公开(公告)号：US09291455B2

公开(公告)日：2016-03-22

申请号：US13918556

申请日：2013-06-14

Applicant: Johannes Classen ,  Christoph Gauger ,  Patrick Wellner

Inventor： Johannes Classen ,  Christoph Gauger ,  Patrick Wellner

IPC: G01C19/56 ,  G01C19/5719 ,  G01C19/5747 ,  G01C19/574

CPC classification number: G01C19/56 ,  G01C19/5719 ,  G01C19/574 ,  G01C19/5747

Abstract: A method for operating and/or measuring a micromechanical device. The device has a first and second seismic mass which are movable by oscillation relative to a substrate; a first drive device for deflecting the first seismic mass and a second drive device for deflecting the second seismic mass, parallel to a drive direction in a first orientation; a third drive device for deflecting the first seismic mass, and a fourth drive device for deflecting the second seismic mass in parallel to the drive direction and according to a second orientation opposite from the first orientation; a first detection device for detecting drive motion of the first seismic mass; and a second detection device for detecting drive motion of the second seismic mass. A first and a second detection signal are generated by the first and second detection devices, the first detection signal being evaluated separately from the second detection signal.

Abstract translation: 一种用于操作和/或测量微机械装置的方法。 该装置具有第一和第二震动块，它们通过相对于基底振动而移动; 第一驱动装置，用于偏转第一抗震块;以及第二驱动装置，用于使第二抗震块平行于第一取向的驱动方向; 第三驱动装置，用于偏转所述第一抗震块;以及第四驱动装置，用于使所述第二抗震块平行于所述驱动方向并且根据与所述第一方向相反的第二方位偏转; 第一检测装置，用于检测第一抗震块的驱动运动; 以及用于检测第二地震块的驱动运动的第二检测装置。 第一和第二检测信号由第一和第二检测装置产生，第一检测信号与第二检测信号分开评估。

公开(公告)号：US09229020B2

公开(公告)日：2016-01-05

申请号：US14120386

申请日：2014-05-14

Applicant: Johannes Classen

Inventor： Johannes Classen

IPC: G01L1/14 ,  G01P1/00 ,  G01P15/08 ,  G01C19/5755 ,  G01P15/097 ,  G01P15/125 ,  B81B3/00

CPC classification number: G01P1/003 ,  B81B3/0078 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2203/04 ,  B81B2203/051 ,  G01C19/5755 ,  G01P15/0802 ,  G01P15/0888 ,  G01P15/097 ,  G01P15/125 ,  G01P2015/0814 ,  G01P2015/0877 ,  G01P2015/088 ,  G01P2015/0882

Abstract: A micropatterned component, for measuring accelerations and/or yaw rates, including a substrate having a principal plane of extension of the substrate, an electrode, and a further electrode; the electrode having a principal plane of extension of the electrode, and the further electrode having a principal plane of extension of the further electrode; the principal plane of extension of the electrode being set parallelly to a normal direction perpendicular to the principal plane of extension of the substrate; the principal plane of extension of the further electrode being set parallelly to the normal direction; the electrode having an electrode height extending in the normal direction; the electrode having a flow channel extending completely through the electrode in a direction parallel to the principal plane of extension of the substrate; the flow channel having a channel depth extending parallelly to the normal direction; the channel depth being less than the electrode height.

Abstract translation: 用于测量加速度和/或偏转速率的微图案化部件，包括具有基底的主平面延伸的基底，电极和另外的电极; 所述电极具有所述电极的延伸的主平面，并且所述另一电极具有所述另一电极的延伸的主平面; 电极的延伸主平面平行于垂直于衬底延伸主平面的法线方向设置; 另一电极的延伸主平面平行于法线方向设置; 该电极具有沿法线方向延伸的电极高度; 所述电极具有在平行于所述基板的延伸主平面的方向上完全穿过所述电极的流动通道; 所述流路具有平行于所述法线方向延伸的通道深度; 通道深度小于电极高度。

公开(公告)号：US09156675B2

公开(公告)日：2015-10-13

申请号：US14322106

申请日：2014-07-02

Applicant: Arnd Kaelberer ,  Jochen Reinmuth ,  Johannes Classen

Inventor： Arnd Kaelberer ,  Jochen Reinmuth ,  Johannes Classen

IPC: B81B3/00 ,  B81C1/00 ,  G01L9/00 ,  H04R19/04 ,  H04R31/00

CPC classification number: B81B3/0037 ,  B81B3/0021 ,  B81B2201/0257 ,  B81B2201/0264 ,  B81B2203/0127 ,  B81B2207/012 ,  B81B2207/095 ,  B81C1/00682 ,  G01L9/0072 ,  H04R19/04 ,  H04R31/00

Abstract: A micromechanical component includes a substrate having a cavern structured into the same, an at least partially conductive diaphragm, which at least partially spans the cavern, and a counter electrode, which is situated on an outer side of the diaphragm oriented away from the substrate so that a clearance is present between the counter electrode and the at least partially conductive diaphragm, the at least partially conductive diaphragm being spanned onto or over at least one electrically insulating material which at least partially covers the functional top side of the substrate, and at least one pressure access being formed on the cavern so that the at least partially conductive diaphragm is bendable into the clearance when a gaseous medium flows from an outer surroundings of the micromechanical component into the cavern. Also described is a manufacturing method for a micromechanical component.

Abstract translation: 微机械部件包括具有被构造成相同的洞穴的基板，至少部分地导电的隔膜，其至少部分地跨过该洞穴;以及对电极，其位于远离基板的隔膜的外侧上， 在相对电极和至少部分导电的隔膜之间存在间隙，所述至少部分导电的隔膜跨越至少一个电绝缘材料或至少部分地覆盖基板的功能顶侧的电绝缘材料，并且至少 一个压力通道形成在洞穴上，使得当气体介质从微机械部件的外部周围流动到洞穴中时，至少部分导电的隔膜可弯曲成间隙。 还描述了一种用于微机械部件的制造方法。

公开(公告)号：US08928099B2

公开(公告)日：2015-01-06

申请号：US13757261

申请日：2013-02-01

Applicant: Johannes Classen ,  Jochen Reinmuth ,  Andreas Scheurle

Inventor： Johannes Classen ,  Jochen Reinmuth ,  Andreas Scheurle

IPC: H01L29/84 ,  G01P15/08 ,  B81B3/00 ,  B81C1/00 ,  G01P15/125

CPC classification number: B81B3/0018 ,  B81B2201/025 ,  B81C1/00015 ,  B81C1/0015 ,  G01P15/0802 ,  G01P15/125

Abstract: A method for manufacturing a micromechanical component is described in which a trench etching process and a sacrificial layer etching process are carried out to form a mass situated movably on a substrate. The movable mass has electrically isolated and mechanically coupled subsections of a functional layer. A micromechanical component having a mass situated movably on a substrate is also described.

Abstract translation: 描述了一种制造微机械部件的方法，其中进行沟槽蚀刻工艺和牺牲层蚀刻工艺以形成可移动地位于衬底上的质量。 可移动物体具有功能层的电隔离和机械耦合子部分。 还描述了具有可移动地位于基底上的质量的微机械部件。

公开(公告)号：US20140338450A1

公开(公告)日：2014-11-20

申请号：US14120383

申请日：2014-05-14

Applicant: Johannes Classen

Inventor： Johannes Classen

IPC: G01P15/125

CPC classification number: G01P15/125 ,  B81B3/0045 ,  B81B2203/0154 ,  B81B2203/058 ,  G01P2015/0831

Abstract: An acceleration sensor having a substrate and a seismic mass; the acceleration sensor has a main extension plane and includes a spring device, via which the substrate and the seismic mass are connected, such that in an acceleration in a detection direction that runs perpendicular to the main extension plane, the seismic mass is deflectable in the sense of a tilting motion about an axis of rotation running parallel to the main extension plane, the seismic mass furthermore being connected to the substrate via at least one first spring, the stiffness of the first spring in a deflection of the seismic mass in the sense of the tilting motion being lower in the detection direction than the stiffness of the first spring in a deflection in a primary direction extending parallel to the main extension plane.

Abstract translation: 具有基板和地震块的加速度传感器; 加速度传感器具有主延伸平面，并且包括弹簧装置，通过该弹簧装置连接基板和地震块，使得在与主延伸平面垂直的检测方向上的加速度中，地震质量可在 围绕平行于主延伸平面的旋转轴线的倾斜运动的感觉，地震质量还经由至少一个第一弹簧连接到基板，第一弹簧在地震块的偏转中的刚度 所述倾斜运动在所述检测方向上比在与所述主延伸平面平行的主方向上的偏转中的所述第一弹簧的刚度更低。

公开(公告)号：US08850890B2

公开(公告)日：2014-10-07

申请号：US13197338

申请日：2011-08-03

Applicant: Johannes Classen

Inventor： Johannes Classen

IPC: G01P15/125 ,  B81B3/00 ,  G01P15/08

CPC classification number: G01P15/08 ,  B81B3/0045 ,  B81B2201/0242 ,  B81B2203/0154 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0831 ,  G01P2015/086

Abstract: An inertial sensor includes a substrate, a mass element, and a detecting device for detecting a movement of the mass element relative to the substrate, the mass element being coupled to the substrate with the aid of a spring device, wherein the spring device has a T-shaped cross-sectional profile. A method for manufacturing an inertial sensor is also disclosed.

Abstract translation: 惯性传感器包括基板，质量元件和用于检测质量元件相对于基板的移动的检测装置，质量元件借助于弹簧装置联接到基板，其中弹簧装置具有 T形截面轮廓。 还公开了一种用于制造惯性传感器的方法。

公开(公告)号：US08806940B2

公开(公告)日：2014-08-19

申请号：US12613083

申请日：2009-11-05

Applicant: Johannes Classen

Inventor： Johannes Classen

IPC: G01P15/00

CPC classification number: G01P15/125 ,  G01P15/0802 ,  G01P2015/0831

Abstract: A micromechanical component for detecting an acceleration. The component includes a conductive layer having a first and a second electrode and a rotatable flywheel mass in the form of a rocker having a first and a second lever arm. The first lever arm is situated opposite the first electrode, and the second lever arm is situated opposite the second electrode. The first lever arm has a first hole structure having a number of first cut-outs, and the second lever arm has a second hole structure having a number of second cut-outs. The first and the second lever arm have different masses. The component is characterized by the fact that the outer dimensions of the first and second lever arms correspond, and the first hole structure of the first lever arm differs from the second hole structure of the second lever arm. Furthermore, a method for manufacturing such a micromechanical component is provided.

Abstract translation: 用于检测加速度的微机械部件。 该组件包括具有第一和第二电极的导电层和具有第一和第二杠杆臂的摇臂形式的可旋转飞轮块。 第一杠杆臂位于与第一电极相对的位置，第二杠杆臂与第二电极相对。 第一杠杆臂具有具有多个第一切口的第一孔结构，并且第二杠杆臂具有具有多个第二切口的第二孔结构。 第一和第二杠杆臂具有不同的质量。 该部件的特征在于第一和第二杠杆臂的外部尺寸对应，第一杠杆臂的第一孔结构与第二杠杆臂的第二孔结构不同。 此外，提供了一种用于制造这种微机械部件的方法。

公开(公告)号：US08783108B2

公开(公告)日：2014-07-22

申请号：US12876559

申请日：2010-09-07

Applicant: Johannes Classen

Inventor： Johannes Classen

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P2015/0831

Abstract: A micromechanical system for detecting an acceleration includes a substrate, a rocker-like mass structure having a first lever arm and a diametrically opposed second lever arm, the lever arms being situated tiltably at a distance to the substrate and about an axis of rotation to the substrate, and first and second electrodes being provided on the substrate. Each electrode is diametrically opposed to a lever arm and each lever arm includes a section extending from the axis of rotation which is located between the electrodes above an intermediate space. The two sections have different masses.

Abstract translation: 用于检测加速度的微机械系统包括基板，具有第一杠杆臂和径向相对的第二杠杆臂的摇臂状质量结构，所述杠杆臂可倾斜地定位在与基板相距一定距离处， 基板，并且第一和第二电极设置在基板上。 每个电极与杠杆臂完全相对，并且每个杠杆臂包括从位于中间空间之间的电极之间的旋转轴线延伸的部分。 两部分质量不同。

公开(公告)号：US08596122B2

公开(公告)日：2013-12-03

申请号：US12736609

申请日：2009-04-01

Applicant: Johannes Classen ,  Lars Tebje

Inventor： Johannes Classen ,  Lars Tebje

IPC: G01P15/125

CPC classification number: G01P15/18 ,  G01P15/125 ,  G01P2015/0817 ,  G01P2015/0831

Abstract: A micromechanical component comprising a substrate, a seismic mass, and first and second detection means, the substrate having a main extension plane and the first detection means being provided for detection of a substantially translational first deflection of the seismic mass along a first direction substantially parallel to the main extension plane, and the second detection means further being provided for detection of a substantially rotational second deflection of the seismic mass about a first rotation axis parallel to a second direction substantially perpendicular to the main extension plane. The seismic mass can be embodied as an asymmetrical rocker, with the result that accelerations can be sensed as rotations. Detection can be accomplished via capacitive sensors.

Abstract translation: 一种微机械部件，包括基板，地震块以及第一和第二检测装置，所述基板具有主延伸平面，并且所述第一检测装置被设置用于检测所述地震块沿着基本上平行的第一方向的基本平移的第一偏转 并且第二检测装置还被设置用于检测围绕平行于基本上垂直于主延伸平面的第二方向的第一旋转轴线的地震质量的基本上旋转的第二偏转。 地震质量可以被体现为不对称的摇杆，结果可以将加速度感测为旋转。 可以通过电容式传感器进行检测。

公开(公告)号：US08429971B2

公开(公告)日：2013-04-30

申请号：US12308632

申请日：2007-11-14

Applicant: Johannes Classen ,  Axel Franke ,  Dietrich Schubert ,  Kersten Kehr ,  Ralf Reichenbach

Inventor： Johannes Classen ,  Axel Franke ,  Dietrich Schubert ,  Kersten Kehr ,  Ralf Reichenbach

IPC: G01P15/125

CPC classification number: G01P15/18 ,  G01P15/125 ,  G01P2015/084

Abstract: A micromechanical acceleration sensor includes a substrate, an elastic diaphragm which extends parallel to the substrate plane and which is partially connected to the substrate, and which has a surface region which may be deflected perpendicular to the substrate plane, and a seismic mass whose center of gravity is situated outside the plane of the elastic diaphragm. The seismic mass extends at a distance over substrate regions which are situated outside the region of the elastic diaphragm and which include a system composed of multiple electrodes, each of which together with oppositely situated regions of the seismic mass forms a capacitor in a circuit. In its central region the seismic mass is attached to the elastic diaphragm in the surface region of the elastic diaphragm which may be deflected perpendicular to the substrate plane.

Abstract translation: 微机械加速度传感器包括基板，平行于基板平面延伸并且部分地连接到基板的弹性隔膜，并且具有可以垂直于基板平面偏转的表面区域，以及地震块的中心 重力位于弹性隔膜的平面之外。 地震质量在位于弹性膜片的区域之外的衬底区域上延伸一段距离，其包括由多个电极组成的系统，每个电极与地震质量体的相对定位的区域在电路中形成电容器。 在其中心区域，抗震块附着在弹性隔膜的表面区域中的弹性隔膜，弹性隔膜可能垂直于基板平面偏转。