公开(公告)号：US08322752B2

公开(公告)日：2012-12-04

申请号：US12992081

申请日：2009-05-13

申请人： Toshinori Sakagami ,  Akira Shimizu ,  Akira Hashimoto

发明人： Toshinori Sakagami ,  Akira Shimizu ,  Akira Hashimoto

IPC分类号： B42D15/00 ,  B41J2/435 ,  B32B3/00

CPC分类号： B42D25/435 ,  B23K26/0006 ,  B23K26/354 ,  B23K2103/16 ,  B23K2103/172 ,  B23K2103/42 ,  B32B3/02 ,  B32B7/02 ,  B32B27/00 ,  B32B27/08 ,  B32B27/12 ,  B32B27/34 ,  B32B27/36 ,  B32B27/365 ,  B32B27/40 ,  B32B2250/05 ,  B32B2255/10 ,  B32B2262/0261 ,  B32B2262/0276 ,  B32B2307/40 ,  B32B2307/402 ,  B32B2307/412 ,  B32B2307/538 ,  B32B2367/00 ,  B32B2369/00 ,  B32B2425/00 ,  B41M3/14 ,  B41M5/26 ,  B42D13/00 ,  B42D25/00 ,  B42D25/24 ,  B42D25/41 ,  Y10T428/24355 ,  Y10T428/24884 ,  Y10T428/24901 ,  Y10T428/24967

摘要： There is provided a laser-marking multilayer sheet for an electronic passport formed by laminating five sheets of a multilayer sheet A/a multilayer sheet B/a film C/a multilayer sheet B/a multilayer sheet A. The multilayer sheet B is a colored laser-marking multilayer sheet. The film C is a laser-marking multilayer sheet made of a film for the electronic passport. The laser-marking multilayer sheet can have clear letters, symbols, and images, which are excellent in a laser-marking property and high in contrasts between the original surface color and the printed portions. The laser-marking multilayer sheet is excellent especially for inhibiting the falsification and forgery thereof.

摘要翻译： 提供了一种用于电子护照的激光标记多层片材，其通过层叠五片多层片材A /多层片材B /膜C /多层片材B /多层片材A而形成。多层片材B是着色的 激光标记多层片材。 电影C是由电子护照的薄膜制成的激光标记多层片。 激光标记多层片材可以具有清晰的字母，符号和图像，其激光打标性能优异，原始表面颜色和印刷部分之间的对比度高。 激光标记多层片材特别适用于抑制其伪造和伪造。

公开(公告)号：US20120220139A1

公开(公告)日：2012-08-30

申请号：US13410970

申请日：2012-03-02

申请人： Woo-Jin Lee ,  Kuo-wei Hong ,  Akira Shimizu ,  Deakyun Jeong

发明人： Woo-Jin Lee ,  Kuo-wei Hong ,  Akira Shimizu ,  Deakyun Jeong

IPC分类号： H01L21/31

CPC分类号： C23C16/345 ,  C23C16/4554 ,  C23C16/5096 ,  H01L21/0217 ,  H01L21/02219 ,  H01L21/02274 ,  H01L21/0228 ,  H01L21/31111

摘要： A method of forming a film on a semiconductor substrate by plasma enhanced atomic layer deposition (PEALD), includes: introducing a nitrogen- and hydrogen-containing reactive gas and a rare gas into a reaction space inside which the semiconductor substrate is placed; introducing a precursor in pulses of less than 1.0-second duration into the reaction space wherein the reactive gas and the rare gas are introduced; exiting a plasma in pulses of less than 1.0-second duration immediately after the precursor is shut off; and maintaining the reactive gas and the rare gas as a purge of less than 2.0-second duration.

摘要翻译： 通过等离子体增强原子层沉积（PEALD）在半导体衬底上形成膜的方法包括：将含氮和氢的反应气体和稀有气体引入到其中放置半导体衬底的反应空间中; 将引入小于1.0秒持续时间脉冲的前体引入反应气体和稀有气体的反应空间; 在前体关闭之后立即以小于1.0秒持续时间的脉冲离开等离子体; 并且将反应气体和稀有气体保持为小于2.0秒持续时间的吹扫。

公开(公告)号：US08197915B2

公开(公告)日：2012-06-12

申请号：US12416809

申请日：2009-04-01

申请人： Takahiro Oka ,  Akira Shimizu

发明人： Takahiro Oka ,  Akira Shimizu

IPC分类号： H05H1/24 ,  C23C16/00

CPC分类号： C23C16/402 ,  C23C16/45542 ,  G03F7/40 ,  H01L21/02164 ,  H01L21/02274 ,  H01L21/0228 ,  H01L21/0337 ,  H01L21/32139

摘要： A method of depositing a silicon oxide film on a resist pattern or etched lines formed on a substrate by plasma enhanced atomic layer deposition (PEALD) includes: providing a substrate on which a resist pattern or etched lines are formed in a PEALD reactor; controlling a temperature of a susceptor on which the substrate is placed at less than 50° C. as a deposition temperature; introducing a silicon-containing precursor and an oxygen-supplying reactant to the PEALD reactor and applying RF power therein in a cycle, while the deposition temperature is controlled substantially or nearly at a constant temperature of less than 50° C., thereby depositing a silicon oxide atomic layer on the resist pattern or etched lines; and repeating the cycle multiple times substantially or nearly at the constant temperature to deposit a silicon oxide atomic film on the resist pattern or etched lines.

摘要翻译： 通过等离子体增强原子层沉积（PEALD）在抗蚀剂图案或在衬底上形成的蚀刻线上沉积氧化硅膜的方法包括：提供在其中在PEALD反应器中形成抗蚀剂图案或蚀刻线的衬底; 将其上放置基板的基座的温度控制在低于50℃作为沉积温度; 在PEALD反应器中引入含硅前体和供氧反应物并在其中施加RF功率，同时基本上或几乎处于小于50℃的恒定温度下控制沉积温度，从而沉积硅 抗蚀剂图案或蚀刻线上的氧化物原子层; 并且在恒定温度下基本上或接近多次重复该循环，以将氧化硅原子膜沉积在抗蚀剂图案或蚀刻线上。

公开(公告)号：US20120028381A1

公开(公告)日：2012-02-02

申请号：US13264524

申请日：2010-04-12

申请人： Shinsuke Tachibana ,  Akira Shimizu

发明人： Shinsuke Tachibana ,  Akira Shimizu

IPC分类号： H01L21/66 ,  G01R31/26

CPC分类号： G01R31/2605 ,  H02S50/10

摘要： A solar battery panel inspection apparatus is an apparatus for inspecting a solar battery panel including a transparent insulating substrate having a main surface, and a transparent electrode layer, a semiconductor photoelectric conversion layer and a back electrode layer which are sequentially stacked and having an outer circumferential insulating region in which the main surface is exposed, to check the insulation performance of the outer circumferential insulating region. The solar battery panel inspection apparatus includes the first terminal to be brought into contact with the back electrode layer; the second terminal to be brought into contact with a region of or in proximity to an outer circumferential edge of the outer circumferential insulating region; one or more third terminals to be brought into contact with the outer circumferential insulating region between the first terminal and the second terminal; a voltage application unit for applying a voltage each between two terminals selected from these terminals; and a current detection unit detecting a current flowing between the two terminals to which a voltage is applied.

摘要翻译： 太阳能电池面板检查装置是一种用于检查包括具有主表面的透明绝缘基板和透明电极层，半导体光电转换层和背电极层的太阳能电池面板的装置，其依次层叠并具有外周 绝缘区域，其中主表面被暴露，以检查外周绝缘区域的绝缘性能。 太阳能电池面板检查装置包括与背面电极层接触的第一端子; 所述第二端子与所述外周绝缘区域的外周边缘的区域接近或接近; 一个或多个第三端子与第一端子和第二端子之间的外周绝缘区域接触; 电压施加单元，用于在从这些端子中选择的两个端子之间施加电压; 以及电流检测单元，检测在施加了电压的两个端子之间流动的电流。

公开(公告)号：US20110217838A1

公开(公告)日：2011-09-08

申请号：US12718731

申请日：2010-03-05

申请人： Julian J. Hsieh ,  Nobuyoshi Kobayashi ,  Akira Shimizu ,  Kiyohiro Matsushita ,  Atsuki Fukazawa

发明人： Julian J. Hsieh ,  Nobuyoshi Kobayashi ,  Akira Shimizu ,  Kiyohiro Matsushita ,  Atsuki Fukazawa

IPC分类号： H01L21/768

CPC分类号： H01L21/768

摘要： A method for forming an interconnect structure with airgaps, includes: providing a structure having a trench formed on a substrate; depositing a spacer oxide layer on sidewalls of the trench as sidewall spacers by plasma enhanced atomic layer deposition; filling the trench having the sidewall spacers with copper; removing the sidewall spacers to form an airgap structure; and encapsulating the airgap structure, wherein airgaps are formed between the filled copper and the sidewalls of the trench.

摘要翻译： 一种用气隙形成互连结构的方法，包括：提供在衬底上形成沟槽的结构; 通过等离子体增强的原子层沉积在沟槽的侧壁上沉积间隔氧化物层作为侧壁间隔物; 用铜填充具有侧壁间隔物的沟槽; 去除侧壁间隔件以形成气隙结构; 并且封装气隙结构，其中在填充的铜和沟槽的侧壁之间形成气隙。

公开(公告)号：US20110073362A1

公开(公告)日：2011-03-31

申请号：US12996432

申请日：2009-06-03

申请人： Akira Shimizu

发明人： Akira Shimizu

IPC分类号： H05K5/00

CPC分类号： H01L31/02008 ,  H02S40/34 ,  Y02E10/50

摘要： According to one embodiment, a terminal box includes a box case placed on and fixed to a back film of a solar cell string and a terminal panel formed on the box case. The box case includes a case main body placed on and fixed to the back film of the solar cell string and a terminal panel fixing portion for placing and fixing the terminal panel above the case main body. An opening for passing an output lead wire through the terminal panel is formed continuously from the bottom face of the case main body to the top face of the terminal panel. One edge of the terminal panel is provided so as to protrude from the terminal panel fixing portion such that the tip of the output lead wire can be bent and latched on.

摘要翻译： 根据一个实施例，接线盒包括放置在太阳能电池串的背膜上并固定到盒子壳体上形成的端子板的盒壳体。 箱体包括放置在太阳能电池串的背膜上并固定到太阳能电池串的背膜上的壳体主体和用于将端子板放置和固定在壳体主体上方的端子板固定部分。 用于使输出引线通过端子板的开口从壳体主体的底面到端子板的顶面连续地形成。 端子板的一个边缘设置成从端子板固定部分突出，使得输出引线的尖端可以被弯曲和锁定。

公开(公告)号：US07902451B2

公开(公告)日：2011-03-08

申请号：US11884357

申请日：2006-02-08

申请人： Akira Shimizu

发明人： Akira Shimizu

IPC分类号： H01L31/042

CPC分类号： H01L31/02008 ,  H01L31/02 ,  H01L31/046 ,  H01L31/0504 ,  H02S20/23 ,  Y02B10/12 ,  Y02E10/50

摘要： A plurality of photoelectric conversion elements delimited by connection line regions and isolation line regions are provided on a glass substrate having an external profile of a right triangle. A connection line region is configured to connect photoelectric conversion elements in series. An isolation line region is configured to electrically isolate adjacent photoelectric conversion elements and to separate (divide) photoelectric conversion elements by a predetermined area. A connection line region is orthogonal to an isolation line region. The external profile of a photoelectric conversion elements represents a rectangle. An external interconnection to electrically connect photoelectric conversion elements is formed at an outer circumferential region of the glass substrate at the side outer to the region where photoelectric conversion elements are formed. Thus, there can be obtained an integrated type solar cell allowing connection between photoelectric conversion elements without difficulty and of efficient photoelectric conversion property.

摘要翻译： 在具有直角三角形的外部轮廓的玻璃基板上设置由连接线区域和隔离线区域界定的多个光电转换元件。 连接线区域被配置为串联连接光电转换元件。 隔离线区域被配置为电隔离相邻的光电转换元件并将光电转换元件分离（划分）预定区域。 连接线区域与隔离线区域正交。 光电转换元件的外部轮廓表示矩形。 在光电转换元件的形成区域的外侧的一侧的玻璃基板的外周区域形成有用于电连接光电转换元件的外部互连。 因此，可以获得容易连接光电转换元件和有效的光电转换特性的集成型太阳能电池。

公开(公告)号：US20100293156A1

公开(公告)日：2010-11-18

申请号：US12712662

申请日：2010-02-25

申请人： Michiko Tanaka ,  Kazutomo Ushijima ,  Akira Shimizu ,  Seisuke Tokuda ,  Shinji Fujiwara ,  Nobuo Kawamura

发明人： Michiko Tanaka ,  Kazutomo Ushijima ,  Akira Shimizu ,  Seisuke Tokuda ,  Shinji Fujiwara ,  Nobuo Kawamura

IPC分类号： G06F17/30

CPC分类号： G06F17/30306

摘要： Provided is a database processing system including: a computer for outputting data in response to a received query request; and a storage system including a storage device for storing the data, in which: the storage device stores a plurality of partial indices indicating a storage location of the data; the data stored in the storage device is grouped; and the computer is configured to: receive the query request for the data; acquire one of the plurality of partial indices; specify, based on the query request for the data and the acquired one of the plurality of partial indices, a location at which the requested data is stored; and send a request to acquire the data stored at the specified location to the storage system. Accordingly, in the database processing system, a time period necessary to input and output the data is shortened.

摘要翻译： 提供了一种数据库处理系统，包括：计算机，用于响应于接收的查询请求输出数据; 以及存储系统，包括用于存储数据的存储装置，其中：所述存储装置存储指示所述数据的存储位置的多个部分索引; 存储在存储设备中的数据被分组; 并且计算机被配置为：接收对数据的查询请求; 获取所述多个部分索引中的一个; 基于所述数据的查询请求和所述多个部分索引中获取的一个部分索引，指定存储所请求的数据的位置; 并发送请求以将存储在指定位置的数据存储到存储系统。 因此，在数据库处理系统中，输入和输出数据所需的时间段被缩短。

公开(公告)号：US07734638B2

公开(公告)日：2010-06-08

申请号：US11637763

申请日：2006-12-13

申请人： Akira Shimizu ,  Takaki Nakamura

发明人： Akira Shimizu ,  Takaki Nakamura

IPC分类号： G06F7/00 ,  G06F17/30

CPC分类号： G06F17/30067 ,  Y10S707/99933

摘要： A file system program that controls a processor to create an attribute information area in which a registered keyword as metadata of the data attached to the file; wherein the file system program comprises: a file access control module that controls access to the file; and a file search module that searches for the file using an inputted keyword, wherein the file search module comprises: an attribute information search module that searches for a file by comparing the registered keyword and the inputted keyword; and an entire document search module that searches for a file by comparing the entire file and the inputted keyword, and wherein the file access control module comprises an. attribute information change module that changes the registered keyword based on a result of the search by the entire document search module.

摘要翻译： 一种文件系统程序，其控制处理器创建属性信息区域，其中注册的关键字作为附加到该文件的数据的元数据; 其中所述文件系统程序包括：文件访问控制模块，其控制对所述文件的访问; 以及文件搜索模块，其使用输入的关键字搜索所述文件，其中所述文件搜索模块包括：属性信息搜索模块，通过比较所述注册的关键字和所输入的关键字来搜索文件; 以及整个文档搜索模块，通过比较整个文件和输入的关键字来搜索文件，并且其中文件访问控制模块包括一个。 属性信息改变模块，其基于整个文档搜索模块的搜索结果来改变所登记的关键字。

公开(公告)号：US20100136313A1

公开(公告)日：2010-06-03

申请号：US12326000

申请日：2008-12-01

申请人： Akira Shimizu ,  Akiko Kobayashi ,  Suvi Haukka

发明人： Akira Shimizu ,  Akiko Kobayashi ,  Suvi Haukka

IPC分类号： C23C16/34 ,  B32B9/00 ,  C01B33/00

CPC分类号： C23C16/34 ,  C01B33/00 ,  C23C16/45531

摘要： A process for forming metallic nitride film by atomic layer deposition (ALD), which comprises steps for feeding into a reaction space vapor phase alternated pulses of metal source material and silicon source material in a plurality of cycles, and feeding into the reaction space vapor phase pulses of nitrogen source material. wherein a nitrogen source pulse is fed intermittently in selected cycles such that a ratio of nitrogen source pulses to silicon source pulses is less than 1:1 and a ratio of nitrogen source pulses to metal source pulses is less than 1:1, the ratio selected to produce the thin film with a resistivity between 1,000 μΩcm and 15,000 μΩcm.

摘要翻译： 一种用于通过原子层沉积（ALD）形成金属氮化物膜的方法，包括以多个循环的方式将金属源材料和硅源材料的交替脉冲进入反应空间的步骤，并将其进料到反应空间气相 脉冲氮源材料。 其中氮源脉冲以选定的循环间歇地进给，使得氮源脉冲与硅源脉冲的比例小于1:1，并且氮源脉冲与金属源脉冲的比率小于1:1，选择的比率 以产生电阻率在1000μΩ-OHgr·cm和15000μ＆OHgr·cm之间的薄膜。