公开(公告)号：US08957394B2

公开(公告)日：2015-02-17

申请号：US13679072

申请日：2012-11-16

Applicant: KLA-Tencor Corporation

Inventor： Alan D. Brodie ,  Joseph Maurino ,  Mark A. McCord ,  Paul F. Petric

IPC: H01J23/06 ,  H01J23/08 ,  G21K5/08 ,  H01J37/065 ,  H01J29/48

CPC classification number: H01J23/06 ,  G21K5/08 ,  H01J23/08 ,  H01J29/48 ,  H01J29/488 ,  H01J37/065 ,  H01J2237/038 ,  H01J2237/06341 ,  H01J2237/06375 ,  H01J2237/3175

Abstract: One embodiment relates to a high-voltage electron gun including an insulator stand-off having a resistive layer. The resistive layer is at least on an interior surface of the insulator stand-off. A cathode holder is coupled to one end of the insulator 115 stand-off, and an anode is coupled to the other end. The resistive layer advantageously increases the surface breakdown field strength for the insulator stand-off and so enables a compact design for the high-voltage electron gun. Other embodiments, aspects and feature are also disclosed.

Abstract translation: 一个实施例涉及一种包括具有电阻层的绝缘体支架的高压电子枪。 电阻层至少在绝缘体支架的内表面上。 阴极保持器联接到绝缘体115的一端，并且阳极耦合到另一端。 电阻层有利地增加了用于绝缘体间隔的表面击穿场强，因此能够实现高压电子枪的紧凑设计。 还公开了其它实施例，方面和特征。

公开(公告)号：US08791425B2

公开(公告)日：2014-07-29

申请号：US13895452

申请日：2013-05-16

Applicant: Hermes Microvision, Inc.

Inventor： Weiming Ren ,  Zongwei Chen

IPC: H01J23/08 ,  H01F7/00

CPC classification number: H01J37/14 ,  B82Y10/00 ,  B82Y40/00 ,  H01J3/20 ,  H01J37/141 ,  H01J37/145 ,  H01J37/3177 ,  H01J2237/1035 ,  H01J2237/1415 ,  H01J2237/31774

Abstract: The present invention provides two ways to form a special permeability discontinuity unit inside every sub-lens of a multi-axis magnetic lens, which either has a simpler configuration or has more flexibility in manufacturing such as material selection and mechanical structure. Accordingly several types of multi-axis magnetic lens are proposed for various applications. One type is for general application such as a multi-axis magnetic condenser lens or a multi-axis magnetic transfer lens, another type is a multi-axis magnetic non-immersion objective which can require a lower magnetomotive force, and one more type is a multi-axis magnetic immersion objective lens which can generate smaller aberrations. Due to using permeability-discontinuity units, every multi-axis magnetic lens in this invention can also be electrically excited to function as a multi-axis electromagnetic compound lens so as to further reduce aberrations thereof and/or realize electron beam retarding for low-voltage irradiation on specimen.

Abstract translation: 本发明提供了在多轴磁性透镜的每个子透镜内部形成特殊的磁导率不连续单元的两种方式，其具有更简单的构造或在诸如材料选择和机械结构的制造中具有更大的灵活性。 因此，针对各种应用提出了几种类型的多轴磁性透镜。 一种用于一般应用，例如多轴磁聚焦透镜或多轴磁转移透镜，另一种类型是可以要求较低磁动势的多轴磁性非浸没物镜，另一种类型是 可以产生较小像差的多轴磁浸物镜。 由于使用导磁率不连续单位，本发明中的每个多轴磁性透镜也可以被电激励以用作多轴电磁复合透镜，以便进一步降低其像差和/或实现低电压的电子束延迟 对样品照射

公开(公告)号：US20110148297A1

公开(公告)日：2011-06-23

申请号：US12928899

申请日：2010-12-22

Applicant: Hiroshi Yasuda ,  Yoshihisa Ooae ,  Takeshi Haraguchi

Inventor： Hiroshi Yasuda ,  Yoshihisa Ooae ,  Takeshi Haraguchi

IPC: H01J23/08 ,  H01F7/00

CPC classification number: H01J37/143 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/06 ,  H01J37/3174 ,  H01J2237/0635 ,  H01J2237/14

Abstract: A multi-column electron beam exposure apparatus includes: multiple column cells; an electron beam converging unit in which two annular permanent magnets and electromagnetic coils are surrounded by a ferromagnetic frame, each of the two annular permanent magnets being magnetized in an optical axis direction and being symmetrical about the optical axis, the electromagnetic coils disposed near the annular permanent magnets and used to adjust magnetic fields of the annular permanent magnets; and a substrate provided with circular apertures through which electron beams used in the column cells pass, respectively, the substrate having the electron beam converging unit disposed in a side portion of each of the circular apertures. The two annular permanent magnets may be disposed one above the other in the optical axis direction with same polarities facing each other, and the electromagnetic coils may be provided inside or outside the annular permanent magnets in their radial direction.

Abstract translation: 多列电子束曝光装置包括：多列细胞; 电子束会聚单元，其中两个环形永磁体和电磁线圈被铁磁框架包围，两个环形永磁体中的每一个在光轴方向上被磁化并且围绕光轴对称，电磁线圈设置在环形 永磁体，用于调整环形永磁体的磁场; 以及设置有圆孔的基板，通过该圆形孔分别通过电子束会聚单元的基板，每个圆形孔的侧面部分通过电子束。 两个环形永磁体可以沿着光轴方向一个一个地设置在彼此相同的极性上，并且电磁线圈可以设置在环形永磁体的径向内侧或外侧。

公开(公告)号：US07808182B2

公开(公告)日：2010-10-05

申请号：US11832193

申请日：2007-08-01

Applicant: David Arthur New ,  Robert Amantea ,  Peter James Coyle

Inventor： David Arthur New ,  Robert Amantea ,  Peter James Coyle

IPC: H01J23/02 ,  H01J23/08

CPC classification number: H01J23/04 ,  H01J9/025 ,  H01J23/06 ,  H01J2201/304

Abstract: The present invention provides an enhanced THz electromagnetic source structure achieving a very high aspect ratio of 500 to 1 of electron beam width to electron beam thickness of the electron beam moving in the direction across the grating structure while maintaining its cross-section. The structure comprises a magnetic circuit providing a unique low magnetic field slot placed in a steel core for the placement of an electron gun, thus allowing the electron beam to be focused without the interaction of a magnetic field while still supporting a high magnetic field in the grating region. Additionally, the structure comprises an electrostatic shield preventing potential difference between the anode voltage and the grounded steel core from affecting the focusing of the electron beam.

Abstract translation: 本发明提供了一种增强的THz电磁源结构，其实现电子束宽度与电子束的电子束厚度的500比1的非常高的纵横比，该电子束在横跨光栅结构的方向上移动，同时保持其横截面。 该结构包括磁路，其提供放置在钢芯中的独特的低磁场槽，用于放置电子枪，从而允许电子束在没有磁场的相互作用的同时聚焦，同时仍支持高磁场 光栅区域。 此外，该结构包括防止阳极电压和接地钢芯之间的电位差的静电屏蔽影响电子束的聚焦。

公开(公告)号：US07764020B2

公开(公告)日：2010-07-27

申请号：US11779261

申请日：2007-07-17

Applicant: Larry R. Barnett

Inventor： Larry R. Barnett

IPC: H01J23/08

CPC classification number: H01F7/202 ,  H01F7/0278 ,  H01J23/10 ,  H01J25/025

Abstract: A magnet configuration for a power microwave tube with a resonant cavity comprises a permanent magnet (110) with an axis-aligned through-bore (135) of sufficient size to contain the resonant cavity. The permanent magnet has an inner chamber (140) that is centered on the axis (130) with opposite magnet poles aligned along the axis. The magnet configuration further comprises an electromagnet coil (120) fitting in the chamber and encircling the axis such that the coil produces a magnetic field that reinforces the magnetic field from the permanent magnet. An optional protrusion (125) spanning the through-bore narrows an air gap between the poles. The method provides a magnetic field in a power microwave generator by combining a permanent magnet with an electromagnet in accordance with the magnet configuration and energizes the electromagnetic coil, which may be by pulsing the coil current.

Abstract translation: 具有谐振腔的功率微波管的磁体配置包括具有足够尺寸的轴对准通孔（135）的永磁体（110）以容纳谐振腔。 永磁体具有以轴线（130）为中心的内室（140），具有相对的磁极沿轴线排列。 磁体结构进一步包括电磁线圈（120），该电磁线圈（120）安装在腔室中并围绕轴线，使得线圈产生加强永磁体的磁场的磁场。 跨越通孔的可选突起（125）使两极之间的气隙变窄。 该方法通过根据磁体配置将永久磁铁与电磁体组合并提供电磁线圈来提供功率微波发生器中的磁场，该电磁线圈可以通过脉冲线圈电流来激励电磁线圈。

公开(公告)号：US20070200506A1

公开(公告)日：2007-08-30

申请号：US11711037

申请日：2007-02-27

Applicant: Setsuo Miyake

Inventor： Setsuo Miyake

IPC: H01J23/08

CPC classification number: H01J23/40 ,  H01J25/10

Abstract: An output power adjusting mechanisms for adjusting output power is provided on a wave guide of a high frequency output section coupled to an output cavity. The output power adjusting mechanisms is located at a position apart away from the output cavity by a distance of ⅛ wavelength or [(⅛ wavelength)×odd number]. The output power adjusting mechanism includes a reflection adjusting part which is provided in the tube wall of the wave guide so as to be displaceable in the inward and outward directions of the output tube. The output power is adjusted by displacing the reflection adjusting part.

Abstract translation: 用于调节输出功率的输出功率调节机构设置在耦合到输出腔的高频输出部分的波导上。 输出功率调节机构位于远离输出腔的距离为1/8波长或[（1/8波长）模数]的位置。 输出功率调节机构包括反射调节部，该反射调节部设置在波导管的管壁中，以便能够在输出管的向内和向外的方向上移位。 通过移动反射调节部来调节输出功率。

公开(公告)号：US20050231135A1

公开(公告)日：2005-10-20

申请号：US10511837

申请日：2003-04-16

Applicant: James Wilber ,  Joseph Stephens

Inventor： James Wilber ,  Joseph Stephens

IPC: H01J23/08 ,  H01J29/00 ,  H04N3/22 ,  H04N9/29

CPC classification number: H01J29/003 ,  H04N9/29

Abstract: A magnetic field compensation winding arrangement for a cathode ray tube includes a magnetic field compensation winding positioned on the cathode ray tube to compensate for an ambient magnetic field. An operational amplifier is used for generating a magnetic field compensation current in the winding. A pair of digital-to-analog converters are used for generating a pair of signals, respectively, that are coupled to the amplifier to control the magnetic field compensation current.

Abstract translation: 用于阴极射线管的磁场补偿绕组装置包括位于阴极射线管上以补偿环境磁场的磁场补偿绕组。 运算放大器用于在绕组中产生磁场补偿电流。 一对数模转换器分别用于产生耦合到放大器以控制磁场补偿电流的一对信号。

公开(公告)号：US6002988A

公开(公告)日：1999-12-14

申请号：US1328

申请日：1997-12-30

Applicant: David Riley Whaley ,  Carter Michael Armstrong

Inventor： David Riley Whaley ,  Carter Michael Armstrong

IPC: H01F7/02 ,  H01J3/24 ,  H01J23/087 ,  H01J37/14 ,  H05H7/04 ,  H05H9/02 ,  H01J23/08

CPC classification number: H01J3/24 ,  H01J37/14 ,  H05H7/04

Abstract: In accordance with the present invention, there is provided a method of profiling a total vector potential field of a periodic permanent magnetic field structure, wherein desired elements of the total vector potential field are known. The magnetic field structure comprises a plurality of magnets having individual vector potential fields which collectively form the total vector potential field. The method provides for using an electromagnetic solver to generate data files representative of each individual magnet's contribution to the total vector potential field. Such data files are generated by assuming a magnetization value of one unit for a selected magnet, setting magnetization values of zero for all other magnets, setting the electromagnetic solver to use high resolution proximate the selected magnet and to use low resolution elsewhere, using the electromagnetic solver to compute the individual vector potential fields for all space for which the total vector potential field is to be profiled, and repeating such steps for each magnet of the plurality of magnets to generate the data files. The method further provides for using the data files to determine magnetization values for each magnet necessary to provide the desired elements of the total vector potential field, and using the determined magnetization values to superimpose the individual vector potential fields to determine the total vector potential field.

Abstract translation: 根据本发明，提供了一种对周期性永久磁场结构的总矢量势场进行轮廓分析的方法，其中已知总矢量势场的期望要素。 磁场结构包括具有共同形成总矢量势场的单个矢量势场的多个磁体。 该方法提供使用电磁解算器来生成代表每个磁体对总向量势场的贡献的数据文件。 这样的数据文件是通过为所选择的磁体假设一个单位的磁化值，为所有其它磁体设定磁化值0来设置的，将电磁解算器设置为使用选定磁体附近的高分辨率，并在其他地方使用低分辨率，使用电磁 求解器来计算要对其进行轮廓的总向量势场的所有空间的各向量势场，并且对于多个磁体中的每个磁体重复这样的步骤以生成数据文件。 该方法进一步提供使用数据文件来确定提供总向量势场的期望元素所必需的每个磁体的磁化值，并且使用确定的磁化值来叠加各个矢量势场以确定总向量势场。

公开(公告)号：US5363054A

公开(公告)日：1994-11-08

申请号：US842246

申请日：1992-02-27

Applicant: George Bekefi

Inventor： George Bekefi

IPC: H01J25/02 ,  H01S1/00 ,  H01S3/30 ,  H01J23/08

CPC classification number: H01S1/005 ,  H01J25/025

Abstract: A double beam cyclotron maser comprising two electron guns for introducing two electron beams traveling parallel to each other at different speeds into an electron drift tube/waveguide. The beams have respectively different electron cyclotron space-charge harmonics. A solenoid maintains a magnetic field parallel to the direction of propagation of the electron beams while a magnetic wiggler field initially imparts a transverse force to the electrons such that they propagate down the drift tube with a helical gyration. The magnetic fields, electron beam velocities, and beam space charge harmonics are adjustable to set the interaction frequency at which amplification of electromagnetic radiation can occur. The waveguide is a slow wave structure so configured as to slow the signal from the magnetron to match the phase velocity of the double stream cyclotron space-charge wave.

Abstract translation: 一种双光束回旋加速器，包括两个电子枪，用于将以不同速度彼此平行行进的两个电子束引入到电子漂移管/波导中。 光束分别具有不同的电子回旋加速器空间 - 电荷谐波。 螺线管保持与电子束的传播方向平行的磁场，而磁性摆动磁场最初向电子施加横向力，使得它们以螺旋形旋转向下传播到漂移管。 可以调节磁场，电子束速度和光束空间电荷谐波，以设置可发生电磁辐射放大的相互作用频率。 波导是慢波结构，其被配置为减慢来自磁控管的信号以匹配双流回旋加速器空间电荷波的相速度。

公开(公告)号：US4533875A

公开(公告)日：1985-08-06

申请号：US389133

申请日：1982-06-16

Applicant: Yue-Ying Lau ,  Kwo R. Chu ,  Victor L. Granatstein ,  Larry R. Barnett

Inventor： Yue-Ying Lau ,  Kwo R. Chu ,  Victor L. Granatstein ,  Larry R. Barnett

IPC: H01J25/02 ,  H01S1/00 ,  H03F3/58 ,  H03F3/60 ,  H01J23/08

CPC classification number: H01J25/025 ,  H01S1/00 ,  H03F3/58 ,  H03F3/608

Abstract: A high power amplifier for amplifying millimeter-wave radiation comprising: a length of metallic waveguide tapered from a small cross-sectional end to a larger cross-sectional end; a magnetron-type electron injection gun for injecting a spiral beam of relativistic electrons at the small end of the waveguide for propagation axially therein so that the wall radius of the tapered waveguide increases in the downstream direction of the electron beam; an input coupler for launching electromagnetic waves to be amplified into the waveguide at the large waveguide end thereof such that the individual frequencies in the input waves are reflected at various points along the constriction of the waveguide taper so that they copropagate with and are amplified by the electron beam; and a magnetic circuit for generating an axial magnetic field within the tapered waveguide with a unique profile approximately in accordance with the following equation to maintain synchronism: ##EQU1## where the z subscript is the waveguide axial direction, the .perp. subscript designates the direction perpendicular to this axial direction, and the o subscript represents those quantities at the entrance point for the electron beam into the waveguide.This device has been found experimentally to have negligible launching loss and low sensitivity to electron velocity spread.

Abstract translation: 一种用于放大毫米波辐射的高功率放大器，包括：从小截面端到较大横截面端逐渐变细的金属波导的长度; 用于在波导的小端处注入相对论电子的螺旋光束以在其中轴向传播的磁控管型电子注入枪，使得锥形波导的壁半径在电子束的下游方向上增加; 用于发射电磁波的输入耦合器，以在其波导端的大波导端处放大到波导中，使得输入波中的各个频率沿着波导锥度的收缩部的各个点被反射，使得它们与波导锥形共同传播并被放大 电子束; 以及用于在锥形波导内产生具有大致按照以下等式的独特轮廓的磁路，以保持同步：其中z下标是波导轴向，其中ORTHOGONAL下标表示垂直于 该轴向方向，o下标表示电子束进入波导的入口处的那些量。 实验发现该装置具有可忽略的发射损失和对电子速度传播的低灵敏度。