公开(公告)号：US07915139B1

公开(公告)日：2011-03-29

申请号：US12508461

申请日：2009-07-23

申请人： Chi-I Lang ,  Judy H. Huang ,  Michael Barnes ,  Sunil Shanker

发明人： Chi-I Lang ,  Judy H. Huang ,  Michael Barnes ,  Sunil Shanker

IPC分类号： H01L21/00

CPC分类号： H01L21/76837 ,  H01L21/02164 ,  H01L21/02216 ,  H01L21/02271 ,  H01L21/0234 ,  H01L21/31612 ,  H01L21/76826

摘要： The present invention meets these needs by providing improved methods of filling gaps. In certain embodiments, the methods involve placing a substrate into a reaction chamber and introducing a vapor phase silicon-containing compound and oxidant into the chamber. Reactor conditions are controlled so that the silicon-containing compound and the oxidant are made to react and condense onto the substrate. The chemical reaction causes the formation of a flowable film, in some instances containing Si—OH, Si—H and Si—O bonds. The flowable film fills gaps on the substrates. The flowable film is then converted into a silicon oxide film, for example by plasma or thermal annealing. The methods of this invention may be used to fill high aspect ratio gaps, including gaps having aspect ratios ranging from 3:1 to 10:1.

摘要翻译： 本发明通过提供填充间隙的改进方法来满足这些需要。 在某些实施方案中，所述方法包括将基材置于反应室中并将气相含硅化合物和氧化剂引入所述​​室中。 控制反应器条件使得含硅化合物和氧化剂反应并冷凝到基底上。 化学反应导致形成可流动的膜，在某些情况下，含有Si-OH，Si-H和Si-O键。 可流动膜填充基板上的间隙。 然后将可流动膜转化成氧化硅膜，例如通过等离子体或热退火。 本发明的方法可用于填充高纵横比间隙，包括具有3:1至10:1的纵横比的间隙。

公开(公告)号：US20100069758A1

公开(公告)日：2010-03-18

申请号：US12465150

申请日：2009-05-13

申请人： Michael Barnes ,  Zhihong Pan ,  Sizhong Zhang

发明人： Michael Barnes ,  Zhihong Pan ,  Sizhong Zhang

IPC分类号： A61B6/00

CPC分类号： A61B5/445 ,  A61B5/0059 ,  A61B5/015 ,  A61B5/0507 ,  A61B5/444 ,  A61B5/726

摘要： Under one aspect, a method of displaying medical information about a subject having a plurality of regions includes: resolving light obtained from each region of the plurality of regions into a corresponding spectrum; selecting a portion of each spectrum, the selected portion including medical information about the corresponding region; constructing an image based on the selected portion of each spectrum; and projecting the image onto the subject. Under another aspect, a method of displaying medical information about a subject that has a plurality of regions includes: resolving light obtained from each region of the plurality of regions into a corresponding spectrum; selecting a portion of each spectrum, the selected portion including medical information about the corresponding region; constructing a spectral image based on the selected portion of each spectrum; displaying an image of the plurality of regions; and displaying the spectral image overlying the image of the plurality of regions.

摘要翻译： 在一个方面，一种显示关于具有多个区域的对象的医学信息的方法包括：将从多个区域的每个区域获得的光分解成相应的光谱; 选择每个频谱的一部分，所选择的部分包括关于相应区域的医学信息; 基于每个频谱的所选部分构建图像; 并将图像投影到被摄体上。 在另一方面，一种显示关于具有多个区域的对象的医学信息的方法包括：将从所述多个区域中的每个区域获得的光分解成相应的光谱; 选择每个频谱的一部分，所选择的部分包括关于相应区域的医学信息; 基于每个频谱的所选部分构建光谱图像; 显示所述多个区域的图像; 以及显示覆盖所述多个区域的图像的光谱图像。

公开(公告)号：US20100061246A1

公开(公告)日：2010-03-11

申请号：US12207624

申请日：2008-09-10

申请人： Michael Barnes ,  Alvaro E. Retana ,  Paul Wells

发明人： Michael Barnes ,  Alvaro E. Retana ,  Paul Wells

IPC分类号： H04L12/56

CPC分类号： H04L45/123 ,  H04L45/12 ,  H04L45/48

摘要： In one embodiment, a method and apparatus of controlling transmission of data packets in a communications network includes designating all networking devices in a portion of the communications network as either hubs or spokes, communicating a link-state advertisement to each connected hub and spoke in the portion of the communications network, computing a shortest path tree at all the hubs and the spokes based on the link-state advertisement, the computing including truncating the shortest path tree at the hubs only for links leading from the spoke to the hub, creating a routing table at each of the hub and the spoke based on the truncated shortest path tree, and transmitting the data packets in the communications network based on the link-state advertisement. The shortest path tree includes all data transmission routes in the tree except links leading from a spoke to a hub.

摘要翻译： 在一个实施例中，控制通信网络中的数据分组传输的方法和装置包括将通信网络的一部分中的所有网络设备指定为集线器或辐条，将链路状态广告传送到每个连接的集线器并在 通信网络的一部分，基于链路状态广告在所有集线器和轮辐处计算最短路径树，所述计算包括仅在从轮辐到集线器的链路上截断中心处的最短路径树，从而创建 基于截短的最短路径树在集线器和辐条的每一个处的路由表，以及基于链路状态广告在通信网络中发送数据分组。 最短路径树包括树中的所有数据传输路由，除了从辐条引导到集线器的链路。

公开(公告)号：US20090306906A1

公开(公告)日：2009-12-10

申请号：US12368176

申请日：2009-02-09

申请人： Paul Gottlieb ,  Michael Barnes ,  Brian William Bourke

发明人： Paul Gottlieb ,  Michael Barnes ,  Brian William Bourke

IPC分类号： G01N31/00 ,  G01N23/00

CPC分类号： G01N23/2206 ,  G01N23/2252 ,  H01J2237/2561

摘要： A method of analyzing spectroscopic data, the method comprising collecting spatially resolved measurement spectroscopic data of a sample for a series of measurements spots, assigning the measurement spots into a predefined set of spectral categories, based on characteristics of the spectroscopic data of the respective measurement spots, identifying groupings of the measurement spots based on their respective spectral categories and their spatial relationships, and assigning each grouping of measurement spots to a fundamental sample unit data object.

摘要翻译： 一种分析光谱数据的方法，所述方法包括：基于各个测量点的光谱数据的特性，将用于一系列测量点的样本的空间分辨的测量光谱数据收集到预定义的光谱类别组中 基于它们各自的光谱类别及其空间关系来识别测量点的分组，以及将每个测量点分组分配给基本采样单元数据对象。

公开(公告)号：US07524735B1

公开(公告)日：2009-04-28

申请号：US11447594

申请日：2006-06-05

申请人： Vishal Gauri ,  Raashina Humayun ,  Chi-I Lang ,  Judy H. Huang ,  Michael Barnes ,  Sunil Shanker

发明人： Vishal Gauri ,  Raashina Humayun ,  Chi-I Lang ,  Judy H. Huang ,  Michael Barnes ,  Sunil Shanker

IPC分类号： H01L21/762

CPC分类号： H01L21/31 ,  C23C16/045 ,  C23C16/401 ,  C23C16/56 ,  H01L21/02164 ,  H01L21/02271 ,  H01L21/0234 ,  H01L21/3121 ,  H01L21/3122 ,  H01L21/31608 ,  H01L21/76224

摘要： Methods of this invention relate to filling gaps on substrates with a solid dielectric material by forming a flowable film in the gap. The flowable film provides consistent, void-free gap fill. The film is then converted to a solid dielectric material. In this manner gaps on the substrate are filled with a solid dielectric material. According to various embodiments, the methods involve reacting a dielectric precursor with an oxidant to form the dielectric material. In certain embodiments, the dielectric precursor condenses and subsequently reacts with the oxidant to form dielectric material. In certain embodiments, vapor phase reactants react to form a condensed flowable film.

摘要翻译： 本发明的方法涉及通过在间隙中形成可流动的膜来填充具有固体电介质材料的衬底上的间隙。 可流动膜提供一致的，无空隙的间隙填充。 然后将膜转化成固体电介质材料。 以这种方式，用固体电介质材料填充衬底上的间隙。 根据各种实施方案，所述方法包括使电介质前体与氧化剂反应以形成电介质材料。 在某些实施方案中，电介质前体冷凝并随后与氧化剂反应以形成电介质材料。 在某些实施方案中，气相反应物反应形成冷凝的可流动的膜。

公开(公告)号：US20050191846A1

公开(公告)日：2005-09-01

申请号：US11087393

申请日：2005-03-22

申请人： David Cheung ,  Wai-Fan Yau ,  Robert Mandal ,  Shin-Puu Jeng ,  Kuo-Wei Liu ,  Yung-Cheng Lu ,  Michael Barnes ,  Ralf Willecke ,  Farhad Moghadam ,  Tetsuya Ishikawa ,  Tze Poon

发明人： David Cheung ,  Wai-Fan Yau ,  Robert Mandal ,  Shin-Puu Jeng ,  Kuo-Wei Liu ,  Yung-Cheng Lu ,  Michael Barnes ,  Ralf Willecke ,  Farhad Moghadam ,  Tetsuya Ishikawa ,  Tze Poon

IPC分类号： C23C16/40 ,  H01L21/316 ,  H01L21/768 ,  H01L21/4763 ,  H01L21/31 ,  H01L21/469

CPC分类号： H01L21/76835 ,  C23C16/401 ,  H01L21/02126 ,  H01L21/02203 ,  H01L21/02208 ,  H01L21/02274 ,  H01L21/0228 ,  H01L21/02304 ,  H01L21/02362 ,  H01L21/31612 ,  H01L21/76801 ,  H01L21/76808 ,  H01L21/7681 ,  H01L21/76829 ,  H01L21/76832 ,  H01L21/76834 ,  H01L2221/1031 ,  Y10T428/24926 ,  Y10T428/31663

摘要： A method and apparatus for depositing a low dielectric constant film by reaction of an organosilicon compound and an oxidizing gas comprising carbon at a constant RF power level. Dissociation of the oxidizing gas can be increased prior to mixing with the organosilicon compound, preferably within a separate microwave chamber, to assist in controlling the carbon content of the deposited film. The oxidized organosilane or organosiloxane film has good barrier properties for use as a liner or cap layer adjacent other dielectric layers. The oxidized organosilane or organosiloxane film may also be used as an etch stop and an intermetal dielectric layer for fabricating dual damascene structures. The oxidized organosilane or organosiloxane films also provide excellent adhesion between different dielectric layers.

公开(公告)号：US20050177507A1

公开(公告)日：2005-08-11

申请号：US11028489

申请日：2004-12-30

申请人： David Bandych ,  John Marron ,  Mark Hoffmeyer ,  Michael Barnes ,  Tim Dawson ,  Paul Hanson

发明人： David Bandych ,  John Marron ,  Mark Hoffmeyer ,  Michael Barnes ,  Tim Dawson ,  Paul Hanson

IPC分类号： G06F17/60

CPC分类号： G06Q20/10 ,  G06Q20/102

摘要： A system and method is provided for processing transactions between at least one buying company and at least one selling company which results in the creation of a new collaborative data set. In one embodiment, the method comprises providing a central datastore accessible to users from the buying company and users from the selling company. Purchase order and invoice data are obtained and compared via a computer, to identify a matched record having purchase order data and corresponding invoice data. A collaborative data set in the central datastore is created, based in part on the matched record and storing in the datastore detailed settlement data regarding settlement of the matched record of purchase order data and corresponding invoice data. The method stores a complete settlement transaction history by providing for storage of additional settlement data in the central datastore, wherein credit memos, debit memos regarding the invoice, the purchase order of the matched record, and/or other documents related to the transaction are stored as part of the collaborative data set.

摘要翻译： 提供了一种用于处理至少一个购买公司和至少一个销售公司之间的交易的系统和方法，其导致创建新的协作数据集。 在一个实施例中，该方法包括提供来自购买公司的用户和销售公司的用户可访问的中央数据存储。 通过计算机获得采购订单和发票数据并进行比较，以识别具有采购订单数据和相应发票数据的匹配记录。 创建中央数据存储区中的协作数据集，部分基于匹配的记录，并存储数据存储区中关于结算采购订单数据和相应发票数据的匹配记录的详细结算数据。 该方法通过提供在中央数据存储区中存储附加结算数据来存储完整的结算交易历史，其中存储有关发票的借记凭单，与该交易有关的匹配记录的采购订单和/或其他文件 作为协作数据集的一部分。

公开(公告)号：US20050164244A1

公开(公告)日：2005-07-28

申请号：US10970698

申请日：2004-10-21

申请人： David Glass ,  Michael Barnes ,  Susan Thompson

发明人： David Glass ,  Michael Barnes ,  Susan Thompson

IPC分类号： C12Q1/68

CPC分类号： C12Q1/6883 ,  C12Q2600/112 ,  C12Q2600/158

摘要： The present application is directed to a method of determining disease classification, particular of juvenile arthritis. It is also directed to a method of analyzing disease progression in a subject exhibiting juvenile arthritis. The invention pertains to expression patterns of certain inflammatory related nucleotide sequences that differ among the various classifications of juvenile arthritis such as, but not limited to, pauciarticular arthritis, polyarticular arthritis, juvenile onset spondyloarthropathy, and systemic onset juvenile rheumatoid arthritis.

摘要翻译： 本申请涉及确定疾病分类的方法，特别是青少年关节炎。 还涉及分析呈现少年关节炎的受试者的疾病进展的方法。 本发明涉及在诸如但不限于关节炎关节炎，关节炎关节炎，青少年发作性脊椎关节病和全身性发作性幼年型类风湿性关节炎的各种分类中的各种不同分类之间的炎性相关核苷酸序列的表达模式。

公开(公告)号：US20050155854A1

公开(公告)日：2005-07-21

申请号：US11017637

申请日：2004-12-22

申请人： Paul Shufflebotham ,  Michael Barnes

发明人： Paul Shufflebotham ,  Michael Barnes

IPC分类号： B01D53/70 ,  C23C16/44 ,  B01J19/08 ,  B01J19/12

CPC分类号： C23C16/4412 ,  B01D53/70 ,  B01D2257/2066 ,  B01D2259/818 ,  Y02C20/30

摘要： An exemplary method and apparatus for abating reaction products from a vacuum processing chamber includes a reaction chamber in fluid communication with the vacuum processing chamber, a coil disposed about the reaction chamber, and a power source for supplying RF energy to the coil. The coil creates a plasma in the reaction chamber which effectively breaks down stable reaction products from the vacuum processing chamber such as perfluorocarbons (PFCs) and hydrofluorocarbons (HFCs) which significantly contribute to global warming. According to alternative embodiments, the plasma may be generated with grids or coils disposed in the reaction chamber perpendicular to the flow of reaction products from the vacuum processing chamber.

摘要翻译： 用于减轻来自真空处理室的反应产物的示例性方法和装置包括与真空处理室流体连通的反应室，围绕反应室设置的线圈以及用于向线圈供应RF能量的电源。 线圈在反应室中产生等离子体，其有效地分解来自真空处理室的稳定反应产物，例如对全球变暖有显着贡献的全氟化碳（PFCs）和氢氟烃（HFCs）。 根据替代实施例，等离子体可以通过设置在反应室中的格栅或线圈垂直于来自真空处理室的反应产物流而产生。

公开(公告)号：US06841006B2

公开(公告)日：2005-01-11

申请号：US09938399

申请日：2001-08-23

申请人： Michael Barnes ,  Michael S. Cox ,  Canfeng Lai ,  John Parks

发明人： Michael Barnes ,  Michael S. Cox ,  Canfeng Lai ,  John Parks

IPC分类号： C23C16/54 ,  C30B25/08 ,  H01L21/00 ,  C23C16/00 ,  B65G49/07 ,  C23F1/00

CPC分类号： H01L21/67167 ,  C23C16/54 ,  C30B25/08 ,  H01L21/67184 ,  Y10S414/139

摘要： A substrate processing apparatus is disclosed. In one embodiment, the apparatus includes a first atmospheric deposition station and a second atmospheric deposition station. The second atmospheric deposition station comprises an atmospheric pressure vapor deposition chamber. A substrate handling system is adapted to transfer substrates between the first and the second atmospheric deposition stations.