摘要:
Link processing systems and methods use controlled two dimensional deflection of a beam along an optical axis trajectory to process links positioned along and transverse to the trajectory during a pass of the optical axis along the trajectory. Predictive position calculations allow link blowing accuracy during constant velocity and accelerating trajectories.
摘要:
A method and system for locally processing a predetermined microstructure formed on a substrate without causing undesirable changes in electrical or physical characteristics of the substrate or other structures formed on the substrate are provided. The method includes providing information based on a model of laser pulse interactions with the predetermined microstructure, the substrate and the other structures. At least one characteristic of at least one pulse is determined based on the information. A pulsed laser beam is generated including the at least one pulse. The method further includes irradiating the at least one pulse having the at least one determined characteristic into a spot on the predetermined microstructure. The at least one determined characteristic and other characteristics of the at least one pulse are sufficient to locally process the predetermined microstructure without causing the undesirable changes.
摘要:
A method and system for high-speed, precise micromachining an array of devices are disclosed wherein improved process throughput and accuracy, such as resistor trimming accuracy, are provided. Beam scanning and deflection are both used to distribute beam spots to elements of an array of elements for selective processing. The deflection can be performed with a solid state deflector.
摘要:
A system and method for inspecting machine readable marks on one side of a wafer without requiring transmission of radiant energy from another side of the wafer and through the wafer. The wafer has articles which may include die, chip scale packages, circuit patterns and the like. The marking occurs in a wafer marking system and within a designated region relative to an article position. The articles have a pattern on a first side. The method includes the steps of imaging a first side of the wafer, imaging a second side of the wafer, establishing correspondence between a portion of first side image and a portion of a second side image, and superimposing image data from the first and second sides to determine at least the position of a mark relative to an article.
摘要:
A method and system for laser processing targets of different types on a workpiece are provided. The method includes setting a laser pulse width of one or more laser pulses to selectively provide one or more laser output pulses having one or more set pulse widths based on a first type of target to be processed. The method further includes setting a pulse shape of the one or more output pulses to selectively provide the one or more output pulses having the set pulse shape based on the types of targets to be processed. The method still further includes delivering the one or more output pulses having the one or more set pulse widths and the set pulse shape to at least one target of the first type. The method finally includes resetting the laser pulse width of one or more laser pulses to selectively provide one or more laser output pulses having one or more reset pulse widths based on a second type of target to be processed.
摘要:
A rotary optical position encoder for detecting angular position includes a light source, a monolithic scale disk including an optical scale pattern, a monolithic reticle substrate including sets of reticle aperture patterns between the light source and the scale disk, detection and conversion circuitry, and digital processing circuitry. The light source, scale disk, reticle substrate, and detection and conversion circuitry form a plurality of optical sub-encoders at angular positions about the rotational axis, each sub-encoder having an optical path extending from the light source to the detection and conversion circuitry via a respective set of reticle aperture patterns and the optical scale pattern. The digital processing circuitry is operative to combine digital position output values of the sub-encoders to generate an encoder position output value. The optical sub-encoders can include incremental position encoders that provide high-resolution position indications with improved thermally stability due to the use of a shared reticle substrate. Additional optical sub-encoders provide zero-reference or “index” indications as well as a coarse absolute position.
摘要:
A control system is disclosed for controlling the movement of a limited rotation motor. The control system includes a computer system and a closed-loop motor controller. The computer system is for generating command digital data including digital input commands for controlling the movement of the limited rotation motor. The closed-loop motor controller includes an input circuit for receiving the command digital data synchronous with a data input signal, a digital control system for processing the command digital data, an output circuit for providing a motor drive signal to the limited rotation motor, and a feedback circuit for providing digital feedback data to said digital control processing circuit. The digital control processing circuit providing closed-loop motor control calculations on a computation cycle that is synchronous with the data input signal.
摘要:
A limited rotation motor optical scanning system is disclosed that includes a limited rotation motor scanner, a digital controller servo system, a position feedback unit, a wide angle compensation unit, a digital processor, and an adjustment unit. The limited rotation motor scanner element is adapted for directing an energy beam to at least one location within a field of view. The digital controlled servo system is adapted for controlling motion of the limited rotation motor scanner element in accordance with a servo command waveform. The position feedback unit is for providing a position feedback signal indicative of a rotational position of the limited rotation motor scanner element. The wide angle compensation unit is for receiving the position feedback signal and for providing a boost signal that is representative of a boost factor that compensates for torque constant variation with the rotational position of said limited rotation motor scanner element. The digital processor is for providing a set of control parameters for use during the command waveform in conformance with which the command waveform will be employed to control motion of the limited rotation motor scanner element. The adjustment unit is for providing an adjusted output signal responsive to the control parameters and responsive to the boost signal to control the motion of the limited rotation motor scanner element while compensating for torque constant variation with the rotational position of the limited rotation motor scanner element during the command waveform.
摘要:
An optical position encoder employs spatial filtering of diffraction orders other than +/−1st diffraction orders for greater accuracy. The encoder includes a light source, a scale including a diffractive scale pattern, an optical detector adjacent to the scale, and first and second spaced-apart diffraction gratings between the light source and the scale. The gratings and scale are configured to spatially separate +/−1st diffraction orders from other diffraction orders and to direct the +/−1st diffraction orders along respective optical paths. The optical paths diverge from the first grating to respective locations on the second grating that are separated by more than the beam width of the source light beam. The optical paths further converge from the locations on the second grating to an area of the scale adjacent to the detector, and then extend from the area of the scale to the detector to create an interference pattern as a function of the relative position between the scale and the light source. Preferably, higher diffraction orders are separated by total internal reflection at the first diffraction grating.
摘要:
A laser monitoring and controlling apparatus is disclosed that includes a laser, a data server and a laser Graphical User Interface (GUI). In an embodiment, the apparatus further includes, an imaging means and means for displaying images from the imaging means on the GUI.