公开(公告)号：US09419287B2

公开(公告)日：2016-08-16

申请号：US14609966

申请日：2015-01-30

Applicant: Zhongwei Chen ,  Aiping Yu ,  Fathy Mohamed Hassan

Inventor： Zhongwei Chen ,  Aiping Yu ,  Fathy Mohamed Hassan

IPC: B01J27/00 ,  B01J21/00 ,  H01M4/96 ,  H01M4/86 ,  C01B31/04 ,  H01M12/06

CPC classification number: H01M4/96 ,  C01B32/182 ,  C01B32/194 ,  C01B32/23 ,  H01M4/8615 ,  H01M12/06

Abstract: A bifunctional catalyst for catalyzing both an oxygen reduction reaction and an oxygen evolution reaction is provided, wherein the catalyst comprises a doped graphene backbone having thiol functional groups. A method for producing a bifunctional catalyst is also provided.

Abstract translation: 提供了用于催化氧还原反应和析氧反应两者的双功能催化剂，其中催化剂包含具有硫醇官能团的掺杂石墨烯骨架。 还提供了制备双功能催化剂的方法。

公开(公告)号：US20140023939A1

公开(公告)日：2014-01-23

申请号：US13941139

申请日：2013-07-12

Applicant: Zhongwei Chen ,  Zhu Chen

Inventor： Zhongwei Chen ,  Zhu Chen

IPC: H01M4/90 ,  H01M4/86

CPC classification number: H01M4/9016 ,  H01M4/8615 ,  H01M4/96 ,  H01M12/06 ,  Y02E60/50

Abstract: The present invention relates to a bifunctional catalyst for use with air metal batteries and fuel cell. The bifunctional catalyst comprising a core and a shell, where the core comprises a metal oxide and the shell comprises a carbon nanostructure. In a further aspect the bifunctional catalyst is catalytically active for oxygen reduction and oxygen evolution reactions.

Abstract translation: 本发明涉及一种用于空气金属电池和燃料电池的双功能催化剂。 包含核和壳的双功能催化剂，其中芯包含金属氧化物，壳包含碳纳米结构。 在另一方面，双功能催化剂对氧还原和析氧反应具有催化活性。

公开(公告)号：US20130257044A1

公开(公告)日：2013-10-03

申请号：US13437107

申请日：2012-04-02

Applicant: Qingpo XI ,  Tao LI ,  Feng CAO ,  Fumin HE ,  Zhongwei CHEN

Inventor： Qingpo XI ,  Tao LI ,  Feng CAO ,  Fumin HE ,  Zhongwei CHEN

IPC: F16L23/20 ,  F16J15/02 ,  F16L19/00

CPC classification number: F16J15/0881 ,  F16L23/20

Abstract: The present invention introduces a metal seal flange assembly for a vacuum system. A new designed metal gasket has a crosses-section shape of irregular quadrangle with two sharp angle forms by the longer base and legs. The long base of the irregular quadrangle is the vertical inner wall of the metal gasket. A preferred cross section shape of the metal gasket is trapezoid or isosceles trapezoid. this design can reduce the normal force applied to the metal seal flange assembly and reduce the number of bolts used in a limit working space.

Abstract translation: 本发明引入了用于真空系统的金属密封凸缘组件。 新设计的金属垫片具有不规则四边形的横截面形状，具有较长的底座和腿部的两个尖角形状。 不规则四边形的长基座是金属垫片的垂直内壁。 金属垫片的优选截面形状是梯形或等腰梯形。 这种设计可以减少施加到金属密封法兰组件的法向力，并减少在极限工作空间中使用的螺栓数量。

公开(公告)号：US08519333B2

公开(公告)日：2013-08-27

申请号：US13463208

申请日：2012-05-03

Applicant: Chiyan Kuan ,  Yi-Xiang Wang ,  Chung-Shih Pan ,  Zhonghua Dong ,  Zhongwei Chen

Inventor： Chiyan Kuan ,  Yi-Xiang Wang ,  Chung-Shih Pan ,  Zhonghua Dong ,  Zhongwei Chen

IPC: H01J37/20 ,  H01J37/26 ,  G01N23/225 ,  G01N23/22

CPC classification number: G01N23/2251 ,  G01N2223/307 ,  G01N2223/611

Abstract: The present invention relates to a charged particle system for reticle or semiconductor wafer defects inspection and review, and more particularly, relates to an E-beam inspection tool for reticle or semiconductor wafer defects inspection and review without gravitational AMC settling. The charged particle system is an upside down electron beam inspection system with an electron beam aimed upward. The face down design may prevent AMC from gravitational settling on the inspected face of the specimen during inspection, thereafter having a cleaner result compared with conventional face-up inspection system.

Abstract translation: 本发明涉及一种用于掩模版或半导体晶片缺陷检查和审查的带电粒子系统，更具体地涉及一种用于掩模版或半导体晶片缺陷检查和检查的电子束检查工具，而不引力AMC沉降。 带电粒子系统是一个向上的电子束检查系统。 面朝下设计可以防止AMC在检查期间在试样的被检查面上引力沉降，之后与常规的面朝上检查系统相比具有更清洁的结果。

公开(公告)号：US20130153782A1

公开(公告)日：2013-06-20

申请号：US13464261

申请日：2012-05-04

Applicant: Weiming Ren ,  Zhongwei Chen

Inventor： Weiming Ren ,  Zhongwei Chen

IPC: H01J3/20 ,  H01F7/02

CPC classification number: H01J37/14 ,  B82Y10/00 ,  B82Y40/00 ,  H01J3/20 ,  H01J37/141 ,  H01J37/145 ,  H01J37/3177 ,  H01J2237/1035 ,  H01J2237/1415 ,  H01J2237/31774

Abstract: The present invention provides two ways to form a special permeability-discontinuity unit inside every sub-lens of a multi-axis magnetic lens, which either has a simpler configuration or has more flexibility in manufacturing such as material selection and mechanical structure. Accordingly several types of multi-axis magnetic lens are proposed for various applications. One type is for general application such as a multi-axis magnetic condenser lens or a multi-axis magnetic transfer lens, another type is a multi-axis magnetic non-immersion objective which can require a lower magnetomotive force, and one more type is a multi-axis magnetic immersion objective lens which can generate smaller aberrations. Due to using permeability-discontinuity units, every multi-axis magnetic lens in this invention can also be electrically excited to function as a multi-axis electromagnetic compound lens so as to further reduce aberrations thereof and/or realize electron beam retarding for low-voltage irradiation on specimen.

Abstract translation: 本发明提供了在多轴磁性透镜的每个子透镜内部形成特殊的渗透率不连续单元的两种方式，其具有更简单的构造或者在诸如材料选择和机械结构的制造中具有更大的灵活性。 因此，针对各种应用提出了几种类型的多轴磁性透镜。 一种用于一般应用，例如多轴磁聚焦透镜或多轴磁性转印透镜，另一种类型是可能需要较低磁动势的多轴磁性非浸没物镜，另外一种类型是 可以产生较小像差的多轴磁浸物镜。 由于使用导磁率不连续单位，本发明中的每个多轴磁性透镜也可以被电激励以用作多轴电磁复合透镜，以便进一步降低其像差和/或实现低电压的电子束延迟 对样品照射

公开(公告)号：US20120318978A1

公开(公告)日：2012-12-20

申请号：US13551947

申请日：2012-07-18

Applicant: WEIMING REN ,  ZHONGWEI CHEN

Inventor： WEIMING REN ,  ZHONGWEI CHEN

IPC: H01J3/26 ,  H01J37/26

CPC classification number: H01J37/05 ,  H01J37/21 ,  H01J37/28 ,  H01J2237/057 ,  H01J2237/1508 ,  H01J2237/1532

Abstract: The monochromator for reducing energy spread of a primary charged particle beam in charged particle apparatus comprises a beam adjustment element, two Wien-filter type dispersion units and an energy-limit aperture. In the monochromator, a dual proportional-symmetry in deflection dispersion and fundamental trajectory along a straight optical axis is formed, which not only fundamentally avoids incurring off-axis aberrations that actually can not be compensated but also ensures the exit beam have a virtual crossover which is stigmatic, dispersion-free and inside the monochromator. The present invention also provides two ways to build a monochromator into a SEM, in which one is to locate a monochromator between the electron source and the condenser, and another is to locate a monochromator between the beam-limit aperture and the objective. The former provides an additional energy-angle depending filtering, and obtains a smaller effective energy spread.

Abstract translation: 用于减少带电粒子装置中的初级带电粒子束的能量扩散的单色仪包括光束调节元件，两个维恩滤波器型色散单元和能量限制孔径。 在单色仪中，形成了沿着直线光轴的偏转色散和基本轨迹中的双比例对称性，其不仅从根本上避免了实际上不能被补偿的偏轴像差，而且确保出射光束具有虚拟交叉， 是单色的，是无色的，不分​​散的。 本发明还提供了将单色仪构建到SEM中的两种方法，其中一种是在电子源和电容器之间定位单色器，另一种是在光束极限孔径和物镜之间定位单色仪。 前者提供额外的能量角取决于滤波，并获得较小的有效能量扩展。

公开(公告)号：US08247136B2

公开(公告)日：2012-08-21

申请号：US11376768

申请日：2006-03-15

Applicant: Yushan Yan ,  Xin Wang ,  Wenzhen Li ,  Mahesh Waje ,  Zhongwei Chen ,  William Goddard ,  Wei-Qiao Deng

Inventor： Yushan Yan ,  Xin Wang ,  Wenzhen Li ,  Mahesh Waje ,  Zhongwei Chen ,  William Goddard ,  Wei-Qiao Deng

IPC: H01M4/02 ,  H01M4/36 ,  H01M4/92 ,  H01M8/00 ,  B05D5/12

CPC classification number: H01M4/881 ,  H01M4/8605 ,  H01M4/92 ,  H01M4/926 ,  H01M8/1004 ,  H01M8/1011 ,  Y02E60/523

Abstract: Novel proton exchange membrane fuel cells and direct methanol fuel cells with nanostructured components are configured with higher precious metal utilization rate at the electrodes, higher power density, and lower cost. To form a catalyst, platinum or platinum-ruthenium nanoparticles are deposited onto carbon-based materials, for example, single-walled, dual-walled, multi-walled and cup-stacked carbon nanotubes. The deposition process includes an ethylene glycol reduction method. Aligned arrays of these carbon nanomaterials are prepared by filtering the nanomaterials with ethanol. A membrane electrode assembly is formed by sandwiching the catalyst between a proton exchange membrane and a diffusion layer that form a first electrode. The second electrode may be formed using a conventional catalyst. The several layers of the MEA are hot pressed to form an integrated unit. Proton exchange membrane fuel cells and direct methanol fuel cells are developed by stacking the membrane electrode assemblies in a conventional manner.

Abstract translation: 新型质子交换膜燃料电池和具有纳米结构组分的直接甲醇燃料电池配置在电极上的贵金属利用率更高，功率密度更高，成本更低。 为了形成催化剂，将铂或铂 - 钌纳米颗粒沉积在碳基材料上，例如单壁，双壁，多壁和杯堆叠碳纳米管。 沉积工艺包括乙二醇还原法。 通过用乙醇过滤纳米材料来制备这些碳纳米材料的对准阵列。 通过将催化剂夹在质子交换膜和形成第一电极的扩散层之间形成膜电极组件。 第二电极可以使用常规的催化剂形成。 MEA的几层被热压形成一个集成的单元。 质子交换膜燃料电池和直接甲醇燃料电池通过以常规方式堆叠膜电极组件来开发。

公开(公告)号：US20110291007A1

公开(公告)日：2011-12-01

申请号：US12787139

申请日：2010-05-25

Applicant: YI-XIANG WANG ,  JOE WANG ,  XUEDONG LIU ,  ZHONGWEI CHEN

Inventor： YI-XIANG WANG ,  JOE WANG ,  XUEDONG LIU ,  ZHONGWEI CHEN

IPC: G01N23/22 ,  H01J37/244

CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J2237/024 ,  H01J2237/24465 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/24495 ,  H01J2237/2611 ,  H01J2237/2817

Abstract: The present invention generally relates to a detection unit of a charged particle imaging system. More particularly, portion of the detection unit can move into or out of the detection system as imaging condition required. With the assistance of a Wein filter (also known as an E×B charged particle analyzer) and a movable detector design, the present invention provides a stereo imaging system that suitable for both low current, high resolution mode and high current, high throughput mode. Merely by way of example, the invention has been applied to a scanning electron beam inspection system. But it would be recognized that the invention could apply to other system using charged particle beam as an observation tool.

Abstract translation: 本发明一般涉及带电粒子成像系统的检测单元。 更具体地，检测单元的一部分可以作为所需的成像条件移入或移出检测系统。 在Wein滤波器（也称为E×B带电粒子分析仪）和可移动检测器设计的帮助下，本发明提供了一种适用于低电流，高分辨率模式和高电流，高通量模式的立体成像系统 。 仅作为示例，本发明已经应用于扫描电子束检查系统。 但是应当认识到，本发明可以应用于使用带电粒子束作为观测工具的其它系统。

公开(公告)号：US20100102227A1

公开(公告)日：2010-04-29

申请号：US12257304

申请日：2008-10-23

Applicant: ZHONGWEI CHEN ,  WEIMING REN ,  JOE WANG ,  XUEDONG LIU ,  JUYING DOU ,  FUMIN HE ,  FENG CAO ,  YAN REN ,  XIAOLI GUO ,  WEI HE ,  QINGPO XI

Inventor： ZHONGWEI CHEN ,  WEIMING REN ,  JOE WANG ,  XUEDONG LIU ,  JUYING DOU ,  FUMIN HE ,  FENG CAO ,  YAN REN ,  XIAOLI GUO ,  WEI HE ,  QINGPO XI

IPC: G01N23/00 ,  H01J3/20

CPC classification number: H01J37/073 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/06341 ,  H01J2237/24592

Abstract: The present invention relates to a charged particle beam apparatus which employs a scanning electron microscope for sample inspection and defect review.The present invent provides solution of improving imaging resolution by utilizing a field emission cathode tip with a large tip radius, applying a large accelerating voltage across ground potential between the cathode and anode, positioning the beam limit aperture before condenser lens, utilizing condenser lens excitation current to optimize image resolution, applying a high tube bias to shorten electron travel time, adopting and modifying SORIL objective lens to ameliorate aberration at large field of view and under electric drifting and reduce the urgency of water cooling objective lens while operating material analysis.The present invent provides solution of improving throughput by utilizing fast scanning ability of SORIL and providing a large voltage difference between sample and detectors.

Abstract translation: 本发明涉及采用扫描电子显微镜进行样品检查和缺陷检查的带电粒子束装置。 本发明提供了通过利用具有大的尖端半径的场致发射阴极尖端来提高成像分辨率的解决方案，在阴极和阳极之间的地电位上施加大的加速电压，将光束极限孔定位在聚光透镜之前，利用聚光透镜激发电流 优化图像分辨率，应用高管偏压缩短电子行进时间，采用和修正SORIL物镜，以改善大视野和电漂移下的像差，并减少水冷物镜在操作材料分析时的紧迫性。 本发明提供了通过利用SORIL的快速扫描能力并在样品和检测器之间提供大的电压差来提高产量的解决方案。

公开(公告)号：US20080121810A1

公开(公告)日：2008-05-29

申请号：US11923012

申请日：2007-10-24

Applicant: Xuedong Liu ,  Xu Zhang ,  Joe Wang ,  Edward Tseng ,  Zhongwei Chen

Inventor： Xuedong Liu ,  Xu Zhang ,  Joe Wang ,  Edward Tseng ,  Zhongwei Chen

IPC: H01J1/50

CPC classification number: H01J37/145 ,  H01J37/28 ,  H01J2237/0475 ,  H01J2237/12 ,  H01J2237/14 ,  H01J2237/24485 ,  H01J2237/2807

Abstract: System and method for charged particle beam. According an embodiment, the present invention provides a charged particle beam apparatus. The apparatus includes a charged particle source for generating a primary charged particle beam. The apparatus also includes at least one condenser lens for pre-focusing the primary charge particle beam. Furthermore, the apparatus includes a compound objective lens for forming the magnetic field and the electrostatic field to focus the primary charged particle beam onto a specimen in the charged particle beam path. The specimen includes a specimen surface. The compound objective lens includes a conical magnetic lens, an immersion magnetic lens, and an electrostatic lens, the conical magnetic lens including an upper pole piece, a shared pole piece being electrically insulated from the upper pole piece, and an excitation coil.

Abstract translation: 带电粒子束的系统和方法。 根据实施例，本发明提供一种带电粒子束装置。 该装置包括用于产生初级带电粒子束的带电粒子源。 该装置还包括用于预聚焦初级充电粒子束的至少一个聚光透镜。 此外，该装置包括用于形成磁场的复合物镜和静电场，以将初级带电粒子束聚焦到带电粒子束路径中的样本上。 样品包括样品表面。 复合物镜包括锥形磁性透镜，浸没式磁透镜和静电透镜，该圆锥形磁性透镜包括上极片，与上极片电绝缘的共用极片和励磁线圈。