Replacement gate structure for transistor with a high-K gate stack
    62.
    发明授权
    Replacement gate structure for transistor with a high-K gate stack 失效
    具有高K栅极堆叠的晶体管的替代栅极结构

    公开(公告)号:US08716118B2

    公开(公告)日:2014-05-06

    申请号:US13345295

    申请日:2012-01-06

    IPC分类号: H01L21/3205

    摘要: A transistor includes a semiconductor layer and a gate structure located on the semiconductor layer. The gate structure includes a first dielectric layer. The first dielectric layer includes a doped region and an undoped region below the doped region. A second dielectric layer is located on the first dielectric layer, and a first metal nitride layer is located on the second dielectric layer. The doped region of the first dielectric layer comprises dopants from the second dielectric layer. Source and drain regions in the semiconductor layer are located on opposite sides of the gate structure.

    摘要翻译: 晶体管包括位于半导体层上的半导体层和栅极结构。 栅极结构包括第一介电层。 第一介电层包括掺杂区域和掺杂区域下面的未掺杂区域。 第二电介质层位于第一电介质层上,第一金属氮化物层位于第二电介质层上。 第一介电层的掺杂区域包括来自第二介电层的掺杂剂。 半导体层中的源极和漏极区位于栅极结构的相对侧上。

    Multi-layer work function metal replacement gate
    63.
    发明授权
    Multi-layer work function metal replacement gate 有权
    多层功能金属更换门

    公开(公告)号:US08659077B1

    公开(公告)日:2014-02-25

    申请号:US13615343

    申请日:2012-09-13

    IPC分类号: H01L29/66

    摘要: Embodiments relate to a field-effect transistor (FET) replacement gate apparatus. The apparatus includes a channel structure including a base and side walls defining a trench. A high-dielectric constant (high-k) layer is formed on the base and side walls of the trench. The high-k layer has an upper surface conforming to a shape of the trench. A first layer is formed on the high-k layer and conforms to the shape of the trench. The first layer includes an aluminum-free metal nitride. A second layer is formed on the first layer and conforms to the shape of the trench. The second layer includes aluminum and at least one other metal. A third layer is formed on the second layer and conforms to the shape of the trench. The third layer includes aluminum-free metal nitride.

    摘要翻译: 实施例涉及场效应晶体管(FET)替换门装置。 该装置包括一个通道结构,该通道结构包括限定沟槽的底座和侧壁。 在沟槽的底壁和侧壁上形成高介电常数(高k)层。 高k层具有与沟槽形状一致的上表面。 第一层形成在高k层上并符合沟槽的形状。 第一层包括无铝的金属氮化物。 在第一层上形成第二层并符合沟槽的形状。 第二层包括铝和至少一种其他金属。 第三层形成在第二层上并符合沟槽的形状。 第三层包括无铝金属氮化物。

    Replacement metal gate with a conductive metal oxynitride layer
    66.
    发明授权
    Replacement metal gate with a conductive metal oxynitride layer 有权
    替代金属栅极与导电金属氧氮化物层

    公开(公告)号:US08404530B2

    公开(公告)日:2013-03-26

    申请号:US13177692

    申请日:2011-07-07

    IPC分类号: H01L21/338

    摘要: A disposable gate structure and a gate spacer are formed on a semiconductor substrate. A disposable gate material portion is removed and a high dielectric constant (high-k) gate dielectric layer and a metal nitride layer are formed in a gate cavity and over a planarization dielectric layer. The exposed surface portion of the metal nitride layer is converted into a metal oxynitride by a surface oxidation process that employs exposure to ozonated water or an oxidant-including solution. A conductive gate fill material is deposited in the gate cavity and planarized to provide a metal gate structure. Oxygen in the metal oxynitride diffuses, during a subsequent anneal process, into a high-k gate dielectric underneath to lower and stabilize the work function of the metal gate without significant change in the effective oxide thickness (EOT) of the high-k gate dielectric.

    摘要翻译: 在半导体衬底上形成一次性栅极结构和栅极间隔物。 去除一次性栅极材料部分,并且在栅极腔中和平坦化介电层上形成高介电常数(高k)栅极电介质层和金属氮化物层。 金属氮化物层的暴露表面部分通过使用暴露于臭氧化水或含氧化剂的溶液的表面氧化工艺转化为金属氮氧化物。 导电栅极填充材料沉积在栅极腔中并被平坦化以提供金属栅极结构。 金属氧氮化物中的氧在随后的退火过程中扩散到下面的高k栅极电介质中,以降低和稳定金属栅极的功函数,而不会在高k栅极电介质的有效氧化物厚度(EOT)上显着变化 。

    2-thioethenyl substituted carbapenem derivatives
    68.
    发明授权
    2-thioethenyl substituted carbapenem derivatives 失效
    2-硫代乙烯基取代的碳青霉烯衍生物

    公开(公告)号:US08344154B2

    公开(公告)日:2013-01-01

    申请号:US12656606

    申请日:2010-02-04

    IPC分类号: C07D277/24 C07D277/26

    CPC分类号: C07D487/04

    摘要: 2-Ethenylthio-type carbapenem derivatives of formula (I) or pharmaceutically acceptable salts thereof are provided. The compounds according to the present invention have potent antimicrobial activity and a wide antimicrobial spectrum against pneumococci including penicillin resistant Streptococcus pneumoniae (PRSP), Haemophilus influenzae including β-lactamase-negative, ampicillin-resistant Haemophilus influenzae (BLNAR), and Moraxella (Branhamella) catarrhalis.

    摘要翻译: 提供式(I)的2-乙烯基硫代碳代青霉烯衍生物或其药学上可接受的盐。 根据本发明的化合物具有有效的抗微生物活性和抗肺炎球菌的广谱抗菌谱,包括耐青霉素肺炎链球菌(PRSP),流感嗜血杆菌,包括β-内酰胺酶阴性,氨苄青霉素抗性流感嗜血杆菌(BLNAR)和莫拉氏菌 )卡他氏菌