公开(公告)号：US10458794B2

公开(公告)日：2019-10-29

申请号：US15454907

申请日：2017-03-09

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Gabriele Gattere ,  Luca Giuseppe Falorni ,  Carlo Valzasina

IPC: G01C19/5712

Abstract: A micromechanical detection structure includes a substrate of semiconductor material and a driving-mass arrangement is coupled to a set of driving electrodes and driven in a driving movement following upon biasing of the set of driving electrodes. A first anchorage unit is coupled to the driving-mass arrangement for elastically coupling the driving-mass arrangement to the substrate at first anchorages. A driven-mass arrangement is elastically coupled to the driving-mass arrangement by a coupling unit and designed to be driven by the driving movement. A second anchorage unit is coupled to the driven-mass arrangement for elastically coupling the driven-mass arrangement to the substrate at second anchorages. Following upon the driving movement, the resultant of the forces and of the torques exerted on the substrate at the first and second anchorages is substantially zero.

公开(公告)号：US10444013B2

公开(公告)日：2019-10-15

申请号：US15458704

申请日：2017-03-14

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Daniele Prati ,  Carlo Valzasina ,  Tiziano Chiarillo ,  Pasquale Franco

IPC: G01C19/5712 ,  G01C19/5776 ,  G01C19/574

Abstract: A MEMS gyroscope, wherein a suspended mass is mobile with respect to a supporting structure. The mobile mass is affected by quadrature error caused by a quadrature moment; a driving structure is coupled to the suspended mass for controlling the movement of the mobile mass in a driving direction at a driving frequency. Motion-sensing electrodes, coupled to the mobile mass, detect the movement of the mobile mass in the sensing direction and quadrature-compensation electrodes are coupled to the mobile mass to generate a compensation moment opposite to the quadrature moment. The gyroscope is configured to bias the quadrature-compensation electrodes with a compensation voltage so that the difference between the resonance frequency of the mobile mass and the driving frequency has a preset frequency-mismatch value.

公开(公告)号：US10433068B2

公开(公告)日：2019-10-01

申请号：US15365590

申请日：2016-11-30

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Matteo Perletti ,  Igor Varisco ,  Luca Lamagna ,  Silvia Adorno ,  Gabriele Gattere ,  Carlo Valzasina ,  Sebastiano Conti

IPC: H04R25/00 ,  H04R19/00 ,  B81B3/00 ,  B81C1/00 ,  G01H11/06 ,  H04R31/00

Abstract: A MEMS acoustic transducer provided with: a substrate of semiconductor material, having a back surface and a front surface opposite with respect to a vertical direction; a first cavity formed within the substrate, which extends from the back surface to the front surface; a membrane which is arranged at the upper surface, suspended above the first cavity and anchored along a perimeter thereof to the substrate; and a combfingered electrode arrangement including a number of mobile electrodes coupled to the membrane and a number of fixed electrodes coupled to the substrate and facing respective mobile electrodes for forming a sensing capacitor, wherein a deformation of the membrane as a result of incident acoustic pressure waves causes a capacitive variation of the sensing capacitor. In particular, the combfingered electrode arrangement lies vertically with respect to the membrane and extends parallel thereto.

公开(公告)号：US10381173B2

公开(公告)日：2019-08-13

申请号：US15470431

申请日：2017-03-27

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Giovanni Campardo ,  Carlo Valzasina

IPC: H01H1/00 ,  B81B7/04 ,  B81B7/00 ,  H01H59/00 ,  H01H1/14

Abstract: A microelectromechanical device, in particular a non-volatile memory module or a relay, comprising: a mobile body including a top region and a bottom region; top electrodes facing the top region; and bottom electrodes, facing the bottom region. The mobile body is, in a resting condition, at a distance from the electrodes. The latter can be biased for generating a movement of the mobile body for causing a direct contact of the top region with the top electrodes and, in a different operating condition, a direct contact of the bottom region with the bottom electrodes. In the absence of biasing, molecular-attraction forces maintain in stable mutual contact the top region and the top electrodes or, alternatively, the bottom region and the bottom electrodes.

公开(公告)号：US09829319B2

公开(公告)日：2017-11-28

申请号：US14985071

申请日：2015-12-30

Applicant: STMicroelectronics S.R.L.

Inventor： Marco Garbarino ,  Andrea Donadel ,  Davide Magnoni ,  Carlo Valzasina

IPC: G01C19/56 ,  G01C19/5762 ,  G01C19/5726

CPC classification number: G01C19/5762 ,  G01C19/5726

Abstract: A microelectromechanical device includes: a body; a movable mass, elastically coupled to the body and oscillatable with respect to the body according to a degree of freedom; a frequency detector, configured to detect a current oscillation frequency of the movable mass; and a forcing stage, capacitively coupled to the movable mass and configured to provide energy to the movable mass through forcing signals having a forcing frequency equal to the current oscillation frequency detected by the frequency detector, at least in a first transient operating condition.

公开(公告)号：US20170184400A1

公开(公告)日：2017-06-29

申请号：US15197414

申请日：2016-06-29

Applicant: STMICROELECTRONICS S.R.L. ,  STMICROELECTRONICS, INC. ,  STMICROELECTRONICS INTERNATIONAL N.V.

Inventor： Carlo Valzasina ,  Huantong Zhang ,  Matteo Fabio Brunetto ,  Gert Ingvar Andersson ,  Erik Daniel Svensson ,  Nils Einar Hedenstierna

IPC: G01C19/5776

CPC classification number: G01C19/5776 ,  G01C19/5719 ,  G01C19/574

Abstract: A gyroscope includes a substrate, a first structure, a second structure and a third structure elastically coupled to the substrate and movable along a first axis. The first and second structure are arranged at opposite sides of the third structure with respect to the first axis A driving system is configured to oscillate the first and second structure along the first axis in phase with one another and in phase opposition with the third structure. The first, second and third structure are provided with respective sets of sensing electrodes, configured to be displaced along a second axis perpendicular to the first axis in response to rotations of the substrate about a third axis perpendicular to the first axis and to the second axis.

公开(公告)号：US09404747B2

公开(公告)日：2016-08-02

申请号：US14067051

申请日：2013-10-30

Applicant: STMicroelectronics S.r.l.

Inventor： Carlo Valzasina ,  Luca Giuseppe Falorni

IPC: G01C19/56 ,  G01C19/5747 ,  G01C19/5712 ,  G01C19/5719 ,  G01C19/574

CPC classification number: G01C19/5712 ,  G01C19/56 ,  G01C19/5719 ,  G01C19/574 ,  G01C19/5747

Abstract: A microelectromechanical gyroscope, includes: a supporting body; a first movable mass and a second movable mass, which are oscillatable according to a first driving axis and tiltable about respective a first and second sensing axes and are symmetrically arranged with respect to a center of symmetry; first sensing electrodes and a second sensing electrodes associated with the first and second movable masses and arranged on the supporting body symmetrically with respect to the first and second sensing axis, the first and second movable masses being capacitively coupled to the respective first sensing electrode and to the respective second sensing electrode, a bridge element elastically coupled to respective inner ends of the first movable mass and of the second movable mass and coupled to the supporting body so as to be tiltable about an axis transverse to the first driving axis.

Abstract translation: 一种微机电陀螺仪，包括：支撑体; 第一可移动质量块和第二可移动质量块，它们可根据第一驱动轴线振荡并围绕相应的第一和第二感测轴线可倾斜，并且相对于对称中心对称布置; 第一感测电极和与第一和第二可移动质量相关联并且相对于第一和第二感测轴对称地布置在支撑体上的第二感测电极，第一和第二可移动质量体电容耦合到相应的第一感测电极，并且 相应的第二感测电极，桥接元件，其弹性地联接到第一可移动质量块的相应内端和第二可移动质量块，并且联接到支撑体，以便能够围绕横向于第一驱动轴线的轴线倾斜。

公开(公告)号：US09383382B2

公开(公告)日：2016-07-05

申请号：US13779002

申请日：2013-02-27

Applicant: STMicroelectronics S.r.l.

Inventor： Barbara Simoni ,  Carlo Valzasina

IPC: G01P15/125 ,  B81C1/00 ,  G01P15/08 ,  B81B3/00

CPC classification number: G01P15/125 ,  B81B3/0094 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2201/033 ,  B81B2203/04 ,  B81B2203/058 ,  B81C1/00198 ,  G01P15/0802

Abstract: A microelectromechanical sensor that in one embodiment includes a supporting structure, having a substrate and electrode structures anchored to the substrate; and a sensing mass, movable with respect to the supporting structure so that a distance between the sensing mass and the substrate is variable. The sensing mass is provided with movable electrodes capacitively coupled to the electrode structures. Each electrode structure comprises a first fixed electrode and a second fixed electrode mutually insulated by a dielectric region and arranged in succession in a direction substantially perpendicular to a face of the substrate.

Abstract translation: 一种微机电传感器，其在一个实施例中包括支撑结构，其具有衬底和锚定到衬底的电极结构; 以及相对于支撑结构可移动的感测质量，使得感测质量块和衬底之间的距离是可变的。 感测质量体具有与电极结构电容耦合的可动电极。 每个电极结构包括第一固定电极和第二固定电极，所述第一固定电极和第二固定电极通过电介质区域相互绝缘并且在基本上垂直于衬底的表面的方向上相继布置。