Process for producing micropillar structure
    73.
    发明授权
    Process for producing micropillar structure 有权
    微柱结构生产工艺

    公开(公告)号:US07799378B2

    公开(公告)日:2010-09-21

    申请号:US10536589

    申请日:2003-11-27

    摘要: A solution having a polymer dissolved in a hydrophobic organic solvent is cast on a substrate, said organic solvent is evaporated in a moist atmosphere to condense moisture contained in an atmosphere prevailing on a surface of said cast solution into micro-droplets, said micro-droplets are dispersed on the surface of said cast solution or in said cast solution into a close-packed structure, said micro-droplets, condensed and dispersed on the surface of said cast solution or in said cast solution, are evaporated to obtain a porous honeycomb structure with said droplets used as casts, and said porous honeycomb structure is at least bisected by peeling in a thickness direction, thereby obtaining honeycomb structures wherein micro-pillars or anisotropic micro-pillars are regularly formed and arranged by said bisection on the peeled sections.

    摘要翻译: 将溶解在疏水性有机溶剂中的聚合物的溶液浇铸在基材上,将所述有机溶剂在潮湿气氛中蒸发以将包含在所述流延溶液表面上的气氛中的水分浓缩成微滴,所述微滴 分散在所述流延溶液的表面或所述流延溶液中形成紧密堆积的结构,所述微滴在所述流延溶液或所述流延溶液的表面上被冷凝并分散,得到多孔蜂窝结构体 其中所述小滴用作铸件,并且所述多孔蜂窝结构通过在厚度方向上的剥离至少被二等分,从而获得其中微柱或各向异性微柱规则地形成并且通​​过在剥离部分上的所述二等分布置的蜂窝结构。

    Manufacturing inspection/analysis system analyzing device, analyzing device control program, storage medium storing analyzing device control program, and method for manufacturing inspection and analysis
    77.
    发明申请
    Manufacturing inspection/analysis system analyzing device, analyzing device control program, storage medium storing analyzing device control program, and method for manufacturing inspection and analysis 有权
    制造检验/分析系统分析装置,分析装置控制程序,存储分析装置控制程序的存储介质以及制造检验和分析的方法

    公开(公告)号:US20060203230A1

    公开(公告)日:2006-09-14

    申请号:US11369934

    申请日:2006-03-08

    IPC分类号: G01N21/88

    摘要: A position change section of a processing device changes the position of a treatment object, at the time of performing a process by a process section, to correspond to a predetermined position in conformity to the treatment object. An inspection device inspects the occurrence of a defect on the treatment object having been subjected to processes by a plurality of processing devices. Then an analyzing process for specifying in which processing device the defect occurred is carried out based on (i) positional information of the treatment object, in each of the processing devices, and (ii) defect information defected by the inspection device. With this arrangement, during the process of manufacture of treatment objects, it is possible to precisely specify which processing device or processing device group caused the defect, without performing processes such as attaching, to the treatment object, information regarding processing devices which have conducted processes.

    摘要翻译: 处理装置的位置改变部分在执行处理部分的处理时改变处理对象的位置,以对应于与处理对象一致的预定位置。 检查装置检查已经经过多个处理装置的处理的处理对象的缺陷的发生。 然后,根据(i)处理对象的位置信息,每个处理装置,以及(ii)检测装置所缺陷的缺陷信息,进行用于指定哪个处理装置发生缺陷的分析处理。 通过这种布置,在处理对象的制造过程中,可以精确地指定哪个处理装置或处理装置组造成缺陷,而不进行诸如将处理对象附加到已经进行处理的处理装置的信息的处理 。