End structure of nozzle, purging device, and load port

    公开(公告)号:US09916997B2

    公开(公告)日:2018-03-13

    申请号:US15072823

    申请日:2016-03-17

    CPC classification number: H01L21/67393

    Abstract: There is provided an end structure of a nozzle (11) including a gas-flow passage (13) communicable with an opening (104) provided through a bottom of a container (100) configured to contain an object, the nozzle (11) configured so that gas is injected into or discharged from the container (100) through the gas-flow passage (13) and the opening (104). The end structure includes a contact portion (19) provided at an upper end portion of the nozzle (11) and around the gas-flow passage (13), and the contact portion (19) is configured to be brought into contact with a contacted portion (103) provided around the opening (104). The contact portion (19) includes a flat portion (19b) and protruding portions (19a and 19c) each protruding upward relative to the flat portion (19b), and the flat portion (19b) is made of material softer than that of the protruding portions (19a and 19c).

    Vibration damping system and vehicle

    公开(公告)号:US09869609B2

    公开(公告)日:2018-01-16

    申请号:US14703055

    申请日:2015-05-04

    CPC classification number: G01M17/04 B60G17/0185 B60G2600/08

    Abstract: A vibration damping system comprises a vibration applying device mounted on a frame and a control device that controls the vibration applying device, the control device comprising a voltage command producing part that produces a driving voltage command to drive the vibration applying device and a vibration failure diagnosis part that diagnoses whether there is failure based on a vibration detection signal output by a vibration detecting device, wherein the voltage command producing part produces the driving voltage command corresponding to a diagnosis frequency that is previously set at a frequency identical to a resonance frequency of the frame or the vibration applying device or at a predetermined frequency close to the resonance frequency and makes the vibration applying device generate the vibration applying force according to the driving voltage command, and the vibration failure diagnosis part diagnoses whether there is failure based on the vibration detection signal.

    EFEM
    84.
    发明授权
    EFEM 有权

    公开(公告)号:US09786534B2

    公开(公告)日:2017-10-10

    申请号:US14479842

    申请日:2014-09-08

    Abstract: An EFEM 1 includes a wafer transfer chamber 3 having an interior space in which a wafer transfer robot 5 is disposed and load ports 2 disposed adjacent to a front surface 32 of the wafer transfer chamber 3, and semiconductor processing equipment M can be disposed adjacent to a rear surface 33 of the wafer transfer chamber 3. The EFEM 1 has a configuration in which two buffer stations 4 capable of temporarily storing wafers W are disposed next to each other in the front-rear direction A on a side surface 31 of the wafer transfer chamber 3. The EFEM 1 thus configured adapts to an increase in wafer diameter and is capable of handling many wafers while preventing or minimizing an increase in the stroke distance in the height direction of the wafer transfer robot 5 and an increase in the footprint of the entire EFEM 1.

    Load port device
    85.
    发明授权

    公开(公告)号:US09685359B2

    公开(公告)日:2017-06-20

    申请号:US14199051

    申请日:2014-03-06

    Abstract: A load port device comprises a link mechanism that has a main moving link whose one end is connected with a door holding member in a rotatable manner, a guide that bends and extends from a horizontal direction to a vertical direction and that guides one end of the main moving link, a main moving block with which the other end of the main moving link is connected in a rotatable manner and a door hoisting shaft that extends in the vertical direction and that moves the main moving block in the extending direction. The link mechanism allows the end of the main moving link to move from the horizontal direction to the vertical direction or from the vertical direction to the horizontal direction along the guide in a state that the other end of the main moving link moves to the vertical direction.

    Articulated robot and method for controlling the same
    86.
    发明授权
    Articulated robot and method for controlling the same 有权
    铰接机器人及其控制方法

    公开(公告)号:US09579794B2

    公开(公告)日:2017-02-28

    申请号:US14798673

    申请日:2015-07-14

    Abstract: An articulated robot comprises a control unit including: a track information storage unit which stores track information corresponding to a combination of a start point and an end point; a setting unit which sets a current position and a target position of an arm distal end as the start point and the end point; and an operation command generation unit which generates an operation command based on track information corresponding to a combination of the set start point and the set end point (corresponding track information). If the corresponding track information is not stored but related track information corresponding to a combination of a start point and an end point having a predetermined relationship with a combination of the set start point and the set end point is stored in the track information storage unit, the operation command generation unit generates the operation command based on the related track information.

    Abstract translation: 铰接机器人包括:控制单元,包括:轨道信息存储单元,其存储对应于起点和终点的组合的轨道信息; 设定单元,其将臂前端的当前位置和目标位置设定为起点和终点; 以及操作命令生成单元,其基于与设定的开始点和设定的终点(对应的轨道信息)的组合相对应的轨道信息来生成操作命令。 如果没有存储对应的轨道信息,则与轨迹信息存储单元中存储与设定的开始点和设定的终点的组合具有预定关系的起始点和终点的组合相对应的相关轨迹信息, 操作命令生成单元基于相关的轨道信息生成操作命令。

    DOOR OPENING AND CLOSING APPARATUS
    87.
    发明申请
    DOOR OPENING AND CLOSING APPARATUS 审中-公开
    门打开和关闭装置

    公开(公告)号:US20160260628A1

    公开(公告)日:2016-09-08

    申请号:US15057344

    申请日:2016-03-01

    CPC classification number: H01L21/67772 H01L21/67369 H01L21/67775

    Abstract: A door opening and closing apparatus shifts a door part holding a lid part of a storage container between a totally closed position where the inner space of the storage container body is sealed and a totally open position where the inner space of the storage container body is totally opened frontward, for putting in and taking out transfer target objects between the storage container and a transfer room. The door opening and closing apparatus puts the door part on standby at the predetermined halfway stop position every time a single access operation of a transfer robot to the storage container ends and until next access operation of the transfer robot to the storage container is performed.

    Abstract translation: 门打开和关闭装置将保持容器的盖部分的门部分在储存容器主体的内部空间被密封的完全关闭位置和储存容器主体的内部空间完全敞开的位置之间移动 向前开放,用于在存放容器和转移室之间放置和取出转印目标物体。 每当向存储容器传送机器人的单次存取操作结束并且直到进行到存储容器的传送机器人的下一次访问操作结束时,门打开和关闭装置将门部件置于预定中途停止位置。

    Conveying apparatus
    88.
    发明授权
    Conveying apparatus 有权
    输送装置

    公开(公告)号:US09300181B2

    公开(公告)日:2016-03-29

    申请号:US14135335

    申请日:2013-12-19

    CPC classification number: H02K5/128 B65G54/02 H02K41/03 H02K41/031

    Abstract: A conveying apparatus includes: a housing; a movable member; a linear motor; and a cover. The linear motor includes a primary magnetic pole and a secondary magnetic pole each having a facing surface that faces the other and that is a plane along the longitudinal direction of the housing. The cover allows the primary magnetic pole to be located in an atmospheric environment, and the secondary magnetic pole to be located in a vacuum environment or a reduced pressure environment by separating the primary magnetic pole and the secondary magnetic pole from each other. The primary magnetic pole and the secondary magnetic pole face each other so that a direction of a magnetic attraction force generated therebetween and acting on their facing surfaces is different from directions of forces acting, due to an atmospheric pressure outside the housing, on the wall of the housing on which the cover is provided.

    Abstract translation: 输送装置包括:壳体; 可移动构件; 线性马达; 和封面。 线性电动机包括主磁极和次级磁极,每个磁极具有面对另一个的面对表面,并且是沿壳体的纵向方向的平面。 所述盖允许所述主磁极位于大气环境中,并且所述次级磁极通过将所述主磁极和所述次级磁极彼此分离而位于真空环境或减压环境中。 主磁极和次级磁极彼此面对,使得在它们之间产生的作用于它们的相对表面上的磁吸引力的方向不同于由于壳体外部的大气压力而作用的力的方向在 提供盖的外壳。

    Motor controller and construction machine provided therewith
    89.
    发明授权
    Motor controller and construction machine provided therewith 有权
    提供电机控制器和施工机械

    公开(公告)号:US09276512B2

    公开(公告)日:2016-03-01

    申请号:US14289886

    申请日:2014-05-29

    CPC classification number: H02P21/22 H02J2007/0067 H02P3/24

    Abstract: There is provided a motor controller capable of suppressing the rotation of a motor at the time of discharging an electric accumulator, and a construction machine provided with the motor controller. A motor controller 10 is provided with a current controller 1 for controlling an electric current supplied from an electric accumulator E to a motor M, and a rotation detector 2 for detecting the rotation of the motor M. The current controller 1 supplies only a d-axis current to the motor M according to a discharge command. If the rotation of the motor M is detected by the rotation detector 2 at the time of discharging the electric accumulator E, the current controller 1 controls the d-axis current so as to suppress the rotation of the motor M.

    Abstract translation: 提供一种电动机控制器,其能够抑制放电蓄电器时的电动机的旋转,以及设置有电动机控制器的施工机械。 电动机控制器10设置有用于控制从蓄电器E供给到电动机M的电流的电流控制器1和用于检测电动机M的旋转的旋转检测器2.电流控制器1仅提供d- 根据放电指令对电动机M的轴电流。 如果在放电蓄电池E时由旋转检测器2检测到电动机M的旋转,则电流控制器1控制d轴电流以抑制电动机M的旋转。

    ELECTRONIC MODULE AND METHOD FOR MANUFACTURING ELECTRONIC MODULE
    90.
    发明申请
    ELECTRONIC MODULE AND METHOD FOR MANUFACTURING ELECTRONIC MODULE 有权
    电子模块和制造电子模块的方法

    公开(公告)号:US20150334853A1

    公开(公告)日:2015-11-19

    申请号:US14811275

    申请日:2015-07-28

    Abstract: The Electronic Module includes body case 2 that comprises a plurality of case members 3, 4 by abutting each other and that has an internal space (S) where the first opening P1 is formed on one side surface of the internal space (S) and the second opening P2 that opens in a direction different from that of the first opening P1 is in an exposed state when a plurality of the case members 3, 4 are separated each other, a substrate 5 on which a sensor IC 51 is mounted and that is housed in the internal space (S) of the body case 2, and a resin body 6 that covers the substrate 5 by being filled in the internal space (S) of the body case 2 and solidified or hardened, and is characterized by that a plurality of the case members 3, 4.

    Abstract translation: 电子模块包括主体壳体2,其包括多个壳体构件3,4,通过彼此邻接并且具有内部空间(S),其中第一开口P1形成在内部空间(S)的一个侧表面上,并且 当多个壳体构件3,4彼此分离时,与第一开口P1不同的方向开口的第二开口P2处于暴露状态,安装有传感器IC51的基板5, 容纳在主体壳体2的内部空间(S)中,以及树脂体6,其通过填充在主体壳体2的内部空间(S)中并且固化或硬化而覆盖基板5,并且其特征在于, 多个壳体构件3,4。

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