Substrate support method
    83.
    发明授权
    Substrate support method 有权
    基板支持方法

    公开(公告)号:US07259833B2

    公开(公告)日:2007-08-21

    申请号:US11136886

    申请日:2005-05-25

    Abstract: The present invention includes a method for supporting a substrate that features a chuck body having a body surface with a pin extending therefrom having a contact surface lying in a plane, with the pin being movably coupled to the chuck body to move with respect to the plane. To that end, the method includes disposing the substrate upon two spaced-apart bodies; and moving one of the two spaced-apart bodies away from the substrate.

    Abstract translation: 本发明包括一种用于支撑基板的方法,该基板具有带有主体表面的卡盘主体,其具有从其延伸的销具有位于平面中的接触表面,该销可移动地联接到卡盘主体相对于该平面运动 。 为此,该方法包括将基板设置在两个间隔开的主体上; 并将两个间隔开的物体中的一个远离衬底移动。

    Energy saving thermostat with a variable deadband
    85.
    发明授权
    Energy saving thermostat with a variable deadband 失效
    具有可变死区的节能恒温器

    公开(公告)号:US06478084B1

    公开(公告)日:2002-11-12

    申请号:US09295380

    申请日:1999-04-21

    CPC classification number: G05D23/1909 F24F11/30 F24F2110/10

    Abstract: An apparatus for, and a method of, reducing cycling of heating and cooling systems by varying the deadband of a thermostat. The deadband is varied such that it does not impact human comfort significantly. The deadband is kept narrow (at its current normal value) during peak heating/cooling period, while it is made wider during periods of non-occupancy, shoulder months with low heating/cooling requirements, and set-back periods. The variation of deadband can be based on an internal clock/calender, an outdoor temperature sensor or a combination of both. The apparatus may be an electronic thermostat which may be programmable.

    Abstract translation: 通过改变恒温器的死区,减少加热和冷却系统循环的装置和方法。 死区是变化的,使得它不会显着影响人的舒适。 在高峰期加热/冷却期间,死区保持狭窄(以当前的正常值),而在非占用期间,肩部月份,加热/冷却要求低,以及回退期间更宽。 死区的变化可以基于内部时钟/压光机,室外温度传感器或两者的组合。 该装置可以是可编程的电子恒温器。

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