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公开(公告)号：US09649727B2
公开(公告)日：2017-05-16
申请号：US14699647
申请日：2015-04-29
发明人： Vijay Kancharla
IPC分类号： B23K26/38 , B23K26/40 , B23K26/073 , B23K26/08
CPC分类号： B23K26/38 , B23K26/0624 , B23K26/073 , B23K26/08 , B23K2103/02
摘要： Laser cutting systems and methods are used to cut amorphous metal materials, such as thin amorphous metal ribbons or foils, with a relatively high speed. Embodiments of laser cutting systems and methods described herein also allow cutting with reduced crystallization, and thus reduced increases in thickness, at the cut edges and with reduced cracks or other cutting defects at the cut edges. A fiber laser, such as an Ytterbium fiber laser, is used to generate a laser beam with a power level greater than about 50 W. The laser beam is focused and directed at the amorphous metal material with a beam spot size of about 30 microns or less. The focused laser beam and the amorphous metal material are moved relative to each other at a speed greater than about 18 inches per second such that the focused laser beam cuts the amorphous metal material.
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公开(公告)号：US09647410B2
公开(公告)日：2017-05-09
申请号：US14958059
申请日：2015-12-03
发明人： Andrey Mashkin , Fedor Shcherbina
IPC分类号： H01S3/30 , H01S3/067 , H01S3/094 , H01S3/08 , H01S3/0941 , H01S4/00 , H05G2/00 , H01S3/082 , H01S3/16 , G02B6/02 , G02B6/028 , G02B6/293
CPC分类号： H01S3/0675 , G02B6/02057 , G02B6/0288 , G02B6/29356 , H01S3/067 , H01S3/06708 , H01S3/06716 , H01S3/0804 , H01S3/0826 , H01S3/094003 , H01S3/094011 , H01S3/094069 , H01S3/09415 , H01S3/1603 , H01S3/1618 , H01S4/00 , H05G2/00
摘要： A multimode (“MM”) fiber oscillator is configured with MM active fiber doped with light emitters, a pair of MM passive fibers spliced to respective opposite ends of the MM active fiber, and a plurality of MM fiber Bragg gratings (“FBG”) written in respective cores of the MM passive fibers to provide a resonant cavity. The passive and active fibers are configured with respective cores which are dimensioned with respective diameters matching one another and substantially identical numerical apertures.
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73.发明申请MULTI-LASER SYSTEM AND METHOD FOR CUTTING AND POST-CUT PROCESSING HARD DIELECTRIC MATERIALS 有权用于切割和切割加工硬质电介质材料的多激光系统和方法公开(公告)号：US20160059349A1
公开(公告)日：2016-03-03
申请号：US14838809
申请日：2015-08-28
发明人： Jeffrey P. SERCEL , Marco MENDES , Rouzbeh SARRAFI , Joshua SCHOENLY , Xiangyang SONG , Mathew HANNON , Miroslaw SOKOL
IPC分类号： B23K26/06 , B23K26/361 , C03B33/10 , B23K26/14 , C03B33/023 , B23K26/38 , B23K26/402
CPC分类号： B23K26/402 , B23K26/38 , B23K26/70 , B23K2103/50 , B23K2103/52 , B23K2103/54 , C03B33/0222 , Y02P40/57
摘要： Laser processing of hard dielectric materials may include cutting a part from a hard dielectric material using a continuous wave laser operating in a quasi-continuous wave (QCW) mode to emit consecutive laser light pulses in a wavelength range of about 1060 nm to 1070 nm. Cutting using a QCW laser may be performed with a lower duty cycle (e.g., between about 1% and 15%) and in an inert gas atmosphere such as nitrogen, argon or helium. Laser processing of hard dielectric materials may further include post-cut processing the cut edges of the part cut from the dielectric material, for example, by beveling and/or polishing the edges to reduce edge defects. The post-cut processing may be performed using a laser beam with different laser parameters than the beam used for cutting, for example, by using a shorter wavelength (e.g., 193 nm excimer laser) and/or a shorter pulse width (e.g., picosecond laser).
摘要翻译： 硬介电材料的激光加工可以包括使用以准连续波（QCW）模式工作的连续波激光从硬电介质材料切割一部分，以发射约1060nm至1070nm波长范围的连续激光脉冲。 使用QCW激光器的切割可以以较低的占空比（例如，约1％至15％之间）和惰性气体气氛如氮气，氩气或氦气进行。 硬介电材料的激光加工还可以包括对从电介质材料切割的部分的切割边缘进行后切割处理，例如通过斜边和/或抛光边缘以减少边缘缺陷。 后切割处理可以使用具有比用于切割的光束不同的激光参数的激光束，例如通过使用较短波长（例如，193nm准分子激光）和/或较短的脉冲宽度（例如，皮秒 激光）。
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74.发明申请PROCESS AND SYSTEM FOR UNIFORMLY CRYSTALLIZING AMORPHOUS SILICON SUBSTRATE BY FIBER LASER 审中-公开通过光纤激光器使非晶硅基板均匀结晶的工艺和系统公开(公告)号：US20160013057A1
公开(公告)日：2016-01-14
申请号：US14790170
申请日：2015-07-02
发明人： Alexey AVDOKHIN , Yuri EROKHIN , Manuel LEONARDO , Alexander LIMANOV , Igor SAMARTSEV , Michael von Dadelszen
IPC分类号： H01L21/02 , H01L21/67 , H01L29/04 , H01S3/11 , H01S3/0941 , H01S3/094 , H01S3/16 , H01L29/16 , H01S3/067
CPC分类号： H01L21/02686 , H01L21/02532 , H01S3/06745 , H01S3/06754 , H01S3/094003 , H01S3/1618
摘要： The inventive system for crystallizing an amorphous silicon (a-Si) film is configured with a quasi-continuous wave fiber laser source operative to emit a film irradiating pulsed beam. The fiber laser source is operative to emit a plurality of non-repetitive pulses incident on the a-Si. In particular, the fiber laser is operative to emit multiple discrete packets of film irradiating light at a burst repetition rate (BRR), and a plurality of pulses within each packet emitted at a pulse repetition rate (PRR) which is higher than the BRR. The pulse energy, pulse duration of each pulse and the PRR are controlled so that each packet has a desired packet temporal power profile (W/cm2) and packet energy sufficient to provide transformation of a-Si to polysilicon (p-Si) at each location of the film which is exposed to at least one packets.
摘要翻译： 本发明的用于结晶非晶硅（a-Si）膜的系统由准连续波长的光纤激光源构成，该激光源可操作地发射照射脉冲光束的膜。 光纤激光源可操作地发射入射到a-Si上的多个非重复脉冲。 特别地，光纤激光器以突发重复率（BRR）发射多个离散的薄膜照射光束的分组，并且以比BRR高的脉冲重复率（PRR）发射每个分组内的多个脉冲。 控制脉冲能量，每个脉冲的脉冲持续时间和PRR，使得每个分组具有期望的分组时间功率分布（W / cm 2）和分组能量，其足以在每个分组处提供a-Si到多晶硅（p-Si）的转变 暴露于至少一个数据包的电影的位置。
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公开(公告)号：US09217840B2
公开(公告)日：2015-12-22
申请号：US14186782
申请日：2014-02-21
发明人： Valentin Fomin , Andrey Abramov , Dmitry Mochalov
CPC分类号： G02B6/4296 , G02B6/14 , G02B6/262 , G02B6/40
摘要： A high power fiber laser system is configured with a combiner end fiber spliced to a combiner output fiber. The system further includes a light stripper extending along the combiner end and output fibers and configured with sequentially located zones which are provided with respective refractive indices. In a forward propagating direction of light signal, the upstream zone includes polymeric material with the refractive index higher than that of the cladding of the combiner end fiber. This zone is configured to remove the backreflected core guided light bled into the cladding of the combiner through a splice between combiner end and output fibers. The intermediate zone includes polymeric material configured with a refractive index lower than that of the cladding of the combiner output fiber so it can prevent clad guided signal light from decoupling the cladding under the material. The downstream zone is configured with polymeric material having a refractive index lower than that of the cladding of the combiner output fiber. The polymeric material of the downstream zone is impregnated with a plurality of light diffusers scattering high numerical aperture rays of the clad-guided signal light.
摘要翻译： 高功率光纤激光器系统被配置有与组合器输出光纤接合的组合器端光纤。 该系统还包括沿着组合器端延伸并输出光纤并配置有设置有相应折射率的顺序定位的区域的光剥离器。 在光信号的向前传播方向上，上游区域包括折射率高于组合器端纤维包层的折射率的聚合材料。 该区域被配置为通过组合器端部和输出光纤之间的接合将经反射的芯引导光移除到组合器的包层中。 中间区域包括被配置为折射率低于组合器输出光纤的包层的折射率的聚合物材料，因此可以防止包层引导信号光使材料之下的包层解耦。 下游区域配置有折射率低于组合器输出光纤的包层的折射率的聚合材料。 下游区域的聚合物材料浸渍有散射包层引导信号光的高数值孔径光的多个光漫射器。
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公开(公告)号：US20150266130A1
公开(公告)日：2015-09-24
申请号：US14688555
申请日：2013-10-21
发明人： Valentin Fomin , Anton Starovoytov , Andrey Abramov , Valentin Gapontsev , Artjom Fuchs , Ingo Schramm , Eugene Shcherbakov , Holger Mamerow , Andreas Michalzik
CPC分类号： B23K26/0096 , B23K26/032 , B23K26/082 , B23K26/142 , B23K26/22 , B23K26/24 , B23K26/705
摘要： A hand displaceable laser welding gun is configured with an elongated support column extending along a longitudinal axis and made from lightweight material. A support plate is displaceably mounted to the column while supporting thereon an optical head axially which is provided with optics. The optics is configured to direct a laser beam along a path towards a welding zone through a protective window of the optical head.The laser welding gun further is structured with a first arm mounted to the support plate and extending along a longitudinal axis of the gun diametrically opposite to the optical head. The inner surface of the displaceable arm has an inner surface defining a tunnel which is aligned with the optical head and axially traversed by the laser beam, a first axially flowing stream of pressurized gaseous medium, and a second axially flowing stream of gaseous medium. The second stream, entering the tunnel at a pressure lower than that one of the first stream in response to a pressure gradient generated in the column, does not generate vortexes within the column.The first and second streams exit through the downstream end of the tunnel next to the welding zone. As the streams flow out, they carry out welding debris flowing within the tunnel to the optical head.
摘要翻译： 手可移动激光焊枪配置有沿着纵向轴线延伸并由轻质材料制成的细长支撑柱。 支撑板可移动地安装到柱上，同时在其上轴向地支撑设置有光学元件的光学头。 光学器件被配置为沿着通过光学头的保护窗口的焊接区域的路径引导激光束。 激光焊枪还具有安装到支撑板并沿着与光学头直径相对的枪的纵向轴线延伸的第一臂。 可移动臂的内表面具有限定隧道的内表面，其与光学头对准并且被激光束轴向穿过，第一轴向流动的加压气体介质流和第二轴向流动的气体介质流。 响应于在塔中产生的压力梯度，以比第一流低的压力进入隧道的第二流不会在塔内产生涡流。 第一和第二物流通过隧道的下游端离开焊接区旁边。 当流流出时，它们将在隧道内流动的焊接碎片进行到光学头。
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公开(公告)号：US20150179523A1
公开(公告)日：2015-06-25
申请号：US14624823
申请日：2015-02-18
发明人： Jeffrey P. Sercel , Marco Mendes , Jie Fu
CPC分类号： H01L21/7813 , B23K26/40 , B23K2101/40 , B23K2103/50 , B32B38/0008 , B32B38/10 , B32B43/006 , B32B2457/14 , H01L21/67115 , Y10S156/93 , Y10T156/1158 , Y10T156/1917
摘要： Laser lift off systems and methods may be used to provide monolithic laser lift off with minimal cracking by reducing the size of one or more beam spots in one or more dimensions to reduce plume pressure while maintaining sufficient energy to provide separation. By irradiating irradiation zones with various shapes and in various patterns, the laser lift off systems and methods use laser energy more efficiently, reduce cracking when separating layers, and improve productivity. Some laser lift off systems and methods described herein separate layers of material by irradiating non-contiguous irradiation zones with laser lift off zones (LOZs) that extend beyond the irradiation zones. Other laser lift off systems and methods described herein separate layers of material by shaping the irradiation zones and by controlling the overlap of the irradiation zones in a way that avoids uneven exposure of the workpiece. Consistent with at least one embodiment, a laser lift off system and method may be used to provide monolithic lift off of one or more epitaxial layers on a substrate of a semiconductor wafer.
摘要翻译： 激光剥离系统和方法可用于通过在一个或多个维度上减小一个或多个束斑的尺寸来减小羽流压力同时保持足够的能量以提供分离，从而提供具有最小裂纹的单片激光剥离。 通过照射各种形状和各种图案的照射区域，激光剥离系统和方法更有效地使用激光能量，减少分离层时的开裂，并提高生产率。 本文所述的一些激光剥离系统和方法通过用延伸超过照射区域的激光剥离区域（LOZ）照射不连续的照射区域来分离材料层。 本文所述的其它激光剥离系统和方法通过成形照射区域并通过以避免工件不均匀暴露的方式控制照射区域的重叠来分离材料层。 与至少一个实施例一致，可以使用激光剥离系统和方法来提供半导体晶片的衬底上的一个或多个外延层的单片剥离。
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公开(公告)号：US20140362877A1
公开(公告)日：2014-12-11
申请号：US14308407
申请日：2014-06-18
CPC分类号： H01S3/06708 , G02B6/14 , G02B6/2813 , H01S3/06745 , H01S3/06754 , H01S3/0804 , H01S3/094007 , Y10T156/11
摘要： A clad absorber unit is provided on a passive fiber of a high power fiber laser system and operative to trap and remove modes propagating along the waveguide clad of the fiber. The mode absorber is configured with such an optimal length that the clad light may be removed in a localized manner, substantially uniformly removed over the entire length thereof. The absorber removing clad light in a unformed fashion includes a host material impregnated with diffusers.
摘要翻译： 在高功率光纤激光器系统的无源光纤上设置包层吸收单元，用于捕获和去除沿着光纤的波导包层传播的模式。 模式吸收体配置有这样一个最佳长度，使得可以以局部方式去除包层光，在其整个长度上基本均匀地移除。 吸收剂去除包覆光以未成型的方式包括浸渍有扩散器的主体材料。
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公开(公告)号：US20140241385A1
公开(公告)日：2014-08-28
申请号：US14186782
申请日：2014-02-21
发明人： Valentin Fomin , Andrey Abramov , Dmitry Mochalov
CPC分类号： G02B6/4296 , G02B6/14 , G02B6/262 , G02B6/40
摘要： A high power fiber laser system is configured with a combiner end fiber spliced to a combiner output fiber. The system further includes a light stripper extending along the combiner end and output fibers and configured with sequentially located zones which are provided with respective refractive indices. In a forward propagating direction of light signal, the upstream zone includes polymeric material with the refractive index higher than that of the cladding of the combiner end fiber. This zone is configured to remove the backreflected core guided light bled into the cladding of the combiner through a splice between combiner end and output fibers. The intermediate zone includes polymeric material configured with a refractive index lower than that of the cladding of the combiner output fiber so it can prevent clad guided signal light from decoupling the cladding under the material. The downstream zone is configured with polymeric material having a refractive index lower than that of the cladding of the combiner output fiber. The polymeric material of the downstream zone is impregnated with a plurality of light diffusers scattering high numerical aperture rays of the clad-guided signal light.
摘要翻译： 高功率光纤激光器系统被配置有与组合器输出光纤接合的组合器端光纤。 该系统还包括沿着组合器端延伸并输出光纤并配置有设置有相应折射率的顺序定位的区域的光剥离器。 在光信号的向前传播方向上，上游区域包括折射率高于组合器端纤维包层的折射率的聚合材料。 该区域被配置为通过组合器端部和输出光纤之间的接合将经反射的芯引导光移除到组合器的包层中。 中间区域包括被配置为折射率低于组合器输出光纤的包层的折射率的聚合物材料，因此可以防止包层引导信号光使材料之下的包层解耦。 下游区域配置有折射率低于组合器输出光纤的包层的折射率的聚合材料。 下游区域的聚合物材料浸渍有散射包层引导信号光的高数值孔径光的多个光漫射器。
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公开(公告)号：US11617858B2
公开(公告)日：2023-04-04
申请号：US17423943
申请日：2020-01-20
发明人： Gregory Altshuler , Ilya Yaroslavsky , Dmitri Boutoussov , Viktoriya Andreeva , Olivier Traxer , Michael Barenboym , Isaac Ostrovsky , Anastasiya Kovalenko
摘要： Catheter steering handles that are ergonomically designed to enable an operator to reduce hand fatigue. Various ergonomic aspects of the disclosed steering handles include geometries that more naturally conform to the palm of the hand and that enable the hand to be held in a natural, low stress posture during operation of the steering handle. In another aspect of the disclosure, the catheter steering handle is configured so that the operator can release or partially release the grip on the handle, thereby enabling the operator to relax and flex the hand, thereby reducing fatigue.
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