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公开(公告)号：US20120154935A1
公开(公告)日：2012-06-21
申请号：US13359341
申请日：2012-01-26
申请人： Ulrich Weber , Armin Schoeppach , Hubert Holderer
发明人： Ulrich Weber , Armin Schoeppach , Hubert Holderer
IPC分类号： G02B7/02
摘要： A holding arrangement for an optical element, in particular for a cylindrical lens, includes a basic structure surrounding an optical element and a mounting device by which the optical element is supported on the basic structure. The mounting device has two degrees of freedom so that the optical element can be supported by the mounting device in a manner that allows the optical element to rotate about both about an optical axis and an axis perpendicular to the optical axis. If the optical element is a cylindrical lens, the axis perpendicular to the optical axis can be an axis perpendicular to an axial direction of the cylindrical lens. The disclosure further relates to a manipulator unit for an optical system which includes a holding arrangement.
摘要翻译： 用于光学元件的保持装置，特别是用于圆柱形透镜的保持装置包括围绕光学元件的基本结构和安装装置，光学元件通过该安装装置支撑在基本结构上。 安装装置具有两个自由度，使得光学元件可以以允许光学元件围绕光轴和垂直于光轴的轴线旋转的方式由安装装置支撑。 如果光学元件是圆柱形透镜，则垂直于光轴的轴线可以是垂直于柱面透镜轴向的轴线。 本发明还涉及一种用于光学系统的操纵器单元，其包括保持装置。
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公开(公告)号：US07570343B2
公开(公告)日：2009-08-04
申请号：US11285283
申请日：2005-11-23
申请人： Aurelian Dodoc , Karl Heinz Schuster , Joerg Mallmann , Wilhelm Ulrich , Hans-Juergen Rostalski , Hubert Holderer , Bernhard Gellrich , Juergen Fischer , Susanne Beder , Andreas Wurmbrand , Ulrich Loering , Albrecht Ranck
发明人： Aurelian Dodoc , Karl Heinz Schuster , Joerg Mallmann , Wilhelm Ulrich , Hans-Juergen Rostalski , Hubert Holderer , Bernhard Gellrich , Juergen Fischer , Susanne Beder , Andreas Wurmbrand , Ulrich Loering , Albrecht Ranck
CPC分类号： G03F7/7015 , G03F7/70241 , G03F7/70341 , G03F7/70833 , G03F7/70916 , G03F7/70975 , G03F7/70983
摘要： A microlithographic projection exposure apparatus contains an illumination system for generating projection light and a projection lens with which a reticle that is capable of being arranged in an object plane of the projection lens can be imaged onto a light-sensitive layer that is capable of being arranged in an image plane of the projection lens. The projection lens is designed for immersion mode, in which a final lens element of the projection lens on the image side is immersed in an immersion liquid. A terminating element that is transparent in respect of the projection is fastened between the final lens element on the image side and the light-sensitive layer.
摘要翻译： 微光投影曝光装置包括用于产生投影光的照明系统和投影透镜，能够将能够布置在投影透镜的物平面中的光罩成像到能够布置的感光层上的投影透镜 在投影透镜的图像平面中。 投影透镜被设计用于浸没模式，其中在图像侧的投影透镜的最终透镜元件浸入浸没液体中。 相对于突起而言透明的端接元件紧固在图像侧的最终透镜元件与感光层之间。
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公开(公告)号：US07486382B2
公开(公告)日：2009-02-03
申请号：US11316160
申请日：2005-12-21
申请人： Stephan Back , Wolfgang Hummel , Juergen Fischer , Karl-Eugen Aubele , Erich Merz , Raoul Reiner , Klaus Rief , Stefan Schoengart , Markus Neumaier , Baerbel Schwaer , Ulrich Weber , Michael Muehlbeyer , Hubert Holderer , Alexander Kohl , Jochen Weber , Johannes Lippert , Thorsten Rassel
发明人： Stephan Back , Wolfgang Hummel , Juergen Fischer , Karl-Eugen Aubele , Erich Merz , Raoul Reiner , Klaus Rief , Stefan Schoengart , Markus Neumaier , Baerbel Schwaer , Ulrich Weber , Michael Muehlbeyer , Hubert Holderer , Alexander Kohl , Jochen Weber , Johannes Lippert , Thorsten Rassel
CPC分类号： G03F7/70825 , G03F7/70258
摘要： An imaging device in a projection exposure machine for microlithography includes at least one optical element and at least one manipulator, a linear drive for manipulating the position of the optical element. The linear drive has at least one moving element, the moving element having a shearing part and a lifting part. The shearing part is arranged to move the optical element and the lifting part is arranged to move the shearing part. The linear drive has a supporting element which is in contact with and prevents movement of the optical element while the shearing part is moved by the lifting part.
摘要翻译： 用于微光刻的投影曝光机中的成像装置包括至少一个光学元件和至少一个操纵器，用于操纵光学元件的位置的线性驱动器。 线性驱动器具有至少一个移动元件，移动元件具有剪切部分和提升部分。 剪切部分被布置成移动光学元件，并且提升部分被布置成移动剪切部分。 线性驱动器具有支撑元件，该支撑元件在通过提升部分移动剪切部分的同时与光学元件接触并防止其移动。
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74.发明申请APPARATUS FOR MOUNTING TWO OR MORE ELEMENTS AND METHOD FOR PROCESSING THE SURFACE OF AN OPTICAL ELEMENT 有权用于安装两个或多个元件的装置和处理光学元件表面的方法公开(公告)号：US20090015947A1
公开(公告)日：2009-01-15
申请号：US11722091
申请日：2005-12-22
申请人： Hubert Holderer , Thomas Petasch , Chris Reed , Dragos Pariza , Mike Meehan , Gary Krebs
发明人： Hubert Holderer , Thomas Petasch , Chris Reed , Dragos Pariza , Mike Meehan , Gary Krebs
CPC分类号： G03F7/70825 , G01M11/005 , G01M11/02 , Y10T29/49769
摘要： In an apparatus for mounting two or more optical elements that are each held in an individual mount or in a support structure, said optical elements are mounted in a common mount. The relative positioning of the optical elements (10, 11) in the common mount (18) can be set.
摘要翻译： 在用于安装两个或更多个光学元件的装置中，每个光学元件被保持在单独的安装件或支撑结构中，所述光学元件安装在公共安装件中。 可以设置光学元件（10,11）在公共安装件（18）中的相对定位。
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公开(公告)号：US07400460B2
公开(公告)日：2008-07-15
申请号：US10599784
申请日：2005-04-16
IPC分类号： G02B7/02
CPC分类号： G02B7/021 , G02B13/143 , G03F7/70341 , G03F7/70808 , G03F7/70825
摘要： The invention relates to a method for connection of an optical element to a mount structure, whereby in a first step the optical element is connected to the mount structure and in a second step the optical element is welded to the mount structure in the region of the connection.
摘要翻译： 本发明涉及一种用于将光学元件连接到安装结构的方法，由此在第一步骤中，光学元件连接到安装结构，并且在第二步骤中，光学元件在该区域中被焊接到安装结构 连接。
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76.发明授权公开(公告)号：US07336342B2
公开(公告)日：2008-02-26
申请号：US10975496
申请日：2004-10-29
CPC分类号： G02B17/0892 , G02B17/08 , G02B26/06 , G02B27/58 , G03F7/70225 , G03F7/70258 , G03F7/70308 , G03F7/70825
摘要： A catadioptric lens with optical elements, which are arranged along an optical axis and with at least one concave mirror located in the vicinity of a pupillar surface of the projection lens. The concave mirror is sub-divided into a number of annular or honeycomb mirror segments, which can be displaced independently in relation to one another with the aid of piezoelectric drive elements. The mirror can be used as a phase-shifting pupillar filter, whereby the filtration function can be adjusted by the relative displacement of the mirror elements in relation to one another.
摘要翻译： 一种具有光学元件的反射折射透镜，其沿光轴布置并且具有位于投影透镜的瞳面附近的至少一个凹面镜。 凹面镜被细分成许多环形或蜂窝状镜片段，它们可以通过压电驱动元件相对于彼此独立地移位。 反射镜可以用作相移瞳孔过滤器，由此可以通过镜元件相对于彼此的相对位移来调节过滤功能。
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公开(公告)号：US07277157B2
公开(公告)日：2007-10-02
申请号：US10975496
申请日：2004-10-29
摘要： A catadioptric lens with optical elements, which are arranged along an optical axis and with at least one concave mirror located in the vicinity of a pupillar surface of the projection lens. The concave mirror is sub-divided into a number of annular or honeycomb mirror segments, which can be displaced independently in relation to one another with the aid of piezoelectric drive elements. The mirror can be used as a phase-shifting pupillar filter, whereby the filtration function can be adjusted by the relative displacement of the mirror elements in relation to one another.
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公开(公告)号：US07242537B2
公开(公告)日：2007-07-10
申请号：US10944135
申请日：2004-09-17
申请人： Ulrich Weber , Hubert Holderer
发明人： Ulrich Weber , Hubert Holderer
IPC分类号： G02B7/02
CPC分类号： G03F7/70258 , G02B7/003 , G02B7/1822 , G03F7/70825 , G03F7/70833 , G03F7/709
摘要： In a holding and positioning apparatus for an optical element, the optical element is mounted in a mounting ring and the mounting ring is mounted via at least one manipulator unit. The manipulator unit has a linear actuating element. The manipulator unit has a manipulator head, a movable manipulator part and a manipulator foot, the manipulator head being connected to the movable manipulator part via a solid body joint. The movable manipulator part is connected to the manipulator foot via an actuator and at least one solid body joint, the linear actuating element being coupled to the manipulator foot and the actuator.
摘要翻译： 在用于光学元件的保持和定位装置中，光学元件安装在安装环中，并且安装环经由至少一个操纵器单元安装。 操纵器单元具有线性致动元件。 操纵器单元具有操纵器头，可移动操纵器部分和操纵脚，操纵器头经由固体接头连接到可动操纵器部分。 可移动操纵器部分经由致动器和至少一个实体接头连接到操纵器脚，所述线性致动元件联接到操纵器脚和致动器。
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公开(公告)号：US20060187430A1
公开(公告)日：2006-08-24
申请号：US11285283
申请日：2005-11-23
申请人： Aurelian Dodoc , Karl Schuster , Joerg Mallmann , Wilhelm Ulrich , Hans-Juergen Rostalski , Hubert Holderer , Bernhard Gellrich , Juergen Fischer , Susanne Beder , Andreas Wurmbrand , Ulrich Loering , Albrecht Ranck
发明人： Aurelian Dodoc , Karl Schuster , Joerg Mallmann , Wilhelm Ulrich , Hans-Juergen Rostalski , Hubert Holderer , Bernhard Gellrich , Juergen Fischer , Susanne Beder , Andreas Wurmbrand , Ulrich Loering , Albrecht Ranck
CPC分类号： G03F7/7015 , G03F7/70241 , G03F7/70341 , G03F7/70833 , G03F7/70916 , G03F7/70975 , G03F7/70983
摘要： A microlithographic projection exposure apparatus contains an illumination system for generating projection light and a projection lens with which a reticle that is capable of being arranged in an object plane of the projection lens can be imaged onto a light-sensitive layer that is capable of being arranged in an image plane of the projection lens. The projection lens is designed for immersion mode, in which a final lens element of the projection lens on the image side is immersed in an immersion liquid. A terminating element that is transparent in respect of the projection is fastened between the final lens element on the image side and the light-sensitive layer.
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公开(公告)号：US20050286121A1
公开(公告)日：2005-12-29
申请号：US10517265
申请日：2003-05-07
申请人： Ulrich Weber , Hubert Holderer , Alexander Kohl
发明人： Ulrich Weber , Hubert Holderer , Alexander Kohl
CPC分类号： G02B17/0892 , G02B7/1805 , G02B17/08 , G02B27/0025 , G02B27/144 , G03F7/70225 , G03F7/70258
摘要： An objective is provided with a plurality of lenses, mirrors and at least one beam splitter element (20) inserted in an objective housing (1). One or more surfaces (26, 27, 28), situated in the beam path, of the beam splitter element (20) are provided as correction aspherics. The beam splitter element (20) can be provided with manipulators (22) that are arranged on a manipulator carrier (23) which is permanently connected to the objective housing.
摘要翻译： 目的是设置有多个透镜，反射镜和插入物镜壳体（1）中的至少一个分束器元件（20）。 位于分束器元件（20）的光束路径中的一个或多个表面（26,27,28）被提供作为校正非球面。 分束器元件（20）可以设置有操纵器（22），其被布置在永久地连接到物镜壳体的操纵器托架（23）上。
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