Replacement metal gate with a conductive metal oxynitride layer
    62.
    发明授权
    Replacement metal gate with a conductive metal oxynitride layer 有权
    替代金属栅极与导电金属氧氮化物层

    公开(公告)号:US08404530B2

    公开(公告)日:2013-03-26

    申请号:US13177692

    申请日:2011-07-07

    IPC分类号: H01L21/338

    摘要: A disposable gate structure and a gate spacer are formed on a semiconductor substrate. A disposable gate material portion is removed and a high dielectric constant (high-k) gate dielectric layer and a metal nitride layer are formed in a gate cavity and over a planarization dielectric layer. The exposed surface portion of the metal nitride layer is converted into a metal oxynitride by a surface oxidation process that employs exposure to ozonated water or an oxidant-including solution. A conductive gate fill material is deposited in the gate cavity and planarized to provide a metal gate structure. Oxygen in the metal oxynitride diffuses, during a subsequent anneal process, into a high-k gate dielectric underneath to lower and stabilize the work function of the metal gate without significant change in the effective oxide thickness (EOT) of the high-k gate dielectric.

    摘要翻译: 在半导体衬底上形成一次性栅极结构和栅极间隔物。 去除一次性栅极材料部分,并且在栅极腔中和平坦化介电层上形成高介电常数(高k)栅极电介质层和金属氮化物层。 金属氮化物层的暴露表面部分通过使用暴露于臭氧化水或含氧化剂的溶液的表面氧化工艺转化为金属氮氧化物。 导电栅极填充材料沉积在栅极腔中并被平坦化以提供金属栅极结构。 金属氧氮化物中的氧在随后的退火过程中扩散到下面的高k栅极电介质中,以降低和稳定金属栅极的功函数,而不会在高k栅极电介质的有效氧化物厚度(EOT)上显着变化 。

    2-thioethenyl substituted carbapenem derivatives
    64.
    发明授权
    2-thioethenyl substituted carbapenem derivatives 失效
    2-硫代乙烯基取代的碳青霉烯衍生物

    公开(公告)号:US08344154B2

    公开(公告)日:2013-01-01

    申请号:US12656606

    申请日:2010-02-04

    IPC分类号: C07D277/24 C07D277/26

    CPC分类号: C07D487/04

    摘要: 2-Ethenylthio-type carbapenem derivatives of formula (I) or pharmaceutically acceptable salts thereof are provided. The compounds according to the present invention have potent antimicrobial activity and a wide antimicrobial spectrum against pneumococci including penicillin resistant Streptococcus pneumoniae (PRSP), Haemophilus influenzae including β-lactamase-negative, ampicillin-resistant Haemophilus influenzae (BLNAR), and Moraxella (Branhamella) catarrhalis.

    摘要翻译: 提供式(I)的2-乙烯基硫代碳代青霉烯衍生物或其药学上可接受的盐。 根据本发明的化合物具有有效的抗微生物活性和抗肺炎球菌的广谱抗菌谱,包括耐青霉素肺炎链球菌(PRSP),流感嗜血杆菌,包括β-内酰胺酶阴性,氨苄青霉素抗性流感嗜血杆菌(BLNAR)和莫拉氏菌 )卡他氏菌

    METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND BACK-CONTACT SOLAR CELL
    68.
    发明申请
    METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND BACK-CONTACT SOLAR CELL 审中-公开
    制造半导体器件和反接触太阳能电池的方法

    公开(公告)号:US20120305072A1

    公开(公告)日:2012-12-06

    申请号:US13516057

    申请日:2010-12-09

    摘要: A method is provided for manufacturing a semiconductor device, wherein a p-type region and/or n-type pattern is formed on a surface of a semiconductor substrate, including ejecting at least one of etching paste, masking paste, doping paste, and electrode paste from an ejecting orifice of a nozzle toward the surface of the semiconductor substrate to form beads formed of the paste between the semiconductor substrate and the ejecting orifice and moving the semiconductor substrate relative to the nozzle thereby the paste is applied to the surface of the semiconductor substrate in a stripe shape.

    摘要翻译: 提供一种用于制造半导体器件的方法,其中在半导体衬底的表面上形成p型区域和/或n型图案,包括喷射蚀刻膏,掩模膏,掺杂膏和电极中的至少一种 从喷嘴的喷射孔朝向半导体基板的表面粘贴,以形成由半导体基板和喷射孔之间的浆料形成的珠子,并相对于喷嘴移动半导体基板,从而将糊料施加到半导体的表面 基材为条状。

    Imprint device and imprint method
    70.
    发明授权
    Imprint device and imprint method 失效
    印记装置和印记法

    公开(公告)号:US08113816B2

    公开(公告)日:2012-02-14

    申请号:US11774266

    申请日:2007-07-06

    IPC分类号: B28B13/06

    摘要: An imprint device transfers a finely patterned structure created on a stamper onto a material to be patterned, by bringing the stamper and the material to be patterned in contact with each other. At least one chamfered edge portion is formed at least one of the stamper and the material to be patterned. The imprint device has a separating unit for holding the chamfered edge portion of at least one of the stamper and the material to be patterned, so as to separate the stamper from the material to be patterned.

    摘要翻译: 压印设备通过使压模和待图案化的材料彼此接触来将形成在压模上的精细图案化结构传递到待图案化的材料上。 至少一个倒角边缘部分形成有压模和要被图案化的材料中的至少一个。 压印装置具有用于保持压模和要被图案化的材料中的至少一个的倒角边缘部分的分离单元,以便将压模与要被图案化的材料分开。