摘要:
A method for treating a saturated hydrocarbon compound suitable as a liquid for the immersion exposure method excelling in transmission in the deep ultraviolet region using sulfuric acid in an amount smaller than in a conventional method is provided. The above sulfuric acid washing treatment is the method for producing saturated hydrocarbon compound intended to reduce the absorbance, wherein the second sulfuric acid washing treatment step is conducted after the first sulfuric acid washing treatment step at a temperature 10° C. or more lower than the temperature of the first sulfuric acid washing treatment step. The absorbance of light with a wavelength of 193 nm of the saturated hydrocarbon compound to be treated in the above second sulfuric acid washing treatment step is 0.10 or less per 1 cm of a liquid optical path length, and the above saturated hydrocarbon compound is an alicyclic saturated hydrocarbon compound.
摘要:
An ink bottle assembly for use with an ink supply system, the ink bottle assembly including a main body and a cap assembly. The main body includes a neck having at least one first ramped feature, such as a ramped ridge. The cap assembly includes a shell secured to the neck and a tip slidably secured to the shell. The shell includes a second ramped feature, wherein the second ramped feature is allowed to pass over the first ramped feature in a first direction, and wherein the second ramped feature abuts against the first ramped feature in a second direction, thereby precluding movement in the second direction.
摘要:
The invention provides novel acid generators which are unproblematic in combustibility and accumulation inside the human body and can generate acids having high acidities and high boiling points and exhibiting properly short diffusion lengths in resist coating films and which permit the formation of resist patterns excellent smoothness with little dependence on the denseness of a mask pattern; sulfonic acids generated from the acid generators; sulfonyl halides useful as raw material in the synthesis of the acid generators; and radiation-sensitive resin compositions containing the acid generators. The acid generators have structures represented by the general formula (I), wherein R1 is a monovalent substituent such as alkoxycarbonyl, alkylsulfonyl, or alkoxysulfonyl, R2 to R4 are each hydrogen or alkyl; k is an integer of 0 or above; and n is an integer of 0 to 5. Among the radiation-sensitive resin compositions, a positive one contains a resin having acid-dissociable groups in addition to the above acid generator, while a negative one contains an alkali-soluble resin and a crosslinking agent in addition to the acid generator.
摘要:
An embodiment of this invention provides a circuit and method for reducing the number of electronic components needed to calibrate circuits on an IC. A multiplexer is located on the IC where the outputs of a plurality of circuits located on the IC are each connected to a separate data input of the multiplexer. The control input of the multiplexer selects which data input of the multiplexer is connected to an external component. Each data input is individually connected to the component periodically.
摘要:
A system and method for integrating a plurality of subcircuit grids in a simulation environment. Upon obtaining a subcircuit layer of a particular granularity for each logical component of an electrical entity (e.g., a semiconductor die in a package and board environment), the nodes of a first subcircuit layer are interconnected to the nodes of a second subcircuit layer using a constraint-based search process.
摘要:
The present invention is directed to the preparation of photoresist polymers via living free radical polymerization techniques. Sterically bulky ester monomers are utilized as the polymerization components. Use of chain transfer agents is included in polymerization processing conditions. Cleavage of polymer terminal end groups that include a heteroatom are described.
摘要:
A radiation-sensitive resin composition comprising an acid-labile group-containing resin obtained by living radical polymerization having a specific structure which is insoluble or scarcely soluble in alkali, but becomes alkali soluble by the action of an acid, and a photoacid generator, wherein the ratio of weight average molecular weight to number average molecular weight (weight average molecular weight/number average molecular weight) of the acid-labile group-containing resin is smaller than 1.5.
摘要:
A system and method for a 1xN fiber optical switch is disclosed. The switch comprises (1) a pair of vertically oriented wedge prisms and (2) a collimator. The collimator comprises a four fiber ferrule and a lens. When no wedge prisms are inserted into the optical path, the signal is switched to port 1. When the first prism is inserted, the signal is switched to port 2. When the second prism is inserted (first prism not in), the signal is switched to port 3 which is in a vertical line. While both prisms are inserted into the optical path, the signal is switched to the diagonal port 4. Accordingly, a 1xN switch is provided that is more compact than a conventional 1xN switch. The 1xN fiber optical switch in accordance with the present invention have advantages over conventional opto-mechanical switches. The inventive 1xN switch is much smaller in size because all ports are held in one ferrule and only one lens is utilized.
摘要:
The present invention is directed to the preparation of photoresist polymers via living free radical polymerization techniques. Sterically bulky ester monomers are utilized as the polymerization components. Use of chain transfer agents is included in polymerization processing conditions. Cleavage of polymer terminal end groups that include a heteroatom are described.
摘要:
The invention provides methods of combusting a fuel in a reactor that includes at least 3 zones each of which contains a solid catalyst. A method of making a thermally-stable alumina support from fumed alumina is also described.