Arrangements for manipulating plasma confinement within a plasma processing system and methods thereof
    83.
    发明授权
    Arrangements for manipulating plasma confinement within a plasma processing system and methods thereof 有权
    在等离子体处理系统中操纵等离子体约束的布置及其方法

    公开(公告)号:US09275838B2

    公开(公告)日:2016-03-01

    申请号:US12552474

    申请日:2009-09-02

    IPC分类号: H01J37/32

    摘要: An arrangement for controlling bevel etch rate during plasma processing within a processing chamber. The arrangement includes a power source and a gas distribution system. The arrangement also includes a lower electrode, which is configured at least for supporting a substrate. The arrangement further includes a top ring electrode positioned above the substrate and a bottom ring electrode positioned below the substrate. The arrangement yet also includes a first match arrangement coupled to the top ring electrode and configured at least for controlling current flowing through the top ring electrode to control amount of plasma available for etching at least a part of the substrate top edge. The arrangement yet further includes a second match arrangement configured to control the current flowing through the bottom ring electrode to control amount of plasma available for at least etching at least a part of the substrate bottom edge.

    摘要翻译: 一种用于在处理室内的等离子体处理期间控制斜面蚀刻速率的装置。 该装置包括电源和气体分配系统。 该布置还包括下电极,其被配置为至少用于支撑衬底。 该布置还包括位于基板上方的顶环电极和位于基板下方的底环电极。 该布置还包括耦合到顶环电极并且被配置为至少用于控制流过顶环电极的电流以控制可用于蚀刻衬底顶部边缘的至少一部分的等离子体的第一匹配布置。 该装置还包括第二匹配装置,其被配置为控制流过底环电极的电流以控制可用于至少蚀刻至少一部分衬底底边缘的等离子体的量。

    Instrument for use in a joint replacement procedure
    84.
    发明授权
    Instrument for use in a joint replacement procedure 有权
    用于关节置换手术的仪器

    公开(公告)号:US08734457B2

    公开(公告)日:2014-05-27

    申请号:US12919140

    申请日:2009-02-05

    IPC分类号: A61B17/58 A61B17/60 A61F2/00

    摘要: An instrument for use in a joint replacement procedure includes a trial head that corresponds to the head of an orthopaedic joint component having an upper surface defined by a curved surface and a bore formed in a lower surface and a trial connector for connecting the trial head to a stem part of the orthopaedic joint component which is intended for location in the intramedullary cavity of a bone. The trial connector can be fitted into the bore in the trial head at a variable angular orientation.

    摘要翻译: 用于关节置换手术的器械包括对应于具有由曲面限定的上表面和形成在下表面中的孔的整形外科关节部件的头部的试验头和用于将试验头连接到 整形外科关节部件的一个茎部分,用于定位在骨髓内腔中。 试验连接器可以以可变角度方向安装在试验头中的孔中。

    Method and system for distributing gas for a bevel edge etcher
    85.
    发明授权
    Method and system for distributing gas for a bevel edge etcher 有权
    用于分配斜边蚀刻器的气体的方法和系统

    公开(公告)号:US08475624B2

    公开(公告)日:2013-07-02

    申请号:US11697695

    申请日:2007-04-06

    摘要: A plasma etch processing chamber configured to clean a bevel edge of a substrate is provided. The chamber includes a bottom edge electrode and a top edge electrode defined over the bottom edge electrode. The top edge electrode and the bottom edge electrode are configured to generate a cleaning plasma to clean the bevel edge of the substrate. The chamber includes a gas feed defined through a top surface of the processing chamber. The gas feed introduces a processing gas for striking the cleaning plasma at a location in the processing chamber that is between an axis of the substrate and the top edge electrode. A pump out port is defined through the top surface of the chamber and the pump out port located along a center axis of the substrate. A method for cleaning a bevel edge of a substrate is also provided.

    摘要翻译: 提供了一种构造成清洁衬底的斜边缘的等离子体蚀刻处理室。 该室包括底边缘电极和限定在底部边缘电极上的顶部边缘电极。 顶边电极和底边电极被配置为产生清洁等离子体以清洁基板的斜边缘。 该室包括通过处理室的顶表面限定的气体进料。 气体进料引入处理气体,用于在位于基板的轴线和顶部边缘电极之间的处理室中的位置处冲击清洁等离子体。 泵出口通过腔室的顶表面和沿着衬底的中心轴线定位的泵出口来限定。 还提供了一种用于清洁基板的斜边缘的方法。

    Sealing arrangements for gas turbine engine thrust reverser
    86.
    发明授权
    Sealing arrangements for gas turbine engine thrust reverser 有权
    燃气轮机发动机推力反向器的密封装置

    公开(公告)号:US08122702B2

    公开(公告)日:2012-02-28

    申请号:US11870484

    申请日:2007-10-11

    IPC分类号: F02K3/02

    CPC分类号: F02K1/72 Y02T50/672

    摘要: A transcowl for a gas turbine engine thrust reverser includes an arcuate outer wall; an arcuate inner wall; and an arcuate baffle positioned between the inner and outer walls at a forward end of the transcowl. The baffle has an arcuate cross-sectional shape which defines a forward-facing interior area. An arcuate forward seal is carried at a forward end of the inner wall. The forward seal includes a plurality of axially-extending, spaced-apart arcuate seal teeth which collectively define a labyrinth seal.

    摘要翻译: 用于燃气涡轮发动机推力反向器的转子包括弓形外壁; 弧形内墙; 以及位于转子组织前端的内壁和外壁之间的弧形挡板。 挡板具有限定前向内部区域的弓形横截面形状。 在内壁的前端承载有弧形的正向密封。 正向密封件包括多个轴向延伸的间隔开的弧形密封齿,其共同限定迷宫式密封。

    Apparatus and method for suppressing dynamic pressure instability in bleed duct
    87.
    发明授权
    Apparatus and method for suppressing dynamic pressure instability in bleed duct 有权
    排气管动态压力不稳定性的装置及方法

    公开(公告)号:US07966831B2

    公开(公告)日:2011-06-28

    申请号:US11846220

    申请日:2007-08-28

    IPC分类号: F02C6/04

    摘要: An apparatus and method for suppressing dynamic instability in a bleed duct of a gas turbine engine includes a fan bypass duct configured to permit a flow of air through the gas turbine engine. The fan bypass duct defines a fan duct surface, and the bleed duct has an inlet in fluid communication with the fan bypass duct and a flow control valve having an opened position and a closed position. A flow diverter is positioned on the fan duct surface proximate the inlet of the bleed duct and diverts the flow of air from the inlet when the flow control valve is closed, while permitting a portion of the flow of air to enter the inlet when the flow control valve is opened.

    摘要翻译: 一种用于抑制燃气涡轮发动机的排放管道中的动态不稳定性的装置和方法,包括:风扇旁通管道,其构造成允许空气流过燃气涡轮发动机。 风扇旁路管道限定了风扇管道表面,并且排放管道具有与风扇旁路管道流体连通的入口和具有打开位置和关闭位置的流量控制阀。 流量分配器位于靠近排放管道的入口的风扇管道表面上,并且当流量控制阀关闭时将空气流从入口转向,同时当流动的一部分空气进入入口时 控制阀打开。