CORROSION/ETCHING PROTECTION IN INTEGRATION CIRCUIT FABRICATIONS
    72.
    发明申请
    CORROSION/ETCHING PROTECTION IN INTEGRATION CIRCUIT FABRICATIONS 有权
    集成电路制造中的腐蚀/蚀刻保护

    公开(公告)号:US20130320544A1

    公开(公告)日:2013-12-05

    申请号:US13482352

    申请日:2012-05-29

    IPC分类号: H01L23/532 H01L21/768

    摘要: A method of producing reduced corrosion interconnect structures and structures thereby formed. A method of producing microelectronic interconnects having reduced corrosion begins with a damascene structure having a first dielectric and a first interconnect. A metal oxide layer is deposited selectively to metal or nonselective over the damascene structure and then thermally treated. The treatment converts the metal oxide over the first dielectric to a metal silicate while the metal oxide over the first interconnect remains as a self-aligned protective layer. When a subsequent dielectric stack is formed and patterned, the protective layer acts as an etch stop, oxidation barrier and ion bombardment protector. The protective layer is then removed from the patterned opening and a second interconnect formed. In a preferred embodiment the metal oxide is a manganese oxide and the metal silicate is a MnSiCOH, the interconnects are substantially copper and the dielectric contains ultra low-k.

    摘要翻译: 从而形成减少的腐蚀互连结构和结构的方法。 具有减少的腐蚀的微电子互连的制造方法从具有第一电介质和第一互连的镶嵌结构开始。 金属氧化物层选择性沉积在金属或非选择性的镶嵌结构上,然后进行热处理。 处理将第一电介质上的金属氧化物转化为金属硅酸盐,同时第一互连上的金属氧化物保持为自对准保护层。 当形成并图案化后续的电介质堆叠时,保护层起蚀刻停止,氧化屏障和离子轰击保护的作用。 然后从图案化的开口去除保护层,形成第二互连。 在优选的实施方案中,金属氧化物是氧化锰,金属硅酸盐是MnSiCOH,互连基本上是铜,并且电介质包含超低k。

    PROTECTIVE MATERIAL FOR GAS DELIVERY IN A PROCESSING SYSTEM
    73.
    发明申请
    PROTECTIVE MATERIAL FOR GAS DELIVERY IN A PROCESSING SYSTEM 审中-公开
    用于加工系统中气体输送的保护材料

    公开(公告)号:US20130068320A1

    公开(公告)日:2013-03-21

    申请号:US13525200

    申请日:2012-06-15

    IPC分类号: F16L53/00

    摘要: Apparatus and systems are disclosed for providing a protective material for a gas-delivery system of a processing system. In an embodiment, a processing system includes a processing chamber for processing substrates and a gas-delivery system for delivering processing gases to the processing chamber. The gas-delivery system includes a protective material to protect the gas-delivery system from processing gases including at least one processing gas heated to an elevated temperature. The protective material includes a tungsten plate or a tungsten plate coated with a tantalum alloy and tantalum

    摘要翻译: 公开了用于为处理系统的气体输送系统提供保护材料的装置和系统。 在一个实施例中,处理系统包括用于处理基板的处理室和用于将处理气体输送到处理室的气体输送系统。 气体输送系统包括保护气体输送系统免受处理气体(包括加热到高温的至少一种处理气体)的保护材料。 保护材料包括涂有钽合金和钽的钨板或钨板

    TESTING OF HIGH-SPEED INPUT-OUTPUT DEVICES
    77.
    发明申请
    TESTING OF HIGH-SPEED INPUT-OUTPUT DEVICES 有权
    高速输入输出设备的测试

    公开(公告)号:US20120081138A1

    公开(公告)日:2012-04-05

    申请号:US12898528

    申请日:2010-10-05

    IPC分类号: G01R31/3187

    CPC分类号: G01R31/31716

    摘要: Embodiments of the invention are generally directed to testing of high-speed input-output devices. An embodiment of a high-speed input-output apparatus includes a transmitter and a receiver, and a loop-back connection from an output of the transmitter to an input of the receiver, the loop-back connection including a first connector and a second connector for transmission of differential signals. The apparatus further includes a first inductor having a first terminal and a second terminal and second inductor having a first terminal and a second terminal, the first terminal of the first inductor being connected to the first connector and the first terminal of the second inductor being connected to the second connector, the second terminal of the first inductor and the second terminal of the second inductor providing a test access port for direct current testing of the apparatus.

    摘要翻译: 本发明的实施例通常涉及高速输入 - 输出设备的测试。 高速输入输出设备的实施例包括发射器和接收器以及从发射器的输出到接收器的输入的环回连接,所述环回连接包括第一连接器和第二连接器 用于传输差分信号。 该装置还包括具有第一端子和第二端子的第一电感器和具有第一端子和第二端子的第二电感器,第一电感器的第一端子连接到第一连接器,并且第二电感器的第一端子被连接 到第二连接器,第一电感器的第二端子和第二电感器的第二端子提供用于设备的直流测试的测试访问端口。

    FAILOVER AND FAILBACK OF COMMUNICATION BETWEEN A ROUTER AND A NETWORK SWITCH
    78.
    发明申请
    FAILOVER AND FAILBACK OF COMMUNICATION BETWEEN A ROUTER AND A NETWORK SWITCH 有权
    路由器和网络交换机之间的通信失败和通信失败

    公开(公告)号:US20120057452A1

    公开(公告)日:2012-03-08

    申请号:US13295870

    申请日:2011-11-14

    IPC分类号: H04L12/26

    CPC分类号: H04J3/14 H04L45/22 H04L45/28

    摘要: A router is provided. The router includes a primary interface, a backup interface, a processor, and a memory. The primary interface and backup interface may be used to communicate with a network switch. The router may be configured to determine whether the primary interface is stable. The primary interface is stable when the primary interface may be used to exchange information with a network switch over a primary network segment. The router may be configured to activate the primary interface when the primary interface is determined to be stable. The router may also be configured to activate the backup interface when the primary interface is determined to be not stable. The backup interface may be activated for the exchange of information with the network switch.

    摘要翻译: 提供路由器。 路由器包括主接口,备份接口,处理器和存储器。 主接口和备份接口可用于与网络交换机进行通信。 路由器可能被配置为确定主接口是否稳定。 当主接口可以用于通过主网段与网络交换机交换信息时,主接口是稳定的。 当主接口被确定为稳定时,路由器可以被配置为激活主接口。 当主界面被确定为不稳定时,路由器也可以被配置为激活备份接口。 可以激活备份接口以与网络交换机交换信息。

    System for and methods of storing and comparing computer generated continuous vector lines through a non-secure or a secure communication channel
    79.
    发明授权
    System for and methods of storing and comparing computer generated continuous vector lines through a non-secure or a secure communication channel 有权
    用于通过非安全或安全通信信道存储和比较计算机生成的连续矢量线的系统和方法

    公开(公告)号:US08004491B2

    公开(公告)日:2011-08-23

    申请号:US11734149

    申请日:2007-04-11

    IPC分类号: G09G5/00

    摘要: A system/method to store and compare computer generated vector lines through an insecure or a secure communication channel. Using an input device (i.e. computer Keyboard, finger, soft keypad, or any other input from body movements, electrical current, or impulses, or input from human or mechanical sound waves) to a physical machine, or through a token (i.e. credit card, USB token, which can be carried around by user), a user enters and sends their unique identifier and reference code (i.e. PIN, password, other secret code) to the physical machine by making a contact or contact-less to the computer system. As part of the enrollment process the user inscribes a pre-determined set of continuous vector lines (CVLs). The CVLs include data points that are collected from any computer pointing device in a specific format, using a push down anatomical technique and are sent to local active content (i.e. a library, or a program, or an add-on to the internet browser i.e. ActiveX) or a remote server for further analysis of the two CVLs. A user should go through an Enrollment and Verification process to capture the data points and this process uses a two factor authentication and a verification scheme. The collected data points that represent a CVL profile made previously is kept in a database, registry, or memory that can be encrypted and accessed (locally or remotely) by using a reference number or other unique identifier to enable the comparison of a newly generated CVL identifier to the previously generated one.

    摘要翻译: 一种通过不安全或安全通信通道存储和比较计算机生成的矢量线的系统/方法。 使用输入设备(即计算机键盘,手指,软键盘或身体运动,电流或脉冲的任何其他输入,或从人体或机械声波输入)到物理机器,或通过令牌(即信用卡 ,USB令牌,可由用户携带),用户通过与计算机系统进行联系或无接触来输入并发送其唯一标识符和参考代码(即PIN,密码,其他密码)到物理机器 。 作为注册过程的一部分,用户刻录了一组预定的连续矢量线(CVL)。 CVL包括使用推下解剖技术从任何计算机指点设备收集的数据点,并将其发送到本地活动内容(即图书馆,程序或互联网浏览器的附加组件,即 ActiveX)或远程服务器进一步分析两个CVL。 用户应通过注册和验证过程来捕获数据点,此过程使用双因素身份验证和验证方案。 代表以前制作的CVL配置文件的收集的数据点保存在数据库,注册表或内存中,该数据库,注册表或内存可以通过使用参考号或其他唯一标识符进行加密和访问(本地或远程),以使新生成的CVL 标识符到先前生成的标识符。