公开(公告)号：US07923176B2

公开(公告)日：2011-04-12

申请号：US12035086

申请日：2008-02-21

Applicant: Chong-Chul Chai ,  Mee-Hye Jung ,  Woo-Geun Lee ,  Woo-Seok Jeon ,  Young-Wook Lee ,  Jung-In Park ,  Jun-Hyung Souk ,  Won-Kie Chang ,  Shi-Yul Kim

Inventor： Chong-Chul Chai ,  Mee-Hye Jung ,  Woo-Geun Lee ,  Woo-Seok Jeon ,  Young-Wook Lee ,  Jung-In Park ,  Jun-Hyung Souk ,  Won-Kie Chang ,  Shi-Yul Kim

IPC: G03F1/00 ,  G06C5/00

CPC classification number: G03F1/36 ,  G03F1/00 ,  G03F1/50

Abstract: A mask includes a transparent substrate, a light-blocking layer and a halftone layer. The light-blocking layer includes a source electrode pattern portion including a first electrode portion, a second electrode portion and a third electrode portion, and a drain electrode pattern portion disposed between the second electrode portion and the third electrode portion. The halftone layer includes a halftone portion corresponding to a spaced-apart portion between the source electrode pattern portion and the drain electrode pattern portion, and a dummy halftone portion more protrusive than ends of the second electrode portion and the third electrode portion. Thus, a photoresist pattern corresponding to a channel portion of a thin film transistor (TFT) may be formed with a uniform thickness, to thereby prevent an excessive etching of the channel portion.

Abstract translation: 掩模包括透明基板，遮光层和半色调层。 遮光层包括包括第一电极部分，第二电极部分和第三电极部分的源电极图案部分和设置在第二电极部分和第三电极部分之间的漏电极图案部分。 半色调层包括对应于源电极图案部分和漏电极图案部分之间的间隔部分的半色调部分和比第二电极部分和第三电极部分的端部更突出的虚拟半色调部分。 因此，可以形成对应于薄膜晶体管（TFT）的沟道部分的光致抗蚀剂图案，其厚度均匀，从而防止通道部分的过度蚀刻。

公开(公告)号：US20100203715A1

公开(公告)日：2010-08-12

申请号：US12765698

申请日：2010-04-22

Applicant: Sang-Gab KIM ,  Woo-Geun Lee ,  Shi-Yul Kim ,  Jin-Ho Ju ,  Jang-Soo Kim ,  Sang-Woo Whangbo ,  Min-Seok Oh ,  Hye-Young Ryu ,  Hong-Kee Chin

Inventor： Sang-Gab KIM ,  Woo-Geun Lee ,  Shi-Yul Kim ,  Jin-Ho Ju ,  Jang-Soo Kim ,  Sang-Woo Whangbo ,  Min-Seok Oh ,  Hye-Young Ryu ,  Hong-Kee Chin

IPC: H01L21/28

CPC classification number: H01L27/124 ,  G02F2001/13629 ,  H01L29/458

Abstract: The present invention provides a manufacturing method of a thin film transistor array panel, which includes forming a gate line on a substrate; forming a gate insulating layer, a semiconductor layer, and an ohmic contact on the gate line; forming a first conducting film including Mo, a second conducting film including Al, and a third conducting film including Mo on the ohmic contact; forming a first photoresist pattern on the third conducting film; etching the first, second, and third conducting films, the ohmic contact, and the semiconductor layer using the first photoresist pattern as a mask; removing the first photoresist pattern by a predetermined thickness to form a second photoresist pattern; etching the first, second, and third conducting films using the second photoresist pattern as a mask to expose a portion of the ohmic contact; and etching the exposed ohmic contact using a Cl-containing gas and a F-containing gas.

Abstract translation: 本发明提供一种薄膜晶体管阵列面板的制造方法，其包括在基板上形成栅极线; 在栅极线上形成栅极绝缘层，半导体层和欧姆接触; 形成包括Mo的第一导电膜，包括Al的第二导电膜和在欧姆接触上包含Mo的第三导电膜; 在所述第三导电膜上形成第一光致抗蚀剂图案; 使用第一光致抗蚀剂图案作为掩模蚀刻第一，第二和第三导电膜，欧姆接触和半导体层; 将第一光致抗蚀剂图案去除预定厚度以形成第二光致抗蚀剂图案; 使用第二光致抗蚀剂图案作为掩模蚀刻第一，第二和第三导电膜以暴露欧姆接触的一部分; 并使用含Cl气体和含F气体蚀刻暴露的欧姆接触。

公开(公告)号：US07759738B2

公开(公告)日：2010-07-20

申请号：US12269748

申请日：2008-11-12

Applicant: Jang-Soo Kim ,  Hong-Long Ning ,  Bong-Kyun Kim ,  Hong-Sick Park ,  Shi-Yul Kim ,  Chang-Oh Jeong ,  Sang-Gab Kim ,  Jae-Hyoung Youn ,  Woo-Geun Lee ,  Yang-Ho Bae ,  Pil-Sang Yun ,  Jong-Hyun Choung ,  Sun-Young Hong ,  Ki-Won Kim ,  Byeong-Jin Lee ,  Young-Wook Lee ,  Jong-In Kim ,  Byeong-Beom Kim ,  Nam-Seok Suh

Inventor： Jang-Soo Kim ,  Hong-Long Ning ,  Bong-Kyun Kim ,  Hong-Sick Park ,  Shi-Yul Kim ,  Chang-Oh Jeong ,  Sang-Gab Kim ,  Jae-Hyoung Youn ,  Woo-Geun Lee ,  Yang-Ho Bae ,  Pil-Sang Yun ,  Jong-Hyun Choung ,  Sun-Young Hong ,  Ki-Won Kim ,  Byeong-Jin Lee ,  Young-Wook Lee ,  Jong-In Kim ,  Byeong-Beom Kim ,  Nam-Seok Suh

IPC: H01L29/04 ,  H01L29/10 ,  H01L29/15

CPC classification number: G02F1/13458 ,  G02F1/136286 ,  G02F2001/136295 ,  H01L27/1218 ,  H01L27/124 ,  H01L27/1288

Abstract: A gate line includes a first seed layer formed on a base substrate and a first metal layer formed on the first seed layer. A first insulation layer is formed on the base substrate. A second insulation layer is formed on the base substrate. Here, a line trench is formed through the second insulation layer in a direction crossing the gate line. A data line includes a second seed layer formed below the line trench and a second metal layer formed in the line trench. A pixel electrode is formed in a pixel area of the base substrate. Therefore, a trench of a predetermined depth is formed using an insulation layer and a metal layer is formed through a plating method, so that a metal line having a sufficient thickness may be formed.

Abstract translation: 栅极线包括形成在基底基板上的第一籽晶层和形成在第一籽晶层上的第一金属层。 在基底基板上形成第一绝缘层。 在基底基板上形成第二绝缘层。 这里，在与栅极线交叉的方向上通过第二绝缘层形成线沟槽。 数据线包括形成在线沟槽下方的第二晶种层和形成在线沟槽中的第二金属层。 像素电极形成在基底基板的像素区域中。 因此，使用绝缘层形成预定深度的沟槽，并且通过电镀方法形成金属层，从而可以形成具有足够厚度的金属线。

公开(公告)号：US20100140610A1

公开(公告)日：2010-06-10

申请号：US12556277

申请日：2009-09-09

Applicant: Young-Wook Lee ,  Hong-Suk Yoo ,  Jean-Ho Song ,  Jae-Hyoung Youn ,  Woo-Geun Lee ,  Ki-Won Kim ,  Jang-In Kim

Inventor： Young-Wook Lee ,  Hong-Suk Yoo ,  Jean-Ho Song ,  Jae-Hyoung Youn ,  Woo-Geun Lee ,  Ki-Won Kim ,  Jang-In Kim

IPC: H01L29/786 ,  H01L29/12 ,  H01L21/336

CPC classification number: H01L29/66742 ,  H01L27/1225 ,  H01L27/124 ,  H01L27/1248

Abstract: A thin film transistor substrate according to an embodiment of the present invention includes: an insulation substrate; a gate line formed on the insulation substrate; a first interlayer insulating layer formed on the gate line; a data line and a gate electrode formed on the first interlayer insulating layer; a gate insulating layer formed on the data line and gate electrode; a semiconductor formed on the gate insulating layer and overlapping the gate electrode; a second interlayer insulating layer formed on the semiconductor; a first connection formed on the second interlayer insulating layer and electrically connecting the gate line and the gate electrode to each other; a drain electrode connected to the semiconductor; a pixel electrode connected to the drain electrode; and a second connection connecting the data line and the semiconductor to each other.

Abstract translation: 根据本发明实施例的薄膜晶体管基板包括：绝缘基板; 形成在所述绝缘基板上的栅极线; 形成在栅极线上的第一层间绝缘层; 形成在所述第一层间绝缘层上的数据线和栅电极; 形成在数据线和栅电极上的栅极绝缘层; 形成在栅极绝缘层上并与栅电极重叠的半导体; 形成在所述半导体上的第二层间绝缘层; 形成在所述第二层间绝缘层上并将所述栅极线和所述栅电极彼此电连接的第一连接; 连接到半导体的漏电极; 连接到所述漏电极的像素电极; 以及将数据线和半导体彼此连接的第二连接。

公开(公告)号：US20090152635A1

公开(公告)日：2009-06-18

申请号：US12331361

申请日：2008-12-09

Applicant: Yu-Gwang JEONG ,  Young-Wook Lee ,  Sang-Gab Kim ,  Woo-Geun Lee ,  Min-Seok Oh ,  Jang-Soo Kim ,  Kap-Soo Yoon ,  Shin-Il Choi ,  Hong-Kee Chin ,  Seung-Ha Choi ,  Seung-Hwan Shim ,  Sung-Hoon Yang ,  Ki-Hun Jeong

Inventor： Yu-Gwang JEONG ,  Young-Wook Lee ,  Sang-Gab Kim ,  Woo-Geun Lee ,  Min-Seok Oh ,  Jang-Soo Kim ,  Kap-Soo Yoon ,  Shin-Il Choi ,  Hong-Kee Chin ,  Seung-Ha Choi ,  Seung-Hwan Shim ,  Sung-Hoon Yang ,  Ki-Hun Jeong

IPC: H01L29/78 ,  H01L21/02

CPC classification number: H01L27/127 ,  H01L27/1214 ,  H01L27/1259 ,  H01L27/1288 ,  H01L29/66765

Abstract: Embodiments of the present invention relate to a thin film transistor and a manufacturing method of a display panel, and include forming a gate line including a gate electrode on a substrate, forming a gate insulating layer on the gate electrode, forming an intrinsic semiconductor on the gate insulating layer, forming an extrinsic semiconductor on the intrinsic semiconductor, forming a data line including a source electrode and a drain electrode on the extrinsic semiconductor, and plasma-treating a portion of the extrinsic semiconductor between the source electrode and the drain electrode to form a protection member and ohmic contacts on respective sides of the protection member. Accordingly, the process for etching the extrinsic semiconductor and forming an inorganic insulating layer for protecting the intrinsic semiconductor may be omitted such that the manufacturing process of the display panel may be simplified, manufacturing cost may be reduced, and productivity may be improved.

Abstract translation: 本发明的实施例涉及薄膜晶体管和显示面板的制造方法，包括在基板上形成包括栅电极的栅极线，在栅电极上形成栅绝缘层，在栅电极上形成本征半导体 栅极绝缘层，在本征半导体上形成非本征半导体，在外部半导体上形成包括源电极和漏电极的数据线，以及对源电极和漏极之间的非本征半导体的一部分进行等离子体处理，以形成 保护构件和保护构件的相应侧上的欧姆接触。 因此，可以省略用于蚀刻外部半导体和形成用于保护本征半导体的无机绝缘层的工艺，从而可以简化显示面板的制造工艺，可以降低制造成本，并且可以提高生产率。

公开(公告)号：US20070187741A1

公开(公告)日：2007-08-16

申请号：US11690702

申请日：2007-03-23

Applicant: Woo-Geun LEE ,  Hye-Young RYU

Inventor： Woo-Geun LEE ,  Hye-Young RYU

IPC: H01L29/94

CPC classification number: G02F1/1368 ,  H01L27/1255

Abstract: In a thin film transistor substrate, a method of manufacturing the same, and a display apparatus having the same, a thin film transistor, a gate member, and a storage member are formed on an insulating substrate. The gate member has a gate line and a gate electrode electrically connected to the gate line, and the storage member has a storage line, a first storage electrode, and a second storage electrode. A data member is formed on an active layer. The data member includes a data line crossing the gate line, a third storage electrode overlapped with the first storage electrode and a fourth storage electrode overlapped with the second storage electrode. Thus, a capacitance variation of a storage capacitor may be prevented, thereby improving display quality of a display apparatus.

Abstract translation: 在绝缘基板上形成薄膜晶体管基板及其制造方法及具有该薄膜晶体管基板的显示装置，薄膜​​晶体管，栅极部件和存储部件。 栅极部件具有与栅极线电连接的栅极线和栅电极，并且存储部件具有存储线，第一存储电极和第二存储电极。 在有源层上形成数据元件。 数据构件包括与栅极线交叉的数据线，与第一存储电极重叠的第三存储电极和与第二存储电极重叠的第四存储电极。 因此，可以防止存储电容器的电容变化，从而提高显示装置的显示质量。

公开(公告)号：US08730420B2

公开(公告)日：2014-05-20

申请号：US13419228

申请日：2012-03-13

Applicant: Woo-Geun Lee ,  Shi-Yul Kim ,  Jae-Hyoung Youn ,  Young-Wook Lee

Inventor： Woo-Geun Lee ,  Shi-Yul Kim ,  Jae-Hyoung Youn ,  Young-Wook Lee

IPC: G02F1/136 ,  G02F1/1343

CPC classification number: G02F1/136286 ,  G02F1/136209 ,  G02F2001/13606 ,  G02F2001/136218 ,  G02F2001/136222 ,  G02F2201/40

Abstract: A liquid crystal display to prevent light leakage with an improvement of aperture ratio and a reduction of load of a data line is provided. The liquid crystal display includes a gate line and a storage electrode line formed on a insulating substrate and apart from each other, a first data line and a second data line intersecting the gate line, a first pixel electrode defined by the gate line and the first data line, and a second pixel electrode defined by the gate line and the second data line and neighboring the first pixel electrode. Also, a blocking electrode between the first pixel electrode and the second pixel electrode is included, wherein at least portion of the first data line is disposed under the first pixel electrode, and at least portion of the blocking electrode is disposed under the second pixel electrode and apart from the first data line.

Abstract translation: 提供了一种液晶显示器，用于防止光泄漏，同时提高了开口率和减少了数据线的负载。 液晶显示器包括形成在绝缘基板上并且彼此分开的栅极线和存储电极线，与栅极线相交的第一数据线和第二数据线，由栅极线和第一栅极线限定的第一像素电极 数据线和由栅极线和第二数据线限定并与第一像素电极相邻的第二像素电极。 此外，包括第一像素电极和第二像素电极之间的阻挡电极，其中第一数据线的至少一部分设置在第一像素电极下方，并且阻挡电极的至少一部分设置在第二像素电极下方 并且除了第一条数据线之外。

公开(公告)号：US08604469B2

公开(公告)日：2013-12-10

申请号：US12464920

申请日：2009-05-13

Applicant: Woo-Geun Lee ,  Jae-Hyoung Youn ,  Ki-Won Kim ,  Young-Wook Lee ,  Jong-In Kim

Inventor： Woo-Geun Lee ,  Jae-Hyoung Youn ,  Ki-Won Kim ,  Young-Wook Lee ,  Jong-In Kim

IPC: H01L29/10

CPC classification number: H01L29/7869 ,  H01L27/1225 ,  H01L29/78696

Abstract: A thin film transistor array panel includes a substrate, a gate line formed on the substrate and including a gate electrode, a gate insulating layer formed on the gate line, a semiconductor formed on the gate insulating layer and including a channel of a thin film transistor, a data line formed on the semiconductor and including a source electrode and a drain electrode formed on the semiconductor and opposite to the source electrode with respect to the channel of the thin film transistor, wherein the channel of the thin film transistor covers both side surfaces of the gate electrode.

Abstract translation: 薄膜晶体管阵列面板包括基板，形成在基板上的栅极线，包括栅极电极，形成在栅极线上的栅极绝缘层，形成在栅极绝缘层上并包括薄膜晶体管的沟道的半导体 ，形成在半导体上的数据线，包括相对于薄膜晶体管的沟道形成在半导体上并与源电极相对的源电极和漏电极，其中薄膜晶体管的沟道覆盖两个侧表面 的栅电极。

公开(公告)号：US08598577B2

公开(公告)日：2013-12-03

申请号：US13177783

申请日：2011-07-07

Applicant: Jae-Woo Park ,  Dong-Hoon Lee ,  Sung-Haeng Cho ,  Woo-Geun Lee ,  Hye-Young Ryu ,  Young-Joo Choi

Inventor： Jae-Woo Park ,  Dong-Hoon Lee ,  Sung-Haeng Cho ,  Woo-Geun Lee ,  Hye-Young Ryu ,  Young-Joo Choi

IPC: H01L29/786

CPC classification number: H01L27/1288 ,  H01L27/1214 ,  H01L27/1225 ,  H01L27/124 ,  H01L29/458

Abstract: A display substrate includes a gate line extending in a first direction on a base substrate, a data line on the base substrate and extending in a second direction crossing the first direction, a gate insulating layer on the gate line, a thin-film transistor and a pixel electrode. The thin-film transistor includes a gate electrode electrically connected the gate line, an oxide semiconductor pattern, and source and drain electrodes on the oxide semiconductor pattern and spaced apart from each other. The oxide semiconductor pattern includes a first semiconductor pattern including indium oxide and a second semiconductor pattern including indium-free oxide. The pixel electrode is electrically connected the drain electrode.

Abstract translation: 显示基板包括在基底基板上沿第一方向延伸的栅极线，在基底基板上的数据线，并且沿与第一方向交叉的第二方向延伸，栅极线上的栅极绝缘层，薄膜晶体管和 像素电极。 薄膜晶体管包括栅电极，电极连接栅极线，氧化物半导体图案以及氧化物半导体图案上的源电极和漏电极并彼此间隔开。 氧化物半导体图案包括包括氧化铟的第一半导体图案和包含无铟氧化物的第二半导体图案。 像素电极与漏电极电连接。

公开(公告)号：US20130009151A1

公开(公告)日：2013-01-10

申请号：US13613566

申请日：2012-09-13

Applicant: Je-Hun LEE ,  Ki-Won KIM ,  Do-Hyun KIM ,  Woo-Geun LEE ,  Kap-Soo YOON

Inventor： Je-Hun LEE ,  Ki-Won KIM ,  Do-Hyun KIM ,  Woo-Geun LEE ,  Kap-Soo YOON

IPC: H01L29/786 ,  H01L21/336

CPC classification number: H01L27/1225 ,  H01L21/0214 ,  H01L21/02164 ,  H01L21/0217 ,  H01L21/02554 ,  H01L21/02565 ,  H01L23/53238 ,  H01L27/124 ,  H01L27/1248 ,  H01L27/1262 ,  H01L29/45 ,  H01L29/4908 ,  H01L29/513 ,  H01L29/518 ,  H01L29/66969 ,  H01L29/78603 ,  H01L29/7869 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A TFT array substrate includes a semiconductive oxide layer disposed on an insulating substrate and including a channel portion, a gate electrode overlapping the semiconductive oxide layer, a gate insulating layer interposed between the semiconductive oxide layer and the gate electrode, and a passivation layer disposed on the semiconductive oxide layer and the gate electrode. At least one of the gate insulating layer and the passivation layer includes an oxynitride layer, and the oxynitride layer has a higher concentration of oxygen than that of nitrogen in a location of the oxynitride layer closer to the semiconductive oxide layer.