公开(公告)号：US09075321B2

公开(公告)日：2015-07-07

申请号：US12748896

申请日：2010-03-29

申请人： Ulrich Mueller ,  Martin Rath

发明人： Ulrich Mueller ,  Martin Rath

IPC分类号： G03F1/64

CPC分类号： G03F7/7015 ,  G02B5/208 ,  G03F1/64

摘要： An optical membrane element for an optical device in lithography, especially EUV (extreme ultraviolet) lithography, includes at least one membrane layer and a frame, which at least partially surrounds the membrane layer and at which at least part of the rim of the membrane layer is mounted. At least one tautening element is provided, which facilitates tautening of the membrane layer and wherein the optical membrane element can be used in a projection exposure system, especially for EUV lithography, such that the membrane layer of the membrane element can be adjustably tautened, such that the membrane layer is flat. A method for manufacturing a corresponding optical membrane element includes generating a tautening element lithographically together with the membrane layer.

摘要翻译： 用于光刻中的光学器件的光学膜元件，特别是EUV（极紫外）光刻技术，包括至少一个膜层和框架，该膜层和框架至少部分地围绕膜层，膜层的至少部分边缘 被安装。 提供了至少一个拉伸元件，其有助于膜层的整顿，并且其中光学膜元件可以用于投影曝光系统，特别是用于EUV光刻，使得膜元件的膜层可以可调整地被拉紧，例如 膜层是平的。 用于制造相应的光学膜元件的方法包括与膜层一起光刻地产生拉伸元件。

公开(公告)号：US08925909B2

公开(公告)日：2015-01-06

申请号：US13515727

申请日：2010-12-15

申请人： Rodscha Drabon ,  Ulrich Mueller ,  Peter Stastny

发明人： Rodscha Drabon ,  Ulrich Mueller ,  Peter Stastny

IPC分类号： B60G11/10 ,  B60G11/04

CPC分类号： B60G11/04 ,  B60G2204/121 ,  B60G2206/7101

摘要： In a leaf spring arrangement for a chassis of a motor vehicle, a leaf spring includes multiple layers made of a glass fiber composite plastic, a reinforcement made of a carbon composite plastic and being disposed between an upper and a lower one of the layers, and a core made of a different material than the reinforcement and being disposed between the upper and lower layers, wherein the reinforcement is arranged along a longitudinal a side of the core. The leaf spring is coupled at its center region to an axle of the motor vehicle by a center connection and to the vehicle body by bodywork connections, wherein the leaf spring is tilted by an angle relative to the vertical axis of the motor vehicle.

摘要翻译： 在用于机动车辆的底盘的板簧装置中，板簧包括由玻璃纤维复合塑料制成的多层，由碳复合塑料制成的增强件，并且设置在上层和下层之间， 由不同于所述加强件的材料制成并设置在所述上​​层和下层之间的芯，其中所述加强件沿着所述芯的纵向方向布置。 板簧通过中心连接在其中心区域连接到机动车辆的车轴，并通过车身连接与车体相连，其中板簧相对于机动车辆的垂直轴线倾斜一定角度。

公开(公告)号：US08527900B2

公开(公告)日：2013-09-03

申请号：US12840890

申请日：2010-07-21

申请人： Ulrich Mueller ,  Marco Lobato ,  Korina Loumidi

发明人： Ulrich Mueller ,  Marco Lobato ,  Korina Loumidi

IPC分类号： G06F3/048

CPC分类号： G06F3/0488 ,  B60K37/06 ,  B60K2350/1036 ,  G06F3/0338 ,  G06F3/0482

摘要： The invention relates to a motor vehicle having an operator control element for the operator control of a function of the motor vehicle, wherein the operator control element comprises an upwardly directed surface having a touchpad for the operator control of at least a first function of the motor vehicle, and wherein the operator control element can be displaced in one direction essentially parallel to the upwardly directed surface for the purpose of operator control of at least a second function of the motor vehicle.

摘要翻译： 本发明涉及一种具有用于操作员控制机动车辆的功能的操作者控制元件的机动车辆，其中操作者控制元件包括具有触摸板的向上指向的表面，用于操作者控制电动机的至少第一功能 车辆，并且其中操作者控制元件可以在基本上平行于向上指向的表面的一个方向上移位，以便操作者控制机动车辆的至少第二功能。

公开(公告)号：US20130123096A1

公开(公告)日：2013-05-16

申请号：US13720306

申请日：2012-12-19

申请人： Feng-Shou XIAO ,  Bin Xie ,  Ulrich Mueller ,  Bilge Yilmaz

发明人： Feng-Shou XIAO ,  Bin Xie ,  Ulrich Mueller ,  Bilge Yilmaz

IPC分类号： B01J29/70 ,  B01J29/88 ,  B01D53/94

CPC分类号： B01J29/7007 ,  B01D53/02 ,  B01D53/94 ,  B01D53/9413 ,  B01D2251/2062 ,  B01D2251/2067 ,  B01D2255/20738 ,  B01D2255/502 ,  B01D2257/402 ,  B01D2257/404 ,  B01D2257/406 ,  B01D2257/702 ,  B01D2257/80 ,  B01J29/18 ,  B01J29/7415 ,  B01J29/7615 ,  B01J29/7815 ,  B01J29/88 ,  B01J35/002 ,  B01J35/04 ,  B01J35/1019 ,  B01J35/1023 ,  B01J37/0009 ,  C01B39/46 ,  C10G11/05 ,  C10G11/18 ,  C10G2300/405 ,  Y02C20/10 ,  Y02P20/153

摘要： The present invention relates to an organotemplate-free synthetic process for the production of a zeolitic material having a BEA framework structure comprising YO2 and optionally comprising X2O3, wherein said process comprises the steps of (1) preparing a mixture comprising seed crystals and at least one source for YO2; and (2) crystallizing the mixture; wherein Y is a tetravalent element, and X is a trivalent element, wherein the zeolitic material optionally comprises at least one alkali metal M, wherein when the BEA framework additionally comprises X2O3, the mixture according to step (1) comprises at least one source for X2O3, and wherein the seed crystals comprise zeolitic material having a BEA framework structure, preferably zeolite Beta.

摘要翻译： 本发明涉及一种用于生产具有包含YO 2和任选地包含X 2 O 3的BEA骨架结构的沸石材料的无机模板合成方法，其中所述方法包括以下步骤：（1）制备包含晶种和至少一种 来源为YO2; 和（2）使混合物结晶; 其中Y是四价元素，X是三价元素，其中沸石材料任选地包含至少一种碱金属M，其中当BEA骨架另外包含X 2 O 3时，根据步骤（1）的混合物包含至少一种源 X 2 O 3，并且其中所述晶种包含具有BEA骨架结构的沸石材料，优选沸石β。

公开(公告)号：US08400618B2

公开(公告)日：2013-03-19

申请号：US12706560

申请日：2010-02-16

申请人： Martin Rath ,  Ulrich Mueller ,  Waldemar Mielke

发明人： Martin Rath ,  Ulrich Mueller ,  Waldemar Mielke

IPC分类号： G03B27/32

CPC分类号： G02B27/62 ,  G03F7/70141 ,  G03F7/70258 ,  G03F7/70833 ,  G03F7/7085 ,  G03F7/70975

摘要： A method for arranging an optical module in a measuring apparatus includes: providing the measuring apparatus with an irradiation system for irradiating the optical module with electromagnetic radiation, a reference component, and a detection element defining a detection surface, the detection element being disposed in a defined position in relation to the reference component, disposing the optical module in the measuring apparatus such that the radiation emitted by the irradiation system passes through the optical module and impinges onto the detection surface as an exit beam, measuring a position of the exit beam in relation to the detection surface, adjusting the position of the optical module within the measuring apparatus such that the position of the exit beam in relation to the detection surface is brought to correspond to a predetermined position, and establishing position parameters defining the position of the optical module in relation to the reference component.

摘要翻译： 一种用于在测量装置中布置光学模块的方法包括：向测量设备提供用于利用电磁辐射照射光学模块的照射系统，参考部件和限定检测表面的检测元件，所述检测元件设置在 将光学模块设置在测量装置中，使得由照射系统发射的辐射通过光学模块并作为出射光束入射到检测表面上，测量出射光束的位置 关于检测表面，调整测量装置内的光学模块的位置，使得出射光束相对于检测表面的位置对应于预定位置，并且建立定义光学位置的位置参数 模块相对于参考组件。

公开(公告)号：US20120267835A1

公开(公告)日：2012-10-25

申请号：US13515727

申请日：2010-12-15

申请人： Rodscha Drabon ,  Ulrich Mueller ,  Peter Stastny

发明人： Rodscha Drabon ,  Ulrich Mueller ,  Peter Stastny

IPC分类号： B60G11/04

CPC分类号： B60G11/04 ,  B60G2204/121 ,  B60G2206/7101

摘要： In a leaf spring arrangement for a chassis of a motor vehicle, a leaf spring includes multiple layers made of a glass fiber composite plastic, a reinforcement made of a carbon composite plastic and being disposed between an upper and a lower one of the layers, and a core made of a different material than the reinforcement and being disposed between the upper and lower layers, wherein the reinforcement is arranged along a longitudinal a side of the core. The leaf spring is coupled at its center region to an axle of the motor vehicle by a center connection and to the vehicle body by bodywork connections, wherein the leaf spring is tilted by an angle relative to the vertical axis of the motor vehicle.

摘要翻译： 在用于机动车辆的底盘的板簧装置中，板簧包括由玻璃纤维复合塑料制成的多层，由碳复合塑料制成的增强件，并且设置在上层和下层之间， 由不同于所述加强件的材料制成并设置在所述上​​层和下层之间的芯，其中所述加强件沿着所述芯的纵向方向布置。 板簧通过中心连接在其中心区域连接到机动车辆的车轴，并通过车身连接与车体相连，其中板簧相对于机动车辆的垂直轴线倾斜一定角度。

公开(公告)号：US08067097B2

公开(公告)日：2011-11-29

申请号：US12085731

申请日：2006-11-24

申请人： Ulrich Mueller

发明人： Ulrich Mueller

IPC分类号： B32B5/26 ,  B32B15/14 ,  F01N1/24 ,  G10K11/168

CPC分类号： B32B5/26 ,  F01D25/30 ,  F02C7/045 ,  F02C7/24 ,  F02K1/827 ,  F05D2260/96 ,  G10K11/168 ,  Y02T50/671 ,  Y10T29/4962 ,  Y10T428/12347 ,  Y10T428/12444 ,  Y10T428/12479 ,  Y10T442/3431

摘要： A woven laminate for sound absorption that includes a first woven layer, a second woven layer, and a third woven layer. The first woven layer has a coarse structure. The second woven layer has a fine structure. The third woven layer has a medium structure. Each of the first, second, and third woven layers are composed of metallic wires that are woven to each other or interlaced as a fleece. At least one of the first, the second, and the third woven layers are superimposed in order to form the woven laminate. The woven layers are placed in the layer order fine-coarse-medium. The woven layers are welded together at least partially.

摘要翻译： 一种用于吸声的编织层压板，包括第一编织层，第二编织层和第三编织层。 第一编织层具有粗糙的结构。 第二编织层具有精细的结构。 第三织造层具有中等结构。 第一，第二和第三织造层中的每一个由彼此编织或以羊毛交织的金属线组成。 将第一，第二和第三编织层中的至少一个叠加以形成编织叠层。 编织层以细级粗介质层级布置。 编织层至少部分地焊接在一起。

公开(公告)号：US07947244B2

公开(公告)日：2011-05-24

申请号：US12090027

申请日：2006-10-11

申请人： Ulrich Mueller ,  Roger Ruetz ,  Hermann Gies

发明人： Ulrich Mueller ,  Roger Ruetz ,  Hermann Gies

IPC分类号： C01B33/00 ,  C01B33/20 ,  C01B33/26

CPC分类号： C01B37/02 ,  Y02P20/582

摘要： The present invention relates to a process for the preparation of a silicate comprising at least silicon and oxygen, comprising (1) mixing of silicon dioxide and/or of a silicon dioxide precursor with an aqueous solution comprising at least one tetraalkylammonium compound comprising R1R2R3R4N+ and at least one base, wherein R1 and R2 are methyl and both R3 and R4 are n-propyl; (2) heating of the colloidal solution obtained according to (1) to a temperature in the range of from greater than the boiling point of the colloidal solution under the chosen pressure to 180° C. at atmospheric pressure to give a suspension comprising at least one silicate, wherein the silicate comprising at least silicon and oxygen is added as a crystallization auxiliary in (1).

摘要翻译： 本发明涉及一种制备至少包含硅和氧的硅酸盐的方法，包括（1）将二氧化硅和/或二氧化硅前体与包含至少一种包含R1R2R3R4N +的四烷基铵化合物的水溶液混合，并在 至少一个碱，其中R 1和R 2是甲基，R 3和R 4都是正丙基; （2）将根据（1）获得的胶体溶液在大气压下加热到大于压力下的胶体溶液的沸点至180℃的温度范围内，得到至少包含至少 一种硅酸盐，其中在（1）中加入至少含有硅和氧的硅酸盐作为结晶助剂。

公开(公告)号：US20110076229A1

公开(公告)日：2011-03-31

申请号：US12994058

申请日：2009-05-19

申请人： Natalia Trukhan ,  Ulrich Mueller ,  Ivor Bull

发明人： Natalia Trukhan ,  Ulrich Mueller ,  Ivor Bull

IPC分类号： C01B39/04 ,  C01B39/00 ,  C01B21/02

CPC分类号： B01J29/763 ,  B01D53/9418 ,  B01D2251/2062 ,  B01D2255/2063 ,  B01D2255/20761 ,  B01D2255/50 ,  B01D2255/9202 ,  B01D2255/9207 ,  B01D2257/402 ,  B01D2257/404 ,  B01D2257/406 ,  B01D2258/012 ,  B01J29/072 ,  B01J29/7065 ,  B01J35/04 ,  B01J37/0215 ,  B01J37/036 ,  B01J37/038 ,  B01J37/30 ,  C01B37/00 ,  C01B39/06 ,  C01B39/48 ,  Y02C20/10 ,  Y02P20/153

摘要： A process for the preparation of a copper containing zeolitic material having CHA framework structure and a composition comprising the molar ratio (n YO2):X2O3 wherein X is a trivalent element, preferably Al, Y is a tetravalent element, preferably Si, and wherein n is preferably at least 20, the process comprising the preparation of an phosphor-free aqueous solution containing at least one source for X2O3 and at least one source for YO2, at least one structure directing agent suitable for the preparation of a zeolitic material having CHA framework structure, and at least one Cu source, and the process further comprising the hydrothermal crystallization of said aqueous solution obtaining a suspension containing the copper containing zeolitic material having CHA framework structure.

摘要翻译： 一种制备具有CHA骨架结构的含铜沸石材料和包含摩尔比（n YO 2）：X 2 O 3的组合物的方法，其中X是三价元素，优选Al，Y是四价元素，优选Si，其中n 优选至少为20，该方法包括制备含有至少一种X 2 O 3源和至少一种YO源的无磷水溶液，至少一种适于制备具有CHA骨架的沸石材料的结构导向剂 结构和至少一个Cu源，并且所述方法还包括所述水溶液的水热结晶，得到含有具有CHA骨架结构的含铜沸石材料的悬浮液。

公开(公告)号：US20110013171A1

公开(公告)日：2011-01-20

申请号：US12838393

申请日：2010-07-16

申请人： Ulrich Mueller ,  Joachim Stuehler ,  Oswald Gromer ,  Rolf Freimann ,  Paul Kaufmann ,  Bernhard Geuppert

发明人： Ulrich Mueller ,  Joachim Stuehler ,  Oswald Gromer ,  Rolf Freimann ,  Paul Kaufmann ,  Bernhard Geuppert

IPC分类号： G03B27/58

CPC分类号： G03F7/70775 ,  G03F7/70258 ,  G03F7/706 ,  G03F7/70633 ,  G03F7/70725 ,  G03F7/7085 ,  G03F7/70891

摘要： A projection exposure system (10) for microlithography which includes: a mask holding device (14) holding a mask (18) with mask structures (20) disposed on the mask, a substrate holding device (36) holding a substrate (30), projection optics (26) imaging the mask structures (20) onto the substrate (30) during an exposure process, and a measurement structure (48) disposed in a defined position with respect to a reference element (16) of the projection exposure system (10), which defined position is mechanically uncoupled from the position of the mask holding device (14). The projection exposure system (10) also includes a detector (52) arranged to record an image of the measurement structure (48) imaged by the projection optics (26). The projection exposure system (10) is configured such that during operation of the projection exposure system (10) the imaging of the mask structures (20) and the imaging of the measurement structure (48) take place at the same time by the projection optics (26. An evaluation device (54) is configured to establish a lateral position of the image of the measurement structure (48) in the area of the detector (52) during the exposure process.

摘要翻译： 一种用于微光刻的投影曝光系统（10），包括：保持掩模（18）的掩模保持装置（14），掩模结构（20）设置在掩模上;保持基板（30）的基板保持装置（36） 投影光学器件（26）在曝光过程期间将掩模结构（20）成像到衬底（30）上;以及测量结构（48），其相对于投影曝光系统的参考元件（16）设置在限定位置 10），所述限定位置与所述掩模保持装置（14）的位置机械地脱离。 投影曝光系统（10）还包括检测器（52），其被布置成记录由投影光学器件（26）成像的测量结构（48）的图像。 投影曝光系统（10）被配置为使得在投影曝光系统（10）的操作期间，掩模结构（20）的成像和测量结构（48）的成像同时由投影光学器件 （26）评估装置（54）被配置为在曝光处理期间在检测器（52）的区域中建立测量结构（48）的图像的横向位置。