公开(公告)号：US07227881B2

公开(公告)日：2007-06-05

申请号：US11371411

申请日：2006-03-09

申请人： Sergei V. Govorkov ,  Rainer Paetzel

发明人： Sergei V. Govorkov ,  Rainer Paetzel

IPC分类号： H01S3/22

CPC分类号： H01S3/2366 ,  H01S3/005 ,  H01S3/0057 ,  H01S3/225 ,  H01S3/2325 ,  H01S3/2333 ,  H01S3/235

摘要： A Master Oscillator (MO)—Power Amplifier (PA) configuration (MOPA) can be used advantageously in an excimer laser system for micro-lithography applications, where semiconductor manufacturers demand powers of 40 W or more in order to support the throughput requirements of advanced lithography scanner systems. A MOPA-based laser system can provide both high pulse energies and high spectral purity. A MOPA system can utilize a multi-pass PA, as well as a special beam path capable of reducing the amount of ASE (Amplified Spontaneous Emission) and feedback to the MO. Lithography scanner optics are primarily fused silica, such that the peak pulse power must be kept low to avoid material compaction when a MOPA system is used with lithography applications. This conflict between the demand for high average power and the low peak power requirement of the pulsed excimer laser source can be resolved by using a novel beam path to generate a sufficiently long pulse length.

摘要翻译： 主振荡器（MO） - 功率放大器（PA）配置（MOPA）可以有利地用于微光刻应用的准分子激光系统，其中半导体制造商需要40W或更高的功率，以支持先进的吞吐量要求 光刻扫描仪系统。 基于MOPA的激光系统可以提供高脉冲能量和高光谱纯度。 MOPA系统可以利用多通道PA，以及能够减少ASE（放大自发发射）量和向MO的反馈的特殊光束路径。 平版印刷扫描仪光学器件主要是熔融石英，使得峰值脉冲功率必须保持较低，以避免当MOPA系统与光刻应用一起使用时的材料压实。 可以通过使用新颖的光束路径来产生足够长的脉冲长度来解决脉冲准分子激光源的高平均功率需求和低峰值功率需求之间的这种冲突。

公开(公告)号：US07184204B2

公开(公告)日：2007-02-27

申请号：US10881103

申请日：2004-06-30

申请人： Sergei V. Govorkov ,  Gongxue Hua ,  Timur Misuryaev ,  Alexander O. Wiessner ,  Thomas Schmidt ,  Rainer Paetzel

发明人： Sergei V. Govorkov ,  Gongxue Hua ,  Timur Misuryaev ,  Alexander O. Wiessner ,  Thomas Schmidt ,  Rainer Paetzel

IPC分类号： H01S3/00 ,  H01S3/22

CPC分类号： G03F7/7055 ,  H01S3/0057 ,  H01S3/0835 ,  H01S3/235

摘要： The lifetime of optical components used in deep-UV (DUV) excimer laser systems, including systems in a MOPA configuration, can be increased by reducing the intensity of pulses incident upon these components. In one approach, an output pulse can be “stretched” in order to reduce the peak power of the pulse. A pulse stretching component can be used, which can be mounted outside the laser enclosure with a horizontal beam path in order to provide a delay line with a minimum impact on the laser system footprint. The horizontal beam path also can minimize the number of optical components in the arm containing the high power beam. A beamsplitting prism can be used with the delay line to avoid the rapid degradation of coatings otherwise exposed to intense UV beams. The prism can expand the beam in the delay line in order to minimize beam intensity and losses due to reflection.

公开(公告)号：US07088450B2

公开(公告)日：2006-08-08

申请号：US10806847

申请日：2004-03-23

申请人： Sergei V. Govorkov ,  Tamas Nagy ,  Gongxue Hua

发明人： Sergei V. Govorkov ,  Tamas Nagy ,  Gongxue Hua

IPC分类号： G01B9/02

CPC分类号： G01J9/0246 ,  G01J1/4257

摘要： A method for measuring amplified spontaneous emission (ASE) content in a beam of laser radiation emitted by a laser master oscillator power-amplifier system comprises directing the beam of light into a two-beam interferometer having unequal beam path lengths. The two beams interfering in the interferometer have equal amplitude and form a pattern of interference fringes. The beam-path difference is arranged to be greater than the coherence length of the ASE so that the ASE content of the beam does not form interference fringes but provides a background level of light in the interference pattern. This enables the ASE content of the beam to be determined from measurements of the maximum intensity of a bright fringe and the minimum energy of a dark fringe in the interference pattern.

摘要翻译： 用于测量由激光主振荡器功率放大器系统发射的激光束中的放大的自发发射（ASE）含量的方法包括将光束引导到具有不等的光束路径长度的双光束干涉仪。 干涉仪干涉的两束光束具有相等的幅度并形成干涉条纹图案。 光束路径差被设置为大于ASE的相干长度，使得光束的ASE内容不形成干涉条纹，而是提供干涉图案中的背景光。 这使得能够通过亮度条纹的最大强度和干涉图案中的暗条纹的最小能量的测量来确定光束的ASE内容。

公开(公告)号：US06999492B2

公开(公告)日：2006-02-14

申请号：US10713583

申请日：2003-11-14

申请人： Hubertus von Bergmann ,  Spencer Merz ,  Gongxue Hua ,  Sergei V. Govorkov

发明人： Hubertus von Bergmann ,  Spencer Merz ,  Gongxue Hua ,  Sergei V. Govorkov

IPC分类号： H01S3/097

CPC分类号： H01S3/097 ,  H01S3/225

摘要： An oil-free pulser design can be used to produce an excimer or molecular fluorine laser system that is lighter, cheaper to produce, and simpler than existing systems. Such designs allow a relatively low DC voltage to be applied to a main transformer, allowing the pulser to be run without oil cooling. This relatively low voltage can be increased to the necessary voltage level, such as on the order to 12 kV to 15 kV, needed to drive the laser system. This transference can be accomplished using standard components, such as a pair of capacitor elements that are pulse-charged in parallel, but can be discharged in series following a reversal of charge on one of the capacitor elements.

摘要翻译： 无油脉冲发生器设计可用于生产更轻，生产成本更低，比现有系统简单的准分子或分子氟激光系统。 这样的设计允许将相对较低的DC电压施加到主变压器，允许脉冲发生器在没有油冷却的情况下运行。 该相对低的电压可以增加到驱动激光系统所需的所需电压水平，例如达到12kV至15kV。 可以使用诸如并联脉冲充电的一对电容器元件之类的标准组件来实现该转移，但是可以在其中一个电容器元件上的电荷反转之后串联放电。

公开(公告)号：US06608852B2

公开(公告)日：2003-08-19

申请号：US09938329

申请日：2001-08-21

申请人： Sergei V. Govorkov ,  Alexander Oliver Wolfgang Wiessner

发明人： Sergei V. Govorkov ,  Alexander Oliver Wolfgang Wiessner

IPC分类号： H01S3091

CPC分类号： H01S3/0941 ,  H01S3/025 ,  H01S3/0407 ,  H01S3/042 ,  H01S3/061 ,  H01S3/09408 ,  H01S3/094084

摘要： A side-pumped, diode-pumped solid state laser device includes an elongated housing having an elongated cavity defined therein and further having an elongated opening defined between the cavity and the exterior of the housing. A solid state rod is disposed within the cavity and is preferably surrounded by a cooling fluid. A cover seal sealably covering the opening and thereby encloses the cavity. The cover seal is formed of a material that is at least substantially transparent to pumping radiation at a predetermined pumping wavelength. A diode array emits the pumping radiation that traverses the cover seal and the opening to be absorbed by the rod to excite laser active species within the rod. The laser device further includes a resonator including the rod disposed therein for generating a laser beam.

公开(公告)号：US06490305B2

公开(公告)日：2002-12-03

申请号：US09965498

申请日：2001-09-26

申请人： Sergei V. Govorkov ,  Klaus Wolfgang Vogler ,  Frank Voss ,  Rainer Pätzel

发明人： Sergei V. Govorkov ,  Klaus Wolfgang Vogler ,  Frank Voss ,  Rainer Pätzel

IPC分类号： H01S322

CPC分类号： H01S3/225 ,  B23K26/12 ,  B23K26/128 ,  B23K26/705 ,  B23K2103/05 ,  G01J1/4257 ,  G03F7/70025 ,  G03F7/70558 ,  G03F7/70808 ,  H01S3/0014 ,  H01S3/134

摘要： A system is provided for delivering a laser beam of wavelength less than 200 nm from a laser, such as an F2 laser or ArF laser, through a sealed enclosure sealably connected to the laser, and preferably to another housing, leading ultimately to a workpiece. The enclosure is preferably evacuated and back-filled with an inert gas to adequately deplete any air, water, hydrocarbons or oxygen within the enclosure. Thereafter or alternatively, an inert gas flow is established and maintained within the enclosure during operation of the laser. The inert gas preferably has high purity, e.g., more than 99.5% and preferably more than 99.999%, wherein the inert is preferably nitrogen or a noble gas. The enclosure is preferably sealed by a window transparent to the sub-200 nm radiation for preventing contaminants generated in the enclosure from entering the housing and contaminating surfaces therein. The enclosure is preferably made of steel and/or copper, and the window is preferably made of CaF2.

公开(公告)号：US06477192B2

公开(公告)日：2002-11-05

申请号：US09971802

申请日：2001-10-03

申请人： Sergei V. Govorkov ,  Gongxue Hua

发明人： Sergei V. Govorkov ,  Gongxue Hua

IPC分类号： H01S322

CPC分类号： H01S3/225 ,  B23K26/12 ,  B23K26/128 ,  B23K26/705 ,  B23K2103/04 ,  G01J1/4257 ,  G03F7/70025 ,  G03F7/70558 ,  G03F7/70808 ,  H01S3/0014 ,  H01S3/134

摘要： A beam delivery system for a laser emitting at a relevant wavelength of less than 200 nm is provided. The system includes a sealed enclosure connected to the laser and surrounding the path of the beam as it exits the laser resonator. The enclosure extends between the laser output coupler and a photodetector sensitive at the wavelength of the relevant laser emission. The interior of the enclosure, and thus the beam path between the output coupler and the detector, is substantially free of species that strongly photoabsorb radiation at the relevant laser emission wavelength. A beam splitting element diverts at least a portion of the beam for measurement by the detector. The beam splitting element preferably includes a beam splitting mirror, holographic beam sampler or diffraction grating. In addition, optics are preferably provided for filtering a visible portion of the diverted beam, so that substantially only a VUV portion of the diverted beam is received at the detector. The filtering optics preferably include a diffraction grating, holographic beam sampler or one or more dichroic mirrors.

公开(公告)号：US5946337A

公开(公告)日：1999-08-31

申请号：US70112

申请日：1998-04-29

申请人： Sergei V. Govorkov ,  Uwe Stamm

发明人： Sergei V. Govorkov ,  Uwe Stamm

IPC分类号： H01S3/08

CPC分类号： H01S3/08004 ,  H01S3/08081

摘要： A laser system having a resonant cavity that is stable in one axis so that a wavelength selector can be used for producing a narrow line output, and is unstable in an orthogonal axis for high energy extraction efficiency and for low output beam divergence. The resonant cavity terminates at one end with a cylindrical mirror and at the other end with a dispersive wavelength selector. A gain medium is disposed in the resonant cavity, and is excited by a power supply to generate a laser beam that oscillates in the resonant cavity. A portion of the laser beam is coupled out of the resonant cavity as an output laser beam. The cylindrical mirror has a cylindrical reflecting surface oriented to diverge the laser beam at a first azimuthal angle relative to an axis of the resonant cavity. The dispersive wavelength selector disperses the laser beam as a function of wavelength at a second azimuthal angle relative to the resonant cavity axis. The second azimuthal angle is orthogonal to the first azimuthal angle.

摘要翻译： 一种具有在一个轴上稳定的谐振腔的激光系统，使得波长选择器可以用于产生窄线输出，并且在正交轴上不稳定，用于高能量提取效率和低输出光束发散。 谐振腔在一端终止于圆柱形反射镜，另一端用分散波长选择器终止。 增益介质设置在谐振腔中，并被电源激发以产生在谐振腔中振荡的激光束。 激光束的一部分作为输出激光束耦合到谐振腔外。 圆柱形反射镜具有圆柱形反射表面，其被定向成相对于谐振腔的轴线以第一方位角发散激光束。 分散波长选择器以相对于谐振腔轴线的第二方位角将作为波长的函数的激光束分散。 第二方位角与第一方位角正交。