Abstract: Systems and methods are described for collecting and combining multiple scan samples from a surface of a semiconducting wafer. A system embodiment includes, but is not limited to, a scan nozzle configured to introduce a first scan solution to a surface of a semiconducting wafer to remove impurities from the surface to provide a first scan sample and retrieve the first scan sample, the scan nozzle further configured to introduce a second scan solution to the surface of the semiconducting wafer to remove residual impurities from the surface to provide a second scan sample and retrieve the second scan sample; and a collection vessel in fluid communication with the scan nozzle, the collection vessel configured to receive each of the first scan sample and the second scan sample from the nozzle and to mix the first scan sample with the second scan sample to provide a combined scan sample.

    Inductively coupled plasma torch structure with flared outlet
    65.
    发明授权
    Inductively coupled plasma torch structure with flared outlet 有权

    公开(公告)号：US12219687B2

    公开(公告)日：2025-02-04

    申请号：US17726018

    申请日：2022-04-21

    Applicant: Elemental Scientific, Inc.

    Inventor： Daniel R. Wiederin ,  Gary J. Barrett ,  Kevin Wiederin

    IPC: H05H1/22 ,  G01N21/73 ,  H01J49/10 ,  H05H1/24 ,  H05H1/28 ,  H05H1/30 ,  H05H1/34

    Abstract: An inductively coupled plasma (ICP) torch is described that includes a tapered outer end. A system embodiment includes, but is not limited to, a tubular sample injector configured to receive an aerosolized sample in an interior defined by walls of the tubular sample injector; an inner tube surrounding at least a portion of the tubular sample injector to form a first annular space between the inner tube and the walls of the tubular sample injector, the inner tube defining at least one inlet port for introduction of an auxiliary gas into the first annular space; and an outer tube surrounding at least a portion of the inner tube to form a second annular space, the outer tube defining at least one inlet port for introduction of a cooling gas into the second annular space, the outer tube having a flared region at an outlet of the outer tube.

    AUTOMATED SYSTEM FOR ONLINE DETECTION OF ORGANIC MOLECULAR IMPURITIES IN SEMICONDUCTOR GRADE CHEMICALS
    66.
    发明申请
    AUTOMATED SYSTEM FOR ONLINE DETECTION OF ORGANIC MOLECULAR IMPURITIES IN SEMICONDUCTOR GRADE CHEMICALS 有权

    公开(公告)号：US20240426796A1

    公开(公告)日：2024-12-26

    申请号：US18756535

    申请日：2024-06-27

    Applicant: Elemental Scientific, Inc.

    Inventor： Alexander Lang ,  Brianna Dufek ,  Daniel R. Wiederin

    IPC: G01N30/72 ,  H01J49/00 ,  H01J49/04 ,  H01J49/10 ,  H01J49/40

    Abstract: An embodiment of an analysis system can include an initial multi-port valve, at least one intermediate multi-port valve, a further multi-port valve, and a time-of-flight mass spectrometer (TOF-MS). The initial multi-port valve can be configured to receive a sample. The at least one intermediate multi-port valve can be fluidly connected to the initial multi-port valve and configured to receive the sample from the initial multi-port valve. A given intermediate multi-port valve can have an ion-exchange column associated therewith. The given intermediate multi-port valve can be configured selectably to one of direct the sample through the ion-exchange column associated therewith (in a speciation mode) or bypass the ion-exchange column (in an infusion mode). The further multi-port valve can be fluidly connected with the at least one intermediate multi-port valve and configured to receive the sample from therefrom. The time-of-flight mass spectrometer (TOF-MS) can be fluidly connected to the further multi-port valve.

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