摘要:
The present invention relates to a vacuum chamber and to its production. According to the invention, the vacuum chamber comprises a frame into which insert plates are placed. The insert plates form together with the frame a closed space in which a vacuum can be created. Preferably, the shell of the frame is extracted from an integrally formed metal piece, with a large portion of material being removed, leading to openings for the insert plates to be created. This has among others the advantage that no welding seams are necessary where the individual plates are inserted.
摘要:
The present invention relates to a pretreatment method to be applied to secondary surfaces in coating systems prior to coating. To this end, a non-stick coating is applied to the secondary surfaces, which can be easily detached from the secondary surfaces, even after coating material has been deposited thereon. In this way, the cleaning process of the coating system after the coating process is considerably simplified.
摘要:
The present invention relates to a coating for workpieces with at least one layer, the at least one layer comprising metal components represented by AlxCr1−x wherein x is an atomic ratio meeting 0≦x≦0.84 and comprising non metallic components represented by O1−yZy where Z is at least one Element selected from the group N, B, C and 0≦y≦0.65, preferably y≦0.5 characterized in that the coating comprises at least partially a cubic non gamma Cr and oxide comprising phase in such a way that the x-ray diffraction pattern shows formation of cubic phase which is not the cubic phase of CrN.
摘要:
A vacuum treatment system (1) for treating workpieces has a treatment chamber (10) that can be evacuated and in which a low-volt arc-discharge device is placed, with at least one locking loading/unloading aperture and at least one coating source placed on one side wall of the treatment chamber. It also has a device for producing a magnetic field to create a remote magnetic field and at least one workpiece holder to hold workpieces. A target-shutter arrangement (8, 8′) is designed so that when uncovered, the distance between the shutter (8) and the target (12) is less than 35 mm, thus allowing ignition and operation of a magnetron or cathode spark discharge behind the target, but preventing ignition of auxiliary plasma when the target (8) is turned off.
摘要:
A work piece or structural component is coated with a system of film layers at least one of which is composed of (AlyCr1-y)X, where X═N, C, B, CN, BN, CBN, NO, CO, BO, CNO, BNO or CBNO and 0.2≦y
摘要翻译:工件或结构部件涂覆有至少一个由(AlyCr1-y)X组成的膜层系统,其中X = N,C,B,CN,BN,CBN,NO,CO,BO, CNO,BNO或CBNO和0.2&nlE; y <0.7,其中所述膜中的组成基本上恒定或者连续地或逐步地在膜的厚度上变化,以及其生产方法。
摘要:
A color wheel has one or a plurality of color filter segments made from a first material, typically glass, having a coefficient of thermal expansion that is substantially different from a carrier, which is made from a second material, typically aluminum. An intermediate washer or coating is disposed in between the segment(s) and the carrier, and has a coefficient of thermal expansion either equal to the segment(s) or in between that of the segment(s) and the carrier. The segment(s) is/are adhered to the washer or coating via a rigid or strong adhesive capable to withstand the strong centrifugal forces associated with rotating the color wheel and the filter segments at high speed.
摘要:
A workpiece carrier (2) comprises a rotary frame (3) and a driving part (20), both of which are rotatable about a driving axle (4). The rotary frame (3) can be driven by a motor (6), and carries a plurality of workpiece holders (13) which are distributed around the driving axle (4) so as to be rotatable about holder axes. A driving disc (22) of the driving part (21) is in each case rotatable about an anchorage point (23) from which its center point is at a distance of an eccentricity (E). A transmission part (25) having a coupling cutout which closely receives the driving disc (22) has driving apertures (26) through which there project driving pins (19) of the workpiece holders (13), which said driving pins (19) are likewise at a distance of the eccentricity (E) from the holder axes. The driving part (20) can be driven at a greater angular velocity by the rotation of the rotary frame (3), via an auxiliary gear set (31) attached to the base frame (1). The rotary frames of a plurality of workpiece carriers can be mounted on a base frame which is itself rotatable, and they can be rotated through engagement with a stationary toothed wheel.
摘要:
The invention relates to a vacuum plasma generator for providing a plasma discharge (10) for treating work pieces (5) by way of a pulsed plasma process in a vacuum chamber (2). Said vacuum plasma generator comprises a generator output (9, 9′) having an AC mains supply (6a), an AC/DC mains rectifier system (6) for rectifying the AC mains voltage to a DC voltage, a filter capacitor (6b), a first stage as clocked DC/DC voltage converter (7) with means for adjusting the DC output voltage which produces an intermediate circuit voltage (Uz), comprising a controlled power switch (7a) which feeds the primary winding of a transformer (14) and the secondary winding of which is connected to a rectifier (15) and a downstream intermediate capacitor (12) and configures a floating transformer secondary circuit (23). Said secondary circuit is connected to a downstream second stage which is a pulse output stage (8) and is connected to the generator output (9, 9′). The DC/DC voltage converter (7) has at least two floating transformer secondary circuits (23) and comprises a switch-over device (20) with a switch controller (22) for optionally switching the floating transformer secondary circuits (23) in parallel or in series.
摘要:
The present invention relates to a method for the vapor deposition of PVD layer systems by means of sputtering on at least one substrate, wherein the layer system comprises at least a first layer, characterized in that, at least in one step of the method, a HiPIMS method is used with a power density of at least 250 W/Cm2, wherein a pulse length with a duration of at least 5 ms is used while a substrate has is applied to the substrate.
摘要:
The invention relates to a painting system which comprises a painting device (121) in the painting chamber (103), said painting device comprising a casing (113) that surrounds the workpiece support (107) such that paint droplets that are not deposited onto the workpieces are dripped onto the casing to a large extent and can thus be reused.